JPH049257B2 - - Google Patents
Info
- Publication number
- JPH049257B2 JPH049257B2 JP58214890A JP21489083A JPH049257B2 JP H049257 B2 JPH049257 B2 JP H049257B2 JP 58214890 A JP58214890 A JP 58214890A JP 21489083 A JP21489083 A JP 21489083A JP H049257 B2 JPH049257 B2 JP H049257B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- solid electrolyte
- gas diffusion
- oxygen concentration
- permeable solid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000001301 oxygen Substances 0.000 claims description 57
- 229910052760 oxygen Inorganic materials 0.000 claims description 57
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 30
- 239000007784 solid electrolyte Substances 0.000 claims description 26
- 239000007789 gas Substances 0.000 claims description 24
- 238000009792 diffusion process Methods 0.000 claims description 20
- 239000002002 slurry Substances 0.000 claims description 18
- 239000000843 powder Substances 0.000 claims description 15
- 239000000919 ceramic Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000011148 porous material Substances 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 49
- -1 oxygen ion Chemical class 0.000 description 24
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 12
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 8
- 229910052697 platinum Inorganic materials 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 229910001882 dioxygen Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000009713 electroplating Methods 0.000 description 3
- 238000007710 freezing Methods 0.000 description 3
- 230000008014 freezing Effects 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 150000002926 oxygen Chemical class 0.000 description 2
- 238000007750 plasma spraying Methods 0.000 description 2
- 229910000033 sodium borohydride Inorganic materials 0.000 description 2
- 239000012279 sodium borohydride Substances 0.000 description 2
- 229910052596 spinel Inorganic materials 0.000 description 2
- 239000011029 spinel Substances 0.000 description 2
- 238000007751 thermal spraying Methods 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910000629 Rh alloy Inorganic materials 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000004108 freeze drying Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- PXXKQOPKNFECSZ-UHFFFAOYSA-N platinum rhodium Chemical compound [Rh].[Pt] PXXKQOPKNFECSZ-UHFFFAOYSA-N 0.000 description 1
- GNLCAVBZUNZENF-UHFFFAOYSA-N platinum silver Chemical compound [Ag].[Ag].[Ag].[Pt] GNLCAVBZUNZENF-UHFFFAOYSA-N 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4075—Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Description
【発明の詳細な説明】 本発明は酸素濃度センサの製造方法に関する。[Detailed description of the invention] The present invention relates to a method of manufacturing an oxygen concentration sensor.
ジルコニア等の酸素イオン透過性固体電解質を
用いる酸素濃度センサは公知であり、酸素濃淡電
池の原理により、ガス中の酸素濃度を測定するこ
とができる。このため、自動車等の内燃機関から
排出される排気ガス中の酸素濃度を測定するのに
使用されており、排気ガスの空燃比制御の一助と
されている。 Oxygen concentration sensors using oxygen ion permeable solid electrolytes such as zirconia are well known and can measure the oxygen concentration in gas based on the principle of an oxygen concentration battery. For this reason, it is used to measure the oxygen concentration in exhaust gas discharged from internal combustion engines such as automobiles, and is used to help control the air-fuel ratio of exhaust gas.
