JPH05159263A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH05159263A JPH05159263A JP3320177A JP32017791A JPH05159263A JP H05159263 A JPH05159263 A JP H05159263A JP 3320177 A JP3320177 A JP 3320177A JP 32017791 A JP32017791 A JP 32017791A JP H05159263 A JPH05159263 A JP H05159263A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic layer
- coercive force
- magnetic
- film
- plane direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
(57)【要約】
【目的】 磁気テープ、またはコンピュータ等に使用さ
れる磁気ディスク等の磁気記録媒体において、高分子基
板等の基板材料のコストが高いという課題を解決し、種
々な基板材料に合わせた磁性層を構成して磁気特性に優
れた、かつ安価な磁気記録媒体を得る。
【構成】 高分子基板4側から順にCoとCrまたはC
oとCrとNiを主成分として含む第1の磁性層11
と、CoとOまたはCoとNiとOを主成分として含む
第2の磁性層からなり、第1の磁性層11の膜面内方向
の保磁力x(Oe)が200以上で、第2の磁性層12
のみの膜面内方向の保磁力が第1の磁性層11のみの保
磁力よりも大きく、かつ積層後の膜面内方向の保磁力を
第1の磁性層11の保磁力の(−9/20x+340)
%以上とする。
【効果】 使用する安価な高分子基板の材料に合わせた
優れた記録再生特性を得ることができる。
(57) [Abstract] [Purpose] For magnetic recording media such as magnetic tapes or magnetic disks used in computers and the like, solving the problem of high cost of substrate materials such as polymer substrates, and solving various substrate materials. A magnetic recording medium having excellent magnetic characteristics and inexpensive is obtained by forming the combined magnetic layers. [Structure] Co and Cr or C in order from the polymer substrate 4 side
First magnetic layer 11 containing o, Cr and Ni as main components
And a second magnetic layer containing Co and O or Co, Ni and O as main components, and the coercive force x (Oe) in the in-plane direction of the first magnetic layer 11 is 200 or more. Magnetic layer 12
The coercive force in the film in-plane direction is larger than the coercive force in the first magnetic layer 11 only, and the coercive force in the film in-plane direction after lamination is (-9 / 20x + 340)
% Or more. [Effect] It is possible to obtain excellent recording / reproducing characteristics according to the material of the inexpensive polymer substrate used.
Description
【0001】[0001]
【産業上の利用分野】本発明は、オーディオ機器,ビデ
オ機器等に使用される磁気テープまたはコンピュータ等
に使用される磁気ディスク等の積層薄膜よりなる磁気記
録媒体に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium comprising a laminated thin film such as a magnetic tape used in audio equipment, video equipment or the like or a magnetic disk used in computers or the like.
【0002】[0002]
【従来の技術】情報化社会の進展に伴い情報記録担体の
大容量化,高密度化が進められている。磁気テープの分
野においても記録媒体の高密度化を目指した研究開発が
盛んであり、これに応える薄膜媒体がいくつか提案され
ている。超高密度磁気記録材料としてはCo−Cr等が
広く研究されており、Co−Cr薄膜(あるいはCo−
Ni−Cr薄膜)等を用いた研究開発が行われている。
またCo−Cr薄膜の上に磁性を有するCo−O(ある
いはCo−Ni−O薄膜)を積層した記録媒体(以下2
層媒体と略す)によって、記録密度特性と実用耐久性の
両立を目指した研究もされている。2. Description of the Related Art With the progress of information society, information recording carriers have been increased in capacity and density. Also in the field of magnetic tapes, research and development aiming at increasing the density of recording media have been actively conducted, and some thin film media have been proposed to meet this demand. Co-Cr and the like have been widely studied as an ultra-high density magnetic recording material.
Research and development using (Ni-Cr thin film) and the like are being conducted.
In addition, a recording medium (hereinafter referred to as “2”) in which a magnetic Co—O (or Co—Ni—O thin film) is laminated on a Co—Cr thin film
A layered medium) is also being researched to achieve both recording density characteristics and practical durability.
【0003】また、これらの薄膜磁気記録媒体を製造す
る方法としては、連続巻き取り真空蒸着法が特にその生
産性において他を凌いでおり、現実的量産法として非常
に有力である。Further, as a method for producing these thin film magnetic recording media, the continuous winding vacuum vapor deposition method is particularly superior in productivity and is very effective as a practical mass production method.
