JPH052098B2 - - Google Patents
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- Publication number
- JPH052098B2 JPH052098B2 JP59268951A JP26895184A JPH052098B2 JP H052098 B2 JPH052098 B2 JP H052098B2 JP 59268951 A JP59268951 A JP 59268951A JP 26895184 A JP26895184 A JP 26895184A JP H052098 B2 JPH052098 B2 JP H052098B2
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- moisture
- ions
- sensitive material
- sensitive
- present
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5007—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with salts or salty compositions, e.g. for salt glazing
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、電気抵抗値の変化により雰囲気の
相対湿度を検知する湿度センサー用の感湿材料の
製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for producing a moisture-sensitive material for a humidity sensor that detects the relative humidity of an atmosphere based on a change in electrical resistance.
昨今では、前記のような機能を有する感湿材料
としては、雰囲気に対して物理的、化学的に安定
であり強度も高い金属酸化物系セラミツクが最も
多く用いられてきた。このような従来のセラミツ
クからなるものの感湿メカニズムは、水蒸気が多
孔質なセラミツク表面で解離して生じた水素イオ
ン（H+）の濃度が、周囲の相対湿度によつて異
なるため、感湿部の電気抵抗値が変化することを
利用したものである。そして、このH+は、下記
刊行物に示されるように相対湿度が低い場合に
は、表面に生成している水酸基上をホツピングに
より伝導し、相対湿度が高い場合には、水和した
H+が水溶液中と同様に水膜を伝導するとされて
いる（刊行物、即ち、Ｊ，Ｈ，Anderson and
G.A.Parks：雑誌名：J.Phys.Chem.第72巻、第
8662頁1968年発行）。
Recently, metal oxide ceramics, which are physically and chemically stable in the atmosphere and have high strength, have been most often used as moisture-sensitive materials having the above-mentioned functions. The moisture sensing mechanism of conventional ceramics is that the concentration of hydrogen ions (H + ) generated when water vapor dissociates on the porous ceramic surface varies depending on the surrounding relative humidity. This method takes advantage of the fact that the electrical resistance value of As shown in the publication below, when the relative humidity is low, this H + is conducted by hopping on the hydroxyl groups generated on the surface, and when the relative humidity is high, it is hydrated.
It is believed that H + conducts through water films as well as in aqueous solutions (see publications, i.e. J, H, Anderson and
GAParks: Magazine name: J.Phys.Chem. Volume 72, No.
8662 pages, published in 1968).
上記のような従来のセラミツクから成るもの
は、H+による電気伝導を利用するものであり、
しかもある程度良好な感度を有するには、その電
気抵抗値には、下限値（おおむね相対湿度50％で
500KΩ程度、90％で20KΩ程度）があり、上記
セラミツクを用いた湿度センサーを空調機による
自動湿度コントロール等の用途に使用する場合、
駆動および検知回路上の使い易さの点で電気抵抗
値が高く、使い易いセンサーが得られ難いという
問題点があつた。 Those made of conventional ceramics as mentioned above utilize electrical conduction due to H + .
Moreover, in order to have a certain degree of good sensitivity, the electrical resistance value must have a lower limit (approximately at a relative humidity of 50%).
(approximately 500KΩ, approximately 20KΩ at 90%), and when using the above ceramic humidity sensor for applications such as automatic humidity control with air conditioners,
In terms of ease of use in the drive and detection circuits, there was a problem in that the electric resistance value was high and it was difficult to obtain a sensor that was easy to use.
また、H+による電気伝導を利用する従来の大
部分のセラミツク感湿材料では、空気中での使用
または放置によつて水（湿気）の吸脱着がくり返
されると、OH基が表面に安定化化学吸着されて
しまうために、センサーの抵抗値が経時的に大き
く変化してしまうことが避けられないので、これ
を初期特性にまで復帰させるには、実開昭55−
161248，55−161249、特開昭52−61788，54−
70895，54−101899，55−87941，56−2542，56−
109044，56−160649号公報などに見られるよう
に、感湿材料の周囲、カバー、基板内、電極等に
ヒーターを設け、感湿材料を500〜600℃に通電加
熱することによつて変化した特性を初期特性にま
で復帰させることが必要であるという問題点があ
つた。 In addition, in most conventional ceramic moisture-sensitive materials that utilize electrical conduction through H It is unavoidable that the resistance value of the sensor changes greatly over time due to chemical adsorption, so in order to restore this to its initial characteristics,
161248, 55-161249, JP 52-61788, 54-
70895, 54−101899, 55−87941, 56−2542, 56−
As seen in publications such as 109044 and 56-160649, heaters are installed around the moisture-sensitive material, in the cover, inside the substrate, on the electrodes, etc., and the moisture-sensitive material is heated to 500 to 600°C. There was a problem in that it was necessary to restore the characteristics to the initial characteristics.
そのため、例えば特開昭59−182852号公報に示
されているように、有機けい素化合物重合体とア
ルカリ金属化合物とを含有する組成物の焼成残留
物を感湿材料とするものである。 For this reason, for example, as disclosed in JP-A-59-182852, the calcination residue of a composition containing an organosilicon compound polymer and an alkali metal compound is used as a moisture-sensitive material.
上記公報に示された焼成残留物を感湿材料とす
るものは、電気抵抗が以前のものより低く、経時
劣化防止用の加熱装置（ヒーター）を必要とせ
ず、低温焼成で製作できるが、さらに電気抵抗の
低い感湿材料が望まれていた。
The material shown in the above publication that uses the firing residue as a moisture-sensitive material has a lower electrical resistance than the previous one, does not require a heating device (heater) to prevent deterioration over time, and can be manufactured by low-temperature firing. Moisture-sensitive materials with low electrical resistance have been desired.
この発明は、かかる問題点を解決するためにな
されたもので、経時劣化防止用の加熱装置（ヒー
ター）を必ずしも必要とせずとも長期間感湿特性
が安定し、より電気抵抗の低い感湿材料の製造方
法を提供することを目的とする。 This invention was made in order to solve these problems, and it is a moisture-sensitive material that has stable moisture-sensitive characteristics over a long period of time without necessarily requiring a heating device (heater) to prevent deterioration over time, and has a lower electrical resistance. The purpose is to provide a manufacturing method for.
この発明の感湿材料の製造方法は、有機けい素
化合物重合体とグラフアイトとを混練する工程、
混練物を焼成する工程、焼成物にアルカリイオン
およびハロゲンイオンの内の少なくとも一種を付
与させる工程、並びにアルカリイオンおよびハロ
ゲンイオンの内の少なくとも一種を付与した焼成
物を再び焼成する工程を施す方法である。
The method for producing a moisture-sensitive material of the present invention includes a step of kneading an organosilicon compound polymer and graphite;
A method comprising the steps of firing a kneaded product, adding at least one of alkali ions and halogen ions to the fired product, and firing the fired product to which at least one of alkali ions and halogen ions has been added again. be.
この発明における付与されたアルカリイオンお
よびハロゲンイオンは、感湿部表面の吸着水によ
つて呼び出され、表面電気伝導に加わることによ
り感湿材料の抵抗値が低くなる。
The applied alkali ions and halogen ions in the present invention are called out by adsorbed water on the surface of the moisture sensitive part, and add to surface electrical conduction, thereby lowering the resistance value of the moisture sensitive material.
又、この発明におけるグラフアイトは層状の化
合物であり、層間にアルカリイオンおよびハロゲ
ンイオンを安定に存在させ、かつ吸着水の有無に
よるその出入りを円滑に行なわせるのである。 Furthermore, the graphite used in the present invention is a layered compound, and allows alkali ions and halogen ions to stably exist between the layers, and allows them to move in and out smoothly depending on the presence or absence of adsorbed water.
