JPH0481963U - - Google Patents
Info
- Publication number
- JPH0481963U JPH0481963U JP12340790U JP12340790U JPH0481963U JP H0481963 U JPH0481963 U JP H0481963U JP 12340790 U JP12340790 U JP 12340790U JP 12340790 U JP12340790 U JP 12340790U JP H0481963 U JPH0481963 U JP H0481963U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- gate
- back plate
- gate valve
- stopper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005484 gravity Effects 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図〜第３図はこの考案の実施例を示してお
り、第１図はゲート弁を開いた状態のゲート装置
の縦断側面図、第２図はゲート弁の閉じ状態を示
す縦断側面図、第３図はストツパーの取付構造を
示す断面図である。第４図は従来のゲート装置を
示す縦断側面図である。
１……真空槽、３……弁箱、３ａ……内底壁、
４……通口、５……ゲート弁、６……操作シリン
ダ、１１……ピストンロツド、１２……バツクプ
レート、１３……平行リンク、１４……弁板、１
７……ストツパー、２１……ねじ穴。
Figures 1 to 3 show an embodiment of this invention, where Figure 1 is a vertical side view of the gate device with the gate valve open, and Figure 2 is a side view of the gate device with the gate valve closed. , FIG. 3 is a sectional view showing the mounting structure of the stopper. FIG. 4 is a longitudinal sectional side view showing a conventional gate device. 1... Vacuum chamber, 3... Valve box, 3a... Inner bottom wall,
4...Port, 5...Gate valve, 6...Operation cylinder, 11...Piston rod, 12...Back plate, 13...Parallel link, 14...Valve plate, 1
7... Stopper, 21... Screw hole.
Claims (1)
の内部に、真空槽への通口を開閉するゲート弁が
配置されており、このゲート弁を弁箱の外面に設
けた操作シリンダで開閉操作するゲート装置であ
つて、 ゲート弁と弁箱の内壁との間に、ゲート弁の閉
じ方向移動を阻止するストツパーが設けられてお
り、 ゲート弁が開き位置側のストロークエンドに位
置している状態でのみ、ストツパーがゲート弁と
弁箱の内壁とのいずれか一方に着脱可能に取付け
固定されている真空装置用のゲート装置。 (2) ゲート弁が重力に抗して開き操作されるよ
うゲート装置を真空槽に付設しており、 ゲート弁は、操作シリンダのピストンロツドに
連結されるバツクプレートと、該バツクプレート
に平行リンクを介して支持された弁板とを含み、 開き位置にあるバツクプレートの下端面と、こ
れに対向する弁箱の内底壁との対向間隔より僅か
に短い金属軸体でストツパーを形成し、 ストツパーをバツクプレートの下端面に設けた
ねじ穴にねじ込み装着した請求項(1)記載の真空
装置用のゲート装置。[Scope of Claim for Utility Model Registration] (1) A valve box is provided adjacent to the vacuum chamber, and a gate valve for opening and closing the passage to the vacuum chamber is disposed inside the valve box. A gate device that is opened and closed by an operation cylinder provided on the outer surface of a valve box, and a stopper is provided between the gate valve and the inner wall of the valve box to prevent the gate valve from moving in the closing direction. A gate device for a vacuum device in which a stopper is removably attached to either the gate valve or the inner wall of the valve box only when the gate valve is at the stroke end on the open position side. (2) A gate device is attached to the vacuum chamber so that the gate valve can be opened against gravity, and the gate valve has a back plate connected to the piston rod of the operating cylinder and a parallel link to the back plate. A stopper is formed by a metal shaft body that is slightly shorter than the facing distance between the lower end surface of the back plate in the open position and the inner bottom wall of the valve body facing thereto. 2. The gate device for a vacuum device according to claim 1, wherein the gate device is screwed into a screw hole provided on the lower end surface of the back plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12340790U JPH0734929Y2 (en) | 1990-11-22 | 1990-11-22 | Gate device for vacuum equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12340790U JPH0734929Y2 (en) | 1990-11-22 | 1990-11-22 | Gate device for vacuum equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0481963U true JPH0481963U (en) | 1992-07-16 |
| JPH0734929Y2 JPH0734929Y2 (en) | 1995-08-09 |
Family
ID=31871117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12340790U Expired - Lifetime JPH0734929Y2 (en) | 1990-11-22 | 1990-11-22 | Gate device for vacuum equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0734929Y2 (en) |
-
1990
- 1990-11-22 JP JP12340790U patent/JPH0734929Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0734929Y2 (en) | 1995-08-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |