JPH048483A - Honeycomb measuring machine - Google Patents

Abstract

PURPOSE:To make a highly accurate measuring job executable by giving an excellent vibro-isolating function to a honeycomb measuring machine itself. CONSTITUTION:A vibration-proof material layer 9 of proper thickness, consisting of gelling matter making silicon with an excellent vibration-proof characteristic as material is installed in space between a surface plate 7 constituting an upper surface member 5 in a honey comb measuring machine 1 and a support plate 10. Consequently, for example, even if external force is added to the surface plate 7 and a measuring apparatus 12 or the like attached to this plate 7 and thereby vibration is produced in these elements, this vibration is largely damped by the vibro-isolating material layer 9. Accordingly, any vibration transmitted to the support plate 10 and the vibration produced in the surface plate 7, etc., also comes to a standstill almost instantaneously.

Description

[Detailed description of the invention] "Industrial application field" The present invention relates to a honeycomb working board.

More specifically, for example, in a clean room, it is possible to install various measuring instruments in a desired combination and perform measurement work on precision instruments such as optical instruments, especially high-precision measurement work. This invention relates to a honeycomb working board that has a vibration isolating device inside.

``Prior Art J'' In general, such a honeycomb working board has surface members made of steel plate joined to both sides of the aluminum honeycomb material that constitutes the main body, and the upper surface member is joined at a predetermined interval. A large number of screw holes were provided therethrough.

By the way, when performing particularly high-precision measurement work using such a honeycomb work board, for example, external force may be applied to precision equipment, measuring equipment, etc. attached to the honeycomb work board, causing vibrations. If it is impossible to carry out the work, the vibrations must be stopped immediately. However, conventional honeycomb work panels do not have vibration-proofing functions themselves, so when performing such work,
Normally, this work was carried out by setting a honeycomb work board on a support platform with a built-in vibration isolator using an air spring system.

"Problem to be Solved by the Invention" By the way, in such conventional honeycomb working panels, the main focus is on light weight, so the thickness of the upper surface member has to be adjusted to maintain flatness. In addition, it is set to be as thin as possible to firmly attach measuring equipment, etc., that is, it is generally set to about 5 mm. Therefore,
In order to prevent the planar accuracy of the honeycomb working board from being impaired and to facilitate forming, in most cases, a large number of screw holes are penetrated through the surface member in advance, and then this surface member is attached to the aluminum honeycomb using an adhesive. It is formed by joining to materials.

In addition, regarding the length under the neck of a mounting screw for attaching a measuring device, etc., for example, the measuring device should be attached to a screw hole where the cell wall forming a cell of aluminum honeycomb material and the screw hole are located facing each other. The length is such that the cell wall will not be damaged by the mounting screws even when the mounting screws are installed, i.e., the tips of the mounting screws will not protrude from the bottom surface of the surface member when the measuring equipment etc. are attached. So the length under the neck is,
It is set short.

By the way, the surface member and the aluminum honeycomb material are such that the lower surface of the surface member and the end of the cell wall forming each cell in the aluminum honeycomb material are joined via an adhesive, so the type of adhesive used, e.g. Depending on whether a two-component resin adhesive or a film adhesive is used, even if a two-component resin adhesive is used, it may be applied to the bottom side of the surface member, or Depending on the application method, such as whether it is applied to the end side of each cell wall of the aluminum honeycomb material, the position where there is a screw hole in the aluminum honeycomb material,
In other words, the results will vary depending on whether the cell is located facing the cell wall or the hollow part of the cell, but in most cases, the heat and pressure applied during bonding will cause the material to melt once. A portion of the adhesive flows into the lower end of at least some of the screw holes, and the flowed adhesive then hardens;
In some cases, the adhesive remained adhered to the inside of the screw hole, and in some cases, the thread at the lower end of the screw hole was completely filled with the adhesive over a considerable height.

Therefore, when installing a measuring device, etc. using such a screw hole, the length under the neck of the mounting screw is such that when the measuring device, etc. is firmly attached, the tip of the threaded portion should be on the bottom surface of the surface member. Even though the length is set so that the mounting screw does not protrude, when the mounting screw is inserted into the threaded hole, the adhesive that has adhered to the inside of the threaded hole is removed as the mounting screw is screwed. It will be done. Most of this scraped and powdered adhesive falls into the cell and remains there.

By the way, in a clean room, the positive pressure inside the room is usually about 1,
It is controlled at 4 atmospheres, and the temperature, humidity, etc. are also controlled to maintain predetermined conditions at all times.

Therefore, when performing various measurement work on precision equipment using a honeycomb work panel in such a lean room, for example, there may be powdered adhesive etc. stuck in the cells of the honeycomb work panel. If the cell is in a state of convection, or if vibration occurs on the honeycomb work panel, etc., the powdered adhesive, etc. that has remained in the cell may be removed by the collected soil. , there is a risk that it will be scattered into the clean room through the screw hole located in communication with the cell. If powdered adhesive etc. is scattered, the cleanliness of the clean room will decrease, the function of the clean room will be impaired, and measurement equipment, precision equipment, etc. will be contaminated, making it impossible to carry out precise measurement work. It had been pointed out.

Therefore, in order to solve the above-mentioned problems, when a measuring device is firmly mounted, for example, the screw thread located at the lower end of the screw hole used for mounting the device may be glued over a considerable height. Use a surface member that is thick enough to prevent the tip of the mounting screw from coming into contact with the attached adhesive, even if it is buried in adhesive. Screws that have a depth that prevents the tip of the mounting screw from coming into contact when a measuring device, etc. is installed through a screw hole, or are installed with a mounting screw, and that open only on the top side of the surface member. A honeycomb working board with holes was tried. However, even when such a honeycomb work panel is used in a clean room, the function of the clean room will not be degraded. However, since the weight of the surface member increases significantly, It has the disadvantage that the lightness, which is the main objective of
In addition, particularly in the latter case, there is a problem that machining the screw holes is troublesome and increases the cost.

In addition, none of the above-mentioned conventional work boards have an anti-@ function, so it is extremely difficult to perform high-precision measurement work with the honeycomb work board alone. Therefore, in order to carry out such work, a support stand with a complex structure incorporating a vibration isolator using an air spring system is required, which makes the honeycomb work panel expensive and heavy. It was also pointed out that the bottle was also heavy.

The present invention has been made in view of the above-mentioned circumstances, and its purpose is to provide a honeycomb working board with a vibration-proofing function without substantially impairing its lightness, which is the main objective of a honeycomb working board, and to reduce the cost and cost. In addition, the honeycomb workbench alone can be used without using a heavy support stand with built-in anti-#i function.
It is possible to carry out highly accurate measurement work, and even when used in a clean room, there will be no deterioration in the functions of the clean room.

Furthermore, it is an object of the present invention to propose a honeycomb working board that is easy to form.

"Means for Solving the Problems" The present invention has been made to achieve the above object, and the technical solutions thereof are as follows.

The honeycomb working board according to the present invention includes a honeycomb material made of a planar aggregate of hollow columnar cells, and surface members joined to the upper and lower cell end surfaces of the honeycomb material, and, The upper surface member includes a metal surface plate having a predetermined thickness and having a large number of screw holes extending therethrough at predetermined intervals, and a silicone gel material having an appropriate thickness. A vibration isolating material layer made of a similar material and a supporting plate made of a plate lighter than the surface plate are laminated in order from the top.

"action" Since the present invention comprises the above means, it operates as follows.

That is, in the honeycomb working board according to the present invention, the surface member joined to the upper side of the honeycomb material constituting the main body part is
A vibration damping material consisting of a metal surface plate with a predetermined thickness and a number of screw holes penetrating through it at predetermined intervals, and a gel material made of silicone with an appropriate thickness. It has a structure in which the layers and a support plate, which is lighter than the top plate, are laminated in order from the top.

Therefore, in this honeycomb working board, between the surface plate and the support plate constituting the upper surface member, a vibration isolating material of an appropriate thickness made of a gel-like substance made of silicone and having excellent vibration prevention properties is provided. Since the layers are provided, e.g.
Even if an external force is applied to the top plate or measurement equipment attached to the top plate, causing vibration, this vibration is greatly attenuated by the vibration-proofing material layer, so the vibration is transmitted to the support plate. This hardly occurs, and vibrations generated in the surface plate etc. are stopped almost instantaneously.

This eliminates the need for a support stand incorporating a vibration isolator using an expensive and heavy air spring system.
Highly accurate measurement work can be performed even when only the honeycomb work panel is used alone.

In addition, when forming the upper surface member, when laminating a vibration isolating material layer made of a gel-like material made of silicone in an interposed state between the surface plate and the support plate, Because the material layer has excellent adhesive properties, it can be directly bonded to the top plate and support plate by applying pressure in most cases without using any other adhesive. Even in cases where screw holes are provided through the holes, problems that previously occurred when a surface member with multiple screw holes through the holes were bonded to the honeycomb material using an adhesive. There is no possibility that the screw thread at the lower end of the threaded hole of the part will be filled with adhesive.

Therefore, the thickness of the surface plate having a predetermined thickness, that is, the thickness of the surface plate, is different from that of conventional mounting screws in which the length under the neck is set as short as possible to firmly mount measuring instruments, etc.
When using mounting screws with the same length under the head, the thickness of the upper surface member of a conventional general honeycomb working board is
Can be set to the same thickness.

Therefore, compared to a conventional general honeycomb working board, this honeycomb working board has approximately the same amount of vibration-proofing material layer and support plate.
Although the weight increases, the support plate is made of a lighter plate than the surface plate, and the vibration isolating material layer is lighter in weight than metal materials, so the increase in weight is small.

Also, its weight is extremely light when compared to the conventional improved honeycomb working platform.

Further, since the screw holes provided in the surface plate can be provided in advance so as to pass through the surface plate, it is easy to form the upper surface member.

Furthermore, in this honeycomb work board, the lower surface of the screw hole in the top plate is closed by a vibration isolating material layer, and this vibration isolating material layer is adhered to the top board using its own adhesive property. Therefore, when the mounting screws are screwed into the screw holes, there is no risk of the adhesive being scraped by the mounting screws.Therefore, even if this honeycomb work panel is used in a clean room, the clean room function will be maintained. It won't be damaged.

“Example j Hereinafter, the present invention will be explained based on embodiments shown in the drawings.

FIG. 1 is a longitudinal cross-sectional view of the main part of the honeycomb working board, and FIG. 2 is a partially cutaway perspective view of the entire honeycomb working board.

First, its configuration etc. will be explained.

1 is a honeycomb work board, and this honeycomb work board 1 is
An aluminum honeycomb material 2 consisting of a planar assembly of hollow columnar cells 3, and a surface member 5 bonded to the end faces of the upper and lower cells 3 of this aluminum honeycomb material 2 via an adhesive 15, respectively.
and 6.

To explain these in detail, first, the aluminum honeycomb material 2 constituting the main body part is made of foil-like aluminum material as a base material, and a predetermined number of these base materials are adhered to each other in a predetermined positional relationship, It is formed by stretching this in the stacking direction, and has a substantially regular hexagonal hollow columnar cell 3 with a predetermined cell size and height formed by the cell wall 4.
It is made up of a flat aggregate of , and has excellent lightness, excellent strength to weight ratio, and excellent planar accuracy.

5 is a surface member joined to the upper end face of the cell 3 in the aluminum honeycomb material 2, and this upper surface member 5 is
A surface plate 7, a vibration isolating material layer 9, and a support plate 10 are laminated in order from the top. The surface plate 7 of this surface member 5 has a size such that its circumference slightly extends from the aluminum honeycomb material 2, and has a large number of screw holes 8 penetrating it at predetermined intervals over substantially the entire surface thereof. The measuring device 1 is provided with a predetermined thickness, that is, the mounting hole 14 drilled in the mounting edge 13 of the measuring device 12.
2. As long as it is possible to firmly install the
When the measuring instrument 12 is firmly attached to the surface plate 7 by inserting the mounting screw 11 whose length is set short and screwing it into the screw hole 8, the threaded end of the mounting screw 11 is inserted into the surface plate 7. It is formed of a stainless steel plate having a thickness that allows it to be positioned slightly inside the surface plate 7 without protruding from the lower surface. Further, the support plate 10 has the same size as the aluminum honeycomb material 2, and is made of a metal plate, such as an aluminum plate, which is considerably lighter than the surface plate 7 and whose thickness is also set considerably thinner. There are interposed between the surface plate 7 and the support plate 10, for example,
A vibration isolating material layer 9 having an appropriate thickness and made of a gel-like substance made of silicone such as αGEL (Registered Surface 11 of Siegel Co., Ltd.) is laminated.

By the way, in forming the vibration damping material layer 9 made of a gel-like substance made of silicone and laminated in an interposed state between the surface plate 7 and the support plate 10, a two-component material consisting of a base material and a hardening agent is used. It can be formed by mixing raw materials in an appropriate ratio, injecting it into a mold, etc., and applying pressure (heating as necessary).It has excellent anti-vibration properties and excellent adhesive properties. are doing.

Therefore, in forming the upper surface member 5, a vibration isolating material layer 9 having the same size as the surface plate 7 and an appropriate thickness is formed in advance, and this vibration isolating material layer 9 is applied to the surface plate. 7
By setting the surface plate 7 and the support plate 10 in an interposed state and applying pressure, the surface plate 7 and the support plate 10 are laminated with the vibration isolating material layer 9 interposed therebetween, without using any other adhesive, and the surface member 5 is It is formed.

Note that, for example, without forming the vibration isolating material layer 9 in advance,
After injecting an appropriate amount of raw materials mixed in an appropriate ratio onto the lower surface of the surface plate 7, which is surrounded by an appropriate height and the lower surface of each screw hole 8 is closed with tape or the like, the supporting plate 10 The vibration isolating material layer 9 may be formed by covering and applying pressure, and at the same time, the surface member 5 may be formed by laminating each member.

The thickness of the vibration-proofing material layer 9 interposed between the surface plate 7 and the support plate 10 varies depending on the size and use of the honeycomb working board 1. An external force is applied to the measuring equipment 12 etc. attached to the face plate 7,
If vibration occurs in these, the vibration is greatly attenuated by the vibration isolating material layer 9, almost preventing the vibration from being transmitted to the support plate 10, and also stopping the vibration generated in the surface plate 7, etc. almost instantaneously. The thickness should be set so that it can be used.

Note that 6 is a surface member made of a metal plate and having the same size as the aluminum honeycomb material 2 joined to the end face of the cell 3 on the lower side of the aluminum honeycomb material 2. Further, 16 is a side frame made of a metal plate provided on the side surface of the honeycomb work panel 1, and this side frame 16 is composed of an upper side frame 16a that is provided hanging around the surface plate 7, and an upper side frame 16a that is provided hanging around the surface plate 7. It consists of an aluminum honeycomb material 2 and a lower side frame 16b joined to the side part of the lower surface member 6 so as to be located inside the side frame 16a. Therefore, in this honeycomb working board 1, for example, when vibration occurs in the surface plate 7, only the surface plate 7 laminated on the upper surface of the vibration isolating material layer 9 can swing.

The honeycomb work board 1 looks like this.

Next, its operation etc. will be explained.

This honeycomb working board 1 has a surface member 5 bonded to the upper side of an aluminum honeycomb material 2 constituting a main body, which has a predetermined thickness and has a number of screw holes 8 penetrated therethrough at predetermined intervals. A surface plate 7 made of a stainless steel plate having an appropriate thickness, a vibration isolating material layer 9 made of a gel-like substance made of silicone such as αGEL, and having a thickness considerably thinner than that of the surface plate 7, In addition, a support plate 10 formed of a fairly lightweight thin metal plate such as an aluminum plate is laminated in order from the top.

Therefore, in this honeycomb working board 1, a vibration isolating material layer 9 having excellent vibration prevention properties is provided between the surface plate 7 and the support plate 10 constituting the upper surface member 5, so that, for example, , even if an external force is applied to the surface plate 7 or the measurement equipment 12 attached to the surface plate 7, and vibration occurs in these,
Since this vibration is greatly attenuated by the vibration isolating material layer 9, there is almost no possibility that the vibration is transmitted to the support plate 10, and the vibration generated in the surface plate 7 etc. is stopped almost instantly. Ru.

This eliminates the need for a support stand incorporating a vibration isolator using an expensive and heavy air spring system.
Even if only the honeycomb work board 1 is used alone,
Highly accurate measurement work can be performed.

In addition, when forming the upper surface member 5, when the vibration isolating material layer 9 is laminated in an interposed state between the surface plate 7 and the support plate 10, the vibration isolating material layer 9 made of the gel-like substance is It has excellent adhesive properties and can be used without the use of other adhesives.
Since it can be directly bonded, even if the surface plate 7 has screw holes penetrated through it in advance, conventional surface members with a large number of screw holes penetrated therethrough can be bonded with adhesive. There is no possibility that the screw threads at the lower ends of some of the screw holes will be buried by the adhesive, which occurred when the aluminum honeycomb material was bonded to the aluminum honeycomb material.

Therefore, the thickness of the surface plate 7 is different from that of a conventional mounting screw whose under-neck length is set as short as possible to securely attach the measuring device 12, etc. When the screw 11 is used, the thickness can be set to be the same as the thickness of the upper surface member in a conventional general honeycomb working board.

Therefore, compared to a conventional general honeycomb working board, the weight of this honeycomb working board 1 is increased due to the vibration isolating material layer 9 and the support plate 10, but the support plate 10 is different from the surface plate 7.
It is made of a considerably lighter metal plate, and its thickness is also set to be considerably thinner than the surface plate 7. Also, unlike metal materials, the vibration isolating material layer 9 is light in weight. The increase is small. Also, its weight is extremely light when compared to the conventional improved honeycomb working platform.

Moreover, since the screw holes 8 provided in the surface plate 7 can be provided in advance so as to pass through them, the formation of the surface member 5 is easy.

Further, in this honeycomb working board 1, the lower surface of the screw hole 8 in the surface plate 7 is closed by a vibration isolating material layer 9, and this vibration isolating material layer 9 is exposed using its own adhesiveness. Since it is bonded to the face plate 7, when the mounting screw 11 is screwed into the screw hole 8, there is no risk that the adhesive adhered to the inside of the screw hole 8 will be scraped. Even if the honeycomb work panel 1 is used in a clean room, the functions of the clean room will not be impaired.

The above is the explanation of the operation, etc.

"Effects of the Invention" As detailed above, the honeycomb working board according to the present invention has a surface member bonded to the upper side of the honeycomb material, in which a large number of screw holes are provided through the surface member at predetermined intervals. A metal surface plate having a predetermined thickness, a vibration isolating material layer made of a gel material made of silicone and having an appropriate thickness, and a support plate formed of a plate lighter than the surface plate. are stacked in order from the top to achieve the following effects.

In other words, this honeycomb work board has an excellent vibration-isolating function, so it can be easily operated using just the honeycomb work board without using a support stand with a built-in expensive and heavy vibration isolator. In particular, this honeycomb work board can perform highly accurate measurement work, and
When used in a clean room, compared to conventional honeycomb work panels that may impair the functions of the clean room,
Although it cannot be denied that the weight is slightly heavier, compared to the conventional improved honeycomb work panel, there is no risk of impairing the functions of the clean room even when used in a clean room.
It is extremely lightweight, so there is almost no loss of lightness, which is the main objective of a honeycomb work panel.Furthermore, even when used in a clean room, it does not degrade the functions of the clean room in any way. Its molding is also easy.

As described above, the effects of the present invention are extremely significant, such as eliminating the problems that existed in this type of conventional example.

[Brief explanation of the drawing]

The drawings show an embodiment of the present invention, and FIG. 1 is a longitudinal cross-sectional view of a main part of a honeycomb working board, and FIG. 2 is a partially cutaway perspective view of the entire honeycomb working board. 1...Honeycomb work board, 2...Aluminum honeycomb material, 3...Cell, 4...Cell wall, 5...Surface member (upper side), 6...Surface Parts (lower side), 7...
...Surface plate, 8...Screw hole, 9...Vibration isolation material layer,
10...Support plate, 11...Mounting screw, 12...
...Measuring equipment, 13...Mounting edge, 14...
Mounting hole, 15...Adhesive, 16...Side frame, 16
a... Upper side frame, 16b... Lower side frame, 1...
...Length below the neck.

Claims (1)

[Claims] A honeycomb material made of a planar aggregate of hollow columnar cells;
A honeycomb working board comprising surface members respectively joined to the end faces of the upper and lower cells, wherein the upper surface member is provided with a number of screw holes passing through it at a predetermined interval. A supporting plate formed of a metal surface plate having a predetermined thickness, a vibration-proofing material layer made of a gel-like substance made of silicone and having an appropriate thickness, and a plate body lighter than the surface plate. A honeycomb working board characterized by being stacked in order from the top.