JPH0487699U - - Google Patents
Info
- Publication number
- JPH0487699U JPH0487699U JP13060490U JP13060490U JPH0487699U JP H0487699 U JPH0487699 U JP H0487699U JP 13060490 U JP13060490 U JP 13060490U JP 13060490 U JP13060490 U JP 13060490U JP H0487699 U JPH0487699 U JP H0487699U
- Authority
- JP
- Japan
- Prior art keywords
- guide hole
- hole
- positioning block
- center
- correction table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
Description
第１図は、本考案の実施例を示す斜視図。第２
図は、本考案の動作説明図。第３図は、他の実施
例の動作説明図。第４図は、他の実施例を示す斜
視図。第５図、第６図は、従来の方法を示す斜視
図。
１は修正テーブル、２はガイド穴、３は真空吸
着孔、４は位置決ブロツク、５はスライド軸、６
はアクチユエータ、７はデバイス、８は修正ブロ
ツク、９はステージ、１０は基準板、１１は修正
板。
FIG. 1 is a perspective view showing an embodiment of the present invention. Second
The figure is an explanatory diagram of the operation of the present invention. FIG. 3 is an explanatory diagram of the operation of another embodiment. FIG. 4 is a perspective view showing another embodiment. 5 and 6 are perspective views showing a conventional method. 1 is a correction table, 2 is a guide hole, 3 is a vacuum suction hole, 4 is a positioning block, 5 is a slide shaft, 6
7 is an actuator, 7 is a device, 8 is a correction block, 9 is a stage, 10 is a reference plate, and 11 is a correction plate.
Claims (1)
を有するテーパ状のガイド穴２を有する修正テー
ブル１と該修正テーブル１に設けたスライド軸５
に沿つて、摺動自由に取り付けられ、前記ガイド
穴２の中央に配置された位置決ブロツク４を有し
、該位置決ブロツクには、デバイス７のパツケー
ジ寸法に合つた穴が掘り込まれており、また、そ
の中央には真空吸着孔３が設けられており、さら
に該位置決ブロツク４は、アクチユエータ６によ
り、ガイド穴２の内部を上下するように構成され
た半導体用位置修正装置。 A correction table 1 having a tapered guide hole 2 having an entrance dimension slightly larger than the external dimensions of the device 7, and a slide shaft 5 provided on the correction table 1.
It has a positioning block 4 which is slidably mounted along the guide hole 2 and is disposed in the center of the guide hole 2, in which a hole matching the package dimensions of the device 7 is drilled. Further, a vacuum suction hole 3 is provided in the center thereof, and the positioning block 4 is moved up and down inside the guide hole 2 by an actuator 6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13060490U JPH0487699U (en) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13060490U JPH0487699U (en) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0487699U true JPH0487699U (en) | 1992-07-30 |
Family
ID=31877925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13060490U Pending JPH0487699U (en) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0487699U (en) |
-
1990
- 1990-11-30 JP JP13060490U patent/JPH0487699U/ja active Pending
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