JPH048823U - - Google Patents

Info

Publication number
JPH048823U
JPH048823U JP5062590U JP5062590U JPH048823U JP H048823 U JPH048823 U JP H048823U JP 5062590 U JP5062590 U JP 5062590U JP 5062590 U JP5062590 U JP 5062590U JP H048823 U JPH048823 U JP H048823U
Authority
JP
Japan
Prior art keywords
shaft member
bearing
gas
insertion hole
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5062590U
Other languages
Japanese (ja)
Other versions
JP2547905Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990050625U priority Critical patent/JP2547905Y2/en
Publication of JPH048823U publication Critical patent/JPH048823U/ja
Application granted granted Critical
Publication of JP2547905Y2 publication Critical patent/JP2547905Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図はプローブの平面図、第２図は同・正面
図、第３図は同・側面図、第４図はケース本体の
平面図、第５図は同・正面図、第６図は同・側面
図、第７図はロツドの一部断面正面図、第８図は
フツクの断面正面図、第９図は同・側面図、第１
０図はブロツクの正面図、第１１図は同・断面側
面図である。 尚図中、１はプローブ、３はケース、５はロツ
ド、１１は軸受部材、１７は押え板、１９は給気
室、２１は排気室、２３は給気通路、２５は排気
通路である。 Figure 1 is a plan view of the probe, Figure 2 is a front view of the probe, Figure 3 is a side view of the probe, Figure 4 is a plan view of the case body, Figure 5 is a front view of the probe, and Figure 6 is a front view of the probe. Figure 7 is a partial cross-sectional front view of the rod, Figure 8 is a cross-sectional front view of the hook, Figure 9 is a side view of the same, Figure 1
Fig. 0 is a front view of the block, and Fig. 11 is a cross-sectional side view thereof. In the figure, 1 is a probe, 3 is a case, 5 is a rod, 11 is a bearing member, 17 is a holding plate, 19 is an air supply chamber, 21 is an exhaust chamber, 23 is an air supply passage, and 25 is an exhaust passage.

Claims (1)

【実用新案登録請求の範囲】 軸部材を気体圧力により浮遊状態でその軸方向
に移動可能に支持する静圧気体軸受装置であつて
、 ケース内に軸部材の移動方向に間隔をおいて配
設され軸受孔が形成された多孔質材料からなる軸
受部材と、 軸部材挿通用孔が形成され前記各軸受部材の外
端面を閉塞する閉塞部材と、 前記各軸受部材の外周部に設けられた給気室と
、 前記閉塞部材の軸部材挿通用孔及び軸受部材の
軸受孔を挿通してケースに貫通された軸部材の外
周面と両軸受部材の間におけるケース側部分の凹
部とで形成された排気室と、 前記給気室に加圧気体を供給する給気通路と、 前記排気室内の気体を排気する排気通路と、 を備えることを特徴とする静圧気体軸受装置。[Claims for Utility Model Registration] A hydrostatic gas bearing device that supports a shaft member so that it can move in the axial direction in a floating state using gas pressure, which is disposed within a case at intervals in the direction of movement of the shaft member. a bearing member made of a porous material and having a shaft member insertion hole formed therein; a closing member having a shaft member insertion hole formed therein and closing an outer end surface of each of the bearing members; an air chamber; an outer circumferential surface of the shaft member that is penetrated into the case by passing through the shaft member insertion hole of the closing member and the bearing hole of the bearing member; and a recess in the case side portion between both bearing members. A static pressure gas bearing device comprising: an exhaust chamber; an air supply passage that supplies pressurized gas to the air supply chamber; and an exhaust passage that exhausts gas in the exhaust chamber.
JP1990050625U 1990-05-14 1990-05-14 probe Expired - Fee Related JP2547905Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990050625U JP2547905Y2 (en) 1990-05-14 1990-05-14 probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990050625U JP2547905Y2 (en) 1990-05-14 1990-05-14 probe

Publications (2)

Publication Number Publication Date
JPH048823U true JPH048823U (en) 1992-01-27
JP2547905Y2 JP2547905Y2 (en) 1997-09-17

Family

ID=31569333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990050625U Expired - Fee Related JP2547905Y2 (en) 1990-05-14 1990-05-14 probe

Country Status (1)

Country Link
JP (1) JP2547905Y2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0379804A (en) * 1989-08-23 1991-04-04 Kayaba Ind Co Ltd Cylinder device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0379804A (en) * 1989-08-23 1991-04-04 Kayaba Ind Co Ltd Cylinder device

Also Published As

Publication number Publication date
JP2547905Y2 (en) 1997-09-17

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees