JPH05120585A - Alarm message display method and display device - Google Patents

Abstract

(57) [Abstract] [Purpose] When an abnormality occurs in the main unit 1, a message corresponding to the type of the abnormality is searched for in the storage means and displayed on the display means 9, and a display content in the display device is displayed. The degree of freedom is given to enable the display of contents according to the level of the operator at that time. [Structure] The data input means 12 is provided, and a fixed message storage section 6 is provided in the message storage storage means
In addition to No. 7, variable message storage units 10 and 11 that can be additionally written / revised by data input means are provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention, when an abnormality occurs in various processing / manufacturing equipment (hereinafter referred to as main equipment), displays an alarm to that effect and a message indicating an operation necessary for recovery. To a method and a device therefor.

[0002]

2. Description of the Related Art A conventional alarm message display device of this type is shown in FIG. In the figure, reference numeral 1 denotes a semiconductor manufacturing apparatus which is a main apparatus, and an alarm message display device 2 is connected to the semiconductor manufacturing apparatus 1 by a transmission line 3.

When an abnormality occurs in the semiconductor manufacturing apparatus 1, data indicating the number of the message to be displayed is transmitted to the alarm message display apparatus 2 via the transmission line 3 according to the type of the abnormality, and the alarm message number storage unit 4 is stored. Therefore, based on the message number, the message display processing execution unit 5 causes the alarm fixed message storage unit 6 and the recovery operation fixed message storage unit 7 to store various alarm fixed message data 6-1 to 6-n and recovery operation fixed. The message data corresponding to the above number is taken out from the message data 7-1 to 7-n via the transmission line 8 and the message is displayed on the display 9.

[0004]

In the conventional alarm message display device as described above, the alarm and the recovery operation message displayed when a certain abnormality occurs are limited to the contents fixed in advance. However, the experience and proficiency of operators who should monitor abnormalities and perform recovery operations vary.
Therefore, for example, for an inexperienced operator, consideration should be given to making the message more specific and detailed. An object of the present invention is to provide a method of displaying an alarm message, which gives a degree of freedom to the content of a message such as an alarm and a recovery operation displayed when an abnormality occurs and enables the display of the content according to the level of an operator at that time. To get a display device.

[0005]

A method of displaying an alarm message according to the present invention includes, as a message to be stored in a storage means, a fixed message and a variable message which can be freely added / revised by a data input means. Is. Further, the alarm message display device according to the present invention is provided with a data input means, and in addition to the fixed message storage section in the message storage storage section, a variable message storage section which can be additionally written and revised by the data input section. Is provided.

[0006]

[Function] For example, when an operator is replaced, a new operator sets an alarm message / recovery operation message reflecting his / her own experience data through a data input device, so that when an abnormality occurs, the operator can adjust the level according to the operator's level. A message will be displayed.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram showing the configuration of the alarm message display device of the present embodiment, in which the same reference numerals as those in FIG. 3 indicate the same or corresponding parts.

The alarm message display device 2 of this embodiment is
Compared with the conventional example of FIG. 3, the alarm fixed message storage unit 6
In addition to the above, an alarm experience rule message storage unit 10 is provided, and in addition to the recovery operation fixed message storage unit 7, a recovery operation experience rule message storage unit 11 is provided. Further, the data input device 12 is provided, and the alarm experience rule message storage unit 10 and the recovery operation experience rule message storage unit 1 are provided.
1, the alarm experience rule message data 10-1 to 10 stored for each alarm message number according to the type of abnormality
-N and recovery operation rule of thumb message data 11-1
11-n can be freely added / revised by operating the data input device 12.

Further, in the present embodiment, the display area of the display 9 is the alarm fixed message display area 9-a, the alarm experience rule message display area 9-b, the recovery operation fixed message display area 9-c and the recovery operation rule message display. Area 9-d is divided into four areas, and respective corresponding messages are displayed.

Next, the operation will be described. When an abnormality occurs in the semiconductor manufacturing apparatus 1, the corresponding message number is transmitted via the transmission line 3 and stored in the message number storage unit 4. Based on the message number, the message display processing execution unit 5 causes the message storage units 6, 7, 1
Message data corresponding to the above numbers from 0 and 11 is taken out through the transmission line 8 and displayed in the respective display areas 9-a to 9-d of the display 9.

Here, as described above, each message data of the alarm experience rule message storage unit 10 and the recovery operation experience rule message storage unit 11 is input by the data input device 12 by the operator based on his own experience data and the like. You can freely add or revise it as needed. Therefore, for example, an inexperienced operator may add a more specific and detailed message according to his / her level in addition to the standard contents of messages stored in advance in the alarm fixed message storage unit 6 and the recovery operation fixed message storage unit 7. By writing a message of the contents, the contents are displayed on the display 9 when an abnormality occurs.

Thus, the operator can easily and accurately grasp the situation and perform the recovery operation promptly and accurately regardless of the degree of his experience.

FIG. 2 shows another embodiment of the present invention. In the present embodiment, the alarm fixed message storage unit 6, the alarm empirical rule message storage unit 10, the recovery operation fixed message storage unit 7, and the recovery operation empirical rule message storage unit 11, which were only one in each of the above-described embodiments, are provided. Each has a plurality (m). Each of the alarm fixed message storage units 6 _{1 to} 6 _m corresponds to a different language, and one of them corresponds to the data 6-1 in the above-described embodiment.
Message data for displaying an alarm fixed message for each message number according to each abnormality in the language, such as 6 to n, is stored. Similarly, each of the alarm experience rule message storage units 10 ₁ to 10 _m , the recovery operation fixed message storage units 7 _{1 to} 7 _m, and the recovery operation experience rule message storage units 11 _{1 to} 11 _m also store each message data in each language. Stores one set at a time.

Of the messages in these different languages, which language message is actually to be displayed on the display 9 can be selected by operating the data input device 12 to switch and control the message storage switching unit 13. As a result, for example, even if the language used by the operator is not constant,
It is possible to display according to each. Also in this embodiment, since the warning heuristics content of the message memory 10 ₁ to 10 _m and recovery operations heuristics message storage unit 11 ₁ to 11 _m can be freely recordable and revise the data input device 12, the operator It is possible to make a more appropriate display considering the difference in experience or culture.

The case where the variable message is added / revised mainly according to the experience level of the operator and a storage unit for each message is provided for each language used has been described above, but the present invention is not limited to this. Absent. For example, the variable message portion may have contents according to the difference in the language used by the operator, and a plurality of message storage units may be provided in association with the difference in the level of experience level of the operator.
It is also free to reflect various other factors.

[0016]

As described above, according to the present invention, in addition to a fixed message, the message storage means is provided with a variable message which can be freely added / revised by the data input means. The display content can be made more appropriate according to the level or the like. Therefore, when an abnormality occurs, there is an effect that it is possible to obtain a message display that facilitates accurate grasp of the situation and enables swift and appropriate countermeasures.

[Brief description of drawings]

FIG. 1 is a block diagram of an alarm message display device showing a first embodiment of the present invention.

FIG. 2 is a block diagram of an alarm message display device showing a second embodiment.

FIG. 3 is a block diagram showing a conventional example.

[Explanation of symbols]

1 Semiconductor Manufacturing Equipment (Main Equipment) 2 Alarm Message Display 4 Alarm Message Number Storage 5 Message Processing Execution 6,6 ₁ , 6 ₂ , ..., 6 _m Alarm Fixed Message Storage 6-1 to 6-n Same message data 7, 7 ₁ , 7 ₂ , ..., 7 _m Recovery operation fixed message storage unit 7-1 to 7-n Same message data 9 Message display 10, 10 ₁ , 10 ₂ , ..., 10 _m alarm empirical rule message storage unit 10-1 to 10-n same message data 11, 11 ₁ , 11 ₂ , ..., 11 _m recovery empirical rule message storage unit 11-1 to 11-n same message data 12 data input apparatus

Claims (2)

[Claims] 1. A storage unit storing messages corresponding to various abnormalities and a display unit for displaying the messages, and when an abnormality occurs in the main device, a message corresponding to the type of the abnormality is searched for and displayed on the storage unit. In the display method of the alarm message displayed on the means, as a message,
In addition to the fixed message, a method for displaying an alarm message is characterized in that it also has a variable message that can be additionally written or revised by data input means. 2. A storage means storing messages corresponding to various abnormalities, a display means for displaying the messages, and a message corresponding to the type of abnormality when an abnormality occurs in the main unit is searched on the storage means and displayed on the display means. In the alarm message display device having a control means for controlling, a data input means is provided, and the storage means has, in addition to a fixed message storage section, a variable message storage section that can be freely added or revised by the data input means. An alarm message display device characterized by: