JPH0480041U - - Google Patents

Info

Publication number
JPH0480041U
JPH0480041U JP12469590U JP12469590U JPH0480041U JP H0480041 U JPH0480041 U JP H0480041U JP 12469590 U JP12469590 U JP 12469590U JP 12469590 U JP12469590 U JP 12469590U JP H0480041 U JPH0480041 U JP H0480041U
Authority
JP
Japan
Prior art keywords
exhaust duct
insulating cover
heat insulating
heat
hot plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12469590U
Other languages
English (en)
Other versions
JP2517721Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12469590U priority Critical patent/JP2517721Y2/ja
Publication of JPH0480041U publication Critical patent/JPH0480041U/ja
Application granted granted Critical
Publication of JP2517721Y2 publication Critical patent/JP2517721Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Description

【図面の簡単な説明】
図面は、本考案に係る基板加熱装置の一実施例
を示し、第１図は加熱ユニツトの一部切欠き縦断
正面図、第２図は第１図におけるＸ−Ｘ線断面図
、第３図は加熱ユニツトの基板給排口側から見た
一部切欠き側面図、第４図は基板支持ピン上昇時
の基板昇降機構を示す側面図、第５図は基板支持
ピン下降時の基板昇降機構を示す側面図、第６図
は装置全体の正面図、第７図は装置全体の基板給
排口側から見た側面図である。 １……ホツトプレート、２……断熱カバー、４
……外壁体、１０……基板昇降機構、１５……プ
ロセス排気用ダクト、１６……熱給排用ダクト。

Claims (1)

    【実用新案登録請求の範囲】
  1. 基板加熱用のホツトプレートの周囲と底面とを
    断熱カバーで囲い、この断熱カバーを外壁体で外
    囲し、前記断熱カバーと外壁体との間の空間を吸
    引排気する熱排気用ダクトを設けるとともに、前
    記ホツトプレートの側辺に沿つてプロセス排気用
    ダクトを設け、前記熱排気用ダクトとプロセス排
    気用ダクトを共通の吸引排気手段に連通接続し、
    かつ、前記プロセス排気用ダクトに流量調節手段
    を備えたことを特徴とする基板加熱装置。
JP12469590U 1990-11-26 1990-11-26 基板加熱装置 Expired - Fee Related JP2517721Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12469590U JP2517721Y2 (ja) 1990-11-26 1990-11-26 基板加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12469590U JP2517721Y2 (ja) 1990-11-26 1990-11-26 基板加熱装置

Publications (2)

Publication Number Publication Date
JPH0480041U true JPH0480041U (ja) 1992-07-13
JP2517721Y2 JP2517721Y2 (ja) 1996-11-20

Family

ID=31872331

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12469590U Expired - Fee Related JP2517721Y2 (ja) 1990-11-26 1990-11-26 基板加熱装置

Country Status (1)

Country Link
JP (1) JP2517721Y2 (ja)

Also Published As

Publication number Publication date
JP2517721Y2 (ja) 1996-11-20

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees