JPH0445030Y2 - - Google Patents

Description

[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a heating device for a hot isostatic pressurizing device, and more specifically relates to a heating device that is an improved base heater. .

(Prior technology) The ^hot isostatic pressing method (Hot
Isostatic pressing (hereinafter abbreviated as HIP)
Since gas pressure is used, the object to be processed can be compressed evenly to the inside, regardless of whether it is large or irregularly shaped.Coupled with the high temperature, it was developed in the 1960s as an extremely effective method for achieving true densification. It is industrialized.

To outline the main parts of this device with reference to FIG. 5, upper and lower openings 1A and 1B of the high-pressure container 1 each have upper lids 2 for sealing the high-pressure container 1 and supporting the axial force due to its internal pressure. and a lower cover 3 are attached. A rectangular opening 4A formed in the press frame 4 is removably attached to the outer end surfaces of the upper and lower lids, and the axial force is carried through the upper and lower lids.

In order to load and unload the material 9 into the high-pressure container 1 through the lower opening 1B, the lower lid 3 has a ring-shaped outer lid 3A and an insertion/removal mechanism that is inserted into the ring opening of the outer lid 3A. It is a combination type consisting of a freely movable inner lid 3B.

An inverted cup-shaped heat insulating layer 5 is disposed within the high-pressure vessel 1, and a heating element 7 having a positive temperature coefficient of resistance is disposed in a processing chamber 6 defined by this insulating layer 5.

The outer lid 3A of the lower lid 3 is provided with a base heating device 8 on which the material to be processed 9 is placed and which, together with the heating element 7, heats the material to be processed 9 from below.

The material to be treated 9 placed on the heating device 8 is isotropically heated at high temperature by the high-pressure gas medium supplied from the upper lid 2 side and high-temperature heating by the heating element 7 and heating device 8. Pressure molded. Note that the heating element 7 may not be provided.

An example of the heating device 8 is shown in FIG. The heating device 8 includes a heat insulator 13 and a support plate 1 on a base 12.
a support stand 11 having a mounting plate 16 on the upper end of a cylindrical support 15 erected through the cylindrical support 1;
5 and a cylindrical heater 10 provided on the outer periphery of the heater. The heater 10 is formed into a cylindrical shape by repeatedly bending a band-shaped metal heating element in the vertical direction.

A developed view of the structure is shown in FIG. 7, and vertical parts 17 arranged in the vertical direction are arranged in parallel in the circumferential direction via an upper bent part 18A and a lower bent part 18B, and terminal parts 19 are provided at both ends. ing.

The heater 10 is mounted on a support plate 14, and its upper and lower ends are positioned and held in circumferential grooves 20, 20 formed on the lower surface of the mounting plate 16 and the upper surface of the support plate 14 via an insulator 21. 22 and 23 are through holes for high pressure gas medium circulation. This base heating device is disclosed in Japanese Patent Application Laid-Open No. 168781/1983.

(Problem to be solved by the invention) The heating element forming the cylindrical heater 10 is:
Mo (melting point 2620℃), Ta (melting point 2996℃), W (melting point 3410℃)
It is made of ultra-high melting point metals such as Nb (2497°C) and Nb (2497°C), and has traditionally been used at temperatures about 1000°C lower than its melting point.

However, in recent years, there has been a demand for HIP treatment at higher temperatures, and it has come to be used at temperatures about 200°C lower than the melting point.

However, when used at such high temperatures, there is a problem that the heater 10 may buckle and bend at its vertical portion 17 due to its own weight, and in severe cases may come off the holding groove 20. When performing HIP using a gas medium containing oxygen, Pt alloy is a metal heat generating material with good oxidation resistance at high temperatures (melting point approximately 1800-1950℃)
However, when used at temperatures below the melting point of about 200°C, creep deformation due to its own weight is significant, which is a particularly serious problem.

The present invention was developed in view of this problem, and even if the cylindrical heater generates heat at about 200℃ below the melting point,
It is an object of the present invention to provide a base heating device for a hot isostatic pressing device that hardly undergoes deformation due to its own weight.

(Means for Solving the Problems) The base heating device of the present invention, which has been made to achieve the above object, is designed to seal the container at the upper and lower openings of a high-pressure container and to carry an axial force due to the internal pressure of the container. An upper lid and a lower lid are attached, and the lower lid is equipped with a base heating device for placing and heating the object to be processed, and the object to be processed placed on the heating device is heated to a high temperature by a high-pressure gas medium. In the base heating device of the hot isostatic pressing device for isotropically pressurizing the bottom, the heating device 8A has a mounting plate 34 on the upper end of the cylindrical support 33 erected on the base 32. A cylindrical heater 10 is provided, which is formed by repeatedly bending a heating strip in the vertical direction on the outer periphery of the cylindrical support 33, and the heater 10 is erected on the base 32. The device is also designed to be suspended in a suspended state by a heater support 37 made of a heat-resistant insulator.

(Function) Since the cylindrical heater 10 is suspended by the heater support 37, the vertical portion 17 formed in the vertical direction of the heater 10 does not need to support its own weight.

Therefore, even if the heater 10 is used at a temperature of about 200° C. below the melting point of the heating element metal, no buckling deformation occurs in the vertical portion 17.

(Example) Fig. 1 and Fig. 2 show a base heating device 8A according to the first embodiment, which includes a support base 31 for placing the material to be treated, and a support base 31 for placing the material to be treated, and a base heating device 8A for heating at high temperature. It is composed of a cylindrical heater 10.

The support stand 31 is composed of a base 32, a cylindrical support 33 that stands concentrically on the center line of the base 32, and a mounting plate 34 attached to the upper end of the cylindrical support 33. A recess is formed in the center of the upper plate 32A of the base 32, and the lower end of the cylindrical support 33 is inserted into the recess. The cylindrical support 33 is made of a high melting point oxide ceramic such as alumina, and a heat insulating material 35 is placed inside the cylindrical support 33.

The base 32 is provided with a ring-shaped heat insulator 36 .
A heater support 37 for disposing the cylindrical heater 10 in a suspended state around the cylindrical support 33 is placed with the cylindrical support 33 inserted therein.

The heater support 37 has a ring-shaped base 38 having an insertion hole in the cylindrical support 33, and a large number of support plates 39 radially arranged upright thereon with the width direction being the radial direction. A slit 40 for supporting the upper bent portion 18A of the heater 10 is formed near the outer edge of the upper surface of the support plate 39. The ring-shaped base 38 and the support plate 39 are integrally molded from a high melting point electrical insulating material such as alumina.

The cylindrical heater 10 has the support plate 39 inserted between a pair of vertical parts 17 and an upper bent part 18.
By engaging with the slit 40, A is suspended from the heater support 37. Further, the lower bent portion 18B is fitted into a holding groove 41 provided on the upper surface of the ring-shaped base 38, so that the shape and posture of the heater are maintained.

3 and 4 show the second embodiment 8 of the present invention.
B, and the same components as in the first embodiment are designated by the same reference numerals. However, the cylindrical heater 10
are omitted from the illustration. In the second embodiment, a rod-shaped heater support 37A vertically penetrates ring-shaped heat insulators 36A and 36B stacked in two stages and is inserted into the upper plate 32A of the base 32.
A slit 40A for engaging and supporting the upper bent portion 18A of the heater 10 is formed at its upper end. The heater supports 37A are inserted into and erected on the outer circumference of the upper plate 32A in the same number as the upper bent portions 18A of the heater 10, and support the upper bent portions 18A in a suspended state. Lower bent portion 18B of cylindrical heater 10
is fitted into a holding groove 41A recessed in the upper surface circumferential direction of the upper heat insulator 36A.

The hot isostatic press device in which the base heating devices 8A and 8B according to the present invention are used is the same as the conventional one. Furthermore, the cylindrical support body 33 and the mounting plate 34 can be provided with appropriate through holes for communication of a high-pressure gas medium, as in the conventional case.

(Effects of the Invention) As explained above, in the bale heating device of the present invention, the cylindrical heater 10 is suspended by the heater supports 37, 37A erected on the base 32, and the cylindrical heater 10 is suspended from the cylindrical support 33. Since it is located on the outer periphery,
Even when the heater 10 is used to generate heat in a high temperature state, the vertical portion 17 of the cylindrical heater 10 does not support its own weight, and this portion does not bend due to buckling deformation.
Good usage conditions can be ensured.

[Brief explanation of drawings]

FIG. 1 is a partially sectional front view of the base heating device according to the first embodiment, FIG. 2 is a sectional view taken along line A-A in FIG. 1,
Figure 3 is a sectional view of the same device according to the second embodiment;
The figures are a sectional view taken along the line A--A in FIG. 3, FIG. 5 is a sectional explanatory view of the HIP device, FIG. 6 is a partial sectional view of a conventional base heating device, and FIG. 7 is a developed view of a cylindrical heater. 8A, 8B... Base heating device, 10... Cylindrical heater, 31... Support stand, 32... Base, 33
... Cylindrical support body, 34 ... Mounting plate, 37, 37A...
...Heater support.

Claims (1)

[Claims for Utility Model Registration] Upper and lower lids are attached to the upper and lower openings of the high-pressure container to seal the container and to bear the axial force due to the internal pressure, and the lower lid holds the object to be processed. A base heating device is provided for placing and heating the base, and hot isostatic pressing is used to isotropically press and mold the workpiece placed on the heating device at high temperature using a high-pressure gas medium. In the base heating device of the device, the heating device 8A includes a support base 31 provided with a mounting plate 34 at the upper end of a cylindrical support 33 erected on a base 32, and a support base 31 provided with a mounting plate 34 on the upper end of a cylindrical support 33 set up on a base 32; It is equipped with a cylindrical heater 10 formed by repeatedly bending a heating strip in the vertical direction, and the heater 10 is suspended in a suspended state by a heater support 37 that is erected on a base 32 and made of a heat-resistant insulator. A base heating device for a hot isostatic press device.