この発明に係わる有機けい素化合物重合体とし
ては、例えば、メチルシリコーン、メチルフエニ
ルシリコーン、およびエチルシリケート重合体な
ど焼成により多孔質化するものが用いられ、これ
らは、グラフアイトの結合剤となる。又その多孔
質化のため、この発明の実施例による感湿材料に
おけるグラフアイトの上記作用が明確に現われる
と共に、吸着水量が多くなるために抵抗値のより
低い感湿材料が得られるのである。
The organosilicon compound polymer used in this invention includes, for example, methyl silicone, methyl phenyl silicone, and ethyl silicate polymer, which become porous upon firing, and these become binders for graphite. . Furthermore, due to its porous nature, the above-mentioned effects of graphite in the moisture-sensitive material according to the embodiments of the present invention are clearly manifested, and since the amount of adsorbed water is increased, a moisture-sensitive material with a lower resistance value can be obtained.
この発明に係わるアルカリイオンは、例えばカ
リウムイオン、ナトリウムイオンおよびリチウム
イオンなどの内の少なくとも一種が用いられる。 As the alkali ion according to the present invention, for example, at least one of potassium ions, sodium ions, lithium ions, etc. is used.
この発明に係わるハロゲンイオンは、例えば塩
素イオンおよびフツ素イオンなどの内の少なくと
も一種が用いられる。 The halogen ions used in this invention include at least one of chlorine ions and fluorine ions.
なお、上記公報に示された焼成残留物を感湿材
料とするものは、焼成前に有機けい素化合物とア
ルカリ金属化合物を混合しているので、その後の
焼結による固有反応によつてアルカリは均一な固
相中の一成分となり、吸着水によりアルカリイオ
ンとして溶出する量が非常に少ない。それに対
し、本発明のものは、有機けい素化合物と金属酸
化物を焼成して多孔質体とした後に、アルカリイ
オンを付与させているので、アルカリイオンは、
表面に安定に存在させることができ、水蒸気吸着
によつて容易に表面に呼び出されて表面電気伝導
に加わり感湿特性に影響を及ぼし、電気抵抗の低
下をもたらすことができる。 Furthermore, in the case of using the sintering residue as a moisture-sensitive material as shown in the above publication, an organosilicon compound and an alkali metal compound are mixed before sintering, so the alkali is removed by the inherent reaction during subsequent sintering. It becomes a component in a homogeneous solid phase, and the amount eluted as alkali ions by adsorbed water is very small. In contrast, in the present invention, alkali ions are added after the organosilicon compound and metal oxide are fired to form a porous body, so the alkali ions are
It can be stably present on the surface, and is easily drawn to the surface by water vapor adsorption, where it participates in surface electrical conduction and affects moisture sensitivity characteristics, resulting in a reduction in electrical resistance.
なお、この発明の実施例による感湿材料が皮膜
の造膜効果、乾燥および硬化促進、亀裂防止並び
に下地基板への接着性向上の目的で以下に示す金
属酸化物等の無機質材料粉末を添加剤として含有
することがある。 It should be noted that the moisture-sensitive material according to the embodiment of the present invention contains the following inorganic material powders such as metal oxides as additives for the purpose of film-forming effect, acceleration of drying and hardening, prevention of cracks, and improvement of adhesion to the underlying substrate. It may contain as.
以下実施例を示すことによりこの発明を詳細に
説明するが、これによりこの発明を限定するもの
ではない。 EXAMPLES This invention will be explained in detail by showing examples below, but the invention is not limited thereto.
実施例
第１図は、この発明の一実施例による感湿材料
を用いた湿度センサーの斜視図であり、図におい
て、１は絶縁基板、２は電極、３は感湿皮膜、４
はリード線である。Embodiment FIG. 1 is a perspective view of a humidity sensor using a moisture-sensitive material according to an embodiment of the present invention. In the figure, 1 is an insulating substrate, 2 is an electrode, 3 is a moisture-sensitive film, and 4
is the lead wire.
