JPH0487649U - - Google Patents
Info
- Publication number
- JPH0487649U JPH0487649U JP1990129976U JP12997690U JPH0487649U JP H0487649 U JPH0487649 U JP H0487649U JP 1990129976 U JP1990129976 U JP 1990129976U JP 12997690 U JP12997690 U JP 12997690U JP H0487649 U JPH0487649 U JP H0487649U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- wafer
- quartz glass
- support columns
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990129976U JPH0487649U (th) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990129976U JPH0487649U (th) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0487649U true JPH0487649U (th) | 1992-07-30 |
Family
ID=31877348
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990129976U Pending JPH0487649U (th) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0487649U (th) |
-
1990
- 1990-11-30 JP JP1990129976U patent/JPH0487649U/ja active Pending