JPH048785B2 - - Google Patents
Info
- Publication number
- JPH048785B2 JPH048785B2 JP58020353A JP2035383A JPH048785B2 JP H048785 B2 JPH048785 B2 JP H048785B2 JP 58020353 A JP58020353 A JP 58020353A JP 2035383 A JP2035383 A JP 2035383A JP H048785 B2 JPH048785 B2 JP H048785B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- transparent
- film
- printed wiring
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
- H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、印刷配線板の製造工程において、例
えばエツチングレジストを形成する場合のように
印刷配線板の表面に形成した光重合性樹脂層に所
定の像を焼き付けるための装置に関するものであ
る。Detailed Description of the Invention [Industrial Field of Application] The present invention is directed to a photopolymerizable resin layer formed on the surface of a printed wiring board, such as when forming an etching resist, in the manufacturing process of a printed wiring board. The present invention relates to a device for printing a predetermined image.
従来、銅張積層板に光重合性樹脂によるエツチ
ングレジストを形成させる場合、表面に光重合性
樹脂層を形成した印刷配線板に製版フイルムを重
ね、これらを焼付機の透明支持板と透明フレキシ
ブルフイルムとで挟み、透明支持板と透明フレキ
シブルフイルムとで挟まれた空間を真空状態にし
て露光を行つている。そして、透明支持板と製版
フイルムとの密着性をよくするため、透明支持板
の製版フイルムと接触する側に細い溝を設けた
り、透明支持板を貫通する細孔を設けたりしてい
る。
Conventionally, when forming an etching resist using a photopolymerizable resin on a copper-clad laminate, a plate-making film is layered on a printed wiring board with a photopolymerizable resin layer formed on the surface, and these are placed between a transparent support plate of a printing machine and a transparent flexible film. The space between the transparent support plate and the transparent flexible film is evacuated to perform exposure. In order to improve the adhesion between the transparent support plate and the plate-making film, narrow grooves are provided on the side of the transparent support plate that comes into contact with the plate-making film, or pores are provided that pass through the transparent support plate.
従来の装置は、透明支持板そのものを加工する
ため、加工が困難であつたり、また精度よく加工
できず却つて透明支持板と製版フイルムとの密着
性の損なうような場合もあつた。
Conventional apparatuses process the transparent support plate itself, which is difficult to process, and may not be able to process with high precision, resulting in a loss of adhesion between the transparent support plate and the plate-making film.
本発明はこのような欠点を解消しようとするも
のである。 The present invention seeks to eliminate these drawbacks.
本発明では、透明板3に、製版フイルム2と接
触する面に、その一部を溝状に切り剥がして空気
排出溝11とした厚さ15〜50μmの紫外線透過フ
イルム10を接着することにより前記のような課
題を解決した。
In the present invention, an ultraviolet transmitting film 10 having a thickness of 15 to 50 μm is adhered to the surface of the transparent plate 3 that comes into contact with the plate-making film 2 by cutting a part of it into a groove shape to form an air exhaust groove 11. solved problems such as.
透明板3に所定の厚さの紫外線透過フイルムを
接着し、これを切り剥がすのみでよいので、加工
が簡単であり、かつ溝の深さはフイルムの厚さで
定まるため、加工精度を気にする必要が全くなく
なる。
Processing is easy, as all you have to do is glue a UV-transparent film of a predetermined thickness to the transparent plate 3 and cut it off. Furthermore, the depth of the groove is determined by the thickness of the film, so there is no need to worry about processing accuracy. There's no need to do that at all.
以下図面に基づいて本発明の一実施例を説明す
る。
An embodiment of the present invention will be described below based on the drawings.
第1図において、1は光重合性樹脂層を表面に
形成した印刷配線板用基板、2はネガ又はポジフ
イルムの製版フイルム、3は透明板、4は透明フ
レキシブルフイルム、5は透明支持板、6は真空
ポンプ、7は紫外線ランプ、8は反射鏡である。
透明板3は厚さ3〜5mmの透明ガラス板が好まし
く、第2図に示すように、製版フイルムと接する
面に厚さ15〜50μmの紫外線透過性フイルム10
を接着し、そのフイルムを部分的に切り剥がして
空気排出溝11を形成してある。空気排出溝11
は第3図に示すように、透明板3の中央部を中心
として放射状に形成すると、より効果的である。
空気排出溝の幅は5〜15mmがよい。これより狭い
と空気を充分に排出できないため密着性を損な
い、これより広いと製版フイルムが溝の中に落ち
込んで平面性を損なつてしまう。 In FIG. 1, 1 is a printed wiring board substrate having a photopolymerizable resin layer formed on its surface, 2 is a negative or positive film, 3 is a transparent plate, 4 is a transparent flexible film, 5 is a transparent support plate, 6 is a vacuum pump, 7 is an ultraviolet lamp, and 8 is a reflector.
The transparent plate 3 is preferably a transparent glass plate with a thickness of 3 to 5 mm, and as shown in FIG.
The air exhaust groove 11 is formed by adhering the film and partially peeling off the film. Air exhaust groove 11
As shown in FIG. 3, it is more effective if they are formed radially around the center of the transparent plate 3.
The width of the air exhaust groove is preferably 5 to 15 mm. If the groove is narrower than this, air cannot be sufficiently exhausted and adhesion is impaired, and if it is wider than this, the plate-making film falls into the groove and the flatness is impaired.
本発明の装置を使用して、銅張積層板にエツチ
ングレジストを形成した。その回路位置精度(使
用ネガフイルムの表裏張り合わせ精度0.03mmに対
する変化量)は0.02〜0.03mm、回路寸法精度(使
用ネガフイルムのライン幅0.15mmに対する変化
量)は0.01〜0.03mmであり、透明ガラス板を加工
して溝を形成した装置を用いた場合と同等であつ
た。 An etching resist was formed on a copper-clad laminate using the apparatus of the present invention. The circuit position accuracy (the amount of change relative to the 0.03 mm line width of the negative film used) is 0.02 to 0.03 mm, the circuit dimensional accuracy (the amount of change relative to the line width of 0.15 mm of the negative film used) is 0.01 to 0.03 mm, and the transparent glass This was equivalent to using a device in which grooves were formed by processing a plate.
本発明は、透明板3に、製版フイルム2と接す
る面に、その一部を溝状に切り剥がして空気排出
溝11とした厚さ15〜50μmの紫外線透過フイル
ム10を接着したので、加工が簡単であり、かつ
溝の深さはフイルムの厚さで定まるため、加工精
度を気にする必要が全くなくなる。
In the present invention, an ultraviolet transmitting film 10 having a thickness of 15 to 50 μm is adhered to the surface of the transparent plate 3 that is in contact with the plate-making film 2 by cutting a part of it into a groove shape to form an air exhaust groove 11, so that processing is easy. It is simple, and since the depth of the groove is determined by the thickness of the film, there is no need to worry about processing accuracy.
図面は何れも本発明の一実施例を示し、第1図
は装置全体の模式図、第2図は透明板の断面図、
第3図は透明板の平面図である。
符号の説明、3……透明板、10……紫外線透
過性フイルム、11……空気排出溝。
Each of the drawings shows an embodiment of the present invention; FIG. 1 is a schematic diagram of the entire device, FIG. 2 is a sectional view of a transparent plate,
FIG. 3 is a plan view of the transparent plate. Explanation of symbols, 3... Transparent plate, 10... Ultraviolet transmitting film, 11... Air exhaust groove.
Claims (1)
に製版フイルムを重ね、これらを焼付機の透明支
持板と透明フレキシブルフイルムとで挟み、透明
支持板と透明フレキシブルフイルムとで挟まれた
空間を真空状態にして露光を行う装置において、
製版フイルムと透明フレキシブルフイルムとの間
に、製版フイルムと接する面にその一部を溝状に
切り剥がして空気排出溝とした厚さ15〜50μmの
紫外線透過フイルムを接着した透明板を配したこ
とを特徴とする印刷配線板の焼付け装置。 2 空気排出溝が幅5〜15mmで、透明板の中央か
ら端部へ放射状となつていることを特徴とする特
許請求の範囲第1項記載の印刷配線板の焼付け装
置。[Claims] 1. A plate-making film is stacked on a printed wiring board on which a photopolymerizable resin layer is formed, and these are sandwiched between a transparent support plate of a printing machine and a transparent flexible film, and the transparent support plate and the transparent flexible film are In a device that performs exposure by creating a vacuum in the space between
A transparent plate is placed between the plate-making film and the transparent flexible film, with a part of it cut off in the form of a groove on the surface that contacts the plate-making film and an ultraviolet transmitting film with a thickness of 15 to 50 μm is glued to form an air exhaust groove. A printing device for printed wiring boards featuring: 2. The printed wiring board baking apparatus according to claim 1, wherein the air exhaust grooves have a width of 5 to 15 mm and are radial from the center of the transparent plate to the ends.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58020353A JPS59146056A (en) | 1983-02-09 | 1983-02-09 | Printing method of photopolymerizable resin film formed on substrate for printed wiring board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58020353A JPS59146056A (en) | 1983-02-09 | 1983-02-09 | Printing method of photopolymerizable resin film formed on substrate for printed wiring board |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59146056A JPS59146056A (en) | 1984-08-21 |
| JPH048785B2 true JPH048785B2 (en) | 1992-02-18 |
Family
ID=12024747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58020353A Granted JPS59146056A (en) | 1983-02-09 | 1983-02-09 | Printing method of photopolymerizable resin film formed on substrate for printed wiring board |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59146056A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2608795A1 (en) * | 1986-12-18 | 1988-06-24 | Photomeca Sa | Device for holding plates of photosensitive resin with a view to their exposure to ultraviolet light, and exposure machine fitted with this device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5260705A (en) * | 1975-11-13 | 1977-05-19 | Dainippon Screen Mfg | Photoosensitive holder for step and repeat machine |
| JPS54107402U (en) * | 1978-01-13 | 1979-07-28 | ||
| JPS56109354A (en) * | 1980-02-01 | 1981-08-29 | Yamatoya Shokai:Kk | Photosensitive plate equipping device of composer |
-
1983
- 1983-02-09 JP JP58020353A patent/JPS59146056A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59146056A (en) | 1984-08-21 |
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