JPH05106971A - Hot isotropic pressurization device - Google Patents
Hot isotropic pressurization deviceInfo
- Publication number
- JPH05106971A JPH05106971A JP3267846A JP26784691A JPH05106971A JP H05106971 A JPH05106971 A JP H05106971A JP 3267846 A JP3267846 A JP 3267846A JP 26784691 A JP26784691 A JP 26784691A JP H05106971 A JPH05106971 A JP H05106971A
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- plate
- high temperature
- furnace chamber
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims abstract description 89
- 238000001513 hot isostatic pressing Methods 0.000 claims description 7
- 230000005611 electricity Effects 0.000 claims description 2
- 238000009413 insulation Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 8
- 230000001590 oxidative effect Effects 0.000 description 5
- 230000008646 thermal stress Effects 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229910002060 Fe-Cr-Al alloy Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B11/00—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses
- B30B11/001—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses using a flexible element, e.g. diaphragm, urged by fluid pressure; Isostatic presses
- B30B11/002—Isostatic press chambers; Press stands therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/002—Component parts of these vessels not mentioned in B01J3/004, B01J3/006, B01J3/02 - B01J3/08; Measures taken in conjunction with the process to be carried out, e.g. safety measures
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Powder Metallurgy (AREA)
- Press Drives And Press Lines (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、熱間等方圧加圧装置に
係り、主として高温の酸化性雰囲気下で例えばＹ
2 Ｏ3 、Ｈ5 Ｏ2 のような酸化物系セラミックスの被処
理物を等方圧加圧するのに利用される。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hot isostatic pressing device, which is mainly used in a high temperature oxidizing atmosphere such as Y
It is used to apply isotropic pressure to an object to be treated of oxide-based ceramics such as 2 O 3 and H 5 O 2 .
【０００２】[0002]
【従来の技術】高温酸化性雰囲気下で使用する熱間等方
圧加圧装置として、特開昭63−23732号公報および特開
平２−126093号公報の技術が公知であり、当該加圧装置
における加熱装置は低温で電気抵抗が大きな高温用発熱
体とこれを予熱するための予熱発熱体とを組合せたもの
とされている。2. Description of the Related Art As a hot isostatic pressing device used in a high temperature oxidizing atmosphere, the techniques disclosed in JP-A-63-23732 and JP-A-2-126093 are known. The heating device in (1) is a combination of a high temperature heating element having a large electric resistance at a low temperature and a preheating heating element for preheating the heating element.
【０００３】ここで、高温用発熱体の材質としてはＺｒ
Ｏ2 を主成分とするもの、また予熱発熱体の材質として
はＰｔ／Ｒｈ、Ｐｔ、Ｆｅ−Ｃｒ−Ａｌ系のものが適用
され、この場合、高温用発熱体の形状は、特開平２−12
6093号公報で開示されているように円筒形状のものであ
った。Here, as the material of the high temperature heating element, Zr is used.
A material containing O 2 as a main component and Pt / Rh, Pt, or Fe—Cr—Al-based material as the material of the preheating heating element are applied. In this case, the shape of the heating element for high temperature is disclosed in 12
It had a cylindrical shape as disclosed in Japanese Patent No. 6093.
【０００４】[0004]
【発明が解決しようとする課題】加熱装置を大型化しよ
うとする場合、従来の円筒形状の高温用発熱体では、円
筒形状を大きくすると必然的に肉厚が厚くなって内外に
生ずる温度差に基づく熱応力によって損傷し易いという
課題があった。また、前記損傷が部分的に発生した場合
であっても高温用発熱体の全体を交換しなければなら
ず、これではコスト的に高くなるという課題があった。In order to increase the size of the heating device, in the conventional cylindrical high-temperature heating element, if the cylindrical shape is made large, the wall thickness inevitably increases and the temperature difference between the inside and the outside occurs. However, there is a problem that it is easily damaged by thermal stress due to the heat. Further, even if the damage is partially generated, the entire high temperature heating element has to be replaced, which causes a problem of cost increase.
【０００５】本発明は、叙述の課題に鑑み、高温用発熱
体を大型化しても内外に生ずる温度差に基づく熱応力に
よっての損傷をなくし、しかも、部分的交換をもできる
ようにしたことを目的とするものである。In view of the above-mentioned problems, the present invention eliminates the damage due to thermal stress due to the temperature difference between the inside and the outside even when the heating element for high temperature is made large, and is capable of partial replacement. It is intended.
【０００６】[0006]
【課題を解決するための手段】本発明は、高圧容器1 内
に倒立コップ形状の断熱層5 が設けられ、該断熱層5の
内側における炉室6 に低温で電気抵抗の大きな高温用発
熱体8 と該高温用発熱体8 を予熱するための予熱発熱体
9 とが設けられ、被処理物を高温高圧下で熱間等方圧加
圧する装置において、前述の目的を達成するために、次
の技術的手段を講じている。According to the present invention, an inverted cup-shaped heat-insulating layer 5 is provided in a high-pressure vessel 1, and a furnace chamber 6 inside the heat-insulating layer 5 has a low temperature and a large electric resistance for high temperature. 8 and a heating element for preheating the high temperature heating element 8
In order to achieve the above-mentioned object, the following technical means is taken in the device which is provided with 9 and in which the object to be processed is hot isostatically pressed at high temperature and high pressure.
【０００７】すなわち、請求項１に係る本発明は、前記
高温用発熱体8 は、下方が開放されて上方が閉塞された
少なくとも一つのスリット部15を有する板状発熱体16
を、前記炉室6 の周上に複数個配置して通電可能とされ
ており、前記炉室6 に備えた被処理物の支持台14上面よ
り下方において前記板状発熱体16を電気絶縁状態で保持
する保持部材13が備えられていることを特徴とするもの
である。That is, according to the first aspect of the present invention, the high-temperature heating element 8 has a plate-shaped heating element 16 having at least one slit portion 15 whose lower portion is open and whose upper portion is closed.
Are arranged on the circumference of the furnace chamber 6 so that they can be energized, and the plate-shaped heating element 16 is in an electrically insulated state below the upper surface of the support base 14 of the object to be processed provided in the furnace chamber 6. It is characterized in that it is provided with a holding member 13 for holding.
【０００８】また、請求項２に係る本発明は、請求項１
の板状発熱体16におけるスリット部15の閉塞された部分
に上部が係合され、かつ下部が請求項１の保持部材13に
電気絶縁状態に保持された支持部材19が備えられている
ことを特徴とするものである。更に、請求項３に係る本
発明は、板状発熱体16を炉室6 の半径方向に２層以上配
置し、かつ内外の板状発熱体16を独立に電気制御する制
御部が備えられていることを特徴とするものである。The present invention according to claim 2 provides the invention according to claim 1.
The upper portion is engaged with the closed portion of the slit portion 15 of the plate-shaped heat generating element 16 and the lower portion is provided with the support member 19 held in an electrically insulated state by the holding member 13 of claim 1. It is a feature. Furthermore, the present invention according to claim 3 is provided with a control section in which two or more plate heating elements 16 are arranged in the radial direction of the furnace chamber 6 and the plate heating elements 16 inside and outside are independently electrically controlled. It is characterized by being present.
【０００９】[0009]
【作用】請求項１に係る本発明では、倒立コップ形状の
断熱層5 内における炉室6 の支持台14上に被処理物を載
置した状態で予熱発熱体9を通電して、高温用発熱体8を
通電可能な温度まで予熱する。この場合、予熱発熱体9
は高温用発熱体8 より下方に備えることにより、対流利
用による加熱となり、予熱効率がよくなるとともに、断
熱層5 で取囲まれていることから、断熱性が向上する。According to the first aspect of the present invention, the preheating heating element 9 is energized while the object to be treated is placed on the support base 14 of the furnace chamber 6 in the heat insulating layer 5 having an inverted cup shape for high temperature use. The heating element 8 is preheated to a temperature at which electricity can be applied. In this case, the preheating heating element 9
By being provided below the high-temperature heating element 8, heating is performed by convection, the preheating efficiency is improved, and the heat insulating layer 5 is surrounded, so that the heat insulating property is improved.
【００１０】高温用発熱体8 に通電可能な温度まで予熱
してから、該発熱体8 に通電し、被処理物に酸化雰囲気
下で等方向性の高圧を作用させるとともに処理温度まで
加熱して加圧加熱処理する。この場合、高温用発熱体8
は、下方が開放されて上方が閉塞されたスリット部15を
有する板状発熱体16を、炉室6 の周上に複数個配置した
ものであるから、大型化しても内外の温度差は少なく、
熱応力によって損傷するおそれもなく耐久性を向上す
る。After preheating to a temperature at which the heating element 8 for high temperature can be energized, the heating element 8 is energized to apply an isotropic high pressure to the object to be processed in an oxidizing atmosphere and heat it to the processing temperature. Pressure heat treatment. In this case, the high temperature heating element 8
Since a plurality of plate-shaped heating elements 16 each having a slit portion 15 whose lower portion is opened and whose upper portion is closed are arranged on the circumference of the furnace chamber 6, the temperature difference between the inside and outside is small even if the size is increased. ,
Improves durability without fear of damage due to thermal stress.
【００１１】また、板状発熱体16は、その下部が保持部
材13により電気絶縁状態で保持されて自立性を確保して
安定な通電が可能となる。更に、板状発熱体16が万一損
傷したりしたときは、個々に交換することができる。請
求項２に係る本発明では、前述の作用に加えて板状発熱
体16の上部を支持部材19で保持し、これによって、板状
発熱体16は上部と下部を保持したこととなり、剛性が向
上して増々大型時の構造の安定化に寄与する。Further, the lower portion of the plate-shaped heating element 16 is held in an electrically insulated state by the holding member 13, so that the plate-shaped heating element 16 can maintain its self-sustaining property and can be stably energized. Furthermore, if the plate heating element 16 is damaged, it can be replaced individually. In the present invention according to claim 2, in addition to the above-described action, the upper portion of the plate-shaped heating element 16 is held by the support member 19, whereby the plate-shaped heating element 16 holds the upper portion and the lower portion, and the rigidity is increased. It contributes to the stabilization of the structure when it is larger and larger.
【００１２】請求項３に係る本発明は、板状発熱体16を
炉室6 の内外で２重に備え、独立して電力制御すること
により、均熱性が良好でかつより一層の大型化を約束す
る。According to the third aspect of the present invention, the plate-shaped heating elements 16 are provided in double inside and outside of the furnace chamber 6 and the electric power is controlled independently, so that the soaking property is good and the size is further increased. promise.
【００１３】[0013]
【実施例】以下、図を参照して本発明の実施例を説明す
る。図１において、円筒形状とされた高圧容器1 の上下
開口部には上蓋2 および下蓋3 が嵌挿され、シール部材
2A,3A によってシールされることにより高圧室4 が画成
されている。Embodiments of the present invention will be described below with reference to the drawings. In FIG. 1, an upper lid 2 and a lower lid 3 are fitted and inserted into the upper and lower openings of a cylindrical high-pressure container 1, and a sealing member
The high pressure chamber 4 is defined by being sealed by 2A and 3A.
【００１４】なお、上下蓋2,3 に作用するプレス軸力
は、図示していない旋回型若しくは走行台車型のプレス
フレームによって支持されるとともに、高圧室4 中には
倒立コップ形状の断熱層5 が配置されて、該断熱層5 の
内側の炉室6 には加熱装置7 が設置されている。加熱装
置7 は、低温で電気抵抗の大きな高温用発熱体8 と該高
温用発熱体8 を予熱するための予熱発熱体9 とで主構成
されていて、高温用発熱体8 の下方に予熱発熱体9 が備
えられている。The pressing axial force acting on the upper and lower lids 2 and 3 is supported by a swivel type or traveling dolly type press frame (not shown), and the high pressure chamber 4 has an inverted cup-shaped heat insulating layer 5 therein. And a heating device 7 is installed in the furnace chamber 6 inside the heat insulating layer 5. The heating device 7 is mainly composed of a high temperature heating element 8 having a low electric resistance at a low temperature and a preheating heating element 9 for preheating the high temperature heating element 8. Body 9 is equipped.
【００１５】すなわち、下蓋3 上に支持台10が設置さ
れ、この支持台10上に、予熱発熱体9のための円筒形状
とされた第１保持部材11が設置され、この第１保持部材
11の外周に形成したラセン溝に予熱発熱体9 がラセン状
に巻かれている。なお、高温酸化性雰囲気下で用いる予
熱発熱体9 としては、Ｐｔ／Ｒｈ、Ｐｔ、Ｆｅ−Ｃｒ−
Ａｌなどを適用でき、また、第１保持部材11の材質とし
ては、Ａｌ2 Ｏ3 などが好適である。That is, the support base 10 is installed on the lower lid 3, and the cylindrical first holding member 11 for the preheating heating element 9 is installed on the support base 10.
A preheating heating element 9 is spirally wound in a spiral groove formed on the outer periphery of 11. As the preheating heating element 9 used in a high temperature oxidizing atmosphere, Pt / Rh, Pt, Fe-Cr-
Al or the like can be applied, and Al 2 O 3 or the like is suitable as the material of the first holding member 11.
【００１６】第１保持部材11上にはスペーサ12を介して
高温用発熱体8 の下部を電気絶縁状態で保持する第２保
持部材13および被処理物の支持台14が設置されている。
第２保持部材13には、図２および図３で示す如く上下方
向に貫通された保持孔13A が円周上に複数個形成してあ
り、この保持孔13A に高温用発熱体8 の下部が挿通され
かつ下端をスペーサ12に当接することで支持台14の上面
より下方において自立状に保持されている。A second holding member 13 for holding the lower portion of the high temperature heating element 8 in an electrically insulated state and a support base 14 for the object to be treated are installed on the first holding member 11 via a spacer 12.
As shown in FIGS. 2 and 3, the second holding member 13 is formed with a plurality of holding holes 13A penetrating in the vertical direction on the circumference, and the lower part of the high temperature heating element 8 is formed in the holding holes 13A. By being inserted and the lower end abutting on the spacer 12, it is held in a self-supporting state below the upper surface of the support base 14.
【００１７】高温用発熱体8 は、図２の展開立面で示す
如く、下方が開放されて上方が閉塞された少なくとも一
つのスリット部15を有する板状発熱体16によって構成さ
れており、スリット部15を長円鍵孔状に形成することに
より、細幅部16A と広幅部16B とされ、細幅部16A で主
たる発熱がなされ、広幅部16B で周方向で隣り合う板状
発熱体16を端子17で接続するとともに、通電端子18を接
続して電力供給が可能とされている。The high-temperature heating element 8 is constituted by a plate-shaped heating element 16 having at least one slit portion 15 whose lower portion is open and whose upper portion is closed, as shown in the development elevation of FIG. By forming the portion 15 in the shape of an oval keyhole, the narrow portion 16A and the wide portion 16B are formed, and the narrow portion 16A mainly generates heat, and the wide portion 16B forms the plate-shaped heating elements 16 adjacent in the circumferential direction. It is possible to supply power by connecting the terminal 17 and the energizing terminal 18.
【００１８】なお、板状発熱体16としては、ＺｒＯ2 が
好ましい材質として推奨でき、また、第２保持部材13と
しては耐酸化性を有しかつ高温用発熱体8 よりは電気抵
抗の大きなものであればよく、例えば、Ａｌ2 Ｏ3 等が
材質として適用可能である。板状発熱体16はその広幅部
16B を保持孔13A に挿入することで支持台14の上面より
下方のやや低温の部分で自立状に保持されるが、該板状
発熱体16の上部をも中継保持することによって高温下で
の強度を高くできる。It should be noted that ZrO 2 can be recommended as a preferable material for the plate-shaped heating element 16, and that the second holding member 13 has oxidation resistance and has a larger electric resistance than the high-temperature heating element 8. However, Al 2 O 3 or the like can be applied as the material. The plate-shaped heating element 16 has a wide portion.
By inserting 16B into the holding hole 13A, it is held in a self-supporting state at a slightly lower temperature portion below the upper surface of the support base 14, but by relaying the upper portion of the plate-shaped heating element 16 as well, it can be kept at high temperature. Strength can be increased.
【００１９】すなわち、板状発熱体16の閉塞部分に係合
する溝部19A を有する細幅棒状の支持部材19をスリット
部15に相対して設け、該支持部材19の下端を保持孔13A
に挿通支持して高温下での強度を高くしている。この場
合、支持部材19は、電気絶縁性の保持部材13に立設され
るものであるから、高温用発熱体8 と同材質のものを適
用でき、従って、高温下での強度も高くなり、更に、板
状発熱体16の板面に対して支持部材19を直交させること
により、剛性が高くなって保持性能が一段と良好とな
る。That is, a narrow rod-shaped support member 19 having a groove portion 19A that engages with the closed portion of the plate-shaped heating element 16 is provided facing the slit portion 15, and the lower end of the support member 19 is provided with a holding hole 13A.
It is inserted through and supported to increase the strength under high temperature. In this case, since the supporting member 19 is provided upright on the electrically insulating holding member 13, the same material as that of the high temperature heating element 8 can be applied, and therefore the strength at high temperature can be increased. Further, by making the support member 19 orthogonal to the plate surface of the plate heating element 16, the rigidity is increased and the holding performance is further improved.
【００２０】図４は本発明の他の実施例であり、第２保
持部材13に半径方向に２重の内外保持孔13A,13B を形成
し、該内外保持孔13A,13B に板状発熱体16の下部を挿入
して自立保持したもので、その他の構成は前述した内容
と同じである。この図３に示した実施例においては、径
方向内外における板状発熱体16の発熱部（細幅部)16Aを
軸方向（高さ方向) には異にするようにし、内外でそれ
ぞれ独立して電力制御可能とすることによって、さらに
大型でかつ均熱性良好なものとでき、この際、図示の如
く内外保持孔13A,13B を円周方向に位相をずらすことに
よって、内外板状発熱体16の配置がスペースの節約の点
で有利となるし、また、加熱特性からも有利となる。な
お、内外板状発熱体16は２層以上に配置することは自由
である。FIG. 4 shows another embodiment of the present invention in which the second holding member 13 is formed with double inner and outer holding holes 13A and 13B in the radial direction, and plate-shaped heating elements are formed in the inner and outer holding holes 13A and 13B. The lower part of 16 is inserted and self-supported, and other configurations are the same as those described above. In the embodiment shown in FIG. 3, the heat generating portions (narrow width portions) 16A of the plate-shaped heat generating element 16 inside and outside the radial direction are made different in the axial direction (height direction), and they are independent inside and outside. By making it possible to control the electric power by means of the electric power control, it is possible to make it even larger and to have a good thermal uniformity. At this time, by shifting the phases of the inner and outer holding holes 13A, 13B as shown in the drawing, the inner and outer plate-shaped heating elements 16 Is advantageous in terms of saving space and also in terms of heating characteristics. The inner and outer plate-shaped heating elements 16 may be freely arranged in two or more layers.
【００２１】図５は保持孔13A を平面視で円弧状に形成
し、同じく円弧状に形成した板状発熱体16を該保持孔13
A に挿入して自立保持したものを示している。なお、以
上記述した構成は、高温酸化性雰囲気を対象としたもの
であるが、その適用は同雰囲気に限定されるものでない
ことは言うまでもない。In FIG. 5, the holding hole 13A is formed in an arc shape in plan view, and the plate-shaped heating element 16 also formed in the arc shape is formed in the holding hole 13A.
It is shown inserted into A and held independently. The above-described configuration is intended for a high temperature oxidizing atmosphere, but needless to say, its application is not limited to the same atmosphere.
【００２２】[0022]
【発明の効果】本発明は以上の通りであり、請求項１に
係る本発明では、高温用発熱体8 は、下方が開放されて
上方が閉塞された少なくとも一つのスリット部15を有す
る板状発熱体16を、前記炉室6 の周上に複数個配置して
通電可能とされており、前記炉室6 に備えた被処理物の
支持台14上面より下方において前記板状発熱体16を電気
絶縁状態で保持する保持部材13が備えられているので、
加熱装置7 を大型化しても、内外に生ずる温度差が少な
くなり、熱応力による損傷のおそれがないし、また、保
守・点検においても部品として処理できるので、コスト
的にも有利となる。The present invention is as described above, and in the present invention according to claim 1, the high temperature heating element 8 has a plate shape having at least one slit portion 15 whose lower portion is opened and whose upper portion is closed. A plurality of heating elements 16 are arranged on the circumference of the furnace chamber 6 so that they can be energized, and the plate-shaped heating elements 16 are arranged below the upper surface of the support base 14 of the object to be processed provided in the furnace chamber 6. Since the holding member 13 for holding in an electrically insulated state is provided,
Even if the heating device 7 is upsized, the temperature difference between the inside and the outside is reduced, there is no risk of damage due to thermal stress, and it can be treated as a component during maintenance and inspection, which is advantageous in terms of cost.
【００２３】また、請求項２に係る本発明では、請求項
１の板状発熱体16におけるスリット部15の閉塞された部
分に上部が係合され、かつ下部が請求項１の保持部材13
に電気絶縁状態に保持された支持部材19が備えられてい
るので、板状発熱体16の保持剛性が向上し、加熱装置7
の大型化に寄与できる。更に、請求項３に係る本発明で
は、板状発熱体16を炉室6 の半径方向に２層以上配置
し、かつ内外の板状発熱体16を独立に電気制御する制御
部が備えられているので、大型でかつ均熱性良好な加熱
装置7 にできる。In the present invention according to claim 2, the upper portion is engaged with the closed portion of the slit portion 15 of the plate-shaped heating element 16 according to claim 1, and the lower portion is the holding member 13 according to claim 1.
Since the supporting member 19 held in an electrically insulated state is provided in the above, the holding rigidity of the plate-shaped heating element 16 is improved, and the heating device 7
Can contribute to larger size. Further, in the present invention according to claim 3, two or more plate heating elements 16 are arranged in the radial direction of the furnace chamber 6, and a control section for electrically controlling the inner and outer plate heating elements 16 independently is provided. Therefore, the heating device 7 having a large size and good thermal uniformity can be obtained.
【図１】本発明の実施例を示す全体の立断面図である。FIG. 1 is an overall vertical sectional view showing an embodiment of the present invention.
【図２】図１の要部展開立面図である。FIG. 2 is an exploded elevational view of a main part of FIG.
【図３】図１の要部平面図である。FIG. 3 is a plan view of an essential part of FIG.
【図４】本発明の他の実施例を示す要部平面図である。FIG. 4 is a plan view of an essential part showing another embodiment of the present invention.
【図５】本発明の他の実施例を示す要部半欠平面図であ
る。FIG. 5 is a half-broken plan view of essential parts showing another embodiment of the present invention.
１ 高圧容器 ５ 断熱層 ６ 炉室 ７ 加熱装置 ８ 高温用発熱体 ９ 予熱発熱体 13 保持部材 14 支持台 15 スリット部 16 板状発熱体 19 支持部材 DESCRIPTION OF SYMBOLS 1 High-pressure container 5 Heat insulation layer 6 Furnace chamber 7 Heating device 8 High temperature heating element 9 Preheating heating element 13 Holding member 14 Support stand 15 Slit part 16 Plate-shaped heating element 19 Supporting member
Claims (3)
層(5) が設けられ、該断熱層(5) の内側における炉室
(6) に低温で電気抵抗の大きな高温用発熱体(8) と該高
温用発熱体(8) を予熱するための予熱発熱体(9) とが設
けられ、被処理物を高温高圧下で熱間等方圧加圧する装
置において、 前記高温用発熱体(8) は、下方が開放されて上方が閉塞
された少なくとも一つのスリット部(15)を有する板状発
熱体(16)を、前記炉室(6) の周上に複数個配置して通電
可能とされており、 前記炉室(6) に備えた被処理物の支持台(14)上面より下
方において前記板状発熱体(16)を電気絶縁状態で保持す
る保持部材(13)が備えられていることを特徴とする熱間
等方圧加圧装置。1. A high pressure vessel (1) is provided with an inverted cup-shaped heat insulating layer (5), and a furnace chamber inside the heat insulating layer (5).