即ち、アルミナの絶縁基板１上に、Pt−Pd合
金系ペーストにて0.2mm間隔で10対のくし形状の
電極２をスクリーン印刷し、Ptのリード線４を
取り付け後焼付けを行なつた。この上に、下記組
成例の組成物にシンナーを加えて攪拌機にて混練
後、混合物を浸漬処理により、約50μmの厚さに
塗布し、480℃２時間の焼結後、５％Na2CO3の
水−アルコール混合溶媒に上記基板を25℃で１分
間浸漬し、再び450℃、１時間焼成して感湿皮膜
３を得、第１図のようなこの発明の一実施例によ
る感湿材料を用いた湿度センサーを製作した。 That is, ten pairs of comb-shaped electrodes 2 were screen printed on an alumina insulating substrate 1 using a Pt--Pd alloy paste at intervals of 0.2 mm, and after attaching Pt lead wires 4, baking was performed. On top of this, thinner was added to the composition of the following composition example, and after kneading with a stirrer, the mixture was applied to a thickness of about 50 μm by immersion treatment, and after sintering at 480°C for 2 hours, 5% Na2CO3 was added. The above substrate was immersed in a water-alcohol mixed solvent at 25°C for 1 minute, and then baked at 450°C for 1 hour to obtain a moisture-sensitive film 3, which produced a moisture-sensitive material according to an embodiment of the present invention as shown in Figure 1. The humidity sensor used was manufactured.
組成例
有機けい素化合物重合体：メチルシリコーン
61.4重量％
グラフアイト 27.6重量％
添加剤：SiO2 11重量％
このようにして製作したこの発明の一実施例に
よる感湿材料を用いた湿度センサーと、感湿皮膜
に1250℃で４時間焼結したAl2O3−MgO−ZnO系
セラミツクを用い、他は第１図の場合と同様にし
て得た従来タイプのセラミツク湿度センサーおよ
び上記公報に示された焼成残留物を感湿材料とす
る。即ちメチルフエニルシリコーン初期重合物
55.0重量％、LiCl16.2重量％を主成分とするもの
を実施例１と同様にして、80℃で10分間、500℃
で30分解焼成して得た感湿材料を用いた湿度セン
サーのサンプルにより、感湿特性（相対湿度
（％）−電気抵抗（Ω）とその経時変化を比較測定
したところ、第２図の結果が得られた。なお、印
加電圧は交流1V、50Hzである。第２図において、
曲線Ａ１およびＡ２は各々従来タイプのものの初
期および６か月間室内放置後の感湿特性を示し、
曲線AA1およびAA2は各々従来の焼成残留物タ
イプの初期および６ケ月間室内放置後の感湿特性
を示し、曲線Ｂ１およびＢ２は各々この発明の一
実施例による感湿材料を用いたものの初期および
６か月間室内放置後の感湿特性である。Composition example Organosilicon compound polymer: Methyl silicone
61.4% by weight Graphite 27.6% by weight Additives: SiO 2 11% by weight A humidity sensor using a moisture-sensitive material according to an embodiment of the present invention manufactured in this way and a moisture-sensitive film were sintered at 1250°C for 4 hours. A conventional type ceramic humidity sensor obtained using Al 2 O 3 --MgO--ZnO type ceramic obtained in the same manner as shown in FIG. 1 and the firing residue shown in the above-mentioned publication were used as moisture-sensitive materials. That is, methylphenyl silicone prepolymerized product
55.0% by weight and 16.2% by weight of LiCl as the main component was heated at 80°C for 10 minutes and at 500°C in the same manner as in Example 1.
When we compared and measured the humidity sensitivity characteristics (relative humidity (%) - electrical resistance (Ω)) and their changes over time using a sample of a humidity sensor using a moisture-sensitive material obtained by decomposing and baking for 30 hours, we obtained the results shown in Figure 2. was obtained.The applied voltage was AC 1V, 50Hz.In Fig. 2,
Curves A1 and A2 show the moisture sensitivity characteristics of the conventional type at the initial stage and after being left indoors for 6 months, respectively.
Curves AA 1 and AA 2 show the moisture sensitivity characteristics of a conventional firing residue type, respectively, initially and after being left indoors for 6 months, and curves B1 and B2, respectively, show the moisture sensitivity characteristics of a conventional baking residue type using a moisture sensitive material according to an embodiment of the present invention. Moisture sensitivity characteristics at the initial stage and after being left indoors for 6 months.
この図から明らかなように、従来のH+伝導タ
イプのセラミツクを感湿材料に用いた湿度センサ
ーは、６か月間放置後には、抵抗値が初期と比べ
て２桁ほど大となり、感湿機能もかなり低下して
しまつたのに対して、この発明の一実施例による
感湿材料を用いた湿度センサーは、６か月間放置
後にはわずかに抵抗値が小となつたのみであり、
感湿機能の低下も見られなかつた。また、初期の
感湿特性曲線Ａ１，AA1およびＢ１を比較する
とわかるように、この発明の一実施例による感湿
材料を用いたものの方法が従来のものよりも抵抗
値が１桁以上小さく、回路上使い易いものであ
り、感湿感度も良好である。この発明の一実施例
による感湿材料を用いた湿度センサーの特に高湿
度側で抵抗値が低く感度も良好であるのは、グラ
フアイトに存在するアルカリイオン（この場合は
Na+）が感湿部表面の吸着水によつて容易に呼び
出され、表面電気伝導に加わるためと、再燃成す
ることによる多孔質化のためと考えられる。 As is clear from this figure, the resistance value of a humidity sensor using conventional H + conduction type ceramic as the moisture-sensitive material increases by two orders of magnitude compared to the initial value after being left unused for 6 months, indicating that the humidity sensor has no moisture-sensing function. However, the resistance value of the humidity sensor using the moisture-sensitive material according to an embodiment of the present invention only slightly decreased after being left for 6 months.
No decrease in moisture sensitivity was observed. Furthermore, as can be seen by comparing the initial moisture-sensitive characteristic curves A1, AA 1 , and B1, the method using the moisture-sensitive material according to the embodiment of the present invention has a resistance value that is more than one order of magnitude lower than that of the conventional method. It is easy to use in circuits and has good humidity sensitivity. The reason why the humidity sensor using the moisture-sensitive material according to the embodiment of the present invention has a low resistance value and good sensitivity, especially on the high humidity side, is because of the alkali ions present in graphite (in this case,
This is thought to be because Na + ) is easily called out by the adsorbed water on the surface of the moisture sensitive part and participates in surface electrical conduction, and because it becomes porous due to re-combustion.
なお、上記実施例では、アルカリイオンを付与
した場合について述べたが、ハロゲンイオン並び
にアルカリイオンとハロゲンイオンを付与した場
合も同様の効果が得られ、その付与方法も例えば
イオン注入、蒸着、上記イオンを含有する溶液へ
の浸漬および上記イオン蒸気中放置等その方法に
よらず同様の効果が得られる。 In the above example, the case where alkali ions were applied was described, but the same effect can be obtained when halogen ions or alkali ions and halogen ions are applied, and the application method can be, for example, ion implantation, vapor deposition, or the above-mentioned ions. The same effect can be obtained regardless of the method, such as immersion in a solution containing ion or leaving it in the ion vapor.
さらに、上記効果は、有機けい素化合物重合体
アルカリイオンおよびハロゲンイオンの種類を変
更した場合も同様である。 Furthermore, the above effects are the same even when the types of alkali ions and halogen ions in the organosilicon compound polymer are changed.
この発明は以上説明したとおり、有機けい素化
合物重合体とグラフアイトとを混練する工程、混
練物を焼成する工程、焼成物にアルカリイオンお
よびハロゲンイオンの内の少なくとも一種を付与
させる工程、並びにアルカリイオンおよびハロゲ
ンイオンの内の少なくとも一種を付与した焼成物
を再び焼成する工程を施すことにより、経時劣化
防止用の加熱装置（ヒーター）を必ずしも必要と
せずとも長時間感湿特性が安定しより電気抵抗の
低い感湿材料の製造方法を得ることができ、例え
ば湿度センサーに有用である。
As explained above, this invention includes a step of kneading an organosilicon compound polymer and graphite, a step of firing the kneaded product, a step of imparting at least one of alkali ions and halogen ions to the fired product, and a step of kneading an organosilicon compound polymer and graphite. By performing a process of re-firing the fired product to which at least one of ions and halogen ions has been added, the moisture-sensitive characteristics are stabilized for a long time without necessarily requiring a heating device (heater) to prevent deterioration over time. A method for producing a moisture-sensitive material with low resistance can be obtained, which is useful for example in humidity sensors.
第１図は、この発明の一実施例による感湿材料
を用いた湿度センサーの斜視図、第２図は、この
発明の一実施例による感湿材料を用いた湿度セン
サーと従来の湿度センサーを比較する感湿特性図
である。
図において、１は絶縁基板、２は電極、３は感
湿皮膜、４はリード線、A1，A2，AA1，AA2は
比較従来例の感湿特性、Ｂ１，Ｂ２はこの発明の
一実施例による感湿材料を用いた湿度センサーの
感湿特性である。
FIG. 1 is a perspective view of a humidity sensor using a moisture-sensitive material according to an embodiment of the present invention, and FIG. 2 is a perspective view of a humidity sensor using a moisture-sensitive material according to an embodiment of the present invention and a conventional humidity sensor. It is a humidity sensitivity characteristic diagram for comparison. In the figure, 1 is an insulating substrate, 2 is an electrode, 3 is a moisture-sensitive film, 4 is a lead wire, A 1 , A 2 , AA 1 , and AA 2 are moisture-sensitive characteristics of the comparative conventional example, and B1 and B2 are the moisture-sensitive characteristics of the present invention. 2 is a diagram illustrating the moisture sensitivity characteristics of a humidity sensor using a moisture sensitive material according to an example.
Claims (1)
混練する工程、混練物を焼成する工程、焼成物に
アルカリイオンおよびハロゲンイオンの内の少な
くとも一種を付与させる工程、並びにアルカリイ
オンおよびハロゲンイオンの内の少なくとも一種
を付与した焼成物を再び焼成する工程を施す感湿
材料の製造方法。1 A step of kneading an organosilicon compound polymer and graphite, a step of firing the kneaded product, a step of imparting at least one of alkali ions and halogen ions to the fired product, and a step of adding at least one of alkali ions and halogen ions. A method for producing a moisture-sensitive material, which includes a step of firing a fired product to which at least one of the above-mentioned substances has been applied.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26895184A JPS61147135A (en) | 1984-12-20 | 1984-12-20 | Method for manufacturing moisture-sensitive materials |
| US06/778,225 US4666628A (en) | 1984-12-20 | 1985-09-20 | Moisture sensitive material and process for its production |
| DE8585112861T DE3585997D1 (en) | 1984-12-20 | 1985-10-10 | MOISTURE-SENSITIVE CERAMIC MATERIAL AND METHOD FOR THE PRODUCTION THEREOF. |
| EP85112861A EP0187205B1 (en) | 1984-12-20 | 1985-10-10 | Moisture sensitive ceramic material and process for its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26895184A JPS61147135A (en) | 1984-12-20 | 1984-12-20 | Method for manufacturing moisture-sensitive materials |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61147135A JPS61147135A (en) | 1986-07-04 |
| JPH052098B2 true JPH052098B2 (en) | 1993-01-11 |
Family
ID=17465557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26895184A Granted JPS61147135A (en) | 1984-12-20 | 1984-12-20 | Method for manufacturing moisture-sensitive materials |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61147135A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6229664B2 (en) * | 2012-12-13 | 2017-11-15 | コニカミノルタ株式会社 | Optical film roll, manufacturing method thereof, polarizing plate and display device |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5483896A (en) * | 1977-12-16 | 1979-07-04 | Matsushita Electric Ind Co Ltd | Humidity detecting element using thin film |
| JPS58166701A (en) * | 1982-03-26 | 1983-10-01 | 株式会社デンソー | Method of producing humidity sensitive element |
| JPS5948647A (en) * | 1982-09-13 | 1984-03-19 | Mitsubishi Electric Corp | Method for manufacturing moisture-sensitive materials |
| JPS5990039A (en) * | 1982-11-16 | 1984-05-24 | Mitsubishi Electric Corp | Moisture sensitive material |
| JPS59109850A (en) * | 1982-12-15 | 1984-06-25 | Murata Mfg Co Ltd | Moisture sensitive element |
| JPH0244390B2 (en) * | 1983-01-19 | 1990-10-03 | Mitsubishi Electric Corp | KANSHITSUZAIRYO |
-
1984
- 1984-12-20 JP JP26895184A patent/JPS61147135A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61147135A (en) | 1986-07-04 |
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