JPH0479434U - - Google Patents
Info
- Publication number
- JPH0479434U JPH0479434U JP12267390U JP12267390U JPH0479434U JP H0479434 U JPH0479434 U JP H0479434U JP 12267390 U JP12267390 U JP 12267390U JP 12267390 U JP12267390 U JP 12267390U JP H0479434 U JPH0479434 U JP H0479434U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum suction
- suction pen
- guide
- main body
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Description
第１図はこの考案の平面図、第２図は第１図の
吸着部分駆動部の内部を示した概略図である。第
３図はウエーハをキヤリアから抜取る時の駆動部
の実際の動きを示した概念図である。第４図は従
来の真空吸着ペンの平面図である。
１……ウエーハ吸着部、３……本体、５……吸
着部分駆動部、６……ガイド、９ａ〜９ｃ……組
み合わせ歯車、１０……ラツク。
FIG. 1 is a plan view of this invention, and FIG. 2 is a schematic diagram showing the inside of the suction part drive section of FIG. 1. FIG. 3 is a conceptual diagram showing the actual movement of the drive unit when taking out the wafer from the carrier. FIG. 4 is a plan view of a conventional vacuum suction pen. DESCRIPTION OF SYMBOLS 1... Wafer adsorption part, 3... Main body, 5... Adsorption part drive part, 6... Guide, 9a to 9c... Combination gears, 10... Rack.
Claims (1)
ＦＦ部とを有する真空吸着ペンにおいて、キヤリ
アに固定できるガイドを設けたことを特徴とする
真空吸着ペン。 (2) 前記ガイドが本体に対して所定角度内で可
動である請求項１記載の真空吸着ペン。[Scope of claims for utility model registration] (1) Wafer adsorption section, main body, vacuum ON/O
What is claimed is: 1. A vacuum suction pen having an FF section, characterized in that the vacuum suction pen is provided with a guide that can be fixed to a carrier. (2) The vacuum suction pen according to claim 1, wherein the guide is movable within a predetermined angle with respect to the main body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12267390U JPH0479434U (en) | 1990-11-22 | 1990-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12267390U JPH0479434U (en) | 1990-11-22 | 1990-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0479434U true JPH0479434U (en) | 1992-07-10 |
Family
ID=31870434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12267390U Pending JPH0479434U (en) | 1990-11-22 | 1990-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0479434U (en) |
-
1990
- 1990-11-22 JP JP12267390U patent/JPH0479434U/ja active Pending
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