JPH0518837Y2 - - Google Patents
Info
- Publication number
- JPH0518837Y2 JPH0518837Y2 JP6639788U JP6639788U JPH0518837Y2 JP H0518837 Y2 JPH0518837 Y2 JP H0518837Y2 JP 6639788 U JP6639788 U JP 6639788U JP 6639788 U JP6639788 U JP 6639788U JP H0518837 Y2 JPH0518837 Y2 JP H0518837Y2
- Authority
- JP
- Japan
- Prior art keywords
- exhaust pipe
- exhaust
- induced plasma
- tube
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000498 cooling water Substances 0.000 claims description 12
- 239000011810 insulating material Substances 0.000 claims description 4
- 230000005284 excitation Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 16
- 239000000463 material Substances 0.000 description 10
- 239000000126 substance Substances 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical group N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical group O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910001873 dinitrogen Chemical group 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6639788U JPH0518837Y2 (2) | 1988-05-20 | 1988-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6639788U JPH0518837Y2 (2) | 1988-05-20 | 1988-05-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01168947U JPH01168947U (2) | 1989-11-29 |
| JPH0518837Y2 true JPH0518837Y2 (2) | 1993-05-19 |
Family
ID=31291803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6639788U Expired - Lifetime JPH0518837Y2 (2) | 1988-05-20 | 1988-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0518837Y2 (2) |
-
1988
- 1988-05-20 JP JP6639788U patent/JPH0518837Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01168947U (2) | 1989-11-29 |
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