JPH05104403A - Rotary shaft displacement detector - Google Patents
Rotary shaft displacement detectorInfo
- Publication number
- JPH05104403A JPH05104403A JP27142991A JP27142991A JPH05104403A JP H05104403 A JPH05104403 A JP H05104403A JP 27142991 A JP27142991 A JP 27142991A JP 27142991 A JP27142991 A JP 27142991A JP H05104403 A JPH05104403 A JP H05104403A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- rotary shaft
- shaft
- grating
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Machine Tool Sensing Apparatuses (AREA)
Abstract
(57)【要約】
【目的】 回転軸の軸方向の変位、変形を検出すること
を目的とする。
【構成】 回転軸１にこの回転軸１の回転方向に沿って
磁極Ｎ又はＳを着磁すると共にこの回転軸１の軸方向に
沿って磁気格子を形成した回転磁気格子２を設け、この
回転軸格子２の表面の曲率に倣った検出面を有する磁束
応答型ヘッド３ａ，３ｂを配し、この磁束応答型ヘッド
３ａ，３ｂの出力信号により回転軸１の軸方向の変位変
形を知るようにしたものである。
(57) [Abstract] [Purpose] The purpose is to detect axial displacement and deformation of the rotating shaft. A rotary magnetic grating 2 is provided on a rotary shaft 1, which is magnetized with a magnetic pole N or S along the rotational direction of the rotary shaft 1, and forms a magnetic grid along the axial direction of the rotary shaft 1. The magnetic flux response type heads 3a and 3b having detection surfaces that follow the curvature of the surface of the shaft grating 2 are arranged, and the displacement signal in the axial direction of the rotary shaft 1 is known from the output signals of the magnetic flux response type heads 3a and 3b. It was done.
Description
【０００１】[0001]
【産業上の利用分野】本発明は例えば工作機械のスピン
ドル軸に適用して好適な回転軸の変位検出装置に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a displacement detecting device for a rotary shaft which is suitable for application to, for example, a spindle shaft of a machine tool.
【０００２】[0002]
【従来の技術及び発明が解決しようとする課題】一般に
工作機械等においてはテーブル及びツール（刃物）の位
置を検出して、種々の制御に使用されているが、その先
端にツール（刃物）が装着されたスピンドル軸の軸方向
の変位、変形は検出していなかった。2. Description of the Related Art Generally, in machine tools and the like, the positions of a table and a tool (cutting tool) are detected and used for various controls. No axial displacement or deformation of the mounted spindle shaft was detected.
【０００３】然しながら、このツールが先端に装着され
たスピンドル軸においても熱の影響を受けて、このスピ
ンドル軸の軸方向の伸縮が生じている。この先端にツー
ルを装着したスピンドル軸が伸縮したときには正確な加
工量を確保できない不都合があった。本発明は斯る点に
鑑み上述の如きスピンドル軸等の回転軸の変位、変形を
検出することを目的とする。However, the spindle shaft having the tool attached to the tip thereof is also affected by heat, and the spindle shaft expands and contracts in the axial direction. When the spindle shaft with the tool attached to this tip expands and contracts, there is a disadvantage that an accurate machining amount cannot be secured. In view of this point, the present invention has an object to detect the displacement and deformation of the rotary shaft such as the spindle shaft as described above.
【０００４】[0004]
【課題を解決するための手段】本発明回転軸の変位検出
装置は例えば図１に示す如く、回転軸１にこの回転軸１
の回転方向に沿って磁極Ｎ又はＳを形成すると共にこの
回転軸１の軸方向に沿って磁気格子を形成した回転磁気
格子２を設け、この回転磁気格子２に対応して、この回
転磁気格子２の面の曲率に倣った検出面を有する検出ヘ
ッド３を配し、この検出ヘッド３の出力信号により、こ
の回転軸１の変位、変形を知るようにしたものである。DISCLOSURE OF THE INVENTION A displacement detecting device for a rotary shaft according to the present invention has, for example, as shown in FIG.
Is provided with a magnetic pole N or S along the rotational direction of 1 and a magnetic grid 2 is formed along the axial direction of the rotary shaft 1. The rotary magnetic grating 2 is provided corresponding to the rotary magnetic grating 2. The detection head 3 having a detection surface that follows the curvature of the surface 2 is arranged, and the displacement and deformation of the rotary shaft 1 can be known from the output signal of the detection head 3.
