JPH06294621A - Optical profile measuring equipment - Google Patents

Abstract

PURPOSE:To block the influence of disturbance light without sacrifice of mounting/ demounting performance of an object by disposing a shade cover while dividing into the light source side and light receiving side in order to block the disturbance light, condensing the diffused light through a convex lens and passing only the parallel light through an aperture and receiving by means of an image sensor. CONSTITUTION:Light from a light source 1 impinges on a transmission diffuser 2 to produce a diffused light. A cover 3 prevents a disturbance light from impinging on the diffuser 2. The diffused light 4 is condensed through a convex lens 5 and passed through a shade 6 having an aperture 7 thus passing only such component as parallel with the optical axis of the lens 5 through the aperture 5. In other words, only the shade part 12 formed by an object 11 passes through the shade 6 and forms a shade on an image sensor 8. A light shielding chamber 9 shields the light receiving part from disturbance light. An operating section 10 measures the outer diameter D of the object 11 based on a measurement data of peak position when the primary derivative of intensity distribution of light received by the sensor 8 is subjected to curve regression, the center of gravity of the primary derivative, or the zero point when the secondary derivative is subjected to curve regression.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical shape measuring apparatus, and more particularly to an apparatus for optically measuring the size and shape of an object such as a machined product or a processing tool.

[0002]

2. Description of the Related Art An apparatus using a one-dimensional image sensor is known as an apparatus for measuring the size and shape of a wire rod or a machined product by using an optical method (Japanese Patent Publication No. 4-184).
No. 5). FIG. 7 shows such a conventional optical shape measuring device A.
0 is a schematic diagram showing a schematic configuration in one example, and FIG. 8 is a graph showing an output example of the conventional measuring apparatus A0. As shown in FIG. 7, the light emitted from the light emitting source 1 such as an LED is condensed by the rod lens 13 and becomes diffused light 14, and becomes parallel light 4 by passing through the convex lens 5 '. The parallel light 4 is projected on the image sensor 8. When the object to be measured 11 is placed between the convex lens 5'and the image sensor 8, a shadow 12 is formed by the object to be measured 11, so that a dark signal or a bright signal of the output of each photocell of the image sensor 8 continues. Therefore, the outer diameter dimension D of the DUT 11 can be measured. As can be seen from the graph in which the horizontal axis shown in FIG. 8 shows the photocell position (photocell spacing is M) and the vertical axis shows the output, the output from the normal photocell does not mean that the dark signal and the bright signal are separated clearly. Instead, it gradually changes near the boundary. Therefore, in order to divide the photocell output that changes stepwise into a dark signal or a bright signal, a threshold for dividing the dark signal and the bright signal is set in advance. Then, if this threshold is exceeded, it is a bright signal, and if it is not, a dark signal. The outer diameter dimension D of the DUT 11 is measured from the product of both the number of photocells outputting the bright signal and the dark signal and the spacing M between the photocells.

[0003]

In the conventional optical profile measuring apparatus A0 as described above, when various measurements are performed, the measured values may fluctuate depending on the surrounding environment.
In particular, in the case of shape measurement using light, ambient light from the surroundings becomes a problem. In the case of the conventional device A0, in addition to the parallel light 4 created by the light source 1 and the convex lens 5 ', the measuring device A0
There is a possibility that the image sensor 8 is also irradiated with the illumination light of the room in which is installed, or the light (including the reflected light from the peripheral device) from the light emitter placed near the device. Light other than the parallel light 4 (disturbance light) overlaps with the parallel light 4 required for measurement, and therefore the photocell output has a correspondingly large value. Considering the case where a threshold value is set for the photocell output and the bright signal and the dark signal are discriminated, it is obvious that the fluctuation of the photocell output directly leads to the measurement error. A method of correcting the threshold value in consideration of such ambient light and a method of correcting the measured value variation due to ambient light afterwards can be considered, but the ambient light does not always show the same spatial intensity distribution. ， Not a valid solution. Further, in the method of surrounding the illumination unit and the image sensor 8 with a cover to prevent ambient light from reaching the image sensor 8, when the measuring device A0 is moved or the object 11 to be measured is attached or detached, the cover is not covered. It is not practical because there is a problem that the part easily gets in the way. In order to solve the above-mentioned problems in the conventional technique, the present invention improves the optical shape measuring device and is free from the influence of ambient light.
It is another object of the present invention to provide an optical shape measuring device that does not impair the movement of the device or the attachment or detachment of the object to be measured.

