JPH048427U - - Google Patents
Info
- Publication number
- JPH048427U JPH048427U JP4783390U JP4783390U JPH048427U JP H048427 U JPH048427 U JP H048427U JP 4783390 U JP4783390 U JP 4783390U JP 4783390 U JP4783390 U JP 4783390U JP H048427 U JPH048427 U JP H048427U
- Authority
- JP
- Japan
- Prior art keywords
- gas supply
- liquid filling
- filling chamber
- supply pipe
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 7
- 230000005587 bubbling Effects 0.000 claims description 3
- 239000012159 carrier gas Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Description
第１図は本考案の一実施例を示す全体構成図、
第２図はガス供給管の変形例を示す図、第３図は
ガス供給管と吹出口との気泡発生数に対する最適
径を説明するための図、第４図〜第６図は従来例
を示し第４図は全体構成図、第５図は単孔型およ
び第６図は多孔型を示す図である。
１……半導体製造装置、２……キヤリヤーガス
供給手段、５……コントローラ、１０……バブリ
ング装置、１１……タンク、１２……液体充填室
、１３……ベーパー発生室、１４……液体、１５
……ベーパー、２１……ガス供給管、２２……基
端側、２３……先端側、２４……ガス吹出口。
FIG. 1 is an overall configuration diagram showing an embodiment of the present invention;
Fig. 2 is a diagram showing a modified example of the gas supply pipe, Fig. 3 is a diagram for explaining the optimum diameter of the gas supply pipe and the outlet for the number of bubbles generated, and Figs. 4 to 6 are diagrams showing the conventional example. FIG. 4 shows the overall configuration, FIG. 5 shows a single-hole type, and FIG. 6 shows a multi-hole type. DESCRIPTION OF SYMBOLS 1...Semiconductor manufacturing equipment, 2...Carrier gas supply means, 5...Controller, 10...Bubbling device, 11...Tank, 12...Liquid filling chamber, 13...Vapor generation chamber, 14...Liquid, 15
... vapor, 21 ... gas supply pipe, 22 ... base end side, 23 ... distal side, 24 ... gas outlet.
Claims (1)
クと、基端側がキヤリヤーガス供給手段に接続さ
れかつガス吹出口を有する先端側が液体充填室の
液中に差込まれたガス供給管とからなるバブリン
グ装置において、 前記ガス供給管の前記タンク内に挿入された部
分をＬ字形状に形成するとともに先端側が水平と
なるように前記液体充填室に配設しかつ前記ガス
吹出口を上向き単孔として形成したことを特徴と
するバブリング装置。[Scope of Claim for Utility Model Registration] A tank forming a liquid filling chamber and a vapor generation chamber, the proximal end of which is connected to a carrier gas supply means, and the distal end of which has a gas outlet inserted into the liquid of the liquid filling chamber. In a bubbling device comprising a gas supply pipe, the part of the gas supply pipe inserted into the tank is formed into an L-shape, and is arranged in the liquid filling chamber so that the tip side is horizontal, and the part of the gas supply pipe inserted into the tank is arranged in the liquid filling chamber so that the tip side is horizontal. A bubbling device characterized in that the outlet is formed as a single upward hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4783390U JPH0533005Y2 (en) | 1990-05-08 | 1990-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4783390U JPH0533005Y2 (en) | 1990-05-08 | 1990-05-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH048427U true JPH048427U (en) | 1992-01-27 |
| JPH0533005Y2 JPH0533005Y2 (en) | 1993-08-23 |
Family
ID=31564116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4783390U Expired - Lifetime JPH0533005Y2 (en) | 1990-05-08 | 1990-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0533005Y2 (en) |
-
1990
- 1990-05-08 JP JP4783390U patent/JPH0533005Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0533005Y2 (en) | 1993-08-23 |
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