JPH0486612U - - Google Patents
Info
- Publication number
- JPH0486612U JPH0486612U JP13082790U JP13082790U JPH0486612U JP H0486612 U JPH0486612 U JP H0486612U JP 13082790 U JP13082790 U JP 13082790U JP 13082790 U JP13082790 U JP 13082790U JP H0486612 U JPH0486612 U JP H0486612U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate transfer
- engaging
- transport device
- transfer tables
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chain Conveyers (AREA)
Description
第１図は、本考案による基板搬送装置の一実施
例を示す概略図、第２図は第１図の実施例にて使
用される基板搬送台を示す概略斜視図、第３図は
第２図とは異なる構成の基板搬送台を示す概略斜
視図、第４図は従来の基板搬送装置の例を示し、
Ａ及びＢはそれぞれ概略図、第５図は第４図の基
板搬送装置により搬送されるべき基板の概略平面
図である。
１０……基板搬送装置、１１……搬送ベルト、
１２……基板搬送台、１２ａ……ピン、１２ｂ…
…フランジ部、１３……基板、１３ａ……孔。
FIG. 1 is a schematic diagram showing an embodiment of a substrate transfer device according to the present invention, FIG. 2 is a schematic perspective view showing a substrate transfer platform used in the embodiment of FIG. 1, and FIG. A schematic perspective view showing a substrate transfer table having a configuration different from that shown in the figure, FIG. 4 shows an example of a conventional substrate transfer device,
A and B are schematic diagrams, respectively, and FIG. 5 is a schematic plan view of a substrate to be transported by the substrate transport device of FIG. 4. 10...Substrate transport device, 11...Transport belt,
12...Substrate transfer table, 12a...Pin, 12b...
...Flange portion, 13... Board, 13a... Hole.
Claims (1)
取り付けられており、該基板搬送台が、それぞれ
搬送すべき基板に設けられた孔に係合し得る係合
部を備えていることを特徴とする、基板搬送装置
。 Substrate transfer tables are attached to the transfer means at predetermined intervals, and each of the substrate transfer tables is provided with an engaging portion capable of engaging with a hole provided in a substrate to be transferred. A substrate transport device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13082790U JPH0486612U (en) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13082790U JPH0486612U (en) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0486612U true JPH0486612U (en) | 1992-07-28 |
Family
ID=31878141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13082790U Pending JPH0486612U (en) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0486612U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01119100A (en) * | 1987-10-31 | 1989-05-11 | Toshiba Corp | Substrate carrying device |
-
1990
- 1990-11-30 JP JP13082790U patent/JPH0486612U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01119100A (en) * | 1987-10-31 | 1989-05-11 | Toshiba Corp | Substrate carrying device |