[0004]

In order to achieve the above object, parallel irradiation light from a light source is received via an object to be measured, and the intensity distribution of the received irradiation light generated by the object to be measured is received. In the optical shape measuring device for measuring the shape of the object to be measured based on the above, a focusing means for focusing the irradiation light from the light source after passing through the object to be measured, and a focus of the focusing means. Diaphragm means arranged in the vicinity and having an opening having a size through which the irradiation light condensed by the condensing means can pass; and light receiving means for receiving the irradiation light passing through the opening of the diaphragm means, The optical shape measuring apparatus comprises: a measuring unit that measures the shape of the object to be measured based on the intensity distribution of the irradiation light received by the light receiving unit. Further, the optical shape measuring device is characterized by further comprising a first light shielding means for shielding ambient light around the light source. Further, the optical shape measuring device is characterized in that a second light shielding means for shielding ambient light around the light receiving means is provided.
Further, an optical shape for receiving parallel irradiation light from a light source through an object to be measured and measuring the shape of the object to be measured based on the intensity distribution of the received irradiation light generated by the object to be measured. In the measuring device, a first blocking light unit that blocks ambient light around the light source, and an irradiation light from the light source that is blocked by the first blocking unit, is passed through the object to be measured. Light collecting means for collecting light after the light collecting means, a diaphragm means arranged near the focal point of the light collecting means and having an opening having a size through which the irradiation light collected by the light collecting means can pass, and the diaphragm. Light receiving means for receiving the irradiation light having passed through the opening of the means, second light blocking means for blocking the ambient light around the light receiving means, and the light receiving means for blocking the ambient light by the second light blocking means. Based on the intensity distribution of the illuminating light received by It is an optical shape measuring apparatus characterized by comprising comprises a measuring means for measuring the shape of the object to be measured. Further, the measuring means measures the shape of the object to be measured based on measurement data composed of peak positions when the first derivative of the intensity distribution of the irradiation light received by the light receiving means is subjected to curve regression. It is an optical shape measuring device that does. Further, the measuring means measures the shape of the object to be measured based on the measurement data consisting of the barycentric position of the first derivative of the intensity distribution of the irradiation light received by the light receiving means. It is a device. Furthermore,
The measuring means measures the shape of the object to be measured based on the measurement data consisting of the zero point position when the second derivative of the intensity distribution of the irradiation light received by the light receiving means is subjected to a curve regression. It is an optical shape measuring device that does. Furthermore, the measuring means is an optical shape measuring device that calibrates the measurement data using a preset calibration curve.

[0005]