この酸素濃度センサの構造として、いくつかの
ものが知されているが、例えば、図面に示す構造
の酸素濃度センサが公知である。図は酸素濃度セ
ンサの一例を示す断面図であり、図中１がジルコ
ニア等からなる酸素イオン透過性固体電解質素子
であり、２はこの酸素イオン透過性固体電解質素
子１の両側に形成された一対の電極である。この
酸素イオン透過性固体電解質素子１と電極２の周
囲には、２層のガス拡散律速層３が形成されてい
る。このガス拡散律速層３は電極２を覆う一対の
セラミツク多孔質層３ａと、酸素イオン透過性固
体電解質素子１と電極２と多孔質層３ａの全体を
覆うセラミツク緻密層３ｂとからなる。また、４
は電極から引き出したリード線であり、電源５に
接続されている。 Several structures of this oxygen concentration sensor are known, and for example, an oxygen concentration sensor having the structure shown in the drawings is known. The figure is a sectional view showing an example of an oxygen concentration sensor. In the figure, 1 is an oxygen ion permeable solid electrolyte element made of zirconia or the like, and 2 is a pair of oxygen ion permeable solid electrolyte elements formed on both sides of this oxygen ion permeable solid electrolyte element 1. This is the electrode. A two-layer gas diffusion control layer 3 is formed around the oxygen ion permeable solid electrolyte element 1 and the electrode 2. This gas diffusion control layer 3 consists of a pair of ceramic porous layers 3a that cover the electrodes 2, and a dense ceramic layer 3b that covers the entirety of the oxygen ion permeable solid electrolyte element 1, the electrodes 2, and the porous layers 3a. Also, 4
is a lead wire drawn out from the electrode, and is connected to the power source 5.
かかる酸素濃度センサにおいては、一対の電極
２に適当な電圧を印加することにより、一方の電
極２では酸素ガスを酸素イオンにイオン化し、こ
の酸素イオンは酸素イオン透過性固体電解質素子
１を通つて他方の電極２に流れ、ここで酸素ガス
となる。このとき流れる電流値が酸素濃度によつ
てかわることにより、電流値から酸素濃度を知る
ことができる。 In such an oxygen concentration sensor, by applying an appropriate voltage to a pair of electrodes 2, one electrode 2 ionizes oxygen gas into oxygen ions, and these oxygen ions pass through the oxygen ion permeable solid electrolyte element 1. It flows to the other electrode 2, where it becomes oxygen gas. Since the value of the current flowing at this time changes depending on the oxygen concentration, the oxygen concentration can be determined from the current value.
図において、ガス拡散律速層３が多孔質層３ａ
と緻密層３ｂの２層に分けられているのは、十分
な有効電極面積を確保するためである。即ち、酸
素濃度センサの電極２では、酸素ガスを酸素イオ
ン（O2-）にイオン化し、酸素イオン透過性固体
電解質素子１へ送り込む働きをしている。しかし
ながら、この電極２には、常にガス拡散律速層３
が密着しており、電極２の有効面積を少なくして
いる。そこで、電極２の有効面積を増加し、酸素
濃度センサの性能を向上させるために、電極２と
接触するガス拡散律速層３を多孔質層３ａとし、
酸素ガスと接触する機会を増やしている。 In the figure, the gas diffusion rate controlling layer 3 is a porous layer 3a.
The reason why it is divided into two layers, ie, a dense layer 3b and a dense layer 3b, is to ensure a sufficient effective electrode area. That is, the electrode 2 of the oxygen concentration sensor functions to ionize oxygen gas into oxygen ions (O 2- ) and send them to the oxygen ion permeable solid electrolyte element 1 . However, this electrode 2 always has a gas diffusion control layer 3.
are in close contact with each other, reducing the effective area of the electrode 2. Therefore, in order to increase the effective area of the electrode 2 and improve the performance of the oxygen concentration sensor, the gas diffusion control layer 3 in contact with the electrode 2 is made into a porous layer 3a.
It increases the chances of coming into contact with oxygen gas.
また、ガス拡散律速層３を２層とすることによ
り、律速制御が容易となる。 Further, by forming the gas diffusion rate controlling layer 3 into two layers, rate controlling becomes easy.
従来、図に示すような酸素濃度センサを製造す
る場合、前記多孔質層３ａは次のようにして形成
していた。 Conventionally, when manufacturing an oxygen concentration sensor as shown in the figure, the porous layer 3a was formed as follows.
第１の方法は溶射によるものであり、セラミツ
ク粉末の粒径が、例えば60〜70μと大きいものを
用い溶射することにより多孔質層３ａを形成する
ものである。この第１の方法では、粒径の大きい
セラミツク粉末を用いるため、溶射層の表面に凹
凸ができ、多孔質層３ａの厚さが均一にならな
い。このため、酸素濃度センサの測定値にバラツ
キが生じ、十分な精度を確保できず、品質が安定
しないという問題がある。 The first method is thermal spraying, in which the porous layer 3a is formed by thermal spraying using ceramic powder having a large particle size of, for example, 60 to 70 microns. In this first method, since ceramic powder with a large particle size is used, the surface of the sprayed layer is uneven, and the thickness of the porous layer 3a is not uniform. For this reason, there is a problem that variations occur in the measured values of the oxygen concentration sensor, that sufficient accuracy cannot be ensured, and that the quality is unstable.
第２の方法は耐熱性セラミツクを含むスラリ中
に浸漬するもので、このスラリ中に、例えば樹脂
等の焼失性または可溶性粉末を混入し、スラリを
コーテイング後この焼失性または可溶性粉末を加
熱等の適宜手段で除去することにより、その結果
できた空洞を利用するものである。しかしなが
ら、この第２の方法では、コーテイング直後のス
ラリの膜厚は均一であるが、重力によりスラリの
垂れ下がりが生じ、酸素イオン透過性固体電解質
素子を保持したときの上方と下方でスラリの膜厚
が不均一になる。このため、酸素濃度センサに品
質のバラツキが生じ、十分な精度が確保できない
という問題がある。 The second method is to immerse the heat-resistant ceramic in a slurry containing heat-resistant ceramic, and mix burnable or soluble powder such as resin into this slurry. After coating the slurry, the burnable or soluble powder is heated, etc. By removing it by appropriate means, the resulting cavity is utilized. However, in this second method, although the thickness of the slurry is uniform immediately after coating, the slurry sag due to gravity, and the thickness of the slurry is becomes uneven. For this reason, there is a problem in that the quality of the oxygen concentration sensor varies, and sufficient accuracy cannot be ensured.
本発明は、上記従来技術の問題を解決するため
になされたもので、ガス拡散律速層の多孔質層の
厚さを均一にすることができる酸素濃度センサの
製造方法を提供することを目的とする。 The present invention was made in order to solve the problems of the prior art described above, and an object of the present invention is to provide a method for manufacturing an oxygen concentration sensor that can make the thickness of the porous layer of the gas diffusion control layer uniform. do.
かかる目的は、本発明によれば、酸素イオン透
過性固体電解質素子の両側に一対の電極を形成し
た後、その周囲に２層のガス拡散律速層を形成す
る酸素濃度センサの製造方法であつて、
前記電極が形成された酸素イオン透過性固体電
解質素子に耐熱性セラミツクを含むスラリを被着
させた後、凍結乾燥し、続いて焼成することによ
り多数の連通孔を有するガス拡散律速層としての
多孔質層を形成し、次いで周囲にセラミツク粉末
を溶射してガス拡散律速層としての緻密層を形成
することを特徴とする酸素濃度センサの製造方法
によつて達成される。 According to the present invention, the object is to provide a method for manufacturing an oxygen concentration sensor in which a pair of electrodes is formed on both sides of an oxygen ion permeable solid electrolyte element, and then two gas diffusion control layers are formed around the pair of electrodes. A slurry containing heat-resistant ceramic is applied to the oxygen ion-permeable solid electrolyte element on which the electrodes are formed, and then freeze-dried and then fired to form a gas diffusion-controlling layer having a large number of communicating holes. This is achieved by a method for manufacturing an oxygen concentration sensor, which is characterized in that a porous layer is formed, and then ceramic powder is thermally sprayed on the periphery to form a dense layer as a gas diffusion control layer.
次に、本発明の酸素濃度センサの製造方法を詳
細に説明する。 Next, a method for manufacturing an oxygen concentration sensor according to the present invention will be explained in detail.
本発明において、酸素イオン透過性固体電解質
としては、例えば、ジルコニア（ZrO2）を用い
る。通常このジルコニ等に安定剤としてイツトリ
ア（Y2O3）等を適量添加する。酸素イオン透過
性固体電解質素子は、例えば、上記ジルコニアと
イツトリアの混合粉末を金型等に入れ、圧力を付
与して所定形状に成形した後高温で焼成すること
により製造することができる。 In the present invention, for example, zirconia (ZrO 2 ) is used as the oxygen ion permeable solid electrolyte. Usually, an appropriate amount of ittria (Y 2 O 3 ) or the like is added as a stabilizer to this zirconia or the like. The oxygen ion-permeable solid electrolyte element can be manufactured by, for example, placing the mixed powder of zirconia and yttoria in a mold or the like, applying pressure to shape it into a predetermined shape, and then firing it at a high temperature.
この酸素イオン透過性固体電解質素子の両側に
一対の電極を形成する。このためには、まず酸素
イオン透過性固体電解質素子の両側に、例えば塩
化白金酸溶液と水素化ホウ素ナトリウム水溶液に
よつて化学メツキを施す。次いで、電気メツキに
より電極の材料である白金、白金−銀合金、白金
−ロジウム合金等を１〜2μの厚さにメツキする。
このとき、メツキ層は酸素イオン透過性固体電解
質素子の全周に亘つて形成されるので、電気メツ
キ後余分のメツキ層を削り取り一対の電極とす
る。 A pair of electrodes is formed on both sides of this oxygen ion permeable solid electrolyte element. For this purpose, first, both sides of the oxygen ion permeable solid electrolyte element are chemically plated using, for example, a chloroplatinic acid solution and an aqueous sodium borohydride solution. Next, electrode materials such as platinum, platinum-silver alloy, platinum-rhodium alloy, etc. are plated to a thickness of 1 to 2 microns by electroplating.
At this time, since the plating layer is formed over the entire circumference of the oxygen ion permeable solid electrolyte element, the excess plating layer is scraped off after electroplating to form a pair of electrodes.
続いて、この電極の各々に白金等からなるリー
ド線を圧着する。 Subsequently, lead wires made of platinum or the like are crimped onto each of the electrodes.
次に、α−アルミナ粉末等のセラミツク粉末を
混入したスラリを調整する。例えば、アルミナス
ラリの調整は、常法に従いアルミナ粉末にアルミ
ナゾルおよび水を加え、よく撹拌することにより
行う。 Next, a slurry containing ceramic powder such as α-alumina powder is prepared. For example, an alumina slurry is prepared by adding alumina sol and water to alumina powder and stirring well according to a conventional method.
このアルミナスラリの酸素イオン透過性固体電
解質素子へのコーテイングは、通常酸素イオン透
過性固体電解質素子をスラリ中に浸漬し、引き上
げて余分なスラリを吹き払うことにより行う。ま
た、刷毛塗り、スプレーコートによつてもよい。 Coating the oxygen ion permeable solid electrolyte element with this alumina slurry is usually carried out by immersing the oxygen ion permeable solid electrolyte element in the slurry, pulling it out, and blowing off the excess slurry. Alternatively, brush coating or spray coating may be used.
本発明においては、スラリの垂れ下がり等の防
止のため、凍結、乾燥を行う。凍結は、通常液体
窒素中に適宜時間浸漬させることにより行う。続
いて、この凍結物を減圧下に所定時間置き、水を
昇華させて乾燥させる。この乾燥物を高温、例え
ば800℃で焼成し、電極近傍以外に付着したコー
テイング層を削り取る。これにより、ガス拡散律
速層としての多孔質層が形成される。 In the present invention, freezing and drying are performed to prevent the slurry from sagging. Freezing is usually performed by immersing the material in liquid nitrogen for an appropriate amount of time. Subsequently, this frozen product is placed under reduced pressure for a predetermined period of time to sublimate the water and dry it. This dried material is fired at a high temperature, for example, 800° C., and the coating layer adhering to areas other than the vicinity of the electrodes is scraped off. As a result, a porous layer is formed as a gas diffusion rate controlling layer.
最後に、プラズマ溶射等によつて、５〜20μの
スピネル等のセラミツク微粉末をコーテイング
し、ガス拡散律速層としての緻密層を形成し、酸
素濃度センサを得る。 Finally, a fine ceramic powder such as spinel having a thickness of 5 to 20 μm is coated by plasma spraying or the like to form a dense layer as a gas diffusion control layer, thereby obtaining an oxygen concentration sensor.
本発明においては、セラミツク粉末を含むスラ
リを被着させた後、続いて凍結乾燥を行うので、
凍結によりスラリの厚さが均一に保持され、乾燥
により水が昇華して多数の連通孔が形成される。
このため、従来と異なり、厚さが均一なガス拡散
律速層としての多孔質層が得られ、品質の安定し
た精度のよい酸素濃度センサを得ることができ
る。 In the present invention, after applying the slurry containing ceramic powder, freeze-drying is performed subsequently.
Freezing maintains a uniform thickness of the slurry, and drying sublimes water to form a large number of communicating pores.
Therefore, unlike the conventional method, a porous layer serving as a gas diffusion control layer with a uniform thickness can be obtained, and an oxygen concentration sensor with stable quality and high accuracy can be obtained.
次に、本発明の実施例を図面を参考にして説明
する。 Next, embodiments of the present invention will be described with reference to the drawings.
実施例
酸素イオン透過性固体電解質素子１の材料とし
て、イツトリアを８モル％含むジルコニア粉末を
用い、この原料粉末を金型で約1000Kg／cm2の圧力
で円板形状に成形し約1700℃で焼成した。次い
で、酸素イオン透過性固体電解質素子１の両側に
塩化白金酸溶液と水素化ホウ素ナトリウム水溶液
によつて化学メツキを施し、その後電気メツキに
より約1μの白金メツキを施した。続いて、酸素
イオン透過性固体電解質素子１の周辺部の電極を
削り取り一対の電極２を得た。Example Zirconia powder containing 8 mol% of ittria was used as the material for the oxygen ion permeable solid electrolyte element 1. This raw material powder was molded into a disc shape with a mold at a pressure of about 1000 kg/cm 2 and heated at about 1700°C. Fired. Next, chemical plating was applied to both sides of the oxygen ion permeable solid electrolyte element 1 using a chloroplatinic acid solution and an aqueous sodium borohydride solution, and then platinum plating with a thickness of about 1 μm was applied by electroplating. Subsequently, a pair of electrodes 2 was obtained by scraping off the peripheral electrodes of the oxygen ion permeable solid electrolyte element 1.
そして、電極２に白金リード線４を圧着した。 Then, a platinum lead wire 4 was crimped onto the electrode 2.
次に粒径10〜20μのα−アルミナ粉末をアルミ
ナゾルに懸濁させ、均一なアルミナスラリーを調
製し、白金リード線をつけた酸素イオン透過性固
体電解質素子１にスラリーを被着させた。 Next, α-alumina powder with a particle size of 10 to 20 μm was suspended in alumina sol to prepare a uniform alumina slurry, and the slurry was applied to an oxygen ion permeable solid electrolyte element 1 equipped with platinum lead wires.
続いて、液体窒素中に５分間浸漬して凍結させ
た。次いで、この凍結物を４mmHgの減圧下に２
時間置き水を昇華させ乾燥物を得た。 Subsequently, it was immersed in liquid nitrogen for 5 minutes to freeze. Next, this frozen material was heated under a reduced pressure of 4 mmHg for 2 hours.
A dried product was obtained by sublimating the water for a while.
更に、800℃で焼成した後酸素イオン透過性固
体電解質素子１周辺部のコーテイング層を削り取
り、ガス拡散律速層としての多孔質層３ａを得
た。 Furthermore, after firing at 800° C., the coating layer around the oxygen ion permeable solid electrolyte element 1 was scraped off to obtain a porous layer 3a as a gas diffusion controlling layer.
次にプラズマ溶射によつて５〜20μのスピネル
微粉末を溶射してガス拡散律速層としての緻密層
３ｂを形成し、酸素濃度センサを得た。 Next, a fine spinel powder of 5 to 20 microns was sprayed by plasma spraying to form a dense layer 3b as a gas diffusion control layer, thereby obtaining an oxygen concentration sensor.
本実施例によつて製造した酸素濃度センサは、
ガス拡散律速層としての多孔質層が均一な厚さに
形成された。また、多孔質層には多数の連通孔が
形成されており、十分な電極有効面積が確保され
た。この酸素濃度センサは、精度的に従来のもの
より約５倍優れていることが確認された。 The oxygen concentration sensor manufactured according to this example is as follows:
A porous layer serving as a gas diffusion controlling layer was formed to have a uniform thickness. Furthermore, a large number of communicating pores were formed in the porous layer, and a sufficient effective electrode area was ensured. It was confirmed that this oxygen concentration sensor is approximately five times more accurate than conventional sensors.
図面は多孔質層と緻密層の２層からなるガス拡
散律速層を有する酸素濃度センサの一例を示す断
面図である。
１……酸素イオン透過性固体電解質素子、２…
…電極、３……ガス拡散律速層、３ａ……多孔質
層、３ｂ……緻密層、４……リード線、５……電
源。
The drawing is a sectional view showing an example of an oxygen concentration sensor having a gas diffusion control layer consisting of two layers: a porous layer and a dense layer. 1...Oxygen ion permeable solid electrolyte element, 2...
...Electrode, 3...Gas diffusion control layer, 3a...Porous layer, 3b...Dense layer, 4...Lead wire, 5...Power source.
Claims (1)
対の電極を形成した後、その周囲に２層のガス拡
散律速層を形成する酸素濃度センサの製造方法で
あつて、 前記電極が形成された酸素イオン透過性固体電
解質素子に耐熱性セラミツクを含むスラリを被着
させた後、凍結乾燥し、続いて焼成することによ
り多数の連通孔を有するガス拡散律速層としての
多孔質層を形成し、次いで周囲にセラミツク粉末
を溶射してガス拡散律速層としての緻密層を形成
することを特徴とする酸素濃度センサの製造方
法。[Claims] 1. A method for manufacturing an oxygen concentration sensor, which comprises forming a pair of electrodes on both sides of an oxygen ion permeable solid electrolyte element, and then forming two gas diffusion control layers around the electrodes, comprising: A slurry containing heat-resistant ceramic is applied to the oxygen ion-permeable solid electrolyte element in which the oxygen ion-permeable solid electrolyte element has been formed, freeze-dried, and then fired to form a porous layer with a large number of communicating pores as a gas diffusion control layer. 1. A method for manufacturing an oxygen concentration sensor, which comprises forming a dense layer as a gas diffusion regulating layer by thermally spraying ceramic powder around the periphery.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58214890A JPS60107560A (en) | 1983-11-15 | 1983-11-15 | Manufacture of oxygen concentration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58214890A JPS60107560A (en) | 1983-11-15 | 1983-11-15 | Manufacture of oxygen concentration sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60107560A JPS60107560A (en) | 1985-06-13 |
| JPH049257B2 true JPH049257B2 (en) | 1992-02-19 |
Family
ID=16663256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58214890A Granted JPS60107560A (en) | 1983-11-15 | 1983-11-15 | Manufacture of oxygen concentration sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60107560A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61119753U (en) * | 1985-01-16 | 1986-07-28 | ||
| JPH0676989B2 (en) * | 1986-02-04 | 1994-09-28 | 株式会社豊田中央研究所 | Limiting current type oxygen sensor |
| JPH0634683Y2 (en) * | 1987-10-08 | 1994-09-07 | 株式会社ユニシアジェックス | Oxygen sensor for internal combustion engine |
| KR19980067017A (en) * | 1997-01-30 | 1998-10-15 | 이형도 | Limiting current sensor for three-way catalyst degradation |
-
1983
- 1983-11-15 JP JP58214890A patent/JPS60107560A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60107560A (en) | 1985-06-13 |
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