JPH05104258A - Manufacture of platy diffusion joined member - Google Patents

Abstract

PURPOSE:To manufacture a play diffusion joined member and to easily remove a capsule after joining by interposing and holding a material to be treated with two sheets of metal foils coated with the specific mold release agent and evacuating the inner part of the capsule formed by sealing the edge parts of the metal foils. CONSTITUTION:The material 10 to be treated is interposed and held with two sheets of the metal foils 13, 13 coated with the mold release agent mixing colloidal silica or alumina sol with boron nitride and each end part of the metal foil 13 is welded under the condition of remaining only a part thereof to form the capsule 15. Successively, after the inner part of the capsule 15 is evacuated from the opening hole part 17 of the metal foil 13, the opening hole part 17 is welded to seal the capsule 15. Thereafter, this capsule 15 is set in an HIP apparatus, and pressurized with high pressure gas under high temp. diffusion-join the material 10 to be treated. After joining, the edge part of the capsule 15 is cut off and the metal foils 13, 13 of the capsule 15 is peeled to take out the diffusion-joined material 10'. Therefore, as the surface joining can be executed even to the complicate parts, this method is suitable to the manufacture of the parts needing the air-tightness.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to hot isostatic pressing (HI).
P) The present invention relates to a method for producing a plate-shaped diffusion bonding member by diffusion bonding by treatment.

[0002]

2. Description of the Related Art In recent years, when a plurality of members such as mechanical parts are surface-bonded, diffusion bonding by a hot isostatic pressing (HIP) method is performed. The HIP method is a method in which a uniform pressure is applied from all sides using a gas as a pressure medium while heating and raising the temperature. This method is excellent in industrial productivity such that a large number of members can be processed at once by using the HIP device. The diffusion bonding by HIP has an advantage that three-dimensional surfaces can be bonded and the bonding can be performed uniformly regardless of the size of the bonding area. On the other hand, when gas as a pressure medium enters the joint surface, not only high pressure is unlikely to act on the member to be joined (hereinafter referred to as the material to be treated), but if the joint surface is contaminated, there is a problem that the joint cannot be successfully joined ..

Therefore, in diffusion bonding by HIP, it is necessary to prevent gas from entering the surfaces to be bonded, and the entire material to be treated as shown in FIG. 6 is vacuum-encapsulated in a metal capsule. Encapsulation and HIP treatment method, FIG. 7
A method of HIPing after sealing the entire circumference of the joint surface by welding in advance as shown in FIG.

Here, in the method of FIG. 6, the material to be treated 1, 1 is sandwiched and fixed by the cores 2 and 2 (corresponding to (a) in the figure), and the capsule 3 and the deaeration pipe 4 are provided around the material. Is formed (corresponding to (b) and (c) in the figure), the air inside the capsule 3 is degassed from the degassing pipe 4 (corresponding to (d) in the figure), and then the degassing pipe 4 is The inside of the capsule 3 is vacuum welded by cutting and welding (corresponding to (e) in the figure), and this is subjected to HIP processing (corresponding to (f) in the figure). Further, in FIG. 7, the materials to be treated are indicated by 5 and 5, and the welded portion around the joint is indicated by 6. The processed material in the state of FIG.
When the P treatment is performed, the diffusion bonding member 7 (corresponding to (b) in the figure) is obtained.

[0005]

However, in the method shown in FIG. 6, since the material to be processed 1 is restrained by the core 2, the pressurizing state is uniform in the HIP processing ((f) in FIG. 6). However, the obtained joining member may be distorted. At this time, it is possible to pressurize uniformly by selecting the shape of the core 2, but it is not practical because it is necessary to prepare various cores. Further, even after the joining, it is very difficult to remove the cores 2 and 2 and the capsule 3.

In order to facilitate the work of removing the capsule,
It is conceivable to interpose a release material or a cushioning material between the inner surface of the capsule and the material to be treated. Ceramic fibers (silica, mullite,
Felt or paper made of alumina or the like is used, but when treated at a high temperature of 1100 ° C. or higher, the fibers themselves sinter and are bonded to the capsule or the material to be treated. On the other hand, boron nitride powder is also used as a release material,
Although it has excellent releasability even when used at high temperatures, it has a drawback that it does not easily adhere to an object. Also, FIG.
In the method shown in (1), the welded portion 6 of the material to be treated must be cut and removed after the joining, which is troublesome.

The present invention has been made in view of the above circumstances, and an object of the present invention is to manufacture a plate-shaped diffusion bonding member, which has been difficult to manufacture in the past, and to remove the capsule after bonding. An object of the present invention is to provide a method for manufacturing a plate-shaped diffusion bonding member that is easy to manufacture.

[0008]

A method for manufacturing a plate-shaped diffusion bonding member of the present invention is to sandwich a material to be treated with two metal foils coated with a release material in which boron nitride is mixed with colloidal silica or alumina sol, By vacuum degassing the inside of the capsule formed by sealing the edge of the metal foil, the material to be treated is sealed in the capsule, and then the entire capsule is subjected to hot isostatic pressing. After the materials to be treated are diffusion-bonded, the capsules are removed.

[0009]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a process diagram showing a method of manufacturing a diffusion bonding member, for example, a filter, in which a stainless steel net is sandwiched and bonded to two stainless window frame members as one embodiment of the present invention. FIG. 1A shows a material to be processed 10, which is composed of two window frame members 11 and 11 and a wire net 12. FIG. 1B shows two metal foils 13 and 13 for sandwiching the material 10 to be processed to form a capsule, and a release material is provided on the surface of each metal foil 13 that sandwiches the material 10 to be processed. Has been applied. 14
Is a coating film of the release material.

In the method shown in this embodiment, two metal foils 1 are used.
Molding material coating film 14 of 3 and 13 and window frame member 1 of material 10 to be processed
The material to be treated 10 is sandwiched so that the metal foil 1 and the metal foil 13 are in contact with each other, leaving only a part of each end of the metal foil 13.
The edges of 3 and 13 are welded to form a capsule 15 (FIG. 1 (c)). After vacuum degassing the inside of the capsule 15 from a portion which is not welded at the end of the metal foil 13, a so-called opening portion 17, the opening portion 17 is welded to form the capsule 1
5 is sealed (FIG. 1 (d)). Next, this capsule 15
Is set in a HIP device and pressurized with a high pressure gas at high temperature to diffusion-bond the material 10 to be processed (FIG. 1 (e)). After joining, the edges of the capsule 15 are cut off, the metal foils 13 and 13 of the capsule 15 are peeled off (FIG. 1 (f)), and the diffusion-bonded workpiece 10 'is taken out. Obtained joining member 1
0'is shown in FIG. 1 (g).

In the above method, the material of the metal foil 13 is
It is appropriately selected depending on the type of the material to be treated, the joining temperature, the availability, and the like. For example, stainless steel, aluminum, copper,
Tantalum or the like is used. Among these, stainless steel is particularly preferably used because it has excellent storage stability.

The thickness of the metal foil 13 depends on the size of the material to be treated,
Generally 30 to 300 μm, depending on the material of the foil, etc.
A degree is preferable. For example, for stainless steel foil, 1m
A foil having a thickness of 50 to 100 μm is preferably used for joining the materials to be processed having an angle of about m square. The thickness of the metal foil 13 is 2
The sheets may be the same or may have different thicknesses. In particular, if the material 10 to be processed is very thin and easily distorted, one of the two metal foils 13 may be thickened.

A release material is applied to the surface of the metal foil 13 between which the material to be treated is sandwiched. The release material used in the present invention is a mixture of boron nitride (BN) and colloidal silica or alumina sol, and an additive such as a surfactant may be added as appropriate. Colloidal silica or alumina sol means nanometer-order silica (SiO 2) in water.
₂ ) or alumina (Al ₂ O ₃ ) dispersed, and has properties like an adhesive. Generally, even if the ceramic powder is dispersed alone in water or an organic solvent, adhesiveness cannot be obtained. Further, even if the ceramic powder and the organic binder are mixed, there is a problem that the organic binder is thermally decomposed by the HIP treatment to reduce the adhesive force and carbon remains. However, the colloidal silica or alumina sol used in the present invention has a high percentage of water remaining even when heated to a high temperature, and in addition to being capable of holding the adhesive force up to a high temperature,
Only high-purity silica or alumina remains after heating. Compared to carbon, these compounds are less likely to react with boron nitride and the material to be treated, so the surface of the material to be treated is not contaminated, and since the silica particles or alumina particles are fine, the release agent coating film is smooth. Therefore, there is an advantage that the surface of the material to be processed is not roughened even when a high pressure is applied. In particular, the mixing ratio (weight ratio) of silica particles or alumina particles and boron nitride in the mold release material is BN / SiO ₂ or BN / A.
When l ₂ O ₃ is ½ to 1/1, the release agent coating film becomes very smooth, and the coating film surface may be glossy. This is because SiO ₂ or Al ₂ O ₃ becomes colloidal silica or alumina sol to improve the flowability of the release agent, and it becomes easy to obtain a smooth release agent coating film.

