JPH0484705A - Optical size measuring apparatus - Google Patents
Optical size measuring apparatusInfo
- Publication number
- JPH0484705A JPH0484705A JP20010390A JP20010390A JPH0484705A JP H0484705 A JPH0484705 A JP H0484705A JP 20010390 A JP20010390 A JP 20010390A JP 20010390 A JP20010390 A JP 20010390A JP H0484705 A JPH0484705 A JP H0484705A
- Authority
- JP
- Japan
- Prior art keywords
- light
- measured
- lens
- space
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title description 18
- 108091008695 photoreceptors Proteins 0.000 claims description 13
- 238000005259 measurement Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004080 punching Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
(産業上の利用分野)
この発明は、例えば丸棒の外径やテープの幅等の寸法を
光学的に測定する装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an apparatus for optically measuring dimensions such as the outer diameter of a round bar or the width of a tape.
(従来技術)
この種の装置としては1例えば特開昭6O−80703
r光学式外径測定装置」が公知である。(Prior art) As this type of device, for example, Japanese Patent Application Laid-open No. 6O-80703
r optical outer diameter measuring device" is well known.
その構成を示す第5図において、投光体10は1例えば
赤色発光ダイオード(LED)光源11と、光源11か
ら射出された光線を平行光線に変える投光レンズ12と
からなる。In FIG. 5 showing its structure, a light projecting body 10 includes a light source 11, such as a red light emitting diode (LED), and a light projecting lens 12 that converts the light beam emitted from the light source 11 into parallel light beams.
30は例えばチャージカップルドデイバイス(COD)
ラインセンサからなる受光体であり、その受光体30は
、被測定物体60を介在させるための空間を介して前記
投光体の投光レンズ12と対向して配置されている。30 is, for example, a charge coupled device (COD)
The light receiving body 30 is made of a line sensor, and the light receiving body 30 is disposed opposite to the light projecting lens 12 of the light projecting body with a space for interposing the object to be measured 60 therebetween.
これにおいて、被測定物体60を空間の任意位置に介入
すると、投光レンズ12から射出された平行光線のうち
、物体60と対向する部分の光線は物体60により遮ら
れるが、その他の光線は受光体30に達し、その非到達
部分のCCDの出力が変化する。そこで、この受光体3
0のCCDを走査し、例えばその出力変化部分の走査時
間を求めることにより出力変化部分の長さ、すなわち被
測定物体60の外径が求められる。In this case, when the object to be measured 60 is inserted at an arbitrary position in space, among the parallel rays emitted from the projection lens 12, the part of the rays facing the object 60 is blocked by the object 60, but the other rays are not received. It reaches the body 30, and the output of the CCD of the unreached part changes. Therefore, this photoreceptor 3
The length of the output changing portion, that is, the outer diameter of the object 60 to be measured, can be determined by scanning the CCD 0 and determining the scanning time of the output changing portion, for example.
(発明が解決しようとする課題)
ところで、前記の作用は光源11が面積のない点である
場合を想定してのものであって、実際には光源はある面
積を有している。このため、投光レンズ12を介して形
成される平行光線は、ある拡がり角をもっことが避けら
れず、その結果、受光体30上の被測定物体60の倫は
、その境界部分が回折。(Problems to be Solved by the Invention) By the way, the above-mentioned effect is based on the assumption that the light source 11 is a point with no area, and the light source actually has a certain area. Therefore, the parallel light rays formed through the light projecting lens 12 inevitably have a certain divergence angle, and as a result, the boundary portion of the object 60 on the photoreceptor 30 is diffracted.
散乱によってボケてしまい、結局、像部分の大きさの決
定が不明確となる。The image becomes blurred due to scattering, and the determination of the size of the image area becomes unclear.
尚、このボケは、受光体30と被測定物体60との間隙
が大きい程顕著になるため、ボケの防止には1wA定の
際両者を近接させておくことが考えられるが、その間隙
自体、介入する被測定物体60の径によって左右されて
しまい、測定の不安定さの解消は困難であった。Note that this blurring becomes more noticeable as the gap between the photoreceptor 30 and the object to be measured 60 becomes larger, so keeping them close to each other at a constant 1 wA is considered to prevent blurring, but the gap itself It has been difficult to eliminate measurement instability because it depends on the diameter of the intervening object to be measured 60.
(118&解決するための手段)
この発明は、前記課題を解決するために、光学式寸法測
定装置を、物体側にテレセンドリンクである光学系とし
て、像の大きさを物体の介入位置とは無関係とし、かつ
受光レンズを介した物体と受光体位置との関係を結像関
係として鮮明な像が得られるよう番こたものである。(118 & Means for Solving) In order to solve the above problem, the present invention uses an optical dimension measuring device as an optical system with a telescopic link on the object side, so that the size of the image is independent of the intervention position of the object. In addition, the relationship between the object through the light-receiving lens and the position of the light-receiving body is used as an imaging relationship to obtain a clear image.
すなわち、この発明は、散乱光または平行光を射出する
投光体と、被測定物体を介入させるための空間を介して
前記投光体と対向して配置された受光レンズと、前記受
光レンズの像側焦点位置に配置された開口絞りと、前記
空間の被測定物体介入位置と前記受光レンズを挾んで略
共役な位置に配置され、少なくとも測定寸法方向番こ受
光素子列を有する受光体とからなる。That is, the present invention includes a light projecting body that emits scattered light or parallel light, a light receiving lens disposed opposite to the light projecting body through a space for intervening an object to be measured, and a light receiving lens that emits scattered light or parallel light. an aperture stop disposed at an image-side focal position; and a photoreceptor disposed at a substantially conjugate position sandwiching the light-receiving lens between the object-to-be-measured intervention position in the space and having at least a row of light-receiving elements aligned in the measurement dimension direction. Become.
尚、前記のとおりこの光学系においては、受光体上に生
ずる物体の像の大きさは、被測定物体を厳密に共役な点
に位置させなくでも、共役の位置に置いた場合と同等と
なる6したがって、前記の略共役の位置とは、その範囲
を含んだ位置を意味している。As mentioned above, in this optical system, the size of the image of the object formed on the photoreceptor is the same as when the object to be measured is placed at a conjugate position, even if it is not placed at a strictly conjugate point. 6. Therefore, the above-mentioned substantially conjugate position means a position that includes that range.
(作用)
前記のとおりこの光学系は、受光レンズを介して物体と
受光体位置とが、結像関係にあり、投光体から射出され
た平行光線(散乱光線の場合については後述)により、
被測定物体の外寸に対応する像が、受光レンズ、開口絞
りを介して受光体上に結像され、その結像部分と対応し
た受光素子の出力が変化し、その変化に基づき前記と同
様にして被測定物体の外寸が求められる。(Function) As mentioned above, in this optical system, the object and the photoreceptor position are in an image-forming relationship through the light-receiving lens, and the parallel rays emitted from the projector (the case of scattered rays will be described later)
An image corresponding to the outer dimensions of the object to be measured is formed on the photoreceptor via the light receiving lens and the aperture diaphragm, and the output of the light receiving element corresponding to the imaged area changes, and based on that change, the same as above is performed. The external dimensions of the object to be measured can be determined by
この場合、実際にはこの平行光線も、光源が無限小でな
いために、ある拡がり角を有することになるが、受光レ
ンズの像側焦点位置に配置された開口絞りにより、厳密
な平行光線以外はここで遮断されるため、像の輪郭にボ
ケは生じない。In this case, the parallel rays actually have a certain divergence angle because the light source is not infinitesimal, but the aperture stop placed at the image-side focal point of the light receiving lens prevents rays other than strictly parallel rays from forming. Since the light is cut off here, the outline of the image will not be blurred.
以上は平行光線について説明したが、投光体から射出さ
れた光線が散乱光の場合も2その中の平行光線以外の光
線は、開口絞りにより遮断される結果4前記の平行光線
の場合と同様、像の輪郭にボケは生じない。The above explanation was about parallel rays, but even when the rays emitted from the projector are scattered lights, 2. The rays other than the parallel rays are blocked by the aperture diaphragm. 4. The result is the same as in the case of parallel rays above. , no blurring occurs in the outline of the image.
(実施例)
以下、丸棒の外径寸法測定装置にこの発明を実施した例
に基づき、この発明の詳細な説明する。(Example) Hereinafter, the present invention will be described in detail based on an example in which the present invention is implemented in an apparatus for measuring the outer diameter dimension of a round bar.
第1図は、この発明の光学系の実施例、第2図はその光
学系の組み込まれた装置の外観、第3、第4図は、開口
絞りの実施例をそれぞれ示す図である。FIG. 1 shows an embodiment of an optical system of the present invention, FIG. 2 shows an external appearance of a device incorporating the optical system, and FIGS. 3 and 4 show embodiments of an aperture stop.
第1図において、前記第5図と同符号を付した光源11
、投光レンズ12からなる投光体10および受光体30
は前記第5図と同様のものであり、その説明は省略する
。In FIG. 1, a light source 11 with the same reference numerals as in FIG.
, a light emitter 10 consisting of a light emitter lens 12 and a light receiver 30
is the same as that shown in FIG. 5, and its explanation will be omitted.
その投光レンズ12と受光体30の間において、投光レ
ンズ12と適宜空間を介して受光レンズ40が配置され
、その後方の像側焦点位置には開口絞り50が配置され
、その開口絞り50は、第3図に示すように薄い光遮断
板にピンホール51を穿ってなる。A light-receiving lens 40 is arranged between the light-emitting lens 12 and the light-receiving body 30 with an appropriate space between the light-emitting lens 12 and the light-receiving lens 40 . As shown in FIG. 3, this is made by punching a pinhole 51 in a thin light shielding plate.
以上により物体側にテレセンドリンクである光学系が構
成される。With the above, an optical system that is a telescopic link is constructed on the object side.
被測定物体60は、上記光学系の投光レンズ12と受光
レンズ40の空間の任意位置に介入されることになり、
その空間の中点と受光レンズ40を挾んで共役な位置に
受光体30配置され、空間内において、任意位置の物体
60と受光体30の位置との関係は、略結像関係が保持
される。The object to be measured 60 is inserted at an arbitrary position in the space between the light projecting lens 12 and the light receiving lens 40 of the optical system,
The photoreceptor 30 is placed at a conjugate position between the center point of the space and the photoreceptor lens 40, and the relationship between the object 60 at an arbitrary position and the position of the photoreceptor 30 in the space maintains a substantially imaging relationship. .
そして、この光源11と投光レンズ12は、第2図に示
す断面凹状のケースの投光部1内に収納され、空間部3
を介して対向する受光部2内に受光レンズ40.開口絞
り50.受光体30が収納されている。The light source 11 and the light projection lens 12 are housed in the light projection section 1 of the case having a concave cross section as shown in FIG.
A light-receiving lens 40. Aperture 50. A photoreceptor 30 is housed.
以上のものにおいて、空間部3内に被測定体である丸棒
60を光軸と直交状態で挿入すると、平行光線によりそ
の物体60の外径に対応した像が受光体30上に結像す
る。その結果、その部分の受光素子列の出力が変化し、
この出力変化に基づき前記と同様にして丸棒60の外径
寸法が判明する。In the above, when the round rod 60, which is the object to be measured, is inserted into the space 3 in a state perpendicular to the optical axis, an image corresponding to the outer diameter of the object 60 is formed on the photoreceptor 30 by parallel light rays. . As a result, the output of the light receiving element row in that part changes,
Based on this output change, the outer diameter of the round bar 60 is determined in the same manner as described above.
尚、前記実施例の説明は、平行光線を射出する投光体1
0を用いた場合であるが、散乱光を射出するものでも同
様である。Note that the description of the above embodiment is based on the light projecting body 1 that emits parallel light rays.
0 is used, but the same applies to a device that emits scattered light.
また、前記実施例の説明は、開口絞り50の開口をピン
ホルとした場合であるが、大きな解像度が必要な場合は
、開口を光学系の光軸と直交方向に穿ったスリットとし
てもよい(発明の効果)
この発明は、光学系を物体側にテレセンドリンクである
光学系とし、かつ受光レンズを介した物体と受光体位置
との関係を結像関係としているので、像の大きさは物体
の介入位置と独立になり、かつ像が鮮明になり、簡単か
つ正確に外寸を測定することができる。Furthermore, although the above embodiment has been described in the case where the aperture of the aperture diaphragm 50 is a pinhole, if a large resolution is required, the aperture may be a slit perpendicular to the optical axis of the optical system (invention Effects of this invention) This invention uses an optical system with a telescopic link on the object side, and the relationship between the object through the light receiving lens and the position of the light receiving body is an imaging relationship, so the size of the image is determined by the size of the object. It is independent of the intervention position, the image is clear, and external dimensions can be measured easily and accurately.
第1図は、この発明の実施例を示す光学系統図、第2図
は。
第1図の光学系を組み込んでなる装置の外観を示す斜視
図。
第3、第4図は、この発明の開口絞りの実施例を示す斜
視図。
第5図は従来技術の光学系統図である。
10:投光体 30:受光体 40:受光レンズ5
0:開口絞りFIG. 1 is an optical system diagram showing an embodiment of the present invention, and FIG. 2 is an optical system diagram showing an embodiment of the present invention. FIG. 2 is a perspective view showing the appearance of an apparatus incorporating the optical system shown in FIG. 1; 3 and 4 are perspective views showing embodiments of the aperture stop of the present invention. FIG. 5 is an optical system diagram of the prior art. 10: Emitter 30: Receiver 40: Receiver lens 5
0: Aperture diaphragm
Claims (1)
体を介入させるための空間を介して前記投光体と対向し
て配置された受光レンズと、前記受光レンズの像側焦点
位置に配置された開口絞りと、前記空間の被測定物体介
入位置と前記受光レンズを挟んで略共役な位置に配置さ
れ、少なくとも測定寸法方向に受光素子列を有する受光
体とからなる光学式寸法測定装置1. A light projecting body that emits scattered light or parallel light, a light receiving lens disposed opposite to the light projecting body through a space for intervening the object to be measured, and an image-side focal position of the light receiving lens. an aperture diaphragm disposed in the space, and a photoreceptor disposed at a position substantially conjugate with the intervening position of the object to be measured in the space and the light-receiving lens, and having a light-receiving element array at least in the measurement dimension direction. Device
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20010390A JPH0484705A (en) | 1990-07-27 | 1990-07-27 | Optical size measuring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20010390A JPH0484705A (en) | 1990-07-27 | 1990-07-27 | Optical size measuring apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0484705A true JPH0484705A (en) | 1992-03-18 |
Family
ID=16418890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20010390A Pending JPH0484705A (en) | 1990-07-27 | 1990-07-27 | Optical size measuring apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0484705A (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06294621A (en) * | 1993-04-07 | 1994-10-21 | Kobe Steel Ltd | Optical profile measuring equipment |
| JPH071294A (en) * | 1993-06-15 | 1995-01-06 | Kobe Steel Ltd | Optical type work shape measuring device in numerically controlled machine tool |
| JPH07325036A (en) * | 1994-05-31 | 1995-12-12 | New Kurieishiyon:Kk | Optical system for inspection, and inspection apparatus |
| JP2002231412A (en) * | 2001-01-31 | 2002-08-16 | Ngk Spark Plug Co Ltd | Spark plug manufacturing method and manufacturing apparatus |
| JP2006145487A (en) * | 2004-11-24 | 2006-06-08 | Kobe Steel Ltd | Optical system for shape measuring device |
| JP2007010393A (en) * | 2005-06-29 | 2007-01-18 | Jfe Steel Kk | Screw shape measuring device |
| JP2008045894A (en) * | 2006-08-11 | 2008-02-28 | Seiko Epson Corp | Imaging device and measuring device |
| JP2010516977A (en) * | 2007-01-30 | 2010-05-20 | ピルツ ゲーエムベーハー アンド コー.カーゲー | Safety device |
| JP2017181513A (en) * | 2017-05-09 | 2017-10-05 | 株式会社フジクラ | Method and apparatus for inspecting intermittent connection type optical fiber tape, and method for manufacturing intermittent connection type optical fiber tape |
| US10704985B2 (en) | 2016-01-14 | 2020-07-07 | Fujikura Ltd. | Method and apparatus for inspecting intermittent connection type optical fiber ribbon and method for manufacturing intermittent connection type optical fiber ribbon |
| JP2024151408A (en) * | 2023-04-12 | 2024-10-25 | プライムプラネットエナジー&ソリューションズ株式会社 | Sputter Measurement System |
| JP2024151407A (en) * | 2023-04-12 | 2024-10-25 | プライムプラネットエナジー&ソリューションズ株式会社 | Sputter Measurement System |
| JP2024151409A (en) * | 2023-04-12 | 2024-10-25 | プライムプラネットエナジー&ソリューションズ株式会社 | Sputter Measurement System |
| WO2025142705A1 (en) * | 2023-12-27 | 2025-07-03 | キヤノン株式会社 | Displacement sensor, manufacturing system, and article manufacturing method |
-
1990
- 1990-07-27 JP JP20010390A patent/JPH0484705A/en active Pending
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06294621A (en) * | 1993-04-07 | 1994-10-21 | Kobe Steel Ltd | Optical profile measuring equipment |
| JPH071294A (en) * | 1993-06-15 | 1995-01-06 | Kobe Steel Ltd | Optical type work shape measuring device in numerically controlled machine tool |
| JPH07325036A (en) * | 1994-05-31 | 1995-12-12 | New Kurieishiyon:Kk | Optical system for inspection, and inspection apparatus |
| JP2002231412A (en) * | 2001-01-31 | 2002-08-16 | Ngk Spark Plug Co Ltd | Spark plug manufacturing method and manufacturing apparatus |
| JP2006145487A (en) * | 2004-11-24 | 2006-06-08 | Kobe Steel Ltd | Optical system for shape measuring device |
| JP2007010393A (en) * | 2005-06-29 | 2007-01-18 | Jfe Steel Kk | Screw shape measuring device |
| JP2008045894A (en) * | 2006-08-11 | 2008-02-28 | Seiko Epson Corp | Imaging device and measuring device |
| JP2010516977A (en) * | 2007-01-30 | 2010-05-20 | ピルツ ゲーエムベーハー アンド コー.カーゲー | Safety device |
| US10704985B2 (en) | 2016-01-14 | 2020-07-07 | Fujikura Ltd. | Method and apparatus for inspecting intermittent connection type optical fiber ribbon and method for manufacturing intermittent connection type optical fiber ribbon |
| JP2017181513A (en) * | 2017-05-09 | 2017-10-05 | 株式会社フジクラ | Method and apparatus for inspecting intermittent connection type optical fiber tape, and method for manufacturing intermittent connection type optical fiber tape |
| JP2024151408A (en) * | 2023-04-12 | 2024-10-25 | プライムプラネットエナジー&ソリューションズ株式会社 | Sputter Measurement System |
| JP2024151407A (en) * | 2023-04-12 | 2024-10-25 | プライムプラネットエナジー&ソリューションズ株式会社 | Sputter Measurement System |
| JP2024151409A (en) * | 2023-04-12 | 2024-10-25 | プライムプラネットエナジー&ソリューションズ株式会社 | Sputter Measurement System |
| US12427600B2 (en) | 2023-04-12 | 2025-09-30 | Prime Planet Energy & Solutions, Inc. | Sputter measurement system |
| WO2025142705A1 (en) * | 2023-12-27 | 2025-07-03 | キヤノン株式会社 | Displacement sensor, manufacturing system, and article manufacturing method |
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