JPH05196707A - Optical magnetic-field sensor - Google Patents

Optical magnetic-field sensor

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Publication number
JPH05196707A
JPH05196707A JP18975491A JP18975491A JPH05196707A JP H05196707 A JPH05196707 A JP H05196707A JP 18975491 A JP18975491 A JP 18975491A JP 18975491 A JP18975491 A JP 18975491A JP H05196707 A JPH05196707 A JP H05196707A
Authority
JP
Japan
Prior art keywords
magnetic field
signal
light
output
magneto
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18975491A
Other languages
Japanese (ja)
Other versions
JP2996775B2 (en
Inventor
Toru Uenishi
徹 上西
Kazuo Kobayashi
一雄 小林
Motoharu Kubo
元春 久保
Takashi Nakajima
高 中嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
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Toshiba Corp
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Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP3189754A priority Critical patent/JP2996775B2/en
Publication of JPH05196707A publication Critical patent/JPH05196707A/en
Application granted granted Critical
Publication of JP2996775B2 publication Critical patent/JP2996775B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

(57)【要約】 【目的】 ダィナミックレンジの広い磁界センサを提供
する。 【構成】 発光部1と、被測定磁界の強さに比例して偏
波面が回転するファラデー効果を有する磁気光学素子5
とを、光ファイバー2で接続する。磁気光学素子5の発
光部1側に偏光子4を、出力側に偏光子4の主軸とある
特定の角度をなすよう主軸を定めた検光子7を配置す
る。検光子7を透過した光を受け電気信号に変換する受
光素子12を設ける。受光素子12から出力される電気
信号から、偏光面の回転角θを検出して磁界の強さを検
出する信号処理回路19を設ける。信号処理回路19
に、高周波阻止フィルタ20、アナログ/デジタル変換
器23、デジタル入力値に対応した逆三角関数値を記憶
させ高速で読み出し可能な記憶素子24、記憶素子の出
力をアナログ出力に変換するデジタル/アナログ変換器
25を設ける。
(57) [Abstract] [Purpose] To provide a magnetic field sensor with a wide dynamic range. [Structure] A light emitting section 1 and a magneto-optical element 5 having a Faraday effect in which a plane of polarization rotates in proportion to the strength of a magnetic field to be measured.
And are connected by an optical fiber 2. A polarizer 4 is arranged on the side of the light emitting unit 1 of the magneto-optical element 5, and an analyzer 7 whose principal axis is determined so as to form a specific angle with the principal axis of the polarizer 4 is arranged on the output side. A light receiving element 12 that receives the light transmitted through the analyzer 7 and converts it into an electric signal is provided. A signal processing circuit 19 for detecting the rotation angle θ of the polarization plane from the electric signal output from the light receiving element 12 to detect the strength of the magnetic field is provided. Signal processing circuit 19
A high-frequency blocking filter 20, an analog / digital converter 23, a storage element 24 that stores an inverse trigonometric function value corresponding to a digital input value and can be read at high speed, and a digital / analog conversion that converts the output of the storage element into an analog output. A container 25 is provided.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はファラデー効果を応用し
て、磁界強度を検出する磁界センサに関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic field sensor for detecting magnetic field strength by applying the Faraday effect.

【0002】[0002]

【従来の技術】この種の磁界センサとしては、特開昭5
9−159076号公報に記載のものが、従来から知ら
れている。図3及び図4は、この公報に開示された従来
技術を示すもので、図3に示すものは磁界の強度Hその
ものを計測する磁界センサであり、図4に示すものは導
体に流れる電流Iによって形成される磁界の強度Hを計
測し、これによって電流Iを計測しようとする変流器に
適用したものである。
2. Description of the Related Art As a magnetic field sensor of this type, Japanese Patent Laid-Open No.
The one described in Japanese Patent Publication No. 9-159076 is conventionally known. FIGS. 3 and 4 show the conventional technique disclosed in this publication. The one shown in FIG. 3 is a magnetic field sensor for measuring the strength H of the magnetic field itself, and the one shown in FIG. 4 is a current I flowing through a conductor. It is applied to a current transformer which measures the intensity H of the magnetic field formed by the current and measures the current I by this.

【0003】図3において、発光ダイオード等からなる
発光部1から出射される光は、光ファイバ3を介して集
光レンズ3に導かれ、集光レンズ3により平行光に近い
光になって偏光子4に入射され、この偏光子4により取
り出された偏光が磁気光学素子5に入射される。磁気光
学素子5は置かれた磁界の強度H(図示矢印方向)によ
っていわゆるファラデー効果を示すもの、例えば鉛ガラ
スや磁性膜等によって形成されている。したがって、磁
気光学素子5一端面に入射された偏光の偏光面は、磁界
強度Hに比例してθだけ回転されて他端面から射出され
る。この射出光は偏光プリズムまたは偏光ビームスプリ
ッタなどからなり、主軸が偏光子4と45°の位置にセ
ットされた検光子7に入射され、ここにおいて、図5に
示すように直交2成分(X成分、Y成分)のベクトル光
に分光される。図5から、それぞれのベクトル成分は次
式で表される。 Ex=E・sin(45°+θ) (1) Ey=E・cos(45°+θ) (2)
In FIG. 3, light emitted from a light emitting section 1 composed of a light emitting diode or the like is guided to a condenser lens 3 through an optical fiber 3 and is converted into light close to parallel light by the condenser lens 3 to be polarized. The polarized light that is incident on the child 4 and is extracted by the polarizer 4 is incident on the magneto-optical element 5. The magneto-optical element 5 is formed of a so-called Faraday effect, for example, lead glass, a magnetic film, or the like, depending on the strength H (in the direction of the arrow in the drawing) of the applied magnetic field. Therefore, the polarization plane of the polarized light incident on the one end surface of the magneto-optical element 5 is rotated by θ in proportion to the magnetic field strength H and is emitted from the other end surface. The emitted light is composed of a polarizing prism or a polarizing beam splitter, and is incident on an analyzer 7 whose principal axis is set at a position of 45 ° with the polarizer 4. Here, as shown in FIG. , Y component). From FIG. 5, each vector component is represented by the following equation. Ex = E · sin (45 ° + θ) (1) Ey = E · cos (45 ° + θ) (2)

【0004】これらのベクトル光はそれぞれ集光レンズ
8,9によって集光された光量信号Px,Pyとなり、
光ファイバー10,11を介して受光素子12,13に
導かれる。ここで、光量はベクトルの大きさの二乗であ
るから、光量信号Px,Pyは、下記の通りとなる。 Px=Ex2 =E2 ・sin2 (45°+θ) =(E2 /2)・(1+sin2θ) (3) Py=Ey2 =E2 ・cos2 (45°+θ) =(E2 /2)・(1−sin2θ) (4)
These vector lights become light quantity signals Px and Py collected by the condenser lenses 8 and 9, respectively,
It is guided to the light receiving elements 12 and 13 via the optical fibers 10 and 11. Here, since the light quantity is the square of the magnitude of the vector, the light quantity signals Px and Py are as follows. Px = Ex 2 = E 2 ・ Sin 2 (45 ° + θ) = (E 2 / 2) ・ (1 + sin2θ) (3) Py = Ey 2 = E 2 ・ Cos 2 (45 ° + θ) = (E 2 / 2) ・ (1-sin2θ) (4)

【0005】受光素子12,13は、例えばフォトダイ
オードから形成されており、受光する光量信号Px,P
yに比例した電流信号を出力する光電変換器である。磁
界が交番磁界の場合を例にとれば、この電流信号は電流
電圧変換アンプ14,15によって、次式(5)(6)
に示す電圧信号Vx,Vyに変換される。なお、同式中
のK1 は定数である。 Vx=K1 (1+sin2θ) (5) Vy=K1 (1−sin2θ) (6)
The light receiving elements 12 and 13 are formed of, for example, photodiodes, and receive light amount signals Px and Px.
It is a photoelectric converter that outputs a current signal proportional to y. Taking the case where the magnetic field is an alternating magnetic field as an example, this current signal is expressed by the following equations (5) and (6) by the current-voltage conversion amplifiers 14 and 15.
Are converted into voltage signals Vx and Vy. Note that K 1 in the equation is a constant. Vx = K 1 (1 + sin2θ) (5) Vy = K 1 (1-sin2θ) (6)