【０００５】[0005]
【作用】本発明に依れば回転軸１に回転磁気格子２を設
けると共にこの回転磁気格子２に対応してこの回転磁気
格子２の面の曲率に倣った検出面を有する検出ヘッド３
を配したので、この回転軸１が軸方向に変位、変形した
ときに、この検出ヘッド３の出力側に変位信号が得ら
れ、この軸方向の変位、変形を知ることができる。According to the present invention, the rotating magnetic grating 2 is provided on the rotating shaft 1, and the detecting head 3 having the detecting surface corresponding to the rotating magnetic grating 2 and having the curvature of the surface of the rotating magnetic grating 2.
Since the rotary shaft 1 is displaced and deformed in the axial direction, a displacement signal is obtained at the output side of the detection head 3 and the displacement and deformation in the axial direction can be known.
【０００６】[0006]
【実施例】以下図面を参照しながら本発明回転軸の変位
検出装置の一実施例につき説明しよう。図１において、
１は工作機械のスピンドル軸の如き回転軸を示し、この
回転軸１の先端には例えばツール（刃物）を装着する如
くする。この回転軸１にこの回転軸１の回転方向に沿っ
て磁極Ｎ又はＳを着磁すると共に、この回転軸１の軸方
向に沿って磁気格子を形成した回転磁気格子２を設け
る。この回転磁気格子２の波長λとしては例えば２００
μｍとする。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the rotary shaft displacement detecting device of the present invention will be described below with reference to the drawings. In FIG.
Reference numeral 1 denotes a rotating shaft such as a spindle shaft of a machine tool, and a tool (blade) is attached to the tip of the rotating shaft 1, for example. A magnetic pole N or S is magnetized along the rotating direction of the rotating shaft 1 and a rotating magnetic grid 2 having a magnetic grid formed along the axial direction of the rotating shaft 1 is provided on the rotating shaft 1. The wavelength λ of the rotating magnetic grating 2 is, for example, 200
μm.
【０００７】この場合この回転磁気格子２を面内磁化に
より形成するときは、この回転軸１が非磁性体ならばそ
の軸の表面に磁気記録媒体を形成し、この回転軸１が磁
性体ならばその軸の表面に非磁性層を被着し、その表面
に磁気記録媒体を形成し、この磁気記録媒体に回転磁気
格子２を形成する。またこの回転磁気格子２を垂直磁化
により形成するときは、この回転軸１を磁性体とし、こ
の回転軸１の表面に磁気記録媒体を形成し、この磁気記
録媒体に垂直磁化し上述回転磁気格子２を形成する。In this case, when the rotating magnetic grating 2 is formed by in-plane magnetization, if the rotating shaft 1 is a non-magnetic substance, a magnetic recording medium is formed on the surface of the rotating shaft 1. If the rotating shaft 1 is a magnetic substance, the magnetic recording medium is formed. For example, a non-magnetic layer is deposited on the surface of the shaft, a magnetic recording medium is formed on the surface, and the rotating magnetic grating 2 is formed on this magnetic recording medium. When the rotating magnetic grating 2 is formed by perpendicular magnetization, the rotating shaft 1 is made of a magnetic material, a magnetic recording medium is formed on the surface of the rotating shaft 1, and the rotating magnetic grating is perpendicularly magnetized to the rotating magnetic grating. Form 2.
【０００８】この回転磁気格子２に対応して、２個の磁
束応答型ヘッド３ａ，３ｂ配設固定する。この磁束応答
型ヘッド３ａ，３ｂの検出面をこの回転磁気格子２の表
面の曲率に倣った面とし、検出感度を向上する如くす
る。Corresponding to the rotating magnetic grating 2, two magnetic flux response type heads 3a and 3b are arranged and fixed. The detection surfaces of the magnetic flux response type heads 3a and 3b are made to follow the curvature of the surface of the rotating magnetic grating 2 to improve the detection sensitivity.
【０００９】この場合、この２個の磁束応答型ヘッド３
ａ，３ｂを図２に示す如く（ｎ±１／４）λの間隔を保
って配設する（ここで、ｎ＝０，１，２，‥‥‥の整数
であり、λは回転磁気格子２の磁気格子の波長であ
る。）。この磁束応答型ヘッド３ａ，３ｂは夫々励磁巻
線４ａ，４ｂと、信号巻線５ａ，５ｂとが可飽和コア部
６ａ，６ｂに巻回された構成となっている。そしてこの
磁束応答型ヘッド３ａ，３ｂの各励磁巻線４ａ，４ｂに
は夫々励磁信号入力端子７ａ，７ｂより所定の励磁信号
が供給され、またこの信号巻線５ａ，５ｂよりの出力信
号を混合回路８及びバンドパスフィルタ９を介して出力
端子１０に得るようにしている。In this case, the two magnetic flux response type heads 3
As shown in FIG. 2, a and 3b are arranged at intervals of (n ± 1/4) λ (where n is an integer of 0, 1, 2, ... 2 is the wavelength of the magnetic grating.). The magnetic flux response type heads 3a and 3b have a structure in which exciting windings 4a and 4b and signal windings 5a and 5b are wound around saturable core portions 6a and 6b, respectively. A predetermined excitation signal is supplied from the excitation signal input terminals 7a and 7b to the respective excitation windings 4a and 4b of the magnetic flux response type heads 3a and 3b, and the output signals from the signal windings 5a and 5b are mixed. The output terminal 10 is obtained through the circuit 8 and the bandpass filter 9.
【００１０】このような図２の構成において、一方の磁
束応答型ヘッド３ａの励磁巻線４ａに数１に示す如き第
１の励磁信号ｉｅ1 を供給すると共に他方の磁束応答型
ヘッド３ｂの励磁巻線４ｂに数２に示す如き第２の励磁
信号ｉｅ2 を供給する。In such a configuration of FIG. 2, the first magnetic flux response type head 3a is supplied with the first excitation signal ie 1 as shown in the equation 1 to the excitation winding 4a and the other magnetic flux response type head 3b is excited. A second excitation signal ie 2 as shown in equation 2 is supplied to the winding 4b.
【００１１】[0011]
【数１】 [Equation 1]
【数２】 [Equation 2]
【００１２】ここでＩｅ1 は定数、Ｗｃは角周波数、ｔ
は時間、π／４は移相量である。このように第１及び第
２の励磁信号ｉｅ1 及びｉｅ2 が各励磁巻線４ａ，４ｂ
に供給されると、この磁気応答型ヘッド３ａ，３ｂの信
号巻線５ａ，５ｂには、この磁束応答型ヘッド３ａ，３
ｂに対し、回転磁気格子２が軸方向に移動した変位量ｘ
に応じて各励磁信号が平衡変調された各変調信号が得ら
れ、この各変調信号を混合回路８を介して混合してバン
ドパスフィルタ９に供給する。このバンドパスフィルタ
９はこの混合回路８よりの出力信号の第２高調波のみを
通過させる如く構成されており、この出力端子１０には
数３で示す如き変位量ｘに応じた位相量を有し、かつ励
磁信号の角周波数の２倍の角周波数、即ち角周波数Ｗc
を有する位相変調信号ｅO が得られ、これにより変位量
ｘを知ることができる。Where Ie 1 is a constant, Wc is an angular frequency, t
Is time and π / 4 is the amount of phase shift. In this way, the first and second excitation signals ie 1 and ie 2 are transmitted to the respective excitation windings 4a and 4b.
Is supplied to the signal windings 5a and 5b of the magnetic response type heads 3a and 3b.
displacement amount x that the rotating magnetic grating 2 has moved in the axial direction with respect to b
In accordance with the above, each excitation signal is balanced-modulated to obtain each modulation signal, and each modulation signal is mixed through the mixing circuit 8 and supplied to the bandpass filter 9. The bandpass filter 9 is configured to pass only the second harmonic of the output signal from the mixing circuit 8, and the output terminal 10 has a phase amount according to the displacement amount x as shown in the equation 3. And an angular frequency twice the angular frequency of the excitation signal, that is, the angular frequency Wc
The phase modulation signal e O is obtained having, you can know this by displacement x.
【００１３】[0013]
【数３】 [Equation 3]
【００１４】ここでＥO は定数である。Here, E O is a constant.
【００１５】本例は上述の如く回転軸１に回転磁気格子
２を設けると共にこの回転磁気格子２の表面の曲率に倣
った検出面を有する磁束応答型ヘッド３ａ，３ｂを配設
固定したので、この回転軸１が軸方向に変位変形したと
きに、この磁束応答型ヘッド３ａ，３ｂの出力側に変位
量ｘに応じた位相変調信号が得られ、この軸方向の変
位、変形を知ることができる。In this embodiment, the rotary magnetic grid 2 is provided on the rotary shaft 1 as described above, and the magnetic flux responsive heads 3a and 3b having the detection surface following the curvature of the surface of the rotary magnetic grid 2 are arranged and fixed. When the rotary shaft 1 is displaced and deformed in the axial direction, a phase modulation signal corresponding to the displacement amount x is obtained on the output side of the magnetic flux response heads 3a and 3b, and the displacement and deformation in the axial direction can be known. it can.
【００１６】従ってこの変位量ｘに応じて例えばスピン
ドル軸の先端に装着したツールの位置を制御するように
すれば、スピンドル軸が熱等により伸縮しても正確な加
工量を確保できる利益がある。また図３は本発明の他の
実施例を示す。この図３例につき説明するに、この図３
において図１に対応する部分には同一符号を付しその詳
細説明は省略する。この図３例は回転軸１と別体に回転
軸１の回転方向に沿って磁極Ｎ又はＳを着磁すると共に
この軸方向に沿って磁気格子を形成した回転磁気格子２
を設け、この回転磁気格子２を回転軸１と係合するよう
にしたものである。その他は図１と同様に構成する。Therefore, if the position of the tool mounted on the tip of the spindle shaft is controlled according to the displacement x, there is an advantage that an accurate machining amount can be secured even if the spindle shaft expands and contracts due to heat or the like. . FIG. 3 shows another embodiment of the present invention. This example of FIG. 3 will be described.
In FIG. 1, parts corresponding to those in FIG. 1 are designated by the same reference numerals and detailed description thereof will be omitted. In the example of FIG. 3, a rotating magnetic grating 2 is provided separately from the rotating shaft 1 in which a magnetic pole N or S is magnetized along the rotating direction of the rotating shaft 1 and a magnetic grating is formed along this axial direction.
Is provided, and the rotating magnetic grating 2 is engaged with the rotating shaft 1. Others are the same as those in FIG.
【００１７】この図３例においても図１例同様の作用効
果が得られることは容易に理解できよう。尚上述実施例
においては、検出ヘッドとして磁束応答型ヘッド３ａ，
３ｂを用いたがこの代わりに磁気抵抗効果素子等が使用
できることは勿論である。また、本発明は上述実施例に
限ることなく本発明の要旨を逸脱することなくその他種
々の構成が採り得ることは勿論である。It can be easily understood that the same effects as in the example of FIG. 1 can be obtained in the example of FIG. Incidentally, in the above-mentioned embodiment, the magnetic flux response type head 3a,
Although 3b is used, it goes without saying that a magnetoresistive effect element or the like can be used instead. Further, the present invention is not limited to the above-described embodiments, and it goes without saying that various other configurations can be adopted without departing from the gist of the present invention.
【００１８】[0018]
【発明の効果】本発明に依ればスピンドル軸等の回転軸
の軸方向の変位、変形を検出することができる。According to the present invention, axial displacement and deformation of a rotary shaft such as a spindle shaft can be detected.
【図１】本発明回転軸の変位検出装置の一実施例を示す
斜視図である。FIG. 1 is a perspective view showing an embodiment of a displacement detecting device for a rotating shaft of the present invention.
【図２】本発明の説明に供する構成図である。FIG. 2 is a configuration diagram for explaining the present invention.
【図３】本発明の他の実施例を示す分解斜視図である。FIG. 3 is an exploded perspective view showing another embodiment of the present invention.
１ 回転軸 ２ 回転磁気格子 ３ａ，３ｂ 磁束応答型ヘッド 1 rotating shaft 2 rotating magnetic grating 3a, 3b magnetic flux response type head
Claims (1)
極を形成すると共に上記回転軸の軸方向に沿って磁気格
子を形成した回転磁気格子を設け、 該回転磁気格子に対応してこの回転磁気格子の面の曲率
に倣った検出面を有する検出ヘッドを配し、 該検出ヘッドの出力信号により上記回転軸の変位、変形
を知るようにしたことを特徴とする回転軸の変位検出装
置。1. A rotary magnetic grating is provided on a rotary shaft, wherein a magnetic pole is formed along a rotational direction of the rotary shaft, and a magnetic grid is formed along an axial direction of the rotary shaft. Displacement detection of the rotating shaft characterized in that a detecting head having a detecting surface following the curvature of the surface of the rotating magnetic grating is arranged, and the displacement and deformation of the rotating shaft are known from the output signal of the detecting head. apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27142991A JPH05104403A (en) | 1991-10-18 | 1991-10-18 | Rotary shaft displacement detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27142991A JPH05104403A (en) | 1991-10-18 | 1991-10-18 | Rotary shaft displacement detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05104403A true JPH05104403A (en) | 1993-04-27 |
Family
ID=17499913
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27142991A Pending JPH05104403A (en) | 1991-10-18 | 1991-10-18 | Rotary shaft displacement detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05104403A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108061510A (en) * | 2017-12-06 | 2018-05-22 | 扬州维森视觉技术有限公司 | A kind of flexibility is without matrix circular section magnetic railings ruler and application thereof and application method |
-
1991
- 1991-10-18 JP JP27142991A patent/JPH05104403A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108061510A (en) * | 2017-12-06 | 2018-05-22 | 扬州维森视觉技术有限公司 | A kind of flexibility is without matrix circular section magnetic railings ruler and application thereof and application method |
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