JPH0518465A - Sealing structure for vacuum device - Google Patents

Sealing structure for vacuum device

Info

Publication number
JPH0518465A
JPH0518465A JP17083091A JP17083091A JPH0518465A JP H0518465 A JPH0518465 A JP H0518465A JP 17083091 A JP17083091 A JP 17083091A JP 17083091 A JP17083091 A JP 17083091A JP H0518465 A JPH0518465 A JP H0518465A
Authority
JP
Japan
Prior art keywords
ring
seal member
side seal
dovetail groove
rubber tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17083091A
Other languages
Japanese (ja)
Inventor
Hiroomi Yamagami
広臣 山上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP17083091A priority Critical patent/JPH0518465A/en
Publication of JPH0518465A publication Critical patent/JPH0518465A/en
Pending legal-status Critical Current

Links

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  • Gasket Seals (AREA)

Abstract

PURPOSE:To facilitate mounting and removal of a lid side seal member by furnishing an extra dovetail groove for O-ring at the periphery nearer the atmosphere side than a dovetail groove for O-ring provided in a body side seal member, fitting a round cord packing loosely to a rubber tube, and fitting this rubber tube in the extra dovetail groove. CONSTITUTION:A dovetail groove 3 for O-ring is provided in the plane 2 of a body side seal member 1, and therein an O-ring 4 is fitted, and on the side nearer atmosphere than the dovetail groove 3 for O-ring, a plane 5 is formed with a level difference provided relative to the first named plane 2. This plane 5 is furnished with an extra dovetail groove 6 for O-ring, and if a rubber tube 8 with a round cord packing 7 fitted loosely, is fitted in this groove 6, the sealing surface of the rubber tube 8 will be positioned higher than the sealing surface of O-ring 4. A lid side seal member 9 is placed on the abovementioned body side seal member 1, and evacuation of a back empty vessel is commenced. When the lid side seal member 9 is pressed, the rubber tube 8 is put in tight attachment thereto, and the air-tightness in the initial period of evacuation can be kept. The lid side seal member 9 is pressed by the atmospheric pressure, and the O-ring 4 is put in tight attachment thereto.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は真空装置用シール構造に
関し、特に真空容器本体と蓋側シール部材の脱着を容易
にした真空装置用シール構造に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum device seal structure, and more particularly to a vacuum device seal structure in which a vacuum container body and a lid-side seal member are easily attached and detached.

【0002】[0002]

【従来の技術】従来の真空装置の真空容器は、図3に示
すように、本体側シール部材1の0リング用あり溝3に
0リング4を嵌装し、この0リング4にシール面を有す
る蓋側シール部材9を密着してシールするシール構造を
有している。シール面を密着させるためには、シール部
の全外周に亘って等間隔に締付け金具に12を設け、締
付けハンドル13にてシール面に均等に圧縮力が作用す
るように調整する。
2. Description of the Related Art As shown in FIG. 3, a vacuum container of a conventional vacuum apparatus has a 0 ring 4 fitted in a dovetail groove 3 for a 0 ring of a main body side seal member 1, and a sealing surface is attached to the 0 ring 4. It has a sealing structure for tightly sealing the lid-side sealing member 9 it has. In order to bring the seal surface into close contact with each other, the tightening metal fittings 12 are provided at equal intervals over the entire outer circumference of the seal portion, and the tightening handle 13 is adjusted so that the compressive force acts evenly on the seal surface.

【0003】[0003]

【発明が解決しようとする課題】この従来の真空容器で
は、本体側シール部材に嵌装された0リングに蓋側シー
ル部材を密着するために、シール部の全外周に亘って等
間隔に締付け金具を設けなくてはならなかった。また、
開口面積が大きくなれば本体側シール部材及び蓋側シー
ル部材の平面度は、加工精度が悪くなり、シール面の密
着を良くするために多大な圧縮力が必要となり、締付け
金具は大形化し、且つ、数量を増さなければならず蓋側
シール部材の脱着に多くの工数を要するという問題点が
あった。
In this conventional vacuum container, in order to bring the lid-side seal member into close contact with the O-ring fitted to the main body-side seal member, the lid-side seal member is tightened at equal intervals over the entire outer circumference thereof. I had to install metal fittings. Also,
If the opening area becomes large, the flatness of the main body side sealing member and the lid side sealing member will be inferior in processing accuracy, and a large compression force will be required to improve the close contact of the sealing surface. In addition, there is a problem that the number of man-hours must be increased and a lot of man-hours are required to attach and detach the lid-side seal member.

【0004】本発明の目的は、締付け金具が不要で、蓋
側シール部材の脱着が容易な真空装置用シール構造を提
供することにある。
An object of the present invention is to provide a sealing structure for a vacuum device, which does not require a tightening fitting and can easily attach and detach the lid side sealing member.

【0005】[0005]

【課題を解決するための手段】本発明は、本体側シール
部材の0リング用あり溝に0リングを嵌装し、該0リン
グにシール面を有する蓋側シール部材を密着してシール
する真空装置用シール構造において、前記本体側シール
部材の前記0リング用あり溝より大気側の外周と前記蓋
側シール部材のシール面より大気側の外周とのうちのい
ずれか一方にもう1つの0リング用あり溝を設け該0リ
ング用あり溝にまるひもパッキングが遊挿されたゴムチ
ューブを嵌装したことを特徴とする。
DISCLOSURE OF THE INVENTION The present invention provides a vacuum in which a 0-ring dovetail groove of a main body side seal member is fitted with a 0 ring, and a lid side seal member having a sealing surface is tightly sealed to the 0 ring. In the device seal structure, another O-ring is provided on either one of the outer periphery of the main body side seal member on the atmosphere side of the groove for the 0 ring and the outer periphery of the lid side seal member on the atmosphere side. It is characterized in that a rubber tube having a dovetail groove provided therein and a string packing loosely inserted in the dovetail groove for the 0 ring is fitted.

【0006】[0006]

【実施例】次に、本発明の実施例について図面を参照し
て説明する。
Embodiments of the present invention will now be described with reference to the drawings.

【0007】図1は本発明の第1の実施例の断面図であ
る。
FIG. 1 is a sectional view of a first embodiment of the present invention.

【0008】第1の実施例は、図1に示すように、本体
側シール部材1の平面2に0リング用あり溝3を設けて
0リング4を嵌装し、0リング用あり溝3より大気側に
平面2と段差を設けて平面5を形成し、さらに平面5に
0リング用あり溝6を設け、まるひもパッキング7が遊
挿されたゴムチューブ8を嵌装すると、ゴムチューブ8
のシール面は、0リング4のシール面より高くなる。
In the first embodiment, as shown in FIG. 1, a 0-ring dovetail groove 3 is provided on a flat surface 2 of a main body side seal member 1 and a 0-ring 4 is fitted therein. When a flat surface 5 is formed by providing a step with the flat surface 2 on the atmosphere side, a flat groove 5 for 0 ring is further provided on the flat surface 5, and a rubber tube 8 into which a round string packing 7 is loosely inserted is fitted.
The sealing surface of is higher than the sealing surface of the O-ring 4.

【0009】次に、蓋側シール部材9を本体側シール部
材1にのせ、真空容器内の真空排気を開始する。このと
き、蓋側シール部材9を軽く手で押しつけると、柔軟性
に豊んだゴムチューブ8は蓋側シール部材9に密着し真
空排気初期の気密を充分保つことができる。数分後に
は、蓋側シール部材9は大気圧で押され、0リング4は
蓋側シール部材9に密着する。
Next, the lid-side sealing member 9 is placed on the main-body-side sealing member 1 and the evacuation of the vacuum container is started. At this time, if the lid-side sealing member 9 is lightly pressed by hand, the rubber tube 8 having high flexibility is brought into close contact with the lid-side sealing member 9 and the airtightness at the initial stage of vacuum exhaust can be sufficiently maintained. After a few minutes, the lid-side seal member 9 is pushed by the atmospheric pressure, and the O-ring 4 comes into close contact with the lid-side seal member 9.

【0010】図2は本発明の第2の実施例の断面図であ
る。
FIG. 2 is a sectional view of the second embodiment of the present invention.

【0011】第2の実施例は、図2に示すように、本体
側シール部材1の平面2に0リング用あり溝3を設けて
0リング4を嵌装し、蓋側シール部材9のシール面10
より大気側にシール面10と段差を設けて平面5を形成
し、さらに、平面5に0リング用あり溝6を設け、まる
ひもパッキン7が遊挿されたゴムチューブ8を嵌装す
る。
In the second embodiment, as shown in FIG. 2, a dowel groove 3 for 0 ring is provided on a flat surface 2 of a main body side sealing member 1 and a 0 ring 4 is fitted thereinto, and a sealing of a lid side sealing member 9 is carried out. Face 10
A flat surface 5 is formed by providing a step with the sealing surface 10 on the more atmospheric side, a dovetail groove 6 for O-ring is further provided on the flat surface 5, and a rubber tube 8 in which a strap packing 7 is loosely inserted is fitted.

【0012】次に、蓋側シール部材9を本体側シール部
材1にのせると、ゴムチューブ8のシール面は本体側シ
ール部材1のシール面11に接触するが、0リング4の
シール面は蓋側シール部材9のシール面10には接触し
ない位置関係にある。その後、真空容器内の真空排気を
開始すると同時に蓋側シール部材9を軽く手で押しつけ
ると、柔軟性に豊んだゴムチューブ8は本体側シール部
材1のシール面11に密着し真空排気初期の気密を充分
保つことができる。数分後には、蓋側シール部材9は大
気圧で押され、0リング4は蓋側シール部材9のシール
面10に密着する。
Next, when the lid side sealing member 9 is placed on the main body side sealing member 1, the sealing surface of the rubber tube 8 contacts the sealing surface 11 of the main body side sealing member 1, but the sealing surface of the O-ring 4 becomes The lid-side sealing member 9 is in a positional relationship where it does not come into contact with the sealing surface 10. After that, when the vacuum evacuation in the vacuum container is started and the lid side sealing member 9 is lightly pressed by hand, the flexible rubber tube 8 is brought into close contact with the sealing surface 11 of the main body side sealing member 1 and the initial vacuum evacuation is performed. Airtightness can be maintained sufficiently. After a few minutes, the lid-side sealing member 9 is pushed by the atmospheric pressure, and the O-ring 4 comes into close contact with the sealing surface 10 of the lid-side sealing member 9.

【0013】本実施例では、蓋側のシール部材9にゴム
チューブ8を嵌装するので既設の真空装置のシール構造
を改造する場合、本体側と分離可能な蓋側のシール部材
9の改造が容易にできる利点がある。
In this embodiment, since the rubber tube 8 is fitted to the lid-side seal member 9, when modifying the seal structure of the existing vacuum device, the lid-side seal member 9 which can be separated from the main body side is modified. It has the advantage of being easy.

【0014】[0014]

【発明の効果】以上説明したように本発明は、従来の0
リングのシールの他にその0リングより大気側に柔軟性
に豊んたゴムチューブシールを設け二重シール構造にし
たので、真空排気初期に0リングをシール面に密着させ
るための締付け金具は不要となり、蓋側シール部材の着
脱が容易に行える効果を有する。
As described above, according to the present invention, the conventional 0
In addition to the ring seal, a flexible rubber tube seal is provided on the atmosphere side of the 0 ring to create a double seal structure, so there is no need for a tightening fitting to bring the 0 ring into close contact with the sealing surface at the initial stage of evacuation. Therefore, there is an effect that the lid side seal member can be easily attached and detached.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施例の断面図である。FIG. 1 is a sectional view of a first embodiment of the present invention.

【図2】本発明の第2の実施例の断面図である。FIG. 2 is a sectional view of a second embodiment of the present invention.

【図3】従来の真空装置用シール構造の一例の一部切欠
き正面図である。
FIG. 3 is a partially cutaway front view of an example of a conventional vacuum device seal structure.

【符号の説明】[Explanation of symbols]

1,9 シール部材 2,5 平面 3,6 あり溝 4 0リング 7 まるひもパッキン 8 ゴムチューブ 10,11 シール面 12 締付け金具 13 締付けハンドル 1,9 Seal member 2,5 Flat surface 3,6 With groove 40 Ring 7 Round string packing 8 Rubber tube 10,11 Sealing surface 12 Tightening fitting 13 Tightening handle

Claims (1)

【特許請求の範囲】 【請求項1】 本体側シール部材の0リング用あり溝に
0リングを嵌装し、該0リングにシール面を有する蓋側
シール部材を密着してシールする真空装置用シール構造
において、前記本体側シール部材の前記0リング用あり
溝より大気側の外周と前記蓋側シール部材のシール面よ
り大気側の外周とのうちのいずれか一方にもう1つの0
リング用あり溝を設け該0リング用あり溝にまるひもパ
ッキングが遊挿されたゴムチューブを嵌装したことを特
徴とする真空装置用シール構造。
Claim: What is claimed is: 1. A vacuum device for fitting a 0 ring into a groove for a 0 ring of a main body side sealing member, and closely sealing a lid side sealing member having a sealing surface on the 0 ring. In the seal structure, another 0 is provided on either the outer circumference of the main body side seal member on the atmosphere side of the groove for the 0 ring or the outer circumference of the lid side seal member on the atmosphere side.
A seal structure for a vacuum device, comprising a dovetail groove for a ring, and a rubber tube in which a string packing is loosely inserted in the dovetail groove for a 0 ring.
JP17083091A 1991-07-11 1991-07-11 Sealing structure for vacuum device Pending JPH0518465A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17083091A JPH0518465A (en) 1991-07-11 1991-07-11 Sealing structure for vacuum device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17083091A JPH0518465A (en) 1991-07-11 1991-07-11 Sealing structure for vacuum device

Publications (1)

Publication Number Publication Date
JPH0518465A true JPH0518465A (en) 1993-01-26

Family

ID=15912121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17083091A Pending JPH0518465A (en) 1991-07-11 1991-07-11 Sealing structure for vacuum device

Country Status (1)

Country Link
JP (1) JPH0518465A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104455408A (en) * 2013-09-18 2015-03-25 李俊贤 Pressure vessel and method for forming airtight pressure environment by using same
WO2015145688A1 (en) * 2014-03-27 2015-10-01 株式会社Jcu Packing for substrate plating jig and substrate plating jig using same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104455408A (en) * 2013-09-18 2015-03-25 李俊贤 Pressure vessel and method for forming airtight pressure environment by using same
WO2015145688A1 (en) * 2014-03-27 2015-10-01 株式会社Jcu Packing for substrate plating jig and substrate plating jig using same

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