JPH0478821B2 - - Google Patents
Info
- Publication number
- JPH0478821B2 JPH0478821B2 JP15663783A JP15663783A JPH0478821B2 JP H0478821 B2 JPH0478821 B2 JP H0478821B2 JP 15663783 A JP15663783 A JP 15663783A JP 15663783 A JP15663783 A JP 15663783A JP H0478821 B2 JPH0478821 B2 JP H0478821B2
- Authority
- JP
- Japan
- Prior art keywords
- rotor housing
- axis side
- film
- photosensitive resin
- resin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02B—INTERNAL-COMBUSTION PISTON ENGINES; COMBUSTION ENGINES IN GENERAL
- F02B55/00—Internal-combustion aspects of rotary pistons; Outer members for co-operation with rotary pistons
- F02B55/08—Outer members for co-operation with rotary pistons; Casings
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Lubrication Of Internal Combustion Engines (AREA)
- Chemically Coating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15663783A JPS6047822A (ja) | 1983-08-26 | 1983-08-26 | ロ−タリピストンエンジンのロ−タハウジングの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15663783A JPS6047822A (ja) | 1983-08-26 | 1983-08-26 | ロ−タリピストンエンジンのロ−タハウジングの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6047822A JPS6047822A (ja) | 1985-03-15 |
| JPH0478821B2 true JPH0478821B2 (2) | 1992-12-14 |
Family
ID=15632019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15663783A Granted JPS6047822A (ja) | 1983-08-26 | 1983-08-26 | ロ−タリピストンエンジンのロ−タハウジングの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6047822A (2) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008138240A (ja) * | 2006-11-30 | 2008-06-19 | Mazda Motor Corp | 摺動部材及びその製造方法 |
| JP4840109B2 (ja) * | 2006-12-06 | 2011-12-21 | マツダ株式会社 | 摺動部材及びその製造方法 |
| CN104747236A (zh) * | 2014-02-07 | 2015-07-01 | 摩尔动力(北京)技术股份有限公司 | 多级流体机构及包括其的发动机 |
-
1983
- 1983-08-26 JP JP15663783A patent/JPS6047822A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6047822A (ja) | 1985-03-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2003507765A (ja) | 向上したレジスト除去のためのリワークの間の露光 | |
| JPH0514098B2 (2) | ||
| JPH0478821B2 (2) | ||
| US3986876A (en) | Method for making a mask having a sloped relief | |
| JPH07209853A (ja) | 位相反転マスクの製造方法 | |
| EP0499944B1 (en) | Method for forming a sloped surface having a predetermined slope | |
| CN116991045A (zh) | 蚀刻（半蚀刻区域深度、外形）尺寸管控的蚀刻工艺 | |
| JPS6013302B2 (ja) | フオトレジストの処理方法 | |
| JPH11204414A (ja) | パターン形成法 | |
| JP3972498B2 (ja) | カゼインレジストパターンの形成方法 | |
| US3951659A (en) | Method for resist coating of a glass substrate | |
| GB2254830A (en) | Manufacturing thin plates having surface structures of different depths or heights | |
| JPS6413730A (en) | Lift-off flatting method | |
| JPH02156244A (ja) | パターン形成方法 | |
| JPH03216602A (ja) | 回折格子の形成方法 | |
| KR0170336B1 (ko) | 플라즈마 샤우어링을 이용한 마스크 제작방법 | |
| JPS6052431B2 (ja) | 樹脂製グラビア版の製法 | |
| JPH0685070B2 (ja) | レジストパターンの現像方法 | |
| JPH01268125A (ja) | 半導体ウエハ周縁部のレジスト膜除去方法 | |
| JPH01302724A (ja) | 半導体装置の製造方法 | |
| JPS6197921A (ja) | パタ−ン形成法 | |
| JPS59202630A (ja) | 半導体装置の製造方法 | |
| JPS58145126A (ja) | 半導体装置の製造方法 | |
| JP2551117B2 (ja) | レジストパターン形成方法 | |
| CN114518699A (zh) | 一种倒梯形光刻胶侧壁形貌的制备方法及光刻胶 |