According to the present invention, the parallel irradiation light from the light source is received via the object to be measured, and the object to be measured is based on the intensity distribution of the received irradiation light generated by the object to be measured. When performing shape measurement, the ambient light around the light source is
The light is blocked by the light shielding means. Irradiation light from the light source, which is shielded from ambient light by the first light shielding means, is condensed by the condensing means after passing through the object to be measured. A diaphragm means having an opening having a size through which the irradiation light condensed by the condensing means can pass is disposed near the focus of the condensing means. The irradiation light that has passed through the opening of the diaphragm means is received by the light receiving means. The ambient light around the light receiving means is blocked by the second light blocking means. The shape of the object to be measured is measured by the measuring means on the basis of the intensity distribution of the irradiation light received by the light receiving means, the disturbance light being blocked by the second light shielding means. In this way, only the parallel light component from the light source is applied to the light receiving means. Therefore, the influence of ambient light on the measurement accuracy is eliminated. Further, since only the light source and the area around the light receiving means are shielded, there is no fear of obstructing the movement of the device or the attachment or detachment of the measured object. Furthermore,
The measuring means measures the shape of the object to be measured based on the measurement data composed of peak positions when the first derivative of the intensity distribution of the irradiation light received by the light receiving means is subjected to curve regression. Further, the measuring means measures the shape of the object to be measured based on the measurement data composed of the barycentric position of the first derivative of the intensity distribution of the irradiation light received by the light receiving means. Further, the measuring means measures the shape of the object to be measured based on the measurement data from the zero point position when the second derivative of the intensity distribution of the irradiation light received by the light receiving means is subjected to the curve regression. Further, the measuring means calibrates the measurement data using a calibration curve measured in advance. In this way, when the first derivative or second derivative is applied to the calculation of the measurement data, compared to the case where the conventional threshold value is used, the emission source and the disturbance light that cannot be removed (most of them are the measurement device and the received light). Probably scattered light reflected by means)
It is less likely to be affected by uneven light amount. In particular, when the ambient light has a uniform intensity distribution within the visual field of the light receiving means, the influence can be completely eliminated. Further, by calibrating the above measurement data, it is possible to remove geometrical errors. As a result, it is possible to obtain an optical shape measuring device which is not affected by the ambient light and which is easy to move and attach and detach the object to be measured.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments embodying the present invention will be described below with reference to the accompanying drawings for the understanding of the present invention. The following embodiments are examples of embodying the present invention and are not intended to limit the technical scope of the present invention. FIG. 1 is a schematic diagram showing a schematic configuration of an optical shape measuring device A1 according to an embodiment of the present invention. 2 is a graph (a) to (c) showing an output example of the measuring apparatus A1, FIG. 3 is a graph (a), (b) showing another output example of the measuring apparatus A1, and FIG. Explanatory diagrams (a) to (c) showing a light receiving state,
FIG. 5 shows an optical shape measuring apparatus A according to another embodiment of the present invention.
2 is a schematic diagram showing a schematic configuration of FIG. 2, and FIG. 6 is a schematic diagram showing a schematic configuration of an optical shape measuring apparatus A3 according to another embodiment of the present invention. Elements common to those in the schematic view of the conventional optical shape measuring apparatus A0 shown in FIG. 7 are designated by the same reference numerals. As shown in FIG. 1, the optical shape measuring apparatus A1 according to the present embodiment receives parallel light emitted from a light emitting source 1 (corresponding to a light source) via an object to be measured 11 and receives the received light. This is the same as the conventional example in that the shape and dimension of the object to be measured 11 are measured based on the intensity distribution of the light to be measured 11 generated. However, in this embodiment,
A cover 3 (corresponding to a first light-shielding unit) that blocks ambient light around the light source 1 and light from the light source 1 whose ambient light is blocked by the cover 3 is passed through the DUT 11. Convex lens 5 for focusing light (corresponding to light collecting means) and convex lens 5
Of the shielding plate 6 (corresponding to the diaphragm means) having an opening 7 of a size that allows the light condensed by the convex lens 5 to pass therethrough, and has passed through the opening 7 of the shielding plate 6. One-dimensional light receiving element array (image sensor) 8 for receiving light
(Corresponding to light receiving means), a light-shielding container 9 that shields ambient light around the image sensor 8, and an intensity distribution of light received by the image sensor 8 that has been shielded from ambient light by the light-shielding container 9 to be measured. This is different from the conventional example in that it is configured with an arithmetic unit 10 (corresponding to a measuring means) that measures the outer diameter dimension D of the object 11. Further, the calculation unit 10 performs a curve regression of the first derivative of the intensity distribution of the light received by the image sensor 8 or the barycentric position of the first derivative of the intensity distribution received by the image sensor 8 or the image sensor 8 receives the light. The outer diameter dimension D of the object to be measured 11 is measured based on the measurement data composed of the zero point position when the second derivative of the intensity distribution of the light is subjected to the curve regression, and the measurement data is obtained by using the calibration curve measured in advance. The point that calibrates is also different from the conventional example.

