JPH048470A - Polishing method and rotary elastic body therefor - Google Patents

Abstract

PURPOSE:To prevent streaks from occurring in the traces even if nonfeeding polishing is performed, by having a relative position between a rotary elastic body and a workpiece reciprocatively displaced in the same direction with a turning axis of the rotary elastic body in succession, during rotation of the rotary elastic body. CONSTITUTION:A Y table 12 is being stopped as rotating a rotary elastic body 5, and an X table 10 is reciprocatively displaced at a fine stroke as if it is vibrated. With this constitution, a polished part 8a of a workpiece 8 is polished at a minute vertical strip area G1 conformed to a displacement stroke of the X table 10. In consequence, occurrence of streak flaw is prevented in the polishing traces despite nonfeeding polishing.

Description

Detailed Description of the Invention <Industrial Application Field> The present invention involves rotating a workpiece while immersed in a suspension liquid in which fine powder abrasive grains are uniformly dispersed, and With the rotating elastic body opposed to the polished surface of the workpiece without contact, the rotating elastic body is rotated to flow the suspension between the polished surface and the polished surface of the workpiece. The present invention relates to a polishing method for processing a polished surface and a rotary elastic body used in this polishing method.

<Conventional technology> In recent years, EEM (Ela
A machining technology that utilizes a microscopic elastic fracture phenomenon called stic E1ssion Machining has been proposed. With this processing technology, it is possible to perform processing in units of atoms by utilizing ultra-fine elastic fracture phenomena, and the surface of the workpiece to be polished can be polished with high precision without multiplying lattice defects.

A conventional EEM polishing apparatus is shown in FIG. 5 and briefly described.

In the figure, 1 is an NG spindle head that can move up and down in the vertical direction, 2
5 is a rotating elastic body called an elastomer sphere attached to the output shaft 4 of the motor 2, and 6 is a suspension in which fine powder abrasive grains are uniformly dispersed. 8 is a workpiece fixed to the bottom of the container 7; 9 is an X-direction air slide that drives the X-table 10; 11 is a Y-direction air slide that drives the Y-table 12; Polished surface 8 of workpiece 8
This is a load support rod that adjusts the degree of proximity between a and the rotating elastic body 5.

The machining operation in this device is carried out by the motor 2, which rotates the elastic body 5.
While rotating the workpiece 8, place it on the X table 10. This is carried out by arbitrarily feeding the workpiece 8 in the X-Y direction using the Y table 12 and bringing the workpiece 8 close to the rotating elastic body 5 in a non-contact state.
As a result, as shown in FIG. 6, the suspension 7 flows in a fluid bearing manner through the minute gap between the rotating elastic body 5 and the polished surface 8a of the workpiece 8, and this suspension The fine powder abrasive grains in 7 collide with and slide on the surface to be polished 8a, and the surface to be polished 8a is polished. Note that the machining marks caused by the - times of feeding become a straight band with a very small width.

Here, as the feeding direction of the workpiece 8, for example, as shown in FIG. The feed is defined as the Y direction feed.

<Problems to be Solved by the Invention> By the way, there is no particular problem with the above-mentioned X-direction feeding, but microscopic observation of the band-shaped machining marks obtained by Y-direction feeding reveals that there are multiple lines parallel to the feeding direction. It was confirmed that a sushi-shaped wound had occurred. In the case of the above-mentioned X direction feeding, the flow direction of the fine powder abrasive grains and the feeding direction are perpendicular to each other and cancel each other out, so it is thought that no sliver-shaped scratches occur.In the case of the Y direction feeding, the fine powder abrasive grains It is thought that the flow direction and the feeding direction are the same and the flow of the abrasive grains is non-uniform, resulting in the formation of sushi-shaped scratches. It has also been confirmed that the above-mentioned sushi-shaped scratches occur even when processing is performed while the workpiece 8 is stopped. The applicant has confirmed that the above-mentioned sushi-like scratches do not occur even when the paper is fed diagonally to the X direction.

For this reason, in the past, the feed direction during machining was
It has been pointed out that it is difficult to use because it has to be limited to one direction. Furthermore, it has been pointed out that since the conventional rotary elastic body has a spherical shape, the processing area per unit time is small and processing is time-consuming.

The present invention was created in view of these circumstances, and
The purpose is to prevent the occurrence of slit-like scratches no matter which direction the workpiece or rotary elastic body is fed, and to increase the machining efficiency by increasing the machining area as much as possible.

Means for Solving the Problems> In order to achieve the above object, the present invention immerses a workpiece in a suspension in which fine powder abrasive grains are dispersed, and rotates the surface of the workpiece to be polished. With the elastic bodies facing each other without contact,
The rotating elastic body is rotated to hold the suspension 8 between the rotating elastic body and the surface to be polished.
A polishing method for processing the surface to be polished of the workpiece by flowing a liquid has the following configuration.

In the polishing method of the first invention, during the rotation of the rotating elastic body,
The feature is that the relative position of the rotary elastic body and the workpiece is continuously reciprocated in the same direction as the rotational axis of the rotary elastic body.

In the polishing method of the second invention, during the rotation of the rotating elastic body,
While continuously reciprocating the relative position of the rotating elastic body and the workpiece in the same direction as the rotational axis of the rotating elastic body, either the rotating elastic body or the workpiece is moved perpendicular to the rotational axis. It is characterized by sending in the direction.

The rotational elastic body of the third aspect of the invention includes the above-mentioned first aspect. It is used in the second invention and is characterized by being formed in a cylindrical shape.

In the first invention, the rotating elastic body or the workpiece is vibrated in the same direction as the axis of rotation of the rotating elastic body or the workpiece, without sending either the rotating elastic body or the workpiece. Polishing progresses by making small reciprocations. That is, since the relative positions of the two are changed from time to time, no sushi-like scratches are generated in the machining marks even though the polishing process is performed without feed. Note that this process corresponds to conventional polishing in a stopped state.

In the second invention, while sending either the rotating elastic body or the workpiece in the direction in which slit-shaped scratches have conventionally occurred, the rotating elastic body and the workpiece are moved in the same manner as in the first invention. Because the relative position of Become. That is, this feeding is in the direction in which slit-shaped scratches have conventionally occurred, but since the feed locus is in a direction substantially perpendicular to the feeding direction or in a diagonal direction, no slit-shaped scratches are generated in the machining marks.

In the third invention, since a cylindrical rotary elastic body is used, if the cylindrical outer circumferential surface is parallel to the surface to be polished of the workpiece, the machining area is spherical. becomes larger in comparison.

<Example> Hereinafter, an example of the present invention will be described in detail based on the drawings.

First, using a conventional polishing device. An example of implementing the polishing method according to the second invention will be described.

First, an example of the first invention method will be described. In FIG. 1, while rotating the rotary elastic body 5,
is stopped, and the X-table 10 is reciprocated with minute strokes as if vibrating. In this case, as shown in the second leap, the polished surface 8a of the workpiece 8 is
A minute vertical band-shaped region G1 corresponding to the displacement stroke of the X-table 10 is polished.

Next, an example of the second invention method will be described. In FIG. 3, while rotating the rotary elastic body 5,
is moved in the Y direction (to the left in the figure) at an appropriate speed, and the X table 10 is reciprocated with a minute stroke in the same manner as in the first method of the invention. When machining proceeds with such feed, the feed locus does not become a straight line feed in the Y direction, but becomes a sawtooth shape. In this case, as shown in FIG. 2, the polished surface 8a of the workpiece 8 is
A horizontal band-shaped region G determined by the displacement stroke of 0 and the feed amount of the X table 12 will be polished.

Furthermore, an embodiment of the third invention device will be described.

As shown in FIG. 4, using a cylindrical rotating elastic body 5',
The output shaft 4 of the motor 2 that supports the rotary elastic body 5' is parallel to the horizontal direction so that the cylindrical outer peripheral surface of the rotary elastic body 5' faces parallel to the polished surface 8a of the workpiece 8. Arrange it so that

An example in which the second method of the invention is carried out using this rotating elastic body 5' will be explained. That is, while only rotating the cylindrical rotary elastic body 5', the X table 12 is moved in the Y direction (to the left in the figure) at an appropriate speed, and the X table 1o is moved according to the first invention method described above. Similarly, it is reciprocated with a minute stroke. The feed locus at this time also has a sawtooth shape. In this case, as shown in 2M, the surface to be polished 8a has a rectangular area G determined by the displacement stroke of the X-table 10 plus the length of the rotary elastic body 5' and the feed amount of the X-table 12; will be polished.

The side of this rectangular area G along the X direction is the sum of the displacement stroke of the X table 10 and the length of the rotating elastic body 5', and the side of the rectangular area G along the Y direction is the The amount of movement. Depending on the ratio of each side, the shape of the rectangular area changes from square to rectangle.

In addition, in the second invention method and polishing using the cylindrical rotating elastic body 5', the feed rate of the X table 12 is arbitrary, and if the feed rate is slowed down, polishing can be performed in a horizontal band shape as described above. However, if the feed speed is increased, the material will be polished into a saw-like shape. Further, in the above embodiment, the workpiece 8 is reciprocated with a minute stroke via the X-table IO, but the present invention is not limited to this. 2 is arranged so as to be parallel to the workpiece surface 8a of the workpiece 8, and the output shaft 4 or the motor 2 itself is reciprocated in the same direction as the rotational axis of the rotary elastic body 5 with a minute stroke. As the vibration applying means at this time, a high frequency generator, an ultrasonic vibrator, a piezoelectric vibrator, etc. can be considered, and are selected as appropriate.

<Effects of the Invention> As explained above, according to the first invention, even if polishing is performed without feeding, it is possible to prevent the occurrence of slit-like scratches in the machining marks.

Further, according to the second invention, even if feeding is performed in the direction in which sushi-shaped scratches have conventionally occurred, it is possible to prevent sushi-shaped scratches from occurring in the machining marks. The feeding direction is not limited as in the above, and the usability is improved.

Furthermore, according to the third aspect of the invention, the processing area can be significantly increased compared to the conventional method, so that processing time can be shortened and production costs can be reduced.

[Brief explanation of the drawing]

Fig. 1 is a plan view used to explain the operation of the polishing method according to the first invention, Fig. 2 is a plan view showing machining marks by each polishing method, and Fig. 3 is a plan view used to explain the operation of the polishing method according to the second invention. FIG. 4 is a plan view used to explain the operation of the polishing method using a rotating elastic body according to the third invention. Figures 5 to 7 relate to conventional examples; Figure 5 is a side view schematically showing a conventional polishing device, Figure 6 is a side view showing the principle of polishing, and Figure 7 is an explanation of the operation of the polishing method. FIG. 5.5'...Rotating elastic body

Claims (3)

[Claims] (1) A workpiece is immersed in a suspension in which fine powder abrasive grains are dispersed, and the rotating elastic body is rotated with the rotating elastic body facing the surface to be polished of the workpiece without contact. A polishing method for processing the polished surface of the workpiece by flowing the suspension between the rotating elastic body and the polished surface, the polishing method comprising: rotating the rotating elastic body and the polished surface; A polishing method characterized by continuously reciprocating the relative position of an object in the same direction as the axis of rotation of a rotating elastic body. (2) The workpiece is immersed in a suspension in which fine powder abrasive grains are dispersed, and the rotating elastic body is rotated with the rotating elastic body facing the surface to be polished of the workpiece without contact. A polishing method for processing the polished surface of the workpiece by flowing the suspension between the rotating elastic body and the polished surface, the polishing method comprising: rotating the rotating elastic body and the polished surface; It is characterized by sending either the rotary elastic body or the workpiece in a direction perpendicular to the rotation axis while continuously reciprocating its relative position with the object in the same direction as the rotation axis of the rotary elastic body. Polishing method. (3) A rotary elastic body used in the polishing method according to claim (1) or (2), characterized in that the rotary elastic body is formed in a cylindrical shape.