(6) is provided with a high temperature heating element (8) having a low electric resistance at a low temperature and a preheating heating element (9) for preheating the high temperature heating element (8), and the object to be treated under high temperature and high pressure. In the apparatus for hot isostatic pressing, the high temperature heating element (8) is a plate-shaped heating element (16) having at least one slit part (15) whose lower part is opened and whose upper part is closed, A plurality of elements are arranged on the periphery of the furnace chamber (6) so that electricity can be supplied, and the plate-shaped heating element (16 Is provided in a state of being electrically insulated, and a holding member (13) is provided for the hot isostatic pressing device.
ット部(15)の閉塞された部分に上部が係合され、かつ下
部が請求項１の保持部材(13)に電気絶縁状態に保持され
た支持部材(19)が備えられていることを特徴とする請求
項１記載の熱間等方圧加圧装置。2. The plate-shaped heating element (16) according to claim 1, wherein the upper part is engaged with the closed part of the slit part (15), and the lower part is electrically insulated from the holding member (13) according to claim 1. The hot isostatic pressing device according to claim 1, further comprising a supporting member (19) held by the device.
２層以上配置し、かつ内外の板状発熱体(16)を独立に電
気制御する制御部が備えられていることを特徴とする請
求項１又は２記載の熱間等方圧加圧装置。3. A control unit is provided, in which two or more plate heating elements (16) are arranged in the radial direction of the furnace chamber (6), and the plate heating elements (16) inside and outside are independently electrically controlled. The hot isostatic pressing device according to claim 1, wherein the hot isostatic pressing device is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3267846A JPH05106971A (en) | 1991-10-16 | 1991-10-16 | Hot isotropic pressurization device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3267846A JPH05106971A (en) | 1991-10-16 | 1991-10-16 | Hot isotropic pressurization device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05106971A true JPH05106971A (en) | 1993-04-27 |
Family
ID=17450444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3267846A Pending JPH05106971A (en) | 1991-10-16 | 1991-10-16 | Hot isotropic pressurization device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05106971A (en) |
-
1991
- 1991-10-16 JP JP3267846A patent/JPH05106971A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH079036Y2 (en) | Vertical heat treatment furnace | |
| US4151400A (en) | Autoclave furnace with mechanical circulation | |
| JPS5914712B2 (en) | Equipment for gas pressure bonding, hot isostatic pressing and similar applications | |
| JP4350695B2 (en) | Processing equipment | |
| JPH05106971A (en) | Hot isotropic pressurization device | |
| JP4820137B2 (en) | Heating element holding structure | |
| JP2006046865A (en) | Kiln, and method for firing ceramic | |
| JPS6224237Y2 (en) | ||
| JPH09229561A (en) | Lateral pressurizing sintering furnace | |
| JP4168521B2 (en) | Electric heating type pressure sintering equipment | |
| JPH0544599B2 (en) | ||
| WO1991001474A1 (en) | Oxidizing atmosphere hot isotropic press | |
| US6031207A (en) | Sintering kiln | |
| JP3870571B2 (en) | Electric heating type pressure sintering equipment | |
| JP2010048437A (en) | Hot isotropic pressure device | |
| JPH0445030Y2 (en) | ||
| JPH0782911B2 (en) | Pressure heating furnace | |
| JPH06103156B2 (en) | Oxidizing atmosphere furnace | |
| JP2723132B2 (en) | Heat treatment furnace | |
| JPH0953103A (en) | Electric sintering mold | |
| JP3864557B2 (en) | Electric heating type pressure sintering equipment | |
| JPH0526480Y2 (en) | ||
| JPH0514158Y2 (en) | ||
| JPH0240491A (en) | Method and apparatus for hot isotactic molding in oxidative atmosphere | |
| JP2535402B2 (en) | Thermal insulation structure for high temperature furnace |