JPH0511252B2 - - Google Patents

Info

Publication number
JPH0511252B2
JPH0511252B2 JP59232131A JP23213184A JPH0511252B2 JP H0511252 B2 JPH0511252 B2 JP H0511252B2 JP 59232131 A JP59232131 A JP 59232131A JP 23213184 A JP23213184 A JP 23213184A JP H0511252 B2 JPH0511252 B2 JP H0511252B2
Authority
JP
Japan
Prior art keywords
radiation
scanning
emissivity
measurement object
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59232131A
Other languages
Japanese (ja)
Other versions
JPS61110018A (en
Inventor
Isao Hishikari
Toshihiko Ide
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chino Corp
Original Assignee
Chino Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chino Corp filed Critical Chino Corp
Priority to JP59232131A priority Critical patent/JPS61110018A/en
Publication of JPS61110018A publication Critical patent/JPS61110018A/en
Publication of JPH0511252B2 publication Critical patent/JPH0511252B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0022Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiation of moving bodies
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/06Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/064Ambient temperature sensor; Housing temperature sensor; Constructional details thereof
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0831Masks; Aperture plates; Spatial light modulators
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0896Optical arrangements using a light source, e.g. for illuminating a surface
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/80Calibration
    • G01J5/802Calibration by correcting for emissivity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J2005/0074Radiation pyrometry, e.g. infrared or optical thermometry having separate detection of emissivity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)

Description

【発明の詳細な説明】 (1) 発明の分野 この発明は、走査形放射温度計を用いた鋼板等
の放射率および温度の測定装置に関するものであ
る。
DETAILED DESCRIPTION OF THE INVENTION (1) Field of the Invention The present invention relates to an apparatus for measuring the emissivity and temperature of steel plates and the like using a scanning radiation thermometer.

(2) 従来技術 出願人は、たとえば特開昭57−161521号公報に
あるように、比較熱板と測定物体との距離を変化
させたときの放射検出器の出力変化から測定物体
の放射率を求める方法を提案している。
(2) Prior art As disclosed in Japanese Patent Application Laid-open No. 57-161521, for example, the applicant has determined the emissivity of a measuring object from the change in the output of a radiation detector when the distance between the comparison hot plate and the measuring object is changed. We are proposing a method to find the .

しかしながら、この方法では、比較熱板を駆動
する装置が大型なものとなり、また、一点測定の
ため測定物体の広い範囲での放射率、温度パター
ンの測定が困難である等の問題点を生じている。
However, this method requires a large device to drive the comparative heating plate, and also has problems such as the difficulty of measuring emissivity and temperature patterns over a wide range of the measurement object because of the single-point measurement. There is.

(3) 発明の目的 この発明の目的は、以上の点に鑑み、より簡便
に、測定物体の広い範囲での放射率、温度の測定
を可能とした物体の放射率および温度の測定装置
を提供することである。
(3) Purpose of the Invention In view of the above points, the purpose of the present invention is to provide a device for measuring the emissivity and temperature of an object, which makes it possible to more easily measure the emissivity and temperature of the object over a wide range. It is to be.

(4) 発明の概要 この発明は、走査形放射温度計に放射源からの
異つた開口を介して2つの放射エネルギーが入射
したときとしないときのそれぞれの検出値の差の
比である寄与率の比と寄与率の差とが所定の関係
にあることに基いて測定物体の放射率を求め、こ
の放射率から測定物体の温度を測定するようにし
た物体の放射率および温度の測定装置である。
(4) Summary of the Invention This invention provides a contribution factor which is the ratio of the difference between detected values when two radiant energies are incident on a scanning radiation thermometer through different apertures from a radiation source and when they are not. An apparatus for measuring the emissivity and temperature of an object, which calculates the emissivity of the object to be measured based on the predetermined relationship between the ratio of be.

(5) 発明の実施例 第1図は、この発明の一実施例を示す構成説明
図である。
(5) Embodiment of the Invention FIG. 1 is a configuration explanatory diagram showing an embodiment of the invention.

図において、1は、紙面に対して垂直に走行す
る鋼板のような測定物体、2は、測定物体の幅方
向を垂直に走査して測定物体1からの放射エネル
ギーを検出するCCDまたは走査鏡等を用いた走
査形放射温度計、31,32は、走査形放射温度
計2の走査線上の両側に位置し走査形放射温度計
2の走査領域の測定物体1に放射エネルギーを放
射し測定物体1を反射した放射エネルギーが走査
形放射温度計2に入射するよう設けられた放射
源、4は、走査形放射温度計2、放射源31,3
2を支持し、異つた大きさの開口41,42から
放射源31,32の放射エネルギーを測定物体1
に放射する背景放射板(壁)、5は、背景放射板
4の温度を検出する温度検出器、6は、走査形放
射温度計2の出力信号、放射源31,32、温度
検出器5の出力信号が供給され、所定の演算処理
を行うアナログ回路、マイクロコンピユータ、パ
ーソナルコンピユータ等の演算手段である。
In the figure, 1 is a measurement object such as a steel plate that runs perpendicular to the paper surface, and 2 is a CCD or scanning mirror that scans the width direction of the measurement object perpendicularly to detect the radiant energy from the measurement object 1. The scanning radiation thermometers 31 and 32 are located on both sides of the scanning line of the scanning radiation thermometer 2, and emit radiant energy to the measurement object 1 in the scanning area of the scanning radiation thermometer 2. A radiation source 4 is provided so that the reflected radiation energy enters the scanning radiation thermometer 2;
The radiant energy of the radiation sources 31 and 32 is measured through the apertures 41 and 42 of different sizes.
5 is a temperature detector that detects the temperature of the background radiation plate 4; 6 is the output signal of the scanning radiation thermometer 2; the radiation sources 31, 32; It is a calculation means such as an analog circuit, a microcomputer, a personal computer, etc., which is supplied with an output signal and performs predetermined calculation processing.

測定物体1の温度をT、放射率をε、放射源3
1,32の温度をTr、放射率をεr、背景放射板
4の温度をTa、走査形放射温度計2の出力信号
をEi、黒体相当の放射エネルギーをE(T)とする。
Temperature of measurement object 1 is T, emissivity is ε, radiation source 3
Let Tr be the temperature of 1 and 32, εr be the emissivity, Ta be the temperature of the background radiation plate 4, Ei be the output signal of the scanning radiation thermometer 2, and let E(T) be the radiant energy equivalent to a black body.

走査形放射温度計2が、測定物体1を走査する
と、第2図で示すように、放射源31,32から
の放射エネルギーが入射したときに高い出力信号
E1,E2が得られ、入射しないときに低い出力信
号E0が得られ、次式が成り立つ。
When the scanning radiation thermometer 2 scans the measurement object 1, as shown in FIG.
E 1 and E 2 are obtained, and a low output signal E 0 is obtained when there is no incidence, and the following equation holds true.

E0=εE(T)+(1−ε)E(Ta) …(1) E1=εE(T)+F1(1−ε)εrE(Tr)+(1−F1
(1−ε)E(Ta) …(2) E2=εE(T)+F2(1−ε)εrE(Tr)+(1−F2
(1−ε)E(Ta) …(3) ここで、F1,F2は、放射源31,32からの
放射エネルギーが測定物体1を反射して、走査形
放射温度計に入射する寄与率で、たとえばF1
F2である。
E 0 = εE(T)+(1-ε)E(Ta)...(1) E 1 =εE(T)+F 1 (1-ε)εrE(Tr)+(1-F 1 )
(1-ε)E(Ta)...(2) E 2 =εE(T)+F 2 (1-ε)εrE(Tr)+(1-F 2 )
(1-ε)E(Ta)...(3) Here, F 1 and F 2 are the contributions of the radiant energy from the radiation sources 31 and 32 reflected from the measurement object 1 and incident on the scanning radiation thermometer. rate, for example F 1 >
It is F2 .

つまり、(1)式右辺第1項は測定物体1自体から
の放射エネルギー、第2項は背景放射板4からの
放射エネルギー、(2)、(3)式右辺第2項は放射源3
1,32からの寄与分、第3項は背景放射板4か
らの寄与分である。
In other words, the first term on the right side of equation (1) is the radiant energy from the measurement object 1 itself, the second term is the radiant energy from the background radiation plate 4, and the second term on the right side of equations (2) and (3) is the radiation energy from the radiation source 3.
1 and 32, and the third term is the contribution from the background radiation plate 4.

(2)式から(1)式を減算し、(3)式から(1)式を減算す
ると次式が得られる。
By subtracting equation (1) from equation (2) and subtracting equation (1) from equation (3), the following equation is obtained.

E1−E0=F1(1−ε)εrE(Tr)−F1(1−ε)
E(Ta) E2−E0=F2(1−ε)εrE(Tr)−F2(1−ε)
E(Ta) その比Rをとると次式が得られる。
E 1 −E 0 =F 1 (1−ε)εrE(Tr)−F 1 (1−ε)
E(Ta) E 2 −E 0 =F 2 (1−ε)εrE(Tr)−F 2 (1−ε)
E(Ta) Taking the ratio R, the following equation is obtained.

R=F1/F2 …(4) また、(2)、(3)式を辺々差し引くと次式が得られ
る。
R=F 1 /F 2 (4) Further, by subtracting equations (2) and (3), the following equation is obtained.

E1−E2=(F1−F2)(1−ε){εrE(Tr)−E
(Ta)} これより、放射率εは、次式となる。
E 1 −E 2 = (F 1 −F 2 ) (1−ε) {εrE(Tr)−E
(Ta)} From this, the emissivity ε is given by the following formula.

ε=1−(E1−E2)/[(F1−F2)・{εrE(Tr)
−E(Ta)}] …(5) ここで、D=F1−F2とR=F1/F2との関係は、
第3図で示すようにD=f(R)で、所定の関数関係
にあることが実験的に見い出された。つまり、R
からDを求めることができ、(5)式の右辺のその他
の値は測定等により求まるので、放射率εを求め
ることができる。
ε=1−(E 1 −E 2 )/[(F 1 −F 2 )・{εrE(Tr)
−E(Ta)}] …(5) Here, the relationship between D=F 1 −F 2 and R=F 1 /F 2 is
As shown in FIG. 3, it was experimentally found that D=f(R), which is a predetermined functional relationship. In other words, R
Since D can be determined from the equation (5) and other values on the right side of equation (5) can be determined by measurement, etc., the emissivity ε can be determined.

そして、(1)式より E(T)={E0−(1−ε)E(Ta)}/ε…(6) であるから、この(6)式に、(5)式より求めた放射率
ε等を代入して、測定物体1の真温度が求まる。
Then, from equation (1), E(T)={E 0 − (1-ε)E(Ta)}/ε...(6), so in equation (6), By substituting the emissivity ε, etc., the true temperature of the measuring object 1 is determined.

つまり、測定前、あらかじめ第3図で示すよう
な測定により求めたD=F1−F2とR=F1/F2
の関数関係D=f(R)、放射源31,32の放射率
εr等を演算手段6に記憶する。
In other words, before the measurement, the functional relationship D=f(R) between D=F 1 -F 2 and R=F 1 /F 2 obtained by measurement as shown in FIG. 3, and the radiation of the radiation sources 31 and 32. The rate εr, etc. are stored in the calculation means 6.

次に、測定時、走査形放射温度計2は、測定物
体1を走査し、各測定位置Xiに対応した出力信
号Eiを演算手段6に供給する。このとき、放射源
31,32の測定物体1を反射したときの出力信
号をE1,E2、それ以外での出力信号をE0とする。
また、放射源31,32の温度信号Tr、背景放
射板4の温度信号Taを検出する温度検出器5の
出力信号も演算手段6に供給される。
Next, during measurement, the scanning radiation thermometer 2 scans the measurement object 1 and supplies an output signal Ei corresponding to each measurement position Xi to the calculation means 6. At this time, the output signals when the radiation sources 31 and 32 reflect the measurement object 1 are E 1 and E 2 , and the output signals at other times are E 0 .
Further, the output signal of the temperature detector 5 which detects the temperature signal Tr of the radiation sources 31 and 32 and the temperature signal Ta of the background radiation plate 4 is also supplied to the calculation means 6.

演算手段は、(1)、(2)、(3)式に対応した信号E0
E1,E2より(4)式の比Rを求め、これによりDを
求め、また、信号Tr,TaよりE(Tr)、E(Ta)
を演算し、(5)式の右辺の演算を行つて放射率εを
求める。また、この放射率εを用いて(6)式の演算
を行つて測定物体1の温度Tを求めることができ
る。
The calculation means is a signal E 0 corresponding to equations (1), (2), and (3).
Find the ratio R in equation (4) from E 1 and E 2 , find D from this, and find E(Tr) and E(Ta) from the signals Tr and Ta.
Calculate and calculate the right side of equation (5) to find the emissivity ε. Furthermore, the temperature T of the measurement object 1 can be determined by calculating equation (6) using this emissivity ε.

このようにして、放射源31,32の寄与率か
ら測定物体1の放射率εを求め、各点の温度Tを
求めることができる。あらかじめ放射率εを求め
た後は、放射源31,32の開口にシヤツタを
し、連続測定を行つてもよい。
In this way, the emissivity ε of the measurement object 1 can be determined from the contribution factors of the radiation sources 31 and 32, and the temperature T at each point can be determined. After determining the emissivity ε in advance, the apertures of the radiation sources 31 and 32 may be shuttered to perform continuous measurements.

第4図は、他の実施例を示し、第1図と同一符
号は同一構成要素を示す。この例では、1個の放
射源3は、測定物体1の法線に対して走査形放射
温度計2と所定の角度をもたせて設けられてお
り、背景放射板4は、異なる大きさの開口41,
42を介して1個の放射源3の放射エネルギーを
測定物体1に放射している。
FIG. 4 shows another embodiment, in which the same reference numerals as in FIG. 1 indicate the same components. In this example, one radiation source 3 is provided at a predetermined angle with the scanning radiation thermometer 2 with respect to the normal to the measurement object 1, and the background radiation plate 4 has apertures of different sizes. 41,
The radiation energy of one radiation source 3 is radiated to the measuring object 1 via 42 .

(6) 発明の効果 あらかじめ、寄与率の差が寄与率の比と所定の
関係にあることを利用し、走査形放射温度計を用
いて放射率、温度を測定するようにしているの
で、簡単な構成で、測定物体の広い範囲について
の放射率補正された正しい温度分布を測定するこ
とができる。
(6) Effects of the invention Utilizing the fact that the difference in contribution rates has a predetermined relationship with the ratio of contribution rates, emissivity and temperature are measured using a scanning radiation thermometer, making it easy to measure. With this configuration, it is possible to measure the correct emissivity-corrected temperature distribution over a wide range of the measurement object.

【図面の簡単な説明】[Brief explanation of drawings]

第1図、第4図は、この発明の一実施例を示す
構成説明図、第2図は、動作説明用波形図、第3
図は寄与率の差と比の関係図である。 1……測定物体、2……走査形放射温度計、
3,31,32……放射源、4……背景放射板、
5……温度検出器、6……演算手段。
1 and 4 are configuration explanatory diagrams showing one embodiment of the present invention, FIG. 2 is a waveform diagram for explaining the operation, and FIG.
The figure is a diagram showing the relationship between the difference in contribution rate and the ratio. 1...Measurement object, 2...Scanning radiation thermometer,
3, 31, 32...radiation source, 4...background radiation plate,
5...Temperature detector, 6...Calculating means.

Claims (1)

【特許請求の範囲】[Claims] 1 測定物体に走査して測定物体からの放射エネ
ルギーを検出する走査形放射温度計と、この走査
形放射温度計の走査領域内の測定物体に異なつた
大きさの開口を介して放射エネルギーを放射する
第1、第2の放射源と、走査形放射温度計に第
1、第2の放射源からの放射エネルギーが測定物
体を反射して各々寄与率F1,F2で入射したとき
の第1、2の検出値E1,E2、および第1、第2
の放射源からの放射エネルギーが測定物体から入
射しないときの検出値E0のそれぞれの差の比R
=(E1−E0)/(E2−E0)=F1/F2を求め、こ
の寄与率の比R=F1/F2と寄与率の差D=(F1
−F2)とのあらかじめ実験的に求めた関係に基
いて寄与率の差Dを求め、この寄与率の差Dを用
いて測定物体の放射率を求め、この放射率から測
定物体の温度を求める演算手段とを備えたことを
特徴とする物体の放射率および温度の測定装置。
1. A scanning radiation thermometer that detects radiant energy from the measuring object by scanning the measuring object, and a scanning radiation thermometer that emits radiant energy through apertures of different sizes to the measuring object within the scanning area of this scanning radiation thermometer. and the first and second radiation sources when the radiation energy from the first and second radiation sources reflects off the measurement object and enters the scanning radiation thermometer with contribution factors F1 and F2, respectively. 2 detected values E1, E2, and the first and second
The ratio R of the difference between the detected values E0 when the radiation energy from the radiation source is not incident from the measurement object
= (E1 - E0) / (E2 - E0) = F1 / F2 is calculated, and the ratio of this contribution rate R = F1 / F2 and the difference in contribution rate D = (F1
-F2), find the difference D in contribution rates based on the relationship determined experimentally in advance, use this difference D in contribution rates to find the emissivity of the measurement object, and find the temperature of the measurement object from this emissivity. 1. An apparatus for measuring emissivity and temperature of an object, characterized in that it is equipped with calculation means.
JP59232131A 1984-11-02 1984-11-02 Measuring apparatus for emissivity and temperature of object Granted JPS61110018A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59232131A JPS61110018A (en) 1984-11-02 1984-11-02 Measuring apparatus for emissivity and temperature of object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59232131A JPS61110018A (en) 1984-11-02 1984-11-02 Measuring apparatus for emissivity and temperature of object

Publications (2)

Publication Number Publication Date
JPS61110018A JPS61110018A (en) 1986-05-28
JPH0511252B2 true JPH0511252B2 (en) 1993-02-15

Family

ID=16934482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59232131A Granted JPS61110018A (en) 1984-11-02 1984-11-02 Measuring apparatus for emissivity and temperature of object

Country Status (1)

Country Link
JP (1) JPS61110018A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115265825B (en) * 2022-07-06 2024-04-16 东北大学 Method and device for measuring temperature of inner surface, storage medium and terminal

Also Published As

Publication number Publication date
JPS61110018A (en) 1986-05-28

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