JPH0482843U - - Google Patents

Info

Publication number
JPH0482843U
JPH0482843U JP12794090U JP12794090U JPH0482843U JP H0482843 U JPH0482843 U JP H0482843U JP 12794090 U JP12794090 U JP 12794090U JP 12794090 U JP12794090 U JP 12794090U JP H0482843 U JPH0482843 U JP H0482843U
Authority
JP
Japan
Prior art keywords
polishing
jig
polishing device
view
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12794090U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12794090U priority Critical patent/JPH0482843U/ja
Publication of JPH0482843U publication Critical patent/JPH0482843U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図はこの考案の一実施例である研磨装置治
具の断面側面図、第２図は第１図の部分拡大断面
図、第３図は第１図の上面図、第４図はこの考案
の他の実施例を示す研磨装置治具の断面側面図、
第５図は第４図の上面図、第６図、第７図は従来
の研磨装置治具のそれぞれ断面側面図、第８図は
第７図の上面図、第９図は従来のウエハの研磨方
法を示す断面図である。 図において、１は研磨装置治具、２はのこぎり
状の研磨表面、３はウエハ、４はワツクス、５は
ワツクスの流れを示す矢印、６は平坦部、２１は
円形でわん曲状のくぼみを持つた研磨面を示す。
尚、図中、同一符号は同一、又は相当部分を示す
。

Claims (1)

    【実用新案登録請求の範囲】
  1. 研磨装置治具の研磨面が丸みを帯びたのこぎり
    の刃の形状とし、且つ上記研磨装置治具の研磨面
    全体にストライプ状に形成させたことを特徴とす
    る研磨装置。
JP12794090U 1990-11-28 1990-11-28 Pending JPH0482843U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12794090U JPH0482843U (ja) 1990-11-28 1990-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12794090U JPH0482843U (ja) 1990-11-28 1990-11-28

Publications (1)

Publication Number Publication Date
JPH0482843U true JPH0482843U (ja) 1992-07-20

Family

ID=31875420

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12794090U Pending JPH0482843U (ja) 1990-11-28 1990-11-28

Country Status (1)

Country Link
JP (1) JPH0482843U (ja)

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