JPH0485727U - - Google Patents
Info
- Publication number
- JPH0485727U JPH0485727U JP12849390U JP12849390U JPH0485727U JP H0485727 U JPH0485727 U JP H0485727U JP 12849390 U JP12849390 U JP 12849390U JP 12849390 U JP12849390 U JP 12849390U JP H0485727 U JPH0485727 U JP H0485727U
- Authority
- JP
- Japan
- Prior art keywords
- movable rod
- wafer
- main body
- vacuum
- pallet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Description
第１図から第３図迄は、本考案による真空内ウ
エーハクリツプ機構を示すもので、第１図は全体
構成を示す平面図、第２図は正面図、第２Ａ図は
第１図の要部を示す詳細構成図、第３図は案内体
とクリツプ片の構成を示す要部の構成図、第４図
は従来の機構を示す平面図である。
１は本体、２はウエーハ保持凹部、３はウエー
ハ、５は移動棒、６は案内体、１０，１１はクリ
ツプ片、１４はばね部材、２０はパレツトドグで
ある。
1 to 3 show an in-vacuum wafer clipping mechanism according to the present invention, in which FIG. 1 is a plan view showing the overall configuration, FIG. 2 is a front view, and FIG. 2A is a main feature of FIG. FIG. 3 is a diagram showing the main part of the structure of the guide body and clip piece, and FIG. 4 is a plan view showing the conventional mechanism. 1 is a main body, 2 is a wafer holding recess, 3 is a wafer, 5 is a moving rod, 6 is a guide body, 10 and 11 are clip pieces, 14 is a spring member, and 20 is a pallet dog.
Claims (1)
２を有する本体１と、前記本体１に設けられ移動
棒５を有する案内体６と、前記移動棒５に設けら
れ前記移動棒５を常時一方向に付勢するためのば
ね部材１４と、前記本体１に回動自在に設けられ
前記移動棒５に接続された一対のクリツプ片１０
，１１と、前記本体１に回動自在に設けられ前記
移動棒５と当接可能なパレツトドグ２０とを備え
、 前記本体１が移動し、前記パレツトドグを介し
て前記移動棒が前記ばね部材に抗して移動するこ
とにより、前記各クリツプ片を作動させるように
構成したことを特徴とする真空内ウエーハクリツ
プ機構。[Claims for Utility Model Registration] A main body 1 having a wafer holding recess 2 for holding a wafer 3, a guide body 6 provided on the main body 1 and having a movable rod 5, and a guide body 6 provided on the movable rod 5 and having a movable rod 5. A spring member 14 for always biasing the rod 5 in one direction, and a pair of clip pieces 10 rotatably provided on the main body 1 and connected to the movable rod 5.
, 11, and a pallet dog 20 which is rotatably provided on the main body 1 and can come into contact with the movable rod 5, the main body 1 moves and the movable rod resists the spring member via the pallet dog. An in-vacuum wafer clipping mechanism, characterized in that the wafer clipping mechanism in a vacuum is configured to operate each of the clipping pieces by moving the wafer in a vacuum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12849390U JPH0485727U (en) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12849390U JPH0485727U (en) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0485727U true JPH0485727U (en) | 1992-07-24 |
Family
ID=31875952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12849390U Pending JPH0485727U (en) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0485727U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000308988A (en) * | 1999-03-18 | 2000-11-07 | Applied Materials Inc | Mechanical gripper for wafer handling robot |
| JP2008172241A (en) * | 2007-01-11 | 2008-07-24 | Applied Materials Inc | High temperature robot end effector |
-
1990
- 1990-11-30 JP JP12849390U patent/JPH0485727U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000308988A (en) * | 1999-03-18 | 2000-11-07 | Applied Materials Inc | Mechanical gripper for wafer handling robot |
| JP2008172241A (en) * | 2007-01-11 | 2008-07-24 | Applied Materials Inc | High temperature robot end effector |