JPH0512297Y2 - - Google Patents

Info

Publication number
JPH0512297Y2
JPH0512297Y2 JP1989008039U JP803989U JPH0512297Y2 JP H0512297 Y2 JPH0512297 Y2 JP H0512297Y2 JP 1989008039 U JP1989008039 U JP 1989008039U JP 803989 U JP803989 U JP 803989U JP H0512297 Y2 JPH0512297 Y2 JP H0512297Y2
Authority
JP
Japan
Prior art keywords
molecular beam
flange
vacuum port
source
beam source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989008039U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0299972U (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989008039U priority Critical patent/JPH0512297Y2/ja
Publication of JPH0299972U publication Critical patent/JPH0299972U/ja
Application granted granted Critical
Publication of JPH0512297Y2 publication Critical patent/JPH0512297Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1989008039U 1989-01-26 1989-01-26 Expired - Lifetime JPH0512297Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989008039U JPH0512297Y2 (fr) 1989-01-26 1989-01-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989008039U JPH0512297Y2 (fr) 1989-01-26 1989-01-26

Publications (2)

Publication Number Publication Date
JPH0299972U JPH0299972U (fr) 1990-08-09
JPH0512297Y2 true JPH0512297Y2 (fr) 1993-03-29

Family

ID=31213565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989008039U Expired - Lifetime JPH0512297Y2 (fr) 1989-01-26 1989-01-26

Country Status (1)

Country Link
JP (1) JPH0512297Y2 (fr)

Also Published As

Publication number Publication date
JPH0299972U (fr) 1990-08-09

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