【0006】電圧信号Vxはアナログ加算器16,17
の+入力端に入力され、電圧信号Vyはアナログ加算器
16の+入力端とアナログ加算器17の−入力端にそれ
ぞれ入力されている。アナログ加算器17の出力は割算
器18の分母入力端にそれぞれ入力されている。これに
よって、割算器18から出力される信号V0 は次式
(7)で表されたものとなる。 V0 =(Vx−Vy)/(Vx+Vy) =sin2θ (7) (7)式において、θが充分小さな範囲で、次式(8)
が成立する。 V0 =2θ=K2 ・H (8) (ただし、K2 は比例定数、V0 =2θは近似値であ
る。)すなわち、式(8)から明らかなように、割算器
18に出力信号V0 によって磁界強度Hを検出するよう
になっている。
The voltage signal Vx is supplied to the analog adders 16 and 17
Is input to the + input terminal of the analog adder 16 and the voltage signal Vy is input to the + input terminal of the analog adder 17, respectively. The output of the analog adder 17 is input to the denominator input terminal of the divider 18. As a result, the signal V 0 output from the divider 18 is represented by the following equation (7). V 0 = (Vx−Vy) / (Vx + Vy) = sin2θ (7) In the formula (7), when θ is sufficiently small, the following formula (8)
Is established. V 0 = 2θ = K 2 · H (8) (where, K 2 is a proportional constant and V 0 = 2θ is an approximate value.) That is, as is apparent from the equation (8), the output is given to the divider 18. The magnetic field strength H is detected by the signal V 0 .

【0007】図4は前述したように磁界センサを変流器
に適用した場合の一例で、導体6に流れる交流電流Iを
検出するものである。この例では、磁気光学素子5には
導体6が貫通される孔が形成されており、偏光子4から
射出された光は磁気光学素子5内を図示点線で示した光
路を経て、検光子7に導かれる。その他は図3に図示し
た磁界センサと同一に構成されている。
FIG. 4 shows an example in which the magnetic field sensor is applied to the current transformer as described above, and detects the alternating current I flowing through the conductor 6. In this example, a hole through which the conductor 6 penetrates is formed in the magneto-optical element 5, and the light emitted from the polarizer 4 passes through the magneto-optical element 5 through the optical path indicated by the dotted line in the figure, and then the analyzer 7 Be led to. Others are the same as the magnetic field sensor shown in FIG.

【0008】したがって、磁気光学素子5内を透過され
る偏光は、電流Iに比例して生ずる磁界の強度Hに比例
してその偏光面が回転され、割算器18の出力V0 は前
式(7)と同じになり、θが充分小さな範囲において次
式(9)となるので、導体6に流れる電流Iが検出され
る。 V0 =2θ=K3 ・H (9) (ただし、K3 は比例定数、V0 =2θは近似値であ
る。)
Therefore, the polarized light transmitted through the magneto-optical element 5 has its plane of polarization rotated in proportion to the intensity H of the magnetic field generated in proportion to the current I, and the output V 0 of the divider 18 is given by It becomes the same as in (7), and since the following equation (9) is obtained in the range where θ is sufficiently small, the current I flowing through the conductor 6 is detected. V 0 = 2θ = K 3 · H (9) (where K 3 is a proportional constant and V 0 = 2θ is an approximate value)

【0009】[0009]

【発明が解決しようとする課題】しかしながら、図3及
び図4に示した従来の光式磁界センサは、上述したよう
にθが充分小さな範囲でしか、直線性が得られないとい
う欠点があった。例えば、1%の精度を満たすθの範囲
は、僅かに±7.0°以内である。更に(3)(4)式
または(5)(6)式から知れるように、光量信号に含
まれるバイアス成分に対する被測定信号成分の割合(変
調度)は、θ=7°のとき24%しかない。このことは
低磁界領域を測定しようとしたとき信号/雑音比が小さ
く充分な測定精度が得られないということになる。この
ように、従来の光式磁界センサでは非常に狭い範囲の磁
界しか、測定できないという欠点があった。本発明は、
上記のような従来技術の問題点を解決するために提案さ
れたもので、測定範囲の広い光式磁界センサを提供する
ことを目的とする。
However, the conventional optical magnetic field sensor shown in FIGS. 3 and 4 has a drawback that the linearity can be obtained only in the range where θ is sufficiently small as described above. .. For example, the range of θ that satisfies the accuracy of 1% is slightly within ± 7.0 °. Further, as is known from the equations (3), (4) or (5), (6), the ratio (modulation degree) of the measured signal component to the bias component included in the light amount signal is only 24% when θ = 7 °. Absent. This means that the signal / noise ratio is small when attempting to measure a low magnetic field region, and sufficient measurement accuracy cannot be obtained. As described above, the conventional optical magnetic field sensor has a drawback that it can measure only a magnetic field in a very narrow range. The present invention is
The present invention has been proposed to solve the above-mentioned problems of the conventional technology, and an object thereof is to provide an optical magnetic field sensor having a wide measurement range.

