JPH0513254A - Manufacture of lc resonator - Google Patents
Manufacture of lc resonatorInfo
- Publication number
- JPH0513254A JPH0513254A JP3160517A JP16051791A JPH0513254A JP H0513254 A JPH0513254 A JP H0513254A JP 3160517 A JP3160517 A JP 3160517A JP 16051791 A JP16051791 A JP 16051791A JP H0513254 A JPH0513254 A JP H0513254A
- Authority
- JP
- Japan
- Prior art keywords
- capacitance
- electrode
- coil conductor
- resonator
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 239000004020 conductor Substances 0.000 claims abstract description 25
- 239000000758 substrate Substances 0.000 claims description 19
- 239000003990 capacitor Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 abstract description 15
- 238000004544 sputter deposition Methods 0.000 abstract description 7
- 229920002120 photoresistant polymer Polymers 0.000 abstract description 6
- 239000012212 insulator Substances 0.000 abstract description 5
- 238000009966 trimming Methods 0.000 abstract description 5
- 238000000605 extraction Methods 0.000 description 7
- 229920001721 polyimide Polymers 0.000 description 3
- 239000009719 polyimide resin Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000010030 laminating Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Filters And Equalizers (AREA)
- Coils Or Transformers For Communication (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、フィルタ回路や発振回
路等に使用されるＬＣ共振子の製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an LC resonator used in a filter circuit, an oscillator circuit or the like.
【０００２】[0002]
【従来の技術と課題】従来、この種のＬＣ共振子として
は、誘電体層と容量電極層を交互に積層して構成した積
層コンデンサ部と、磁性体層とコイル用導体を交互に積
層すると共に各コイル用導体をスルーホール等を介して
電気的に接続して構成した積層コイル部とを一体的に重
ね合わせたものが知られている。このような構造のＬＣ
共振子は、積層コンデンサ部のキャパシタンスＣや積層
コイル部のインダクタンスＬの数値がばらつき易く、所
望の共振特性を得るためには積層コイル部に穴を明ける
等してトリミングを実施する必要があった。2. Description of the Related Art Conventionally, as this type of LC resonator, a laminated capacitor portion constituted by alternately laminating dielectric layers and capacitive electrode layers, and a magnetic layer and a coil conductor are alternately laminated. In addition, there is known one in which a laminated coil portion formed by electrically connecting the coil conductors to each other through a through hole or the like is integrally laminated. LC with such a structure
In the resonator, the numerical values of the capacitance C of the multilayer capacitor section and the inductance L of the multilayer coil section are likely to vary, and it has been necessary to perform a trimming process such as making a hole in the multilayer coil section in order to obtain desired resonance characteristics. ..
【０００３】そこで、本発明の課題は、キャパシタンス
ＣやインダクタンスＬが精度良く形成でき、共振特性を
調整するためのトリミングを必要としないＬＣ共振子の
製造方法を提供することにある。Therefore, an object of the present invention is to provide a method of manufacturing an LC resonator in which the capacitance C and the inductance L can be accurately formed and trimming for adjusting resonance characteristics is not required.
【０００４】[0004]
【課題を解決するための手段と作用】以上の課題を解決
するため、本発明に係るＬＣ共振子の製造方法は、一方
の容量電極を内蔵した誘電体基板の一方の面に、前記容
量電極と共にコンデンサを形成する他方の容量電極を設
ける工程と、前記誘電体基板の他方の面にコイル用導体
を設ける工程と、前記容量電極とコイル用導体とを外部
電極にて電気的に接続する工程とを備えたことを特徴と
する。In order to solve the above problems, in the method of manufacturing an LC resonator according to the present invention, the capacitance electrode is formed on one surface of a dielectric substrate containing one capacitance electrode. Together with the step of providing the other capacitance electrode forming a capacitor, the step of providing the coil conductor on the other surface of the dielectric substrate, and the step of electrically connecting the capacitance electrode and the coil conductor with an external electrode It is characterized by having and.
【０００５】以上の方法において、一方の容量電極を内
蔵した誘電体基板の寸法精度を良くし、この誘電体基板
の一方の面に前記容量電極と共にコンデンサを形成する
他方の容量電極をスパッタ法やフォトレジスト法等の手
段を用いて設けることにより、容量電極間に発生するキ
ャパシタンスＣのばらつきが少ないコンデンサが形成さ
れる。In the above method, the dimensional accuracy of the dielectric substrate containing one capacitance electrode is improved, and the other capacitance electrode forming a capacitor together with the capacitance electrode is formed on one surface of this dielectric substrate by the sputtering method or the like. By providing using a method such as a photoresist method, a capacitor having less variation in the capacitance C generated between the capacitance electrodes is formed.
【０００６】また、コイル用導体を誘電体基板の他方の
面に設けることにより、従来のように複数個のコイル用
導体をスルーホール等を介してシリーズに電気的接続し
なくてすむ。従って、コイル用導体は寸法精度の優れた
薄膜状コイルとなり、インダクタンスＬのばらつきが少
ないコイルが形成される。Also, by providing the coil conductor on the other surface of the dielectric substrate, it is not necessary to electrically connect a plurality of coil conductors to the series through through holes or the like as in the conventional case. Therefore, the coil conductor is a thin-film coil having excellent dimensional accuracy, and a coil having a small variation in the inductance L is formed.
【０００７】[0007]
【実施例】以下、本発明に係るＬＣ共振子の製造方法の
一実施例について添付図面を参照して説明する。本実施
例では、ＬＣ共振子１個の場合について説明するが、量
産時は複数個のＬＣ共振子を備えたマザー基板の形態で
製造されることになる。図１及び図２に示すように、誘
電体基板１の内部には容量電極２が内蔵されている。こ
の誘電体基板１は、容量電極２をスパッタ法やフォトレ
ジスト法等の手段を用いて寸法精度良く誘電体部材１ａ
の上面に設け、この誘電体部材１ａに別の誘電体部材１
ｂを貼り合わせて製作される。誘電体基板１の寸法、特
に誘電体部材１ａの厚み寸法は精度良く仕上られてい
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a method for manufacturing an LC resonator according to the present invention will be described below with reference to the accompanying drawings. In the present embodiment, a case of one LC resonator will be described, but during mass production, it will be manufactured in the form of a mother substrate provided with a plurality of LC resonators. As shown in FIGS. 1 and 2, a capacitance electrode 2 is built in the dielectric substrate 1. In this dielectric substrate 1, the capacitance electrode 2 is formed by using a method such as a sputtering method or a photoresist method with high dimensional accuracy and a dielectric member 1a.
Provided on the upper surface of this dielectric member 1a and another dielectric member 1a
It is manufactured by bonding b. The dimensions of the dielectric substrate 1, especially the thickness dimension of the dielectric member 1a are accurately finished.
【０００８】次に、図３及び図４に示すように、誘電体
基板１の上面にポリイミド樹脂等の絶縁体層５を略全面
にスクリーン印刷等の手段にて形成する。但し、絶縁体
層５は必ずしも必要なものではない。これを設ける理由
は、後述のコイル用導体８の線間に生じる浮遊容量を絶
縁体層５の低誘電率を利用して小さくするためである。
さらに、この絶縁体層５の表面中央部、左縁部及び右縁
部にそれぞれ渦巻き形状のコイル用導体８、引出し電極
９ａ及び引出し電極９ｂがスパッタ法やフォトレジスト
法等の手段にて寸法精度良く形成される。コイル用導体
８の一方の端部は引出し電極９ａに電気的に接続してい
る。コイル用導体８及び引出し電極９ａ，９ｂを形成し
た後、ポリイミド樹脂等の絶縁膜１２がコイル用導体８
の一部を被覆するべく局所的に絶縁体層５の表面に設け
られる。さらに、この絶縁膜１２の表面にコイル用導体
８の他方の端部と引出し電極９ｂを電気的に接続する接
続導体１５を配設する。Next, as shown in FIGS. 3 and 4, an insulating layer 5 of polyimide resin or the like is formed on the upper surface of the dielectric substrate 1 over substantially the entire surface by means of screen printing or the like. However, the insulator layer 5 is not always necessary. The reason for providing this is to reduce the stray capacitance generated between the lines of the coil conductor 8 described later by utilizing the low dielectric constant of the insulator layer 5.
Further, the spiral coil conductor 8, the extraction electrode 9a, and the extraction electrode 9b are respectively formed on the center portion, the left edge portion, and the right edge portion of the surface of the insulator layer 5 by dimensional accuracy by means such as a sputtering method or a photoresist method. Well formed. One end of the coil conductor 8 is electrically connected to the extraction electrode 9a. After forming the coil conductor 8 and the extraction electrodes 9a and 9b, the insulating film 12 made of polyimide resin or the like is used to form the coil conductor 8
Is locally provided on the surface of the insulator layer 5 so as to cover a part thereof. Further, a connection conductor 15 is provided on the surface of the insulating film 12 to electrically connect the other end of the coil conductor 8 and the extraction electrode 9b.
【０００９】次に、図５及び図６に示すように、誘電体
基板１の下面に容量電極３をスパッタ法やフォトレジス
ト法等の手段を用いて寸法精度良く形成した後、コイル
用導体８や容量電極３等をポリイミド樹脂等の絶縁体層
１７，１８にて被覆する。なお、量産時は、この後マザ
ー基板を製品毎に切り離すことになる。さらに、基板１
の左右両端部に外部電極２０，２１をスパッタ等の手段
にて設けて完成品とする。Next, as shown in FIGS. 5 and 6, the capacitor electrode 3 is formed on the lower surface of the dielectric substrate 1 with high dimensional accuracy by means such as a sputtering method or a photoresist method, and then the coil conductor 8 is formed. The capacitor electrodes 3 and the like are covered with insulating layers 17 and 18 such as polyimide resin. During mass production, the mother board is then separated into individual products. Furthermore, the substrate 1
External electrodes 20 and 21 are provided on the left and right ends of the substrate by means such as sputtering to complete the product.
【００１０】外部電極２０は容量電極２及び引出し電極
９ａに電気的に接続しており、外部電極２１は容量電極
３及び引出し電極９ｂに電気的に接続している。図７は
こうして得られたＬＣ共振子の電気等価回路図である。
ここに、Ｃは容量電極２と３の間に発生するキャパシタ
ンスであり、Ｌはコイル用導体８に発生するインダクタ
ンスである。キャパシタンスＣは、寸法精度の良い誘電
体基板１や容量電極２，３にて構成されたコンデンサの
キャパシタンスであるので、その数値のばらつきは小さ
い。また、コイル用導体８は、従来のように複数個のコ
イル用導体をスルーホール等を介してシリーズに接続す
る構造ではないので、寸法精度の優れた薄膜状コイルと
なり、インダクタンスＬのばらつきが少ないコイルが得
られる。この結果、共振特性を調整するためのトリミン
グを必要としないＬＣ共振子が得られる。The external electrode 20 is electrically connected to the capacitance electrode 2 and the extraction electrode 9a, and the external electrode 21 is electrically connected to the capacitance electrode 3 and the extraction electrode 9b. FIG. 7 is an electrical equivalent circuit diagram of the LC resonator thus obtained.
Here, C is a capacitance generated between the capacitive electrodes 2 and 3, and L is an inductance generated in the coil conductor 8. Since the capacitance C is the capacitance of the capacitor composed of the dielectric substrate 1 and the capacitance electrodes 2 and 3 having high dimensional accuracy, the variation in the numerical value is small. Further, since the coil conductor 8 does not have a structure in which a plurality of coil conductors are connected in series through a through hole or the like as in the conventional case, the coil conductor 8 is a thin film coil having excellent dimensional accuracy, and variations in the inductance L are small. The coil is obtained. As a result, an LC resonator that does not require trimming for adjusting resonance characteristics can be obtained.
【００１１】なお、本発明に係るＬＣ共振子の製造方法
は、前記実施例に限定するものではなく、その要旨の範
囲内で種々に変形することができる。コイル用導体や容
量電極の形状は任意であって製品の仕様に合わせて決定
される。また、前記実施例のＬＣ共振子は等価電気回路
では並列共振回路を構成するものであるが、直列共振回
路を構成するものでもよい。The method of manufacturing the LC resonator according to the present invention is not limited to the above embodiment, but can be variously modified within the scope of the gist thereof. The shapes of the coil conductor and the capacitive electrode are arbitrary and are determined according to the product specifications. Further, although the LC resonator of the above embodiment constitutes a parallel resonance circuit in the equivalent electric circuit, it may also constitute a series resonance circuit.
【００１２】[0012]
【発明の効果】以上の説明で明らかなように、本発明に
よれば、一方の容量電極を内蔵した誘電体基板の一方の
面に前記容量電極とコンデンサを形成する他方の容量電
極を設け、かつ、誘電体基板の他方の面にコイル用導体
を設けたので、キャパシタンスＣのばらつきが少ない板
状のコンデンサとインダクタンスＬのばらつきが少ない
薄膜状のコイルが形成され、共振特性を調整するための
トリミングを必要としないＬＣ共振子が得られる。As is apparent from the above description, according to the present invention, the capacitance electrode and the other capacitance electrode for forming a capacitor are provided on one surface of the dielectric substrate having one capacitance electrode built therein, In addition, since the coil conductor is provided on the other surface of the dielectric substrate, a plate-shaped capacitor having a small variation in capacitance C and a thin-film coil having a small variation in inductance L are formed to adjust resonance characteristics. An LC resonator is obtained that does not require trimming.
【図１】本発明に係るＬＣ共振子の製造方法の一実施例
を示す斜視図。FIG. 1 is a perspective view showing an embodiment of a method for manufacturing an LC resonator according to the present invention.
【図２】図１に示したＸ−Ｘ’の垂直断面図。FIG. 2 is a vertical cross-sectional view taken along line X-X ′ shown in FIG.
【図３】本発明に係るＬＣ共振子の製造方法の一実施例
を示す斜視図。FIG. 3 is a perspective view showing an embodiment of a method for manufacturing an LC resonator according to the present invention.
【図４】図３に示したＸ−Ｘ’の垂直断面図。FIG. 4 is a vertical cross-sectional view taken along line X-X ′ shown in FIG.
【図５】本発明に係るＬＣ共振子の製造方法の一実施例
を示す斜視図。FIG. 5 is a perspective view showing an embodiment of a method for manufacturing an LC resonator according to the present invention.
【図６】図５に示したＸ−Ｘ’の垂直断面図。6 is a vertical cross-sectional view taken along line X-X ′ shown in FIG.
【図７】図５に示したＬＣ共振子の等価電気回路図。7 is an equivalent electric circuit diagram of the LC resonator shown in FIG.
１…誘電体基板 ２，３…容量電極 ８…コイル用導体 ２０，２１…外部電極 1 ... Dielectric substrate 2, 3 ... Capacitance electrode 8 ... Coil conductor 20, 21 ... External electrode
───────────────────────────────────────────────────── フロントページの続き (72)発明者 牧田 隆志 京都府長岡京市天神二丁目26番10号 株式 会社村田製作所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Takashi Makita 2-26-10 Tenjin Tenjin, Nagaokakyo, Kyoto Prefecture Murata Manufacturing Co., Ltd.
Claims (1)
一方の面に、前記容量電極と共にコンデンサを形成する
他方の容量電極を設ける工程と、 前記誘電体基板の他方の面にコイル用導体を設ける工程
と、 前記容量電極とコイル用導体とを外部電極にて電気的に
接続する工程と、 を備えたことを特徴とするＬＣ共振子の製造方法。Claim: What is claimed is: 1. A step of providing another capacitance electrode forming a capacitor together with the capacitance electrode on one surface of a dielectric substrate containing one capacitance electrode, and the other of the dielectric substrates. And a step of electrically connecting the capacitor electrode and the coil conductor with an external electrode. A method of manufacturing an LC resonator, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3160517A JP2638339B2 (en) | 1991-07-01 | 1991-07-01 | LC resonator and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3160517A JP2638339B2 (en) | 1991-07-01 | 1991-07-01 | LC resonator and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0513254A true JPH0513254A (en) | 1993-01-22 |
| JP2638339B2 JP2638339B2 (en) | 1997-08-06 |
Family
ID=15716673
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3160517A Expired - Fee Related JP2638339B2 (en) | 1991-07-01 | 1991-07-01 | LC resonator and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2638339B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06318534A (en) * | 1993-05-06 | 1994-11-15 | Rohm Co Ltd | Chip type composite electronic component and manufacture of the same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58145114A (en) * | 1982-01-25 | 1983-08-29 | ティーディーケイ株式会社 | Lc composite part |
-
1991
- 1991-07-01 JP JP3160517A patent/JP2638339B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58145114A (en) * | 1982-01-25 | 1983-08-29 | ティーディーケイ株式会社 | Lc composite part |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06318534A (en) * | 1993-05-06 | 1994-11-15 | Rohm Co Ltd | Chip type composite electronic component and manufacture of the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2638339B2 (en) | 1997-08-06 |
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