JPH0517144Y2 - - Google Patents
Info
- Publication number
- JPH0517144Y2 JPH0517144Y2 JP14070985U JP14070985U JPH0517144Y2 JP H0517144 Y2 JPH0517144 Y2 JP H0517144Y2 JP 14070985 U JP14070985 U JP 14070985U JP 14070985 U JP14070985 U JP 14070985U JP H0517144 Y2 JPH0517144 Y2 JP H0517144Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- vacuum
- atmosphere
- container
- pores
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011148 porous material Substances 0.000 claims description 17
- 229910010272 inorganic material Inorganic materials 0.000 claims description 5
- 239000011147 inorganic material Substances 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 29
- 239000010409 thin film Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14070985U JPH0517144Y2 (fr) | 1985-09-17 | 1985-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14070985U JPH0517144Y2 (fr) | 1985-09-17 | 1985-09-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6250725U JPS6250725U (fr) | 1987-03-30 |
| JPH0517144Y2 true JPH0517144Y2 (fr) | 1993-05-10 |
Family
ID=31047813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14070985U Expired - Lifetime JPH0517144Y2 (fr) | 1985-09-17 | 1985-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0517144Y2 (fr) |
-
1985
- 1985-09-17 JP JP14070985U patent/JPH0517144Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6250725U (fr) | 1987-03-30 |
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