【0010】[0010]

【課題を解決するための手段】上記の目的を達成するた
めの手段として、本発明は、被測定磁界の強さに比例し
て偏波面が回転するファラデー効果を有する磁気光学素
子と、この磁気光学素子の光源側に配置した偏光子と、
磁気光学素子を透過してきた光を受け前記偏光子の主軸
とある特定の角度をなすよう主軸を定めた検光子と、こ
の検光子を透過した光を受け電気信号を変換する受光素
子と、該受光素子から出力される電気信号から前記偏光
面の回転角を検出して磁界の強さを検出する信号処理回
路を備えた光式磁界センサにおいて、前記信号処理回路
に、高周波阻止フィルタ、アナログ/デジタル変換器、
デジタル入力値に対応した逆三角関数値を記憶させ高速
で読み出し可能な記憶素子、記憶素子の出力をアナログ
出力に変換して出力するするデジタル/アナログ変換器
を設けたことを特徴とする。
As means for achieving the above object, the present invention provides a magneto-optical element having a Faraday effect in which a plane of polarization rotates in proportion to the strength of a magnetic field to be measured, and a magnetic optical element having the Faraday effect. A polarizer arranged on the light source side of the optical element,
An analyzer having a principal axis determined so as to form a specific angle with the principal axis of the polarizer that receives the light transmitted through the magneto-optical element, a light receiving element that receives the light transmitted through the analyzer and converts an electrical signal, In an optical magnetic field sensor equipped with a signal processing circuit for detecting the rotation angle of the polarization plane from an electric signal output from a light receiving element to detect the strength of a magnetic field, the signal processing circuit includes a high frequency blocking filter, an analog / Digital converter,
The present invention is characterized in that a storage element that stores an inverse trigonometric function value corresponding to a digital input value and that can be read at high speed, and a digital / analog converter that converts the output of the storage element into an analog output and outputs the analog output are characterized.

【0011】[0011]

【作用】上記のような構成を有する本発明によれば、受
光素子によって得られた電気信号は、前記偏光面の回転
角の三角関数f(sin2θ)として出力される。この
出力を高周波阻止フィルタを介した後、A/D変換し、
記憶素子に入力する。記憶素子では、デジタル入力値に
対応するθの値を高速で読み出す。読み出された2θの
値をD/A変換し、これを磁界センサの出力とする。
According to the present invention having the above-mentioned structure, the electric signal obtained by the light receiving element is output as the trigonometric function f (sin2θ) of the rotation angle of the polarization plane. After passing this output through a high frequency blocking filter, A / D conversion,
Input to the memory element. In the storage element, the value of θ corresponding to the digital input value is read at high speed. The read value of 2θ is D / A converted and used as the output of the magnetic field sensor.

【0012】[0012]

【実施例】 (1)第1実施例 以下、本発明の第1実施例を、図1に従って具体的に説
明する。
EXAMPLES (1) First Example Hereinafter, a first example of the present invention will be specifically described with reference to FIG.

【0013】1はLEDなどの発光素子及び駆動回路よ
り成る発光部、2は発光部の光を導く光ファイバー、3
は光ファイバー2から出射される拡がろうとする光を略
平行光線にする集光レンズ、4は集光レンズ3からの光
を直線偏光とする偏光子、5はそこに作用している被測
定磁界Hの強さに比例して偏光面が回転する磁気光学素
子、7は主軸の方向が偏光子の主軸と45°の位置にな
るよう配置され他検光子である。
Reference numeral 1 is a light emitting portion including a light emitting element such as an LED and a driving circuit, 2 is an optical fiber for guiding the light of the light emitting portion, 3
Is a condenser lens for converting the light emitted from the optical fiber 2 into a substantially parallel light beam, 4 is a polarizer for linearly polarizing the light from the condenser lens 3, and 5 is a magnetic field to be measured acting on the polarizer. A magneto-optical element whose plane of polarization rotates in proportion to the intensity of H, and 7 is another analyzer which is arranged such that the direction of the principal axis is at a position of 45 ° with respect to the principal axis of the polarizer.

【0014】8は集光レンズ、10は光ファイバで、検
光子7から出射してきた平行光線は集光レンズ8で絞ら
れ光ファイバ10に入射される。光ファイバ10の他端
は受光素子12と結合され、光ファイバ10を通ってき
た光量信号は電流に変換された後、電流電圧光管アンプ
14の出力は信号処理回路19に入力され、出力信号V
0 を得る。
Reference numeral 8 is a condenser lens, 10 is an optical fiber, and the parallel rays emitted from the analyzer 7 are focused by the condenser lens 8 and are incident on the optical fiber 10. The other end of the optical fiber 10 is coupled to the light receiving element 12, the light quantity signal that has passed through the optical fiber 10 is converted into a current, and then the output of the current-voltage light tube amplifier 14 is input to the signal processing circuit 19 to output the output signal. V
Get 0 .

【0015】信号処理回路19の構成は次の通りであ
る。すなわち、20は高周波通過フィルタ、21は入力
信号を被測定交流信号成分と直流バイアス信号成分に分
割する低周波通過フィルタである。18は、高周波通過
フィルタ20の出力を低周波通過フィルタ21の出力で
割るように接続された割算器である。22は後で行うA
/D変換の前段としての高周波阻止フィルタ、23はA
/D変換器である。24は、いわゆるRead on
Momory(ROM)と呼ばれる記憶素子である。こ
の記憶素子24は、入力デジタル信号値(A)に1対1
に対応したsin-1(A)の値を予め記憶させておき、
これを入力値に応じて高速で読み出し出力する。25は
ROMのからのデジタル出力信号をアナログ信号に変換
するD/A変換器である。このように構成される磁界セ
ンサの動作について以下に説明する。
The structure of the signal processing circuit 19 is as follows. That is, 20 is a high-frequency pass filter, and 21 is a low-frequency pass filter that divides an input signal into an AC signal component to be measured and a DC bias signal component. 18 is a divider connected so as to divide the output of the high frequency pass filter 20 by the output of the low frequency pass filter 21. 22 will be done later A
A high-frequency blocking filter as a pre-stage for D / D conversion, and 23 is A
It is a / D converter. 24 is so-called Read on
A memory element called a memory (ROM). This storage element 24 has a one-to-one correspondence with the input digital signal value (A).
The value of sin −1 (A) corresponding to is stored in advance,
This is read out and output at high speed according to the input value. Reference numeral 25 is a D / A converter for converting a digital output signal from the ROM into an analog signal. The operation of the magnetic field sensor thus configured will be described below.

【0016】発光部1からの光は、光ファイバ2を通っ
て集合レンズ3に至り、ここで略平行光線となる。この
光は、偏光子4で直線偏光となり、磁気光学素子5を通
過する。この間に、磁界Hが図1に示した矢印の方向に
作用していると、偏光面は強界強度に比例してθだけ回
転する。磁気光学素子5の出射光は、検光子7を通過す
る。検光子7の主軸は偏光子4の主軸と45°の角度を
なすよう配置されているので、図5に示した光ベクトル
図から解るように、検光子7の出射光は次式で表され
る。 Ex=E・sin(45°+θ) (10)
The light from the light emitting section 1 passes through the optical fiber 2 and reaches the collective lens 3, where it becomes substantially parallel rays. This light is linearly polarized by the polarizer 4 and passes through the magneto-optical element 5. During this time, when the magnetic field H acts in the direction of the arrow shown in FIG. 1, the polarization plane rotates by θ in proportion to the strong field intensity. The emitted light of the magneto-optical element 5 passes through the analyzer 7. Since the main axis of the analyzer 7 is arranged at an angle of 45 ° with the main axis of the polarizer 4, as can be seen from the optical vector diagram shown in FIG. 5, the emitted light of the analyzer 7 is expressed by the following equation. It Ex = E · sin (45 ° + θ) (10)

【0017】この光は、集光レンズ8によりビーム径が
絞られ、光量信号Pxとなり、光ファバ10を介して受
光素子12に導かれる。光量は、ベクトルの大きさの二
乗であるから、下記の通りとなる。 Px=Ex2 =E2 ・sin2 (45°+θ) =(E2 /2)・(1+sin2θ) (11)
The beam diameter of this light is narrowed by the condenser lens 8, becomes a light amount signal Px, and is guided to the light receiving element 12 via the optical fiber 10. The amount of light is the square of the magnitude of the vector, and is as follows. Px = Ex 2 = E 2 ・ Sin 2 (45 ° + θ) = (E 2 / 2) ・ (1 + sin2θ) (11)

【0018】受光素子12は、例えばフォトダイオード
から形成されており、受光する光量信号Pxに比例した
電流信号を出力する光電変換器である。磁界が交番磁界
の場合を例にとれば、この電流信号は電流電圧変換アン
プ14によって電圧信号Vxに変換される。 Vx=K1 (1+sin2θ) (12) (ただし、K1 は定数)。
The light receiving element 12 is formed of a photodiode, for example, and is a photoelectric converter that outputs a current signal proportional to the received light amount signal Px. Taking the case where the magnetic field is an alternating magnetic field as an example, this current signal is converted into a voltage signal Vx by the current-voltage conversion amplifier 14. Vx = K 1 (1 + sin2θ) (12) (where K 1 is a constant).

【0019】電圧信号Vxは、高周波通過フィルタ20
および低周波通過フィルタ21に入力されている。した
がって、高周波通過フィルタ20の出力VxA は、(1
2)式の直流バイアス成分が除去され、次式となる。 VxA =K1 sin2θ (13) 低周波通過フィルタ21の出力VxD は、交流成分が除
去され、次式となる。 VxD =K1 (14)
The voltage signal Vx is supplied to the high frequency pass filter 20.
And the low frequency pass filter 21. Therefore, the output Vx A of the high frequency pass filter 20 is (1
The DC bias component of the equation (2) is removed, and the following equation is obtained. Vx A = K 1 sin2θ (13) The output Vx D of the low frequency pass filter 21 has the following expression after the AC component is removed. Vx D = K 1 (14)

【0020】VxA は割算器18の分子入力端子に、V
D は割算器18の分母入力端子にインプットされてい
るので、割算器の出力信号Vx0 は次式(15)で表さ
れる。 Vx0 =sin2θ (15)
Vx A is applied to the numerator input terminal of the divider 18 by V
Since x D is input to the denominator input terminal of the divider 18, the output signal Vx 0 of the divider is represented by the following equation (15). Vx 0 = sin2θ (15)

【0021】(15)式で示される信号は、高周波阻止
フィルタで高周波が除去された後、A/D変換器でデジ
タル信号に変換される。この信号は、記憶素子24で
は、(15)式の関係によりVx0 に1対1に対応する
θの値を予め記憶させており、これを高速で読み出すこ
とにより、Vx0 を入力し、θをリアルタイムに出力す
ることになる。この段階で、出力としては充分である
が、図1に示した実施例では、D/A変換器25を介し
てアナログ出力V0 を得ている。したがって、本実施例
において、検出可能なθの範囲は、 −90°≦2θ≦90° よって、−45°≦θ≦45° となり、従来技術の約6倍の範囲が検出可能となる。
The signal represented by the equation (15) is converted into a digital signal by the A / D converter after the high frequency is removed by the high frequency blocking filter. With respect to this signal, in the storage element 24, a value of θ corresponding to Vx 0 in a one-to-one correspondence with Vx 0 is previously stored in the storage element 24, and Vx 0 is input by reading this value at high speed. Will be output in real time. At this stage, the output is sufficient, but in the embodiment shown in FIG. 1, the analog output V 0 is obtained via the D / A converter 25. Therefore, in the present embodiment, the detectable range of θ is −90 ° ≦ 2θ ≦ 90 °, and therefore −45 ° ≦ θ ≦ 45 °, which is approximately 6 times the range of the conventional technique.

【0022】また、(15)式から明らかなように、発
光部1の特性変動、光ファイバ2,10、受光素子1
2、電流電圧変換アンプ14の特性変動に影響を受けな
い。更に、光ファイバは2と10の2本のみであり、従
来技術の3本に比べて光学系がシンプルである。
Further, as is clear from the equation (15), the characteristic variation of the light emitting section 1, the optical fibers 2 and 10, the light receiving element 1
2. It is not affected by the characteristic variation of the current-voltage conversion amplifier 14. Further, since there are only two optical fibers, 2 and 10, the optical system is simpler than the conventional three.

【0023】(2)第2実施例 図2に、本発明の第2実施例を示す。この第2実施例の
構成は、発光部1から電流電圧変換アンプ14間では、
前記第1実施例と同じである。この第2実施例におい
て、電流電圧変換アンプ14の出力は、低周波通過フィ
ルタ21に入力され、一方、低周波通過フィルタ21の
出力は、発光量を制御する信号として、発光部へフィー
ドバックされる。電流電圧変換アンプ14の出力は同時
に高周波阻止フィルタ22を介して、A/D変換器に入
力される。24は、入力デジタル信号値(A)に1対1
に対応したsin-1(A/k−1)の値を予め記憶刺せ
て置き、これを入力値に応じて高速で読み出し出力する
ようにした記憶素子(ROM)である。25はROMか
らデジタル出力信号をアナログ信号に変換するD/A変
換器である。
(2) Second Embodiment FIG. 2 shows a second embodiment of the present invention. The configuration of the second embodiment is such that between the light emitting section 1 and the current-voltage conversion amplifier 14,
This is the same as the first embodiment. In the second embodiment, the output of the current-voltage conversion amplifier 14 is input to the low frequency pass filter 21, while the output of the low frequency pass filter 21 is fed back to the light emitting unit as a signal for controlling the light emission amount. .. The output of the current-voltage conversion amplifier 14 is simultaneously input to the A / D converter via the high frequency blocking filter 22. 24 is 1: 1 to the input digital signal value (A)
Is a storage element (ROM) in which a value of sin -1 (A / k-1) corresponding to is stored and stabbed in advance and is read out and output at high speed according to an input value. Reference numeral 25 is a D / A converter that converts a digital output signal from the ROM into an analog signal.

【0024】この第2実施例においては、発光部1か
ら、電流電圧変換アンプ14間での動作は図1の第1実
施例に同じである。しかし、低周波通過フィルタ21に
よって交流成分を除去した信号は、発光量を制御する信
号として発光部へフィードバッグされているため、(1
2)式における定数K1 は、K1 =K(一定)となるよ
うに制御され、電圧信号Vxは光源部1から電流電圧変
換アンプ14までの特性変動の影響を受けない。 Vx=K(1+sin2θ) (16)
In the second embodiment, the operation between the light emitting section 1 and the current-voltage conversion amplifier 14 is the same as that of the first embodiment shown in FIG. However, the signal from which the AC component has been removed by the low-frequency pass filter 21 is fed back to the light emitting unit as a signal for controlling the amount of light emission.
The constant K 1 in the equation 2) is controlled so that K 1 = K (constant), and the voltage signal Vx is not affected by the characteristic variation from the light source unit 1 to the current-voltage conversion amplifier 14. Vx = K (1 + sin2θ) (16)

【0025】(16)式で示される信号は高周波阻止フ
ィルタで高周波が除去された後A/D変換器でデジタル
信号に変換される。この信号派、記憶素子24に入力去
れる。記憶素子24では、(16)式の関係より、Vx
に1対1に対応するθの値を予め記憶させており、これ
を高速で読み出すことにより、Vxを入力し、θをリア
ルタイムに出力することになる。この段階で出力として
は充分であるが、図2に示した他の実施例では、D/A
変換器25を介してアナログ出力V0 を得ている。
The signal represented by the equation (16) is converted to a digital signal by the A / D converter after the high frequency is removed by the high frequency blocking filter. This signal group is input to the storage element 24 and then left. In the storage element 24, from the relationship of the equation (16), Vx
The value of θ corresponding to 1 to 1 is stored in advance. By reading this value at high speed, Vx is input and θ is output in real time. At this stage, the output is sufficient, but in the other embodiment shown in FIG.
The analog output V 0 is obtained via the converter 25.

【0026】この第2実施例においても、前記第1実施
例と同様に、検出可能なθの範囲が−45°≦θ≦45
°と広く、発光部1から電流電圧変換アンプ14間での
特性変動の影響を受けなく、光学系がシンプルである。
それに加えて、第1実施例における高周波通過フィルタ
20および割算器18が不要になる分だけ信号処理回路
が簡素になるという効果がある。
Also in the second embodiment, the range of detectable θ is −45 ° ≦ θ ≦ 45, as in the first embodiment.
The optical system is simple, without being affected by the characteristic variation between the light emitting unit 1 and the current-voltage conversion amplifier 14.
In addition, there is an effect that the signal processing circuit is simplified as much as the high frequency pass filter 20 and the divider 18 in the first embodiment are unnecessary.

【0027】[0027]

【発明の効果】以上説明したように本発明によれば、信
号処理回路において、入力に対応する予め記憶されてい
る値を、直接記憶素子から高速で読み出すよう動作する
ので、広範囲の磁界を高い精度で検出することができる
光式磁界センサを提供できる効果が得られる。
As described above, according to the present invention, in the signal processing circuit, the value stored in advance corresponding to the input is read out directly from the storage element at a high speed, so that the magnetic field in a wide range is high. An effect that an optical magnetic field sensor that can detect with accuracy can be provided is obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の光式磁界センサの第1実施例を示す構
成図
FIG. 1 is a configuration diagram showing a first embodiment of an optical magnetic field sensor of the present invention.

【図2】本発明の光式磁界センサの第2実施例を示す構
成図
FIG. 2 is a configuration diagram showing a second embodiment of the optical magnetic field sensor of the present invention.

【図3】従来の光磁界センサの一例を示す構成図FIG. 3 is a configuration diagram showing an example of a conventional optical magnetic field sensor.

【図4】図3の光磁界センサを変流器に適用した状態を
示す構成図
FIG. 4 is a configuration diagram showing a state in which the optical magnetic field sensor of FIG. 3 is applied to a current transformer.

【図5】偏光子と検光子の作用を説明するためのベクト
ル図
FIG. 5 is a vector diagram for explaining the actions of a polarizer and an analyzer.

【符号の説明】 4…偏光子 5…磁気光学素子 7…検光子 12…受光素子 14…電流電圧変換アンプ 18…割算器 19…信号処理回路 20…高周波通過フィルタ 21…低周波通過フィルタ 22…高周波阻止フィルタ 23…A/D変換器 24…記憶素子[Explanation of reference numerals] 4 ... Polarizer 5 ... Magneto-optical element 7 ... Analyzer 12 ... Light receiving element 14 ... Current / voltage conversion amplifier 18 ... Divider 19 ... Signal processing circuit 20 ... High frequency pass filter 21 ... Low frequency pass filter 22 ... high frequency blocking filter 23 ... A / D converter 24 ... storage element

───────────────────────────────────────────────────── フロントページの続き (72)発明者 中嶋 高 神奈川県川崎市川崎区浮島町2番1号 株 式会社東芝浜川崎工場内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Takashi Nakajima 2-1, Ukishima-cho, Kawasaki-ku, Kawasaki-shi, Kanagawa Kanagawa Prefecture Hamakawasaki factory

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】被測定磁界の強さに比例して偏波面が回転
するファラデー効果を有する磁気光学素子と、 この磁気光学素子の光源側に配置した偏光子と、 磁気光学素子を透過してきた光を受け前記偏光子の主軸
とある特定の角度をなすよう主軸を定めた検光子と、 この検光子を透過した光を受け電気信号を変換する受光
素子と、 該受光素子から出力される電気信号から前記偏光面の回
転角を検出して磁界の強さを検出する信号処理回路を備
えた光式磁界センサにおいて、 前記信号処理回路に、処理回路に入力された値に対応し
た値を予め記憶しておく記憶素子と、信号処理回路への
入力時に該記憶素子から入力値に対応した値を読み出し
て出力とする出力手段とを設けたことを特徴とする光式
磁界センサ。
1. A magneto-optical element having a Faraday effect in which a plane of polarization rotates in proportion to the strength of a magnetic field to be measured, a polarizer arranged on the light source side of the magneto-optical element, and a magneto-optical element transmitted through the magneto-optical element. An analyzer having a principal axis that receives light and forms a specific angle with the principal axis of the polarizer, a light receiving element that receives the light that has passed through the analyzer and converts an electrical signal, and an electrical output from the light receiving element. In an optical magnetic field sensor including a signal processing circuit for detecting the rotation angle of the polarization plane from a signal to detect the strength of a magnetic field, the signal processing circuit is provided with a value corresponding to a value input to the processing circuit in advance. An optical magnetic field sensor, comprising: a storage element for storing the data; and an output means for reading out a value corresponding to an input value from the storage element when the signal is input to the signal processing circuit and outputting the read value.
JP3189754A 1991-07-30 1991-07-30 Optical magnetic field sensor Expired - Fee Related JP2996775B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3189754A JP2996775B2 (en) 1991-07-30 1991-07-30 Optical magnetic field sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3189754A JP2996775B2 (en) 1991-07-30 1991-07-30 Optical magnetic field sensor

Publications (2)

Publication Number Publication Date
JPH05196707A true JPH05196707A (en) 1993-08-06
JP2996775B2 JP2996775B2 (en) 2000-01-11

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ID=16246624

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Application Number Title Priority Date Filing Date
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Country Status (1)

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Publication number Priority date Publication date Assignee Title
JP2011141172A (en) * 2010-01-06 2011-07-21 Mitsutoyo Corp Optical fiber type magnetic field sensor
CN107144718A (en) * 2017-06-15 2017-09-08 华北电力大学 Double magnetic circuit complex optics current transformer and its signal processing method
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