The operation of the device A1 will be described in more detail below. The light from the light emission source 1 illuminates the transmission diffusion plate 2 and becomes diffused light having a spatial spread. Cover 3
Is for preventing light from a light source other than the light emitting source 1 from being irradiated from behind the transmissive diffusion plate 2. The diffused light from the transmissive diffusion plate 2 is condensed by the convex lens 5. Convex lens 5
The shield plate 6 with an opening 7 that is sufficiently smaller than the diameter of
Since the focal position of the convex lens 5 and the opening 7 are arranged so as to substantially coincide with each other, only the component 4 parallel to the optical axis of the convex lens 5 in the diffused light from the transmission diffusion plate 2 is shielded. 6
Through the opening 7. The light that has passed through the opening 7 of the shielding plate 6 is applied to the image sensor 8, and the light intensity signal obtained by the image sensor 8 is input to the calculation unit 10. The light shielding container 9 covers the convex lens 5, the shielding plate 6 and the image sensor 8, and only the convex lens 5 is an opening. The light source may have any structure as long as it can emit a parallel light component, and as in the conventional example, a light emitting source and a convex lens may be used to positively generate parallel light. When the DUT 11 is installed between the transmissive diffusion plate 2 and the convex lens 5, a shadow is formed by the DUT 11, but only the shadow component 12 for the parallel light component 4 passes through the shield plate 6,
A shadow is created on the image sensor 8. In this case, the DUT 1
The outer diameter D of 1 and the size d of the image on the image sensor 8
The following relational expression holds between and. d = D * g / f (1) Here, f represents the focal length of the convex lens 5, and g represents the distance between the shielding plate 6 and the image sensor 8. When there is another light source around the device A1, most of the light from this other light source is blocked by the light shielding container 9 and does not directly reach the image sensor 8 as ambient light. Most of the light that can pass through the convex lens 5 is also blocked by the shield plate 6. The light reaching the image sensor 8 without being blocked by the shielding plate 6 is only the component 4 parallel to the optical axis of the convex lens 5, but there is almost no arrangement of another light source that can cause such a component 4. . For example, there is a case where light from another light source is emitted from the image sensor 8 side toward the transmissive diffusion plate 2 and reflected in the same direction as the parallel light component 4 on the surface of the transmissive diffusion plate 2. Even in this case, the transmission diffusion plate 2
By increasing the transmissivity, the amount of such reflection decreases, and if the diffusion characteristics are close to non-directional, the parallel component 4
Can be considered to be extremely small. As described above, in the present embodiment, by devising the light receiving side, it is possible to reduce the influence of the ambient disturbance light, which has been a problem in the conventional example that produces parallel light on the light emitting side. Moreover, the independence of the light-dark boundary region value on the distance between the DUT 11 and the image sensor 8, which is an advantage of the measuring method using parallel light, remains. Further, the light-shielding means for the ambient light is independent on the light source side and the light receiving side, and there is no risk of obstruction during attachment or measurement of the DUT 11.

Next, in the present embodiment, the measurement error due to the ambient light is reduced, and measures for removing the influence of the fluctuation of the light-dark boundary region width and improving the measurement resolution are added to improve the measurement accuracy of the entire shape measurement. It will be realized. The calculation function therefor will be described below. A graph showing the output signal from the image sensor 8 is shown in FIG. In the figure, the horizontal axis is the photocell position for each arrangement interval M of the photocells forming the image sensor 8, and the vertical axis is the signal from each photocell position. This is considered to be obtained by discretizing the light intensity distribution f (x) at intervals M, and by obtaining the first derivative of the light intensity distribution f (x), it can be replaced by the difference between the adjacent signals. I-th signal of photocell and i +
When the difference from the first signal is calculated, it becomes as shown in FIG. As the approximation of the differential, the difference between the i−1th and the ith and the difference between the i−1th and the i + 1th may be used. In the region where the light intensity does not change, the result of this calculation is 0, but it becomes a single peak or valley in the boundary region from dark to bright or from light to dark. Normal curve function for the graph of FIG. 2 (b), y = A * exp ^{_{[- (x-x 0) 2}} / σ 2 ] ... (2) by perform curve approximation (A is a coefficient, sigma ² is dispersed FIG. 2C shows the peak position x ₀ of the obtained approximate function. In the figure, the bottom of the valley is represented by x ₁ , and the peak of the mountain is represented by x ₂ . Since the peak position is calculated with an accuracy smaller than the photocell distance M by the approximate calculation using the normal curve function, the resolution of measurement is higher than the photocell distance M. This peak position is the approximate measurement position (corresponding to the measurement data)
And To obtain the outer diameter dimension D of the DUT 11 (1)
Approximate calculation is performed using the following equation with reference to the equation. _{D = (x 2 -x 1)} * f / g ... (3)

However, the approximate measurement positions x ₁ and x ₂ obtained by this approximate calculation and the measurement position giving the true external dimension D from the equation (3) do not always coincide. The main reason is that the spatial light intensity distribution of the light source is not strictly uniform, and the result of the first derivative has a shape that is distorted from the bright or dark signals that are not symmetrical in the light-dark boundary region. . Further, the reason why the light-dark boundary region has a certain width is that the diffraction at the opening 7 of the shield plate 6 and the image formation by the photocell on the image sensor 8 are not perfect. Depending on the shape of the opening 7 of 6 (whether it is circular, elliptical, rectangular, etc.), the first derivative is subtly influenced. Further, if the surface between the optical axis of the convex lens 5 and the image sensor 8 deviates from the vertical, or if the photocell interval M of the image sensor 8 varies, it is necessary to correct (calibrate) these influences as well (calibration). 4 (a) to (c)). At the approximate measurement position obtained by the normal curve approximation, an accuracy of about 1/10 of the photocell interval M of the image sensor 8 can be provided. This is, for example, when the image sensor 8 has a CC with a pixel pitch of 5 μm.
When the D sensor is used, it corresponds to an accuracy of 0.5 μm, and if it is attempted to obtain such accuracy of shape measurement, the influence described above cannot be ignored. In order to correct these effects, measure the relationship between the spatial position z of the standard and the peak positions x ₁ and x ₂ of the approximate curve using a standard device such as a block gauge or in-gauge at several points in the measurement field of view. , Correction functions (corresponding to the calibration curve) h ₁ (x) and h ₂ (x) are obtained. Here, the correction functions h ₁ (x) and h ₂ (x) are functions for obtaining the spatial position z from the peak positions x ₁ and x ₂ , and the correction functions h ₁ (x ₁ ) and h ₂ (x ₂ ) The difference of is in agreement with the standard size. In this case, the value determined by the standard device is calculated from the peak position of the approximation calculation, but the correction function h ₁
(X) and h ₂ (x) are correction functions that include the f / g term in the equation (3). To obtain the outer diameter dimension D, the following equation may be calculated. _{D = h 2 (x 2)} -h 1 (x 1) ... (4)

In this way, the output of the image sensor 8 is approximated to a regression curve to obtain a rough measurement position, and the deviation amount contained in the rough measurement position is corrected by a correction function determined using a standard device. A resolution higher than the photocell interval M can be obtained. The regression curve function used in the above embodiment is not limited to the normal curve function, but a parabolic function y = A (x−x ₀ ) ² and a hyperbolic function y = A /
[ ^{E- (x-x0)} + e ^{+ (x-x0 )} ] Any single-peak function may be used. Further, the incompleteness of image formation, which is a cause of the bright boundary region, is determined by the distance between the DUT 11, the convex lens 5, and the image sensor 8, which is as shown in FIGS. 4 (a) to 4 (c). It is almost symmetrical about the optical axis. The width of the light-dark boundary area changes depending on the distance between the object to be measured and the light-collecting element, but it only expands or contracts around the light-dark boundary. Therefore, the peak position of the approximate curve does not change, and only one type of correction function needs to be obtained in advance. Next, another calculation example will be described. In this example, the approximate measurement position is obtained by calculating the center of gravity of the convex portion of the differential result generated at the light-dark boundary. Regression curve approximation is used to obtain the approximate measurement position. In this case as well, the calculation up to the first-order differentiation of the light intensity distribution obtained by the image sensor 8 is the same as in the above example. However, with respect to the differentiation result of FIG. 2B, a predetermined threshold value, for example, 20% of the peak height
Cut out a mountain part or a valley part that exceeds. The center of gravity is calculated for this clipped area. The center of gravity is assumed to be the center of gravity for the calculation of the center of gravity. The center of gravity obtained by the calculation has a resolution higher than that of the photocell interval M, so that the accuracy of shape measurement is improved. When the center of gravity is set as the approximate measurement position, a constant deviation may occur when the shape of the DUT 11 is calculated based on the equation (3), as in the above example. In this case, similarly to the above example, the correction function is obtained by comparing with the standard device, and the final measurement accuracy can be improved.

Further, another calculation example will be described. In this example, the zero-cross points of the peaks and valleys of the light-dark boundary obtained by second-order differentiation of the light intensity distribution are used as the approximate measurement position. Since the signal obtained from the image sensor 8 is obtained by discretizing the light intensity distribution at the photocell interval M, the second derivative can be obtained, for example, as follows. i-1
If the output values of the _i- th, i-th, and i + 1-th photocells are s _i-1 , s _i , and s _{i + 1} , respectively, the second-order differential results at the i-th photocell position are s _i-1 , s It can be calculated by _{i + 1} . When the light intensity distribution of FIG. 3A is second-order differentiated, it becomes as shown in FIG. The results of estimating the zero-cross points by linearly approximating the vicinity of the zero-cross of the second derivative with a monotone function, for example, a straight line, are x ₁ and x ₂ , which are used as approximate measurement positions. Similar to the above two examples, since the approximate measurement position is regression estimated using a continuous function based on the information of a plurality of points near the light-dark boundary, a higher resolution can be realized by the photocell interval M. Next, other embodiments A2 and A3 of the present invention will be described. FIG. 5 shows an example A2 in which the condensing means is a reflecting mirror 15 such as a spherical mirror. The condensing means may be a transmissive element such as a lens. The light shielding container 9 has an opening only on the side of the transmission diffusion plate 2 so that only the light reflected by the reflecting mirror 15 can pass through the opening 7 of the light shielding plate 6. FIG. 6 shows an example A3 in which the light receiving means is composed of the two-dimensional image sensor 16. In this case, unlike the conventional example in which the irradiation light is parallel sheet light, there is no distinction between upper, lower, left and right measurement directions. Therefore, by using the two-dimensional image sensor 16, the two-dimensional shape of the DUT 11 can be measured. Also, in this case, two types of characteristic functions are required, one for vertical measurement and the other for horizontal measurement. When a plurality of other one-dimensional image sensors 8 are arranged vertically or horizontally,
In the same manner, the one-dimensional image sensor 8 may be moved up and down to form a two-dimensional image sensor equivalently. Thus, the present invention is based on the measuring devices A1 and A
2, A3 can have various shapes. As described above, according to the present invention, it is possible to obtain an optical shape measuring device which is not affected by ambient light and which is easy to move and attach and detach the object to be measured.

[0012]

Since the optical shape measuring apparatus according to the present invention is configured as described above, it is possible to receive the received irradiation light other than the light condensed by the condensing means among the ambient light of the apparatus. It does not become ambient light, and measurement errors can be reduced. or,
The light-shielding means for removing ambient light is independent on the light source side and the light-receiving side, so there is no risk of interference during measurement. Further, in calculating the measurement data, a first derivative or a second derivative operation is performed. As a result, compared to the conventional example that uses a threshold value, it is less likely to be affected by uneven light intensity due to the light source and the ambient light that cannot be completely removed (most of them are likely to be scattered light reflected by the surface of the measuring device or the shading means) .
In particular, when the ambient light has a uniform intensity distribution within the visual field of the light receiving means, the influence can be completely eliminated. Here, strictly speaking, the system from the object to be measured to the light collecting means and the light receiving means is an image forming optical system by the light collecting means. Therefore, when the distance between the object to be measured and the light collecting means changes, the sharpness of the image on the light receiving means changes. That is, at the boundary between dark and bright on the light receiving means, the center does not change at the position determined from the parallel rays, but the width of the boundary area changes slightly. In the differential calculation, the curve regression calculation, the barycentric calculation, and the like when calculating the measurement data according to the present invention, such a change in the width of the boundary region does not directly affect the measurement result, and there is no possibility of increasing the measurement error. Further, by using a curve regression operation or the like, a measurement resolution less than the distance between the elements of the light receiving means can be obtained. However, when this is applied to a conventional example that produces parallel light on the light emitting side, the light emitting portion and the light receiving portion If the mutual positional relationship shifts, the shadow may be displaced, and the measurement resolution may not be used effectively. On the other hand, in the present invention, since parallel light is extracted only by the light receiving portion regardless of the position of the light emitting portion, mutual positional fluctuation between the light emitting portion and the light receiving portion does not cause a measurement error.
The above measurement resolution can be effectively used. As a result, according to the present invention, without being affected by ambient light,
Further, it is possible to obtain an optical shape measuring device which can easily move the device and attach an object to be measured.

[Brief description of drawings]

FIG. 1 is a schematic diagram showing a schematic configuration of an optical shape measuring apparatus A1 according to an embodiment of the present invention.

FIG. 2 is graphs (a) to (c) showing an output example of the measuring apparatus A1.

FIG. 3 is graphs (a) and (b) showing another output example of the measuring apparatus A1.

FIG. 4 is an explanatory view showing a light receiving state of the measuring device A1 (a).
~ (C).

FIG. 5 is a schematic diagram showing a schematic configuration of an optical shape measuring device A2 according to another embodiment of the present invention.

FIG. 6 is a schematic diagram showing a schematic configuration of an optical shape measuring device A3 according to another embodiment of the present invention.

FIG. 7 is a schematic diagram showing a schematic configuration of an example of a conventional optical shape measuring apparatus A0.

FIG. 8 is a graph showing an output example of a conventional measuring apparatus A0.

[Explanation of symbols]

 A1, A2, A3 ... Optical shape measuring device 1 ... Light emitting source (corresponding to light source) 3 ... Cover (corresponding to first light shielding means) 5 ... Convex lens (corresponding to light converging means) 6 ... Shielding plate (to diaphragm means) 7) Opening 8 ... Image sensor (corresponding to light receiving means) 9 ... Light-shielding container (corresponding to second light-shielding means) 10 ... Arithmetic unit (corresponding to measuring means)

Front page continuation (72) Inventor Yamaguchi evidence 1-5-5 Takatsukadai, Nishi-ku, Kobe-shi, Hyogo Prefecture Kobe Steel Co., Ltd. Kobe Research Institute (72) Inventor Yuji Kusakabe Kanegasaki Nishi-Oike, Uozumi-cho, Akashi-shi, Hyogo 179-1 Kobe Steel Co., Ltd. Akashi Plant (72) Inventor Kenji Kawamoto Kanegasaki Nishi Oike, Uozumi Town, Akashi City, Hyogo Prefecture 179-1 Kobe Steel Co., Ltd. Akashi Plant (72) Inventor Yoshiyuki Kawabuchi Uozumi, Akashi City, Hyogo Prefecture Town Kanegasaki Nishioike 179-1 Kobe Steel Co., Ltd. Akashi Factory

Claims (8)

[Claims] 1. A parallel irradiation light from a light source is received through an object to be measured, and the shape of the object to be measured is measured based on an intensity distribution of the received irradiation light generated by the object to be measured. In the optical shape measuring apparatus, a light collecting means for collecting the irradiation light from the light source after passing through the object to be measured, and a light collecting means arranged near the focus of the light collecting means. A diaphragm means having an opening having a size through which the emitted irradiation light can pass, a light receiving means for receiving the irradiation light passing through the opening of the diaphragm means, and an intensity distribution of the irradiation light received by the light receiving means. An optical shape measuring device, comprising: a measuring means for measuring the shape of the object to be measured based on the above. 2. A first device for blocking ambient light around the light source
The optical shape measuring device according to claim 1, further comprising: 3. A second light shielding means for shielding ambient light around the light receiving means is provided.
The optical shape measuring device described. 4. The parallel irradiation light from a light source is received via an object to be measured, and the shape of the object to be measured is measured based on the intensity distribution of the received irradiation light generated by the object to be measured. In the optical shape measuring device, a first blocking light means for blocking ambient light around the light source, and irradiation light from the light source shielded by ambient light by the first blocking means, Light collecting means for collecting light after passing through, and diaphragm means arranged near the focal point of the light collecting means and having an opening having a size through which the irradiation light collected by the light collecting means can pass. A light receiving means for receiving the irradiation light having passed through the aperture of the diaphragm means, a second light blocking means for blocking ambient light around the light receiving means, and a second light blocking means for blocking the ambient light. Based on the intensity distribution of the irradiation light received by the light receiving means, An optical shape measuring device, comprising: a measuring means for measuring the shape of the object to be measured. 5. The shape of the object to be measured is measured by the measuring means based on measurement data composed of peak positions when the first derivative of the intensity distribution of the irradiation light received by the light receiving means is subjected to curve regression. The optical shape measuring apparatus according to claim 1 or 4, characterized in that: 6. The shape measuring device measures the shape of the object to be measured based on measurement data composed of a barycentric position of a first derivative of the intensity distribution of the irradiation light received by the light receiving device. Item 5. The optical shape measuring device according to Item 1 or 4. 7. The shape measurement of the object to be measured based on the measurement data consisting of the zero point position when the measuring means regresses the second derivative of the intensity distribution of the irradiation light received by the light receiving means by curve regression. The optical shape measuring apparatus according to claim 1, wherein the optical shape measuring apparatus is performed. 8. The optical profile measuring apparatus according to claim 5, 6 or 7, wherein said measuring means calibrates said measurement data using a preset calibration curve.