JPH052100B2 - - Google Patents
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- Publication number
- JPH052100B2 JPH052100B2 JP59268958A JP26895884A JPH052100B2 JP H052100 B2 JPH052100 B2 JP H052100B2 JP 59268958 A JP59268958 A JP 59268958A JP 26895884 A JP26895884 A JP 26895884A JP H052100 B2 JPH052100 B2 JP H052100B2
- Authority
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- Prior art keywords
- moisture
- sensitive material
- present
- sensitive
- metal oxide
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5007—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with salts or salty compositions, e.g. for salt glazing
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、電気抵抗値の変化により雰囲気の相
対湿度を検知する湿度センサー用の感湿材料の製
造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing a moisture-sensitive material for a humidity sensor that detects the relative humidity of an atmosphere based on a change in electrical resistance.
昨今では、前記のような機能を有する感湿材料
としては、雰囲気に対して物理的、化学的に安定
であり高い金属酸化物系セラミツクスが最も多く
用いられてきた。このような従来のセラミツクス
からなるものの感湿メカニズムは、水蒸気が多孔
質なセラミツク表面で解離して生じた水素イオン
（H+）の濃度が、周囲の相対湿度によつて異なる
ため、感湿部の電気抵抗値が変化することを利用
したものである。そして、このH+は、下記刊行
物に示されるように相対湿度が低い場合には、表
面に生成している水酸基上をホツピングにより伝
導し、相対湿度が高い場合には、水和したH+が
水溶液中と同様に水膜を伝導するとされている
（刊行物、即ち、J.H.Anderson and G.A.
Parks：雑誌名：J.Phys.Chem.第72巻、第3662頁
1968年発行）。
Recently, metal oxide ceramics, which are physically and chemically stable to the atmosphere, have been most often used as moisture-sensitive materials having the above-mentioned functions. The moisture sensing mechanism of conventional ceramics is that the concentration of hydrogen ions (H + ) generated when water vapor dissociates on the porous ceramic surface varies depending on the surrounding relative humidity. This method takes advantage of the fact that the electrical resistance value of Then, as shown in the following publication, when the relative humidity is low, this H + is conducted by hopping on the hydroxyl groups generated on the surface, and when the relative humidity is high, the hydrated H + is said to conduct through a water film as well as in an aqueous solution (publications, i.e., