JPH05196688A - Test system for semiconductor ic - Google Patents

Test system for semiconductor ic

Info

Publication number
JPH05196688A
JPH05196688A JP4007191A JP719192A JPH05196688A JP H05196688 A JPH05196688 A JP H05196688A JP 4007191 A JP4007191 A JP 4007191A JP 719192 A JP719192 A JP 719192A JP H05196688 A JPH05196688 A JP H05196688A
Authority
JP
Japan
Prior art keywords
pins
test
unit
units
pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4007191A
Other languages
Japanese (ja)
Other versions
JP2821302B2 (en
Inventor
Toshihiro Fujishita
俊弘 藤下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP4007191A priority Critical patent/JP2821302B2/en
Publication of JPH05196688A publication Critical patent/JPH05196688A/en
Application granted granted Critical
Publication of JP2821302B2 publication Critical patent/JP2821302B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

PURPOSE:To shorten the test time by short-circuiting a plurality of pins at specified intervals, and providing a plurality of pin-DC test unit groups connected to DC test units, and testing them while shifting them in order separately for each DC unit. CONSTITUTION:Taking the example of the case where the number of pins of IC is 12 and the number of DC units is four, pins NOs1, 5, and 9 are set to a DC pin 1 and those are all short-circuited. Similarly, pins 2, 6, and 10, to DC2, and pins 3, 7, and 11, to DC 3, and pins 4, 8, and 12, to DC 4, are set, and those are all short-circuited, respectively First, the measurement is started with the unit of DC 1, and it advances to DCs 2, 3, and 4. Since each unit is independent, the fellow adjacent pins are never measured at the same time. This way, since the pins allotted to the DC units are all short-circuited, respectively, and those are measured en-block in order of units, the test time can be shortened, and synthetic throughput can be elevated.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は半導体ICのテストシス
テムに関し、特に直流特性のテスト方式に関するもので
ある。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor IC test system, and more particularly to a DC characteristic test system.

【0002】[0002]

【従来の技術】従来のテストシステムはICのDCテス
ト(直流能力チェック)を行う計測ユニットを数台装備
しており、このDCユニットに対し測定するICの各々
のピンを割り当てテストする。その方式は図3(a)〜
(c)に示すようにA,B,Cの3方式ある。ここでI
Cの1ピンから12ピン迄を測定するとし、計測ユニッ
トは4台装備しているとする。各ユニットのピン割り当
ては図1(a)による。
2. Description of the Related Art A conventional test system is equipped with several measuring units for performing a DC test (direct current capability check) of an IC, and each pin of the IC to be measured is assigned to this DC unit for testing. The method is shown in FIG.
As shown in (c), there are three systems, A, B, and C. Where I
Assume that you measure pins 1 to 12 of C and that you have four measurement units. The pin assignment of each unit is as shown in FIG.

【0003】テストA方式は各ユニットに1ピンづつセ
ットされユニット順,ピンNo順にテストは進む。従っ
て12回のテストが行われる。
In the test A method, one pin is set for each unit, and the test proceeds in the order of units and pin numbers. Therefore, 12 tests are performed.

【0004】テストB方式は各ユニットに1ピンづつセ
ットされるが、A方式と違い4台のユニットが同時にテ
ストを実行する。その為3回のテストで完了する。
In the test B method, one pin is set for each unit, but unlike the method A, four units simultaneously execute the test. Therefore, the test is completed three times.

【0005】テストC方式は、各ユニットに割り当てら
れるピンを全て短絡し、かつ各ユニット同時にテストを
実行する為1回のテストで12ピン分の測定が完了す
る。
In the test C method, all the pins assigned to each unit are short-circuited and the tests are executed simultaneously for each unit, so that the measurement for 12 pins is completed in one test.

【0006】これらA〜c方式はテストの内容に合わせ
どの方式を選択するかは決められる。図4は、ICのピ
ンとピンの間が完全に絶縁されるているかをチェックす
るピン間リークテストの実例であり、ここでは2ピンと
3ピン間に抵抗Rを介し、短絡している為テスト結果と
しては不良ICと判定される。
Which of these methods A to c is selected is determined according to the contents of the test. FIG. 4 is an example of a pin-to-pin leak test that checks whether the pins of the IC are completely insulated. Here, the test result is because a short circuit occurs between pins 2 and 3 via a resistor R. Is determined to be a defective IC.

【0007】すなわち、1ピン毎に測定する時には、2
ピンに5Vを印加し3ピンを0Vにすることで2ピンと
3ピン間に電流が流れるか否かを測定する。このテスト
では図3(a)のテストA方式が使われる。
That is, when measuring every pin, 2
By applying 5V to the pin and setting 0V to the 3rd pin, it is measured whether or not a current flows between the 2nd pin and the 3rd pin. In this test, the test A method of FIG. 3A is used.

【0008】[0008]

【発明が解決しようとする課題】この従来の半導体IC
のテストシステムは、前述の3方式にて図4に示すIC
のピン間リークを測定する場合に、A方式では確実に1
ピンづつ測定するので精度良く判定できるが、測定回数
がそのピン数分必要となりテストタイムが長くなる欠点
がある。
This conventional semiconductor IC
The test system of the IC is the IC shown in FIG.
When measuring the inter-pin leak of
Since the measurement is performed pin by pin, the determination can be performed accurately, but there is a drawback that the test time becomes long because the number of measurements is required for the number of pins.

【0009】B方式では、4ピンづつ同時に測定する
為、1〜4ピンに同電位がセットされ図4に示す2ピン
と3ピン間のリークは判定できない。
In the B method, since four pins are measured simultaneously, the same potential is set on pins 1 to 4, and the leak between pins 2 and 3 shown in FIG. 4 cannot be determined.

【0010】C方式は全ピン同時測定の為ICを測定す
るプログラム上にて奇数ピント偶数ピンに分け、見かけ
上となりのピンに同電位が加わらない様な工夫が必要と
なり、ICの種類が多い現在では対応に多大な工数が費
されるという欠点があった。そこで、現在では他に有効
な手段がなく、テストタイムを犠牲にしてA方式にて測
定する結果となっている。
In the C method, since all pins are measured simultaneously, it is divided into odd-numbered pins and even-numbered pins in the program for measuring the IC, and it is necessary to devise such that the same potential is not applied to the apparent pins, and there are many types of ICs. At present, there is a drawback that a large number of man-hours are required for handling. Therefore, at present, there is no other effective means, and the result is measured by method A at the expense of test time.

【0011】[0011]

【課題を解決するための手段】本発明の半導体ICのテ
ストシステムは、複数のピンを複数のDCテストユニッ
トに接続して電気的直流特性試験をする半導体ICのテ
ストシステムにおいて、前記複数のピンを所定感覚をお
いて短絡して前記DCテストユニットに接続されたピン
−DCテストスニットグルプを複数個設け、前記DCユ
ニットごとに順次づらしてテストして構成されている。
A semiconductor IC test system according to the present invention is a semiconductor IC test system in which a plurality of pins are connected to a plurality of DC test units to perform an electrical DC characteristic test. Is provided with a plurality of pin-DC test snoop groups connected to the DC test unit by short-circuiting with a predetermined feeling, and the DC units are sequentially tested for each DC unit.

【0012】[0012]

【実施例】次に本発明について図面を参照して説明す
る。図1(a)に計測するDCユニットの台数と各々の
ICのピンの割当図を示す。ここでICのピン数は12
8ピンの場合とする。DCユニットの台数が4台の場合
を考えると、DC1のユニットは(4n+1)ピンを、
DC2は(4n+2)ピン,DC3は(4n+3)ピ
ン,DC4は(4n+4)ピンを担当することとなる。
The present invention will be described below with reference to the drawings. FIG. 1A shows the number of DC units to be measured and the pin assignment diagram of each IC. Here, the number of IC pins is 12
The case of 8 pins. Considering the case where there are four DC units, the DC1 unit has (4n + 1) pins,
DC2 is in charge of the (4n + 2) pin, DC3 is in charge of the (4n + 3) pin, and DC4 is in charge of the (4n + 4) pin.

【0013】図1(b)に本発明の測定動作概念を説明
するためのピン−DCテストユニットグループの接続模
式図である。CDユニット数は4台、測定するピン数は
1〜12ピン迄とする。ここでDC1ユニットに1,
5,9ピンがセットされ全て短絡される。同様にDC2
ユニットに2,6,10ピンがセットされ全て短絡され
る。DC3ユニットに3,7,11ピンがセットされ全
て短絡される。DC4ユニットに4,8,12ピンがセ
ットされ全て短絡される。
FIG. 1B is a schematic diagram of the connection of pin-DC test unit groups for explaining the measuring operation concept of the present invention. The number of CD units is 4, and the number of pins to be measured is 1 to 12 pins. Here, 1 for DC1 unit
Pins 5 and 9 are set and all are short-circuited. DC2 as well
Pins 2, 6 and 10 are set in the unit and all are short-circuited. Pins 3, 7 and 11 are set in the DC3 unit and all are short-circuited. Pins 4, 8 and 12 are set in the DC4 unit and all are short-circuited.

【0014】次に、各々のユニットの測定順序を図2に
示す。まずDC1のユニットから測定を開始し、DC
2,3,4と進む。各DCユニットが独立している為、
となり同士のピンを同時に測定することはない。図1
(a)に示した様にDCユニットが複数台有れば同様の
測定手順を行う。ここで図3に示した従来のテスト機能
は全て有している。
Next, the measurement order of each unit is shown in FIG. First, start measurement from the DC1 unit, and
Go to 2, 3 and 4. Since each DC unit is independent,
Never measure pins next to each other at the same time. Figure 1
If there are a plurality of DC units as shown in (a), the same measurement procedure is performed. It has all the conventional test functions shown in FIG.

【0015】[0015]

【発明の効果】以上説明したように本発明は、ピン間リ
ーク等多数ピン測定しなければならない時、1ピン毎測
定するのに比べDCユニットに割り当てられたピンを全
て短絡し、かつユニット順に一括測定するので、測定に
要すテストタイムを短くでき、総合的なスループットを
上げることが可能となる。又、隣接するピンは同時に測
定はしないので精度良く判定できる。
As described above, according to the present invention, when a large number of pins such as leaks between pins must be measured, all the pins assigned to the DC unit are short-circuited and the units are sequentially arranged as compared with the case of measuring for each pin. Since the measurement is performed collectively, the test time required for measurement can be shortened and the overall throughput can be increased. Further, since the adjacent pins are not measured at the same time, it can be accurately determined.

【図面の簡単な説明】[Brief description of drawings]

【図1】(a),(b)はそれぞれ本発明の一実施例を
説明するために示すDCユニット数と各々のICのピン
の割当図およびピン−DCテストユニットグループの接
続模式図である。
FIGS. 1A and 1B are diagrams showing the number of DC units, pin assignments of each IC, and pin-DC test unit group connection schematic diagrams, respectively, for explaining one embodiment of the present invention. ..

【図2】図1のテストを行う場合の測定フロー図であ
る。
FIG. 2 is a measurement flow chart when the test of FIG. 1 is performed.

【図3】(a)〜(c)はそれぞれ、従来の半導体IC
のテストシステムのA〜C方式の模式図である。
3A to 3C are respectively conventional semiconductor ICs.
3 is a schematic diagram of A to C methods of the test system of FIG.

【図4】半導体ICのリークテストの一例の回路図であ
る。
FIG. 4 is a circuit diagram of an example of a leak test of a semiconductor IC.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 複数のピンを複数のDCテストユニット
に接続して電気的直流特性試験をする半導体ICのテス
トシステムにおいて、前記複数のピンを所定感覚をおい
て短絡して前記DCテストユニットに接続されたピン−
DCテストスニットグルプを複数個設け、前記DCユニ
ットごとに順次づらしてテストすることを特徴とする半
導体ICのテストシステム。
1. In a test system of a semiconductor IC for connecting a plurality of pins to a plurality of DC test units to perform an electric DC characteristic test, the plurality of pins are short-circuited with a predetermined feeling to the DC test unit. Connected pin-
A test system for a semiconductor IC, wherein a plurality of DC test snit groups are provided, and the DC units are sequentially tested.
JP4007191A 1992-01-20 1992-01-20 Test method for semiconductor IC Expired - Fee Related JP2821302B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4007191A JP2821302B2 (en) 1992-01-20 1992-01-20 Test method for semiconductor IC

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4007191A JP2821302B2 (en) 1992-01-20 1992-01-20 Test method for semiconductor IC

Publications (2)

Publication Number Publication Date
JPH05196688A true JPH05196688A (en) 1993-08-06
JP2821302B2 JP2821302B2 (en) 1998-11-05

Family

ID=11659152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4007191A Expired - Fee Related JP2821302B2 (en) 1992-01-20 1992-01-20 Test method for semiconductor IC

Country Status (1)

Country Link
JP (1) JP2821302B2 (en)

Also Published As

Publication number Publication date
JP2821302B2 (en) 1998-11-05

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