【0004】図2は磁気記録媒体を製造する場合の蒸着
装置の概要を示すものであり、図に示すように排気系1
によって真空排気された真空槽2の中で巻き出しロール
3から矢印で示す回転方向に沿って巻出された長尺の高
分子基板4が磁性層形成用の円筒状キャン5の周面に沿
って走行中に電子ビーム6を照射されている電子ビーム
蒸発源7よりマスク8の開口部9より磁性層の蒸着を受
けた後に、巻き取りロール10に巻き取られ、磁気テー
プが製造される。例えば、Co−Cr磁性薄膜の形成に
おいてはCo−Crを蒸発材料として用いればよく、ま
た、Co−O薄膜の形成においては酸素雰囲気にてCo
を蒸発させればよい。FIG. 2 shows an outline of a vapor deposition apparatus for manufacturing a magnetic recording medium. As shown in FIG.
The long polymer substrate 4 unwound from the unwinding roll 3 in the rotation direction shown by the arrow in the vacuum chamber 2 evacuated by is formed along the circumferential surface of the cylindrical can 5 for forming the magnetic layer. After the electron beam evaporation source 7 which is being irradiated with the electron beam 6 during the traveling receives the vapor deposition of the magnetic layer from the opening 9 of the mask 8, the magnetic layer is taken up by the take-up roll 10 to manufacture a magnetic tape. For example, Co—Cr may be used as an evaporation material in forming the Co—Cr magnetic thin film, and Co may be formed in an oxygen atmosphere in forming the Co—O thin film.
Can be evaporated.
【0005】[0005]
【発明が解決しようとする課題】しかしながら2層構造
の媒体においてはその最適構成が十分明らかにされてお
らず、高C/Nを実現するための媒体の構成が求められ
ていた。また薄膜型の磁気記録媒体の実用化においては
媒体の特性はもちろんのこと、材料コストを低く抑える
ことが重要である。材料コストに占める高分子基板の割
合は大きく、安価な基板材料が求められる。真空蒸着法
で形成するCo−Cr系の磁気記録媒体においてはこれ
までポリアミドやポリイミド基板が用いられているが、
これらの超耐熱性高分子基板は高価であり、比較的安価
なポリエチレンナフタレート基板や、さらに安価なポリ
エチレンテレフタレート基板を用いた媒体設計もまた実
用化の上で必要であった。However, the optimum structure of the two-layer structure medium has not been fully clarified, and the structure of the medium for realizing high C / N has been demanded. Further, in practical use of a thin film type magnetic recording medium, it is important to keep the material cost low as well as the characteristics of the medium. Polymer substrates account for a large proportion of the material cost, and inexpensive substrate materials are required. Polyamide or polyimide substrates have been used so far in Co-Cr based magnetic recording media formed by vacuum deposition.
These ultra-heat-resistant polymer substrates are expensive, and a medium design using a relatively inexpensive polyethylene naphthalate substrate or a more inexpensive polyethylene terephthalate substrate was also necessary for practical use.
【0006】本発明はこのような課題を解決するもので
あり、高分子基板材料の種類に合わせた磁性層を構成す
ることにより、記録再生特性に優れた磁気記録媒体を提
供することを目的とする。The present invention is intended to solve such a problem, and an object of the present invention is to provide a magnetic recording medium having excellent recording and reproducing characteristics by forming a magnetic layer according to the type of polymer substrate material. To do.
【0007】[0007]
【課題を解決するための手段】上記目的を達成するため
に本発明は、高分子基板上に直接または下地層を介して
磁性層を有する磁気記録媒体において、磁性層が高分子
基板側から順にCoとCrまたはCoとCrとNiを主
成分として含む第1の磁性層と、CoとOまたはCoと
NiとOを主成分として含む第2の磁性層からなり、そ
の第2の磁性層を除去したときの第1の磁性層の膜面内
方向の保磁力xが200エルステッド以上で、第2の磁
性層のみの膜面内方向の保磁力が第1の磁性層のみの膜
面内方向の保磁力よりも大きく、かつ積層後の膜面内方
向の保磁力が第1の磁性層の膜面内方向の保磁力の(−
9/20x+340)%以上であることを特徴とするも
のである。In order to achieve the above object, the present invention provides a magnetic recording medium having a magnetic layer directly on a polymer substrate or via an underlayer, in which the magnetic layers are sequentially arranged from the polymer substrate side. A first magnetic layer containing Co and Cr or Co, Cr and Ni as main components, and a second magnetic layer containing Co and O or Co, Ni and O as main components. The coercive force x in the in-plane direction of the first magnetic layer when removed is 200 oersteds or more, and the coercive force in the in-plane direction of only the second magnetic layer is in the in-plane direction of only the first magnetic layer. Is larger than the coercive force of the first magnetic layer in the in-plane direction of the first magnetic layer (−).
9 / 20x + 340)% or more.