In the above mold release material, the mixing ratio (weight ratio) of boron nitride and colloidal silica or alumina sol is
Boron nitride is BN, silica component in colloidal silica is SiO ₂ , and alumina component in alumina sol is Al ₂ O _3.
As BN / SiO ₂ = 1/2 to 3/2 or BN / A
It is preferable that l ₂ O ₃ = 1/2 to 3/2. BN
When the content of BN / SiO ₂ or BN / Al ₂ O ₃ is less than 1/2, the content of the alumina component or the silica component in the release material becomes relatively large,
The mold release material itself is strongly sintered by the HIP process and is fixed to the material to be treated, so that it does not function as a mold release material.
This is particularly remarkable when the HIP processing temperature is 1000 ° C. or higher. On the other hand, when the value of BN / SiO ₂ or BN / Al ₂ O ₃ exceeds 3/2, the content of the alumina component or the silica component in the release material becomes relatively small, resulting in insufficient adhesion to the metal foil. Therefore, the release agent coated surface is easily peeled off.

In applying such a release material, it is preferable that the application surface of the metal foil is roughened beforehand with sandpaper or the like so that the release material is easily attached to the metal foil.
Further, it is preferable that the mold release material is applied to a portion in contact with the material to be treated and not applied to a portion to be welded to seal the capsule. Therefore, it is preferable to apply the release material to the portion to be welded with the masking tape or the like attached in advance. Since the release agent coating surface contains water and the like, it is preferable to further dry the release agent coating surface and heat it to about 300 ° C. The thickness of the coating film of the release material is 0.1
When it is desired to have a thickness of not less than mm, coating and drying may be repeated.

The method of sealing the edge of the metal foil in forming the capsule is not particularly limited, and may be, for example, YA.
It can be sealed by a conventionally known welding method such as G laser, electron beam, seam, and TIG.

In this embodiment, the edge portion of the foil 13 is sealed while leaving the opening portion 17 for vacuum deaeration, and after vacuum deaeration, the opening portion 17 is welded to form a sealed capsule. However, the present invention is not limited to this method. For example, after forming a sealed capsule, vacuum degassing and then resealing can be performed, and the order of sealing the capsule and vacuum degassing can be appropriately selected.

The operation pattern of temperature and pressure in the HIP process is not particularly limited, but a pressure-increasing precedent type operation of raising the temperature after applying a gas pressure of 10 kgf / cm ² or more is preferable. According to the pressure-increasing operation, even if the material to be treated or the mold release material contains a vaporized component, it is possible to prevent pressure generation inside the capsule due to the vaporized component, and thus expansion and breakage of the foil.

As a method for taking out the material to be treated after the HIP treatment, it is possible to take out by a suitable method such as cutting one edge of the metal foil with scissors and peeling the foil.

The manufacturing method of the present invention can be used to manufacture not only diffusion bonding of the same kind of metal as the material to be treated but also a bonding member in which two or more kinds of metal sheets are laminated in multiple layers. In FIG. 2, two types of metal sheets 20 and 21 are alternately stacked and joined. In the configuration shown in FIG. 2, not only the joining of metal sheets but also the joining of metal sheets and ceramic sheets is possible. In the case of joining the metal sheet and the ceramic sheet, the difference in the coefficient of thermal expansion between the two inhibits the joining. Therefore, an insert material may be interposed to alleviate this. Bimetal and the like can be easily manufactured by this method.

Further, according to the manufacturing method of the present invention, as shown in FIG. 3, a blade in which a high hardness and brittle ceramic material such as the cutting edge forming material 22 is sandwiched between steels 23, 24 and 25 and bonded is manufactured. You can also

Further, as shown in FIG. 4, the two ring-shaped members 26 and 27 are thin metal plates 28 having a thickness of about 0.1 mm.
Machine parts such as those joined together can also be manufactured. In FIG. 4, the joint surface is indicated by a broken line 29. In FIG.
A wire mesh may be used instead of the metal plate 28.

Furthermore, FIG. 5 shows two sheets of SUS304.
Metal fiber 3 shaped like a scissors between the nets 30 and 31 made of steel
It is a filter that sandwiches 2. In order to maintain air permeability in such a configuration, the HIP treatment condition is 100.
It is preferably 100 to 1000 kgf / cm ² at 0 ° C.

[Specific Example] Example 1; A window frame member made of SUS304 and a wire mesh were used as a material to be treated, and a weight ratio of BN / Al ₂ O ₃ was used as a release material.
= 3/2 mixture of boron nitride and alumina sol was used, and bonding was performed based on the method shown in FIG. 1 under the following bonding conditions. Metal foil made of SUS304 Temperature 1100 ° C. Pressure 1000 kgf / cm ² hours 1 hour The bonding state of the obtained diffusion bonding member was good and the capsules were easily removed.

Example 2 As a material to be treated, a SUS304 sheet (thickness 0.1 mm) and a copper sheet (thickness 0.
1 mm) and 20 sheets were laminated and joined together.
A diffusion bonding member as shown in was produced. BN / SiO ₂
The same procedure as in Example 1 was performed, except that the release agent of 1/1 was used and the joining temperature was changed to 850 ° C. The obtained diffusion-bonded member had a good bonding state, and the capsules were easily removed.

Example 3 A blade shown in FIG. 3 was manufactured by using a plate material of SUS304 and a cutting edge forming material of Y-PSZ (yttrium partially stabilized zirconia) as a material to be treated. The same procedure as in Example 1 was performed except that the joining temperature was changed to 1300 ° C. The obtained diffusion-bonded member had a good bonding state, and the capsules were easily removed.

Example 4 A diffusion bonding member shown in FIG. 4 was manufactured by using a ring member and a plate member made of SUS304 as a material to be treated. The same procedure as in Example 1 was carried out except that a mold release material of BN / Al ₂ O ₃ = 1/2 was used and the joining pressure was changed to 100 kgf / cm ² . The obtained diffusion-bonded member had a good bonding state, and the capsules were easily removed.

Example 5: A filter shown in FIG. 5 was manufactured using a wire mesh and a sponge made of SUS304 as the material to be treated. The same procedure as in Example 1 was carried out except that a mold releasing material of BN / SiO ₂ = 1/2 was used, the joining temperature was changed to 1000 ° C., and the pressure was changed to 100 kgf / cm ² . The obtained diffusion-bonded member had a good bonding state, and the capsules were easily removed.

Comparative Example 1 A diffusion bonding member was manufactured in the same manner as in Example 1 except that ceramic felt was used as a release material. When the diffusion bonding member was taken out from the capsule after bonding, the ceramic felt was fixed to the bonding member, and it was difficult to remove the foil.

Comparative Example 2; Mixing ratio of the release agent is BN /
A diffusion bonding member was manufactured in the same manner as in Example 1 except that Al ₂ O ₃ was changed to 1/3. The release material itself was sintered and adhered to the release wire on the wire mesh.

Comparative Example 3 A mold release material of BN / Al ₂ O ₃ = 2/1 was applied to a metal foil, and after drying, an attempt was made to weld the edges of the foil to form capsules. It has come off from the foil. Table 1 collectively shows the joining conditions and results in Examples 1 to 5 and Comparative Examples 1 to 3.

[0032]

[Table 1]

[0033]

As described above, according to the manufacturing method of the present invention, even complex parts, which have been difficult in the past, can be surface-bonded. Therefore, parts of vacuum equipment or filters, etc., which require airtightness, in particular. Is excellent in manufacturing. Moreover, since the manufacturing method of the present invention is diffusion bonded by the HIP method, the productivity of the diffusion bonding member is excellent by using the HIP device. Further, as a release material, the mixing ratio of boron nitride and colloidal silica or alumina sol is BN / Al ₂ O ₃ or BN.
If a release material having a ratio of / SiO ₂ of 1/2 to 3/2 is used, the work of applying it to the foil is simple, and the capsules can be easily removed after joining.

[Brief description of drawings]

FIG. 1 is a diagram showing steps of a method for manufacturing a diffusion bonding member according to an embodiment of the present invention.

FIG. 2 is an example of a diffusion bonding member manufactured by the manufacturing method of the present invention.

FIG. 3 is another embodiment of the diffusion bonding member manufactured by the manufacturing method of the present invention.

FIG. 4 is another embodiment of the diffusion bonding member manufactured by the manufacturing method of the present invention.

FIG. 5 is another embodiment of the diffusion bonding member manufactured by the manufacturing method of the present invention.

FIG. 6 is a diagram showing steps of a conventional method for manufacturing a diffusion member.

FIG. 7 is a diagram showing steps of a conventional method for manufacturing a diffusion member.

[Explanation of symbols]

 10 Processing Material 10 'Diffusion Bonding Member 11 Window Frame Member 12 Wire Mesh 13 Metal Foil 14 Coating Film of Release Material 15 Capsule 16 Welding Part

Claims (2)

[Claims] 1. An inside of a capsule formed by sandwiching a material to be treated with two metal foils obtained by applying a release material in which boron nitride is mixed with colloidal silica or alumina sol and sealing the edge of the metal foil. Vacuum degassing to seal the material to be treated in the capsule, and then subject the entire capsule to hot isostatic pressing to diffuse-bond the material to be treated, and then remove the capsule. A method for manufacturing a plate-shaped diffusion bonding member, comprising: 2. A mold release material having a content weight ratio of boron nitride / silica = 1/2 to 3/2 or boron nitride / alumina = 1/2 to 3/2 is used as the mold release material. The method for manufacturing a plate-shaped diffusion bonding member according to claim 1.