JPH0481802A - Vapor deposition method and optical jig for vapor deposition - Google Patents

Abstract

PURPOSE:To uniformly distribute a material to be deposited by vapor deposition by disposing optical parts having spherical faces or planes in a vacuum vapor deposition device and mounting the optical jig consisting of a meshed filter varying in density according to positions between a vapor deposition source and the optical parts, then executing vapor deposition. CONSTITUTION:A meshed filter mounting fitting 4 is connected and fixed to a holding jig 3 holding the optical parts 1 and the meshed filter 5 is disposed apart a specified distance from a vapor deposition surface 2. The meshed filter 5 has such a network structure as to be dense at the center and coarse on the periphery. Such assembly is mounted to a dome 6 and is mounted in a vapor deposition chamber 7 of the vacuum vapor deposition device. The vapor deposition of a material for vapor deposition to be formed with an interference film to impart the optical characteristics required for the optical parts 1 from the vapor deposition source 8 is executed by setting the pressure, temp. and dome rotating speed of the vapor deposition device at necessary specified conditions. The thickness of the film sticking to the vapor deposition surface 2 changes according to the density of the mesh, i.e. the film sticks to the thickness having a complementary relation with the density of the mesh by the function of the filler 5 when the vapor deposition is carried out in such constitution.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a vapor deposition method for uniformly distributing a vapor deposition substance onto an optical component having a flat or spherical surface, and an optical jig for vapor deposition.

[Conventional technology]

Recently, color television receivers have been developed into various forms as they have become popular. Television receivers with large screens are one of these, and various products have been developed, including those that reproduce color images on large cathode ray tubes and those that enlarge and project the reproduced image on a small cathode ray tube onto a screen using an optical system. has been done. A color television receiver is equipped with three picture tubes that share normal light, green and blue color component light, and each picture tube has an optical tube with a glass convex surface in contrast to the so-called electron tube. A layered structure of an optical thin film called a dichroic film, a photoconductive film, and an AI film is attached to the glass.
All of these laminated films are required to be electrically or optically homogeneous, and in particular, dichroic films formed on convex surfaces must have optically the same spectral characteristics in any part of the convex surface. It is necessary to do so. However, there are major problems in forming a dichroic film optically uniformly on such convex glass. That is, it occurs because the distribution of the vapor deposition material within the vapor deposition apparatus, which is atrophied from the substantially point-like vapor deposition source that holds the vapor deposition material that forms the necessary optical thin film, is non-uniform in terms of position or area. This is the non-uniformity of the optical transmission or reflection properties of dichroic films.

In order to solve this problem, various methods have been considered for selectively changing the deposition density. For example, in order to obtain uniformity, a filter for distributing the deposition density is placed between the deposition source and the deposition surface separately from the so-called dome of the deposition apparatus, and methods that control the deposition density using the principle of a planetary gear mechanism. etc.

However, both methods have complicated mechanisms and high costs, but are ineffective, and no vapor deposition method or vapor deposition jig with high manufacturing suitability has been proposed yet.

This invention has been made in view of the shortcomings of the prior art, and it is an object of the present invention to provide a vapor deposition method and a vapor deposition jig that have a simple structure, are highly cost-effective, and have excellent manufacturing suitability. It is.

[Means for solving problems]

In order to solve these problems, the present invention arranges an optical component with a spherical or flat surface in a vacuum evaporation apparatus,
In this method, an optical jig consisting of a mesh filter whose density varies depending on the position is attached between the vapor deposition source and the optical component, and vapor deposition is performed.

In addition, in order to carry out this method, an optical component having a spherical or flat surface, a deposition source that holds a deposition material for forming the necessary optical thin film, and an optical component placed at a predetermined distance from the deposition source are provided. An optical jig consisting of a mesh filter whose density varies depending on the position is attached adjacent to the optical component holding device to the vapor deposition device in which the holding device is arranged. An optical jig for vapor deposition is used. Furthermore, when carrying out this method, the density of the mesh filter is formed in a distribution that is complementary to the distribution density of the vapor deposition substance within the vapor deposition apparatus, thereby making it possible to perform vapor deposition with even higher precision. Become.

The present invention will be described in detail below according to embodiments shown in the accompanying drawings.

〔Example〕

FIG. 1 shows an optical component to be vapor-deposited and an optical jig.
A state in which they are combined and arranged in a dome of a vapor deposition apparatus is shown. In the figure, 1 is an optical component, 2 is a convex vapor deposition surface of the optical component, and 3 is a jig for holding the optical component l.
A metal fitting 4 for attaching a mesh filter is connected and fixed to this holding jig 3, and a mesh filter 5 is arranged at a constant distance from the vapor deposition surface 2.

FIG. 2 is a plan view of the mesh filter 3, which has a mesh structure that is dense at the center and coarser at the periphery as shown. Such a filter can be prepared relatively easily, for example, by photo-etching an iron-based alloy.

The assembly as described above is attached to a dome 6 as shown in FIG. 3, and this dome 6 is further attached to a first deposition tank 7 of a vacuum evaporation apparatus. The vapor deposition tank 7 has a well-known configuration and is not shown in the drawings, but the pressure, temperature, and dome rotation speed are controlled using the exhaust mechanism, heating mechanism, and rotation drive mechanism of the dome 6 that are equipped with this vapor deposition apparatus. Necessary constant conditions are set, and a vapor deposition material that forms an interference film that provides the optical characteristics required for the optical component 1 is vapor-deposited from the vapor deposition source 8 at a predetermined vapor deposition temperature.

When vapor deposition is performed with such a configuration, the thickness of the film deposited on the vapor deposition surface 2 changes depending on the mesh density due to the function of the mesh filter 5 having the above-described structure, that is,
It adheres to a thickness that has a complementary relationship with the mesh density.

The mesh filter 5 is manufactured as follows.

First, an interference film is formed without using a mesh filter,
The spectral transmittance at positions lO to 15 shown in FIG. 4 is measured.

Figure 5 shows the measurement results. If a wavelength range having a constant transmittance at each position is searched from the measurement results, the result will be as shown in FIG. The wavelength is the longest at the center 10 and becomes shorter toward the peripheral positions. .

This means that the film thickness gradually increases toward the center. To make this uniform, it is necessary to apply a film ′:′−
The density of this mesh filter is changed so that the film adhesion becomes gradually thinner from the position where the film is thinner to the position where the film becomes thicker.

Taking this into consideration, the ratio of the area of the evaporation surface corresponding to each position to the area of the corresponding part of the mesh filter is changed (Fig. 7, defined as filter ratio), and such a distribution of filter ratio is obtained. By manufacturing a mesh filter with density,
By performing the vapor deposition as described above, it is possible to obtain an optical component having a desired uniform distribution of the vapor-deposited substance.

FIG. 8 shows a mesh filter designed using the filter ratio shown in FIG. FIG. 9 is a diagram showing the positions of the vapor deposited film obtained by this filter corresponding to FIG. 6 and the wavelength range having a constant transmittance.

As described in detail above, according to the present invention, an optical jig consisting of a mesh filter whose density varies depending on the position is attached between the evaporation source and the evaporation surface, so that the evaporation can be carried out. It is possible to produce a vapor deposited film that completely eliminates non-uniformity in the optical transmission characteristics or reflection characteristics of the vapor deposited film, which is caused by non-uniform distribution of the vapor deposited substance in the device in terms of position or area. This makes it possible to provide a low-cost, highly manufacturable vaporization method or a vaporization jig.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of an assembly of a vapor deposition jig and optical components arranged in a vapor deposition apparatus used in the method and apparatus of the present invention, FIG. 2 is a plan view of a mesh filter, and FIG. Figure 4 is a schematic side view of the dome on the vapor deposited film, Figure 4 is a plan view showing the measurement points of optical components, Figure 5 is a diagram showing the measurement results of spectral transmittance, and Figure 6 is the constant transmittance at each measurement position. FIG. 7 is a diagram showing the filter rate, FIG. 8 is a plan view of a mesh filter for carrying out the method according to the present invention, and FIG. 9 is a diagram showing the filter rate when the filter rate is changed. FIG. 6 is a diagram showing the wavelength range corresponding to FIG. 5 obtained in relation to position. l...Optical parts, 2...Vapour deposition surface, 3...Holding jig, 4...Metal fittings for mesh filter installation, 5...Mesh filter 5.6...Dome, 7...Vapor deposition tank, 8 ... Vapor deposition source, 10-15... Measurement point on the optical component. 7000 鵠m (bonito omitted) +h=e～book) Procedural amendment, method, November 1990 Director General of the Japan Patent Office Satoshi Uematsu Tono Heisei. Year 1, month. 7 days difference 1
1. Indication of the case Patent Application No. 196062 of 1990 2. Name of the invention Vapor deposition method and optical jig for vapor deposition 3. Person making the amendment Relationship to the case Patent applicant 4. Date of amendment order October 150, 1990 October 1990 30 units (shipment date) 6° correction details

Claims (4)

[Claims] (1). An optical component with a spherical or flat surface is placed in a vacuum evaporation device, and an optical jig consisting of a mesh filter whose density changes depending on the position is attached between the evaporation source and the optical component to perform evaporation. Vapor deposition method. (2). A vapor deposition system that includes an optical component having a spherical or flat surface, a vapor deposition source that holds a vapor deposition material that forms a necessary optical thin film, and a device that is placed at a predetermined distance from the vapor deposition source and that holds the optical component. In the apparatus, an optical jig for vapor deposition is attached adjacent to the optical component holding device, and an optical jig consisting of a mesh-like filter having a variable density for controlling the deposition distribution of the vapor deposition material from the vapor deposition source is attached. (3). By forming the density of the mesh filter to have a distribution that is complementary to the distribution density of the vapor deposition material in the vapor deposition apparatus, the vapor deposition material is optically uniformly deposited on the surface of the optical component. The optical jig for vapor deposition according to claim 2, wherein the density is changed. (4). 4. The vapor deposition method according to claim 3, wherein the mesh is created by metal photoetching.