【0008】[0008]
【作用】したがって本発明によれば、第1の磁性層と第
2の磁性層の磁気結合を強くすることにより第1の磁性
層からのノイズを低下させて、高いC/Nを得ることが
できる。Therefore, according to the present invention, by strengthening the magnetic coupling between the first magnetic layer and the second magnetic layer, the noise from the first magnetic layer can be reduced and a high C / N can be obtained. it can.
【0009】[0009]
【実施例】以下、本発明の一実施例について図1〜図8
を用いて説明する。図1に示すように高分子基板からな
る支持基体4に電子ビーム蒸着法によって、第1の磁性
層11として飽和磁化550emu/ccのCo−Cr
層を形成した。つづいて電子ビーム蒸着法によって、第
2の磁性層12としてCo−O層を形成して磁気記録媒
体(以下媒体と記す)を得た。第2の磁性層12の飽和
磁化もまた550emu/ccである。得られた媒体を
テープ状に裁断してリングヘッドで記録再生特性を評価
した。媒体とリングヘッドの相対速度は3.8m/sと
た。以上の条件でキャリア(C)およびノイズ(N)レ
ベルの測定を行った。測定バンド幅は30KHzとした。
また保磁力を振動試料磁力系によって測定した。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described below with reference to FIGS.
Will be explained. As shown in FIG. 1, a Co-Cr having a saturation magnetization of 550 emu / cc was formed as a first magnetic layer 11 on a supporting substrate 4 made of a polymer substrate by an electron beam evaporation method.
Layers were formed. Subsequently, a Co—O layer was formed as the second magnetic layer 12 by an electron beam evaporation method to obtain a magnetic recording medium (hereinafter referred to as a medium). The saturation magnetization of the second magnetic layer 12 is also 550 emu / cc. The obtained medium was cut into a tape and the recording / reproducing characteristics were evaluated with a ring head. The relative speed between the medium and the ring head was 3.8 m / s. The carrier (C) and noise (N) levels were measured under the above conditions. The measurement bandwidth was 30 KHz.
The coercive force was measured by a vibrating sample magnetic force system.
【0010】図3に円筒状キャン5の周面温度を変えて
第1の磁性層11(Co−Cr)のみを形成したときの
円筒状キャン5の周面温度と膜面内方向の保磁力(図中
または表中ではHc1と記す)の関係を示す。なお、本
発明において膜面内方向の保磁力とは、高分子基板4の
走行方向(基板幅方向と直交する方向)の面内保磁力と
する。図3中の○がポリエチレンテレフタレート基板を
用いた場合、△がポリエチレンナフタレート基板を用い
た場合、□がポリイミド基板をそれぞれ用いた場合であ
る。同一の周面温度においては、いずれの基板を用いた
場合にも同等の保磁力が得られるが、ポリエチレンテレ
フタレート基板を用いた場合には円筒状キャン5の周面
温度が60℃では蒸着時に高分子基板4の熱損傷が起
き、膜表面が粗面になって安定に製膜することができな
かった。またその周面温度が70℃ではさらに高分子基
板4の熱損傷はひどく、製膜は不可能であった。またポ
リエチレンナフタレート基板を用いた場合には周面温度
が120℃では蒸着時に高分子基板4の熱損傷が起き、
膜表面が粗面になって安定に製膜することができなかっ
た。また周面温度が130℃ではさらに高分子基板4の
熱損傷はひどく、製膜は不可能であった。これに対して
ポリイミド基板を用いた場合には周面温度300℃まで
製膜ができた。したがって、ポリエチレンテレフタレー
ト基板の場合は300エルステッド以下、ポリエチレン
ナフタレート基板の場合は400エルステッド以下の第
1の磁性層11の膜面内保磁力となるので、各高分子基
板4において蒸着可能な温度範囲での媒体の最適設計が
必要となる。In FIG. 3, the peripheral surface temperature of the cylindrical can 5 and the coercive force in the film surface direction when the peripheral surface temperature of the cylindrical can 5 is changed to form only the first magnetic layer 11 (Co-Cr). (Hc 1 in the figure or table). In the present invention, the coercive force in the in-plane direction of the film is an in-plane coercive force in the traveling direction of the polymer substrate 4 (direction orthogonal to the substrate width direction). In FIG. 3, a circle indicates a case where a polyethylene terephthalate substrate is used, a triangle indicates a case where a polyethylene naphthalate substrate is used, and a square indicates a case where a polyimide substrate is used. At the same peripheral surface temperature, the same coercive force is obtained regardless of which substrate is used, but when the polyethylene terephthalate substrate is used, the peripheral surface temperature of the cylindrical can 5 is 60 ° C. The molecular substrate 4 was thermally damaged, and the surface of the film became rough so that the film could not be stably formed. Further, when the peripheral surface temperature was 70 ° C., the heat damage to the polymer substrate 4 was more severe, and film formation was impossible. Further, when a polyethylene naphthalate substrate is used, when the peripheral surface temperature is 120 ° C., the polymer substrate 4 is thermally damaged during vapor deposition,
The surface of the film became rough and it was not possible to form a stable film. Further, when the peripheral surface temperature was 130 ° C., the heat damage to the polymer substrate 4 was more serious, and film formation was impossible. On the other hand, when the polyimide substrate was used, film formation was possible up to a peripheral surface temperature of 300 ° C. Therefore, in the case of a polyethylene terephthalate substrate, the coercive force within the film surface of the first magnetic layer 11 is 300 oersted or less, and in the case of a polyethylene naphthalate substrate, it is 400 oersted or less. Optimal design of the medium in is required.
【0011】図4は第1の磁性層11(Co−Cr)の
保磁力をパラメータとして、さらにその上に第2の磁性
層12(Co−O)を80nm形成した後の積層膜全体
の膜面内保磁力(図中または表中ではHc2と記す)と
第1の磁性層11の保磁力との比と、記録波長0.5μ
mにおけるキャリアレベルとの関係を示す図(a)およ
びノイズレベルとの関係を示す図(b)である。図4に
おいて、横軸の200%とは、積層後の膜面内保磁力が
第1の磁性層11の保磁力の2倍であることを意味す
る。Co−O層を形成する際の円筒状キャン5の周面温
度は20℃であり、第1の磁性層11を設けずに高分子
基板4上に直接第2の磁性層12を形成した場合の保磁
力は1400エルステッドである。また積層膜の膜面内
保磁力の調整は第1の磁性層11の膜厚を変えることに
よって行った。図4(a),(b)から分かるように積
層後の膜面内保磁力の増加の割合が大きくなるに従って
ノイズレベルは低下し、第1の磁性層11のみでの膜面
内保磁力400エルステッドでは160%、300エル
ステッドでは200%、200エルステッドでは250
%でそれぞれノイズ低下がほぼ飽和する。一方、第1の
磁性層11のみでの膜面内保磁力が100エルステッド
では積層による保磁力増加の程度はノイズに対してほと
んど影響がない。また全般に第1の磁性層11の膜面内
保磁力が大きい方が積層媒体のノイズは小さいので、製
膜可能な範囲で膜面内保磁力は高い方が望ましい。FIG. 4 shows the film of the entire laminated film after forming the second magnetic layer 12 (Co-O) to a thickness of 80 nm on the coercive force of the first magnetic layer 11 (Co-Cr) as a parameter. The ratio of the in-plane coercive force (denoted as Hc 2 in the figure or in the table) to the coercive force of the first magnetic layer 11 and the recording wavelength of 0.5 μm.
FIG. 6A is a diagram showing a relationship with a carrier level in m, and FIG. 8B is a diagram showing a relationship with a noise level. In FIG. 4, 200% on the horizontal axis means that the in-plane coercive force after lamination is twice the coercive force of the first magnetic layer 11. The peripheral surface temperature of the cylindrical can 5 when forming the Co—O layer is 20 ° C., and the second magnetic layer 12 is formed directly on the polymer substrate 4 without providing the first magnetic layer 11. Has a coercive force of 1400 Oersted. The in-plane coercive force of the laminated film was adjusted by changing the film thickness of the first magnetic layer 11. As can be seen from FIGS. 4A and 4B, the noise level decreases as the rate of increase of the in-plane coercive force after lamination increases, and the in-plane coercive force 400 of only the first magnetic layer 11 increases. 160% for Oersted, 200% for 300 Oersted, 250 for 200 Oersted
%, The noise reduction is almost saturated. On the other hand, when the in-plane coercive force of only the first magnetic layer 11 is 100 oersted, the degree of increase in coercive force due to stacking has almost no effect on noise. Further, generally, the larger the in-plane coercive force of the first magnetic layer 11 is, the smaller the noise of the laminated medium is. Therefore, it is desirable that the in-plane coercive force of the first magnetic layer 11 is as high as possible.
【0012】図5(a),(b)は高分子基板4上に直
接第2の磁性層12を形成した場合の膜面内保磁力が2
000エルステッドの場合の図4と同様の実験を行った
結果を示すものである。第2の磁性層12の厚さは10
0nmとした。図5では図4の場合に比べてノイズレベ
ルが全体的に若干低いが、この場合にも第1の磁性層1
1のみでの膜面内保磁力400エルステッドでは160
%、300エルステッドでは200%、200エルステ
ッドでは250%でそれぞれノイズ低下がほぼ飽和す
る。第1の磁性層11のみでの膜面内保磁力が100エ
ルステッドでは積層による保磁力増加の程度は図4の場
合と同様、ノイズ低下に対してほとんど効果がない。5A and 5B show the in-plane coercive force of 2 when the second magnetic layer 12 is formed directly on the polymer substrate 4.
FIG. 5 shows the results of an experiment similar to FIG. 4 in the case of 000 Oersted. The thickness of the second magnetic layer 12 is 10
It was set to 0 nm. In FIG. 5, the noise level is slightly lower than that of FIG. 4, but in this case as well, the first magnetic layer 1
In the in-plane coercive force of 400 oersted with only 1, 160
%, 300 Oersted at 200%, and 200 Oersted at 250%, the noise reduction is almost saturated. When the in-plane coercive force of only the first magnetic layer 11 is 100 Oersted, the degree of increase in coercive force due to lamination has almost no effect on noise reduction, as in the case of FIG.
【0013】したがって図4,図5の結果から、第1の
磁性層11のみの場合の膜面内方向の保磁力に対して積
層後の膜面内方向の保磁力がポリエチレンテレフタレー
トの場合は250%以上、ポリエチレンナフタレートの
場合は200%以上、ポリイミドの場合は160%以上
になるような媒体構成とすることが望ましいことが分か
る。Therefore, from the results of FIGS. 4 and 5, when the coercive force in the film in-plane direction after lamination is 250 with respect to the coercive force in the film in-plane direction when only the first magnetic layer 11 is formed, it is 250. It can be seen that it is desirable to have a medium structure in which the content is at least%, in the case of polyethylene naphthalate, at least 200%, and in the case of polyimide, at least 160%.
【0014】このように積層後の保磁力増加が大きい場
合に低ノイズの媒体が得られる理由は次のように考えら
れる。すなわち、第1の磁性層11の上に第2の磁性層
12を形成すると2つの磁性層は強磁性結合し、第1の
磁性層11中の低保磁力成分が保磁力の大きな第2の磁
性層12によって拘束されて高保磁力化する。高保磁力
化の度合は両磁性層の関係によって決まり、第1の磁性
層11が厚くなり過ぎると第2の磁性層12の影響が小
さくなり、低保磁力成分がノイズ源として多く残る。第
1の磁性層11は磁気ヘッドから離れており、特にその
面内成分が低保磁力であると再生ノイズとなり易く、第
2の磁性層12による膜面内方向の保磁力増加はノイズ
低減に有効である。The reason why a medium with low noise can be obtained when the increase in coercive force after lamination is large is considered as follows. That is, when the second magnetic layer 12 is formed on the first magnetic layer 11, the two magnetic layers are ferromagnetically coupled, and the low coercive force component in the first magnetic layer 11 has a large coercive force. It is restrained by the magnetic layer 12 to have a high coercive force. The degree of high coercive force is determined by the relationship between the two magnetic layers. If the first magnetic layer 11 becomes too thick, the effect of the second magnetic layer 12 becomes small, and many low coercive force components remain as noise sources. The first magnetic layer 11 is distant from the magnetic head, and particularly when the in-plane component thereof has a low coercive force, read noise is likely to occur, and an increase in the in-plane coercive force by the second magnetic layer 12 reduces noise. It is valid.
【0015】図6は高分子基板4上に直接形成したとき
の膜面内保磁力が1500エルステッド、膜厚100n
mの第2の磁性層12を、200,300、および40
0エルステッドの第1の磁性層11の上に積層した場合
の、第1の磁性層11の膜厚と、積層膜の膜面内方向の
保磁力との関係を示す図である。図6から分かるように
第1の磁性層11が厚くなるにしたがって、積層膜の保
磁力の低下が起こり、図4(a),(b),図5
(a),(b)の結果でのノイズ低減に必要な膜面内保
磁力を下回る保磁力低下は第1の磁性層11の膜面内方
向の保磁力が200,300,400エルステッドの時
にそれぞれ140,170,200nm以上で起こる。FIG. 6 shows an in-plane coercive force of 1500 oersted and a film thickness of 100 n when directly formed on the polymer substrate 4.
m of the second magnetic layer 12, 200, 300, and 40
FIG. 6 is a diagram showing the relationship between the film thickness of the first magnetic layer 11 and the coercive force in the in-plane direction of the laminated film when the first magnetic layer 11 is laminated on the 0 Oersted first magnetic layer 11. As can be seen from FIG. 6, as the thickness of the first magnetic layer 11 increases, the coercive force of the laminated film decreases, and FIGS. 4 (a), 4 (b), 5
The coercive force decrease below the in-plane coercive force required for noise reduction in the results of (a) and (b) is caused when the in-plane coercive force of the first magnetic layer 11 is 200, 300, 400 oersted. It occurs at 140, 170, and 200 nm or more, respectively.
【0016】図7は高分子基板4上に直接形成したとき
の膜面内保磁力が2000エルステッド、膜厚100n
mの第2の磁性層12を、200,300、および40
0エルステッドの第1の磁性層11の上に積層した場合
の、第1の磁性層の膜厚11と、積層膜の膜面内方向の
保磁力との関係を示す図であり、図6の場合と同様に第
1の磁性層11が厚くなるにしたがって、積層膜の保磁
力の低下が起こり、図4(a),(b),図5(a),
(b)の結果でのノイズ低減に必要な膜面内保磁力を下
回る保磁力低下は、第1の磁性層11の膜面内方向の保
磁力が200,300,400エルステッドの時にそれ
ぞれ180,200,210nm以上で起こる。FIG. 7 shows an in-plane coercive force of 2000 oersted and a film thickness of 100 n when directly formed on the polymer substrate 4.
m of the second magnetic layer 12, 200, 300, and 40
7 is a diagram showing the relationship between the film thickness 11 of the first magnetic layer and the coercive force in the in-plane direction of the laminated film when the first magnetic layer 11 of 0 Oersted is laminated on the first magnetic layer 11. As in the case, as the first magnetic layer 11 becomes thicker, the coercive force of the laminated film lowers, and as shown in FIGS. 4 (a), 4 (b), 5 (a),
The decrease in coercive force below the in-plane coercive force required for noise reduction in the result of (b) is 180, when the coercive force in the in-plane direction of the first magnetic layer 11 is 200, 300, 400 oersted, respectively. Occurs above 200,210 nm.
【0017】したがって、本発明の磁気記録媒体を具体
的な手段を用いて実現するには、真空中で長尺のポリエ
チレンテレフタレート基板よりなる高分子基板4を円筒
状キャン5の周面に沿って走行させながら真空蒸着法に
よってその高分子基板4上に直接あるいは下地層を介し
てCoとCrあるいはCoとCrとNiを主成分として
含む第1の磁性層11と、CoとOあるいはCoとNi
とOと主成分として含む第2の磁性層12を順次形成し
て磁気記録媒体を製造する場合、第1の磁性層11を形
成する際に円筒状キャン5の周面温度を0℃以上50℃
以下とし、かつ積層後の膜面内方向の保磁力が1層目の
みの膜面内方向保磁力の250%以上となる膜厚で第1
の磁性層11を形成すること、または真空中で長尺のポ
リエチレンナフタレート基板よりなる高分子基板4を円
筒状キャン5の周面に沿って走行させながら真空蒸着法
によってその高分子基板4上に直接あるいは下地層を介
してCoとCrあるいはCoとCrとNiを主成分とし
て含む第1の磁性層11と、CoとOあるいはCoとN
iとOを主成分として含む第2の磁性層12とを順次形
成して磁気記録媒体を製造する場合、第1の磁性層11
を形成する際に、円筒状キャン5の周面温度を60℃以
上110℃以下とし、かつ積層後の膜面内方向の保磁力
が1層目のみの膜面内方向保磁力の200%以上となる
膜厚で第1の磁性層11を形成すること、または真空中
で長尺のポリイミド基板よりなる高分子基板4を円筒状
キャン5の周面に沿って走行させながら真空蒸着法によ
ってその高分子基板4上に直接あるいは下地層を介して
CoとCrあるいはCoとCrとNiを主成分として含
む第1の磁性層11と、CoとOあるいはCoとNiと
Oを主成分として含む第2の磁性層12とを順次形成し
て磁気記録媒体を製造する場合、第1の磁性層11を形
成する際に、円筒状キャン5の周面温度を120℃以上
300℃以下とし、かつ積層後の膜面内方向の保磁力が
1層目のみの膜面内方向保磁力の160%以上となる膜
厚で第1の磁性層11を形成することによってなされ
る。Therefore, in order to realize the magnetic recording medium of the present invention by using a concrete means, a polymer substrate 4 made of a long polyethylene terephthalate substrate in vacuum is provided along the circumferential surface of a cylindrical can 5. While traveling, the first magnetic layer 11 containing Co and Cr or Co, Cr and Ni as main components is directly deposited on the polymer substrate 4 or via the underlayer by the vacuum deposition method, and Co and O or Co and Ni.
When the magnetic recording medium is manufactured by sequentially forming the second magnetic layer 12 containing O and O as main components, the peripheral surface temperature of the cylindrical can 5 is set to 0 ° C. or higher when forming the first magnetic layer 11. ℃
The film thickness is set as follows, and the coercive force in the in-plane direction after lamination is 250% or more of the in-plane coercive force of only the first layer.
Magnetic layer 11 is formed on the polymer substrate 4 by vacuum vapor deposition while moving the polymer substrate 4 made of a long polyethylene naphthalate substrate in vacuum along the peripheral surface of the cylindrical can 5. The first magnetic layer 11 containing Co and Cr or Co, Cr and Ni as main components, directly or through an underlayer, and Co and O or Co and N.
When a magnetic recording medium is manufactured by sequentially forming the second magnetic layer 12 containing i and O as main components, the first magnetic layer 11
When forming the film, the peripheral surface temperature of the cylindrical can 5 is set to 60 ° C. or higher and 110 ° C. or lower, and the coercive force in the film in-plane direction after lamination is 200% or more of the in-plane coercive force of only the first layer The first magnetic layer 11 is formed to have a film thickness such that the film thickness becomes, or the polymer substrate 4 made of a long polyimide substrate is run in vacuum along the peripheral surface of the cylindrical can 5 by a vacuum deposition method. A first magnetic layer 11 containing Co and Cr or Co, Cr and Ni as main components on the polymer substrate 4 directly or via an underlayer, and a first magnetic layer 11 containing Co and O or Co, Ni and O as main components. When the magnetic recording medium is manufactured by sequentially forming the second magnetic layer 12 and the second magnetic layer 12, the peripheral surface temperature of the cylindrical can 5 is set to 120 ° C. or more and 300 ° C. or less when forming the first magnetic layer 11, and the layers are stacked. The film surface where the coercive force in the subsequent film surface direction is only the first layer Made by forming a first magnetic layer 11 a thickness equal to or larger than 160% of the direction coercive force.
【0018】表1はそれぞれの高分子基板4を用いた場
合に最適な媒体設計の条件を示したものである。Table 1 shows optimum medium design conditions when each polymer substrate 4 is used.
【0019】[0019]
【表1】 [Table 1]
【0020】図8はこれまでの実施例で説明した結果を
まとめて示したものであり、第1の磁性層11のみの膜
面内保磁力と、高C/Nを得るのに必要な積層後の膜面
内保磁力の増倍率の関係を示す。図8から高C/Nを得
るのに必要な膜面内保磁力の増倍率をy(%)、第1の
磁性層11のみの膜面内保磁力をx(Oe)とすると、
y>−9/20+340であることが分かり、膜面内保
磁力が200エルステッド以上であること(x≧20
0)、および第2の磁性層12の膜面内保磁力が第1の
磁性層11の膜面内保磁力よりも大きいこと(y>10
0)とともに高C/N媒体の指標となることが分かる。FIG. 8 is a summary of the results described in the above-described examples. The in-plane coercive force of only the first magnetic layer 11 and the lamination required to obtain high C / N. The relationship of the multiplication factor of the in-plane coercive force afterwards is shown. If the multiplication factor of the in-plane coercive force required to obtain a high C / N from FIG. 8 is y (%) and the in-plane coercive force of only the first magnetic layer 11 is x (Oe),
It was found that y> -9 / 20 + 340, and the in-plane coercive force was 200 oersted or more (x ≧ 20
0), and the in-plane coercive force of the second magnetic layer 12 is larger than the in-plane coercive force of the first magnetic layer 11 (y> 10).
It can be seen that together with 0), it becomes an index of a high C / N medium.
【0021】なお、実施例としては第1の磁性層11と
してCo−Crを用いた場合についてのみ述べてきた
が、Co−Ni−Crを用いた場合や、第2の磁性層1
2としてCo−Oの代わりにCo−Ni−Oを用いた場
合にも同様の結果が得られた。Although only the case where Co--Cr is used as the first magnetic layer 11 has been described as an example, the case where Co--Ni--Cr is used and the case where the second magnetic layer 1 is used are described.
Similar results were obtained when Co-Ni-O was used instead of Co-O as 2.
【0022】また本発明でいう、第2の磁性層12とし
て、同じ材料を多層化したものを用いることもできる。
本発明においては磁気テープ形状の実施例についてのみ
述べたが、ディスク形状の媒体についても適用できるの
は言うまでもない。In the present invention, the second magnetic layer 12 may be made of the same material in multiple layers.
In the present invention, only the magnetic tape-shaped embodiment is described, but it goes without saying that the invention can be applied to a disk-shaped medium.
【0023】[0023]
【発明の効果】上記実施例から明らかなように本発明の
磁気記録媒体によれば、使用する高分子基板の材料に合
わせた第1の磁性層と第2の磁性層によって媒体を構成
することによって、記録再生特性の優れた磁気記録媒体
を安価に得ることができる。As is apparent from the above embodiments, according to the magnetic recording medium of the present invention, the medium is composed of the first magnetic layer and the second magnetic layer which are matched to the material of the polymer substrate used. Thus, a magnetic recording medium having excellent recording / reproducing characteristics can be obtained at low cost.
【図1】本発明の一実施例における磁気記録媒体の構成
を説明する図FIG. 1 is a diagram illustrating a configuration of a magnetic recording medium according to an embodiment of the present invention.
【図2】同磁気記録媒体を製造するために使用する蒸着
装置の概略断面図FIG. 2 is a schematic cross-sectional view of a vapor deposition apparatus used to manufacture the magnetic recording medium.
【図3】円筒状キャンの周面温度と膜面内方向の保磁力
との関係を示す特性図FIG. 3 is a characteristic diagram showing the relationship between the peripheral surface temperature of a cylindrical can and the coercive force in the in-plane direction of the film.
【図4】(a),(b)積層後の膜面内方向の保磁力の
変化と記録再生特性との関係を示す特性図FIG. 4A and FIG. 4B are characteristic diagrams showing the relationship between the change in coercive force in the in-plane direction of the film after lamination and the recording / reproducing characteristics.
【図5】(a),(b)積層後の膜面内方向の保磁力の
変化と記録再生特性との関係を示すもう一つの特性図5A and 5B are another characteristic diagrams showing the relationship between the change in coercive force in the in-plane direction of the film after lamination and the recording / reproducing characteristics.
【図6】第1の磁性層の膜厚を変えたときの積層後の膜
面内方向の保磁力の関係を示す特性図FIG. 6 is a characteristic diagram showing the relationship of coercive force in the in-plane direction after lamination when the film thickness of the first magnetic layer is changed.
【図7】第1の磁性層の膜厚を変えたときの積層後の膜
面内方向の保磁力を示すもう一つの特性図FIG. 7 is another characteristic diagram showing coercive force in the in-plane direction after lamination when the film thickness of the first magnetic layer is changed.
【図8】第1の磁性層の保磁力と高C/Nに必要な積層
後の保磁力増倍率の関係を示す特性図FIG. 8 is a characteristic diagram showing the relationship between the coercive force of the first magnetic layer and the coercive force multiplication factor required for high C / N after lamination.
4 高分子基板 11 第1の磁性層 12 第2の磁性層 4 Polymer Substrate 11 First Magnetic Layer 12 Second Magnetic Layer
Claims (1)
て磁性層を有する磁気記録媒体であって、前記磁性層が
前記高分子基板側から順にCoとCrまたはCoとCr
とNiを主成分として含む第1の磁性層と、CoとOま
たはCoとNiとOを主成分として含む第2の磁性層か
らなり、前記第2の磁性層を除去したときの前記第1の
磁性層の膜面内方向の保磁力x(Oe)が200以上
で、前記第2の磁性層のみの膜面内方向の保磁力が前記
第1の磁性層のみの膜面内方向の保磁力よりも大きく、
かつ積層後の膜面内方向の保磁力が前記第1の磁性層の
膜面内方向の保磁力の(−9/20x+340)%以上
であることを特徴とする磁気記録媒体。1. A magnetic recording medium having a magnetic layer on a polymer substrate directly or via an underlayer, wherein the magnetic layer is Co and Cr or Co and Cr in order from the polymer substrate side.
And a first magnetic layer containing Ni as a main component, and a second magnetic layer containing Co and O or Co, Ni and O as a main component, and the first magnetic layer when the second magnetic layer is removed. Has a coercive force x (Oe) in the in-plane direction of the magnetic layer of 200 or more, and a coercive force in the in-plane direction of only the second magnetic layer is in the in-plane direction of only the first magnetic layer. Greater than magnetic force,
A magnetic recording medium characterized in that the coercive force in the in-plane direction after lamination is (-9 / 20x + 340)% or more of the coercive force in the in-plane direction of the first magnetic layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3320177A JPH05159263A (en) | 1991-12-04 | 1991-12-04 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3320177A JPH05159263A (en) | 1991-12-04 | 1991-12-04 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05159263A true JPH05159263A (en) | 1993-06-25 |
Family
ID=18118557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3320177A Pending JPH05159263A (en) | 1991-12-04 | 1991-12-04 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05159263A (en) |
-
1991
- 1991-12-04 JP JP3320177A patent/JPH05159263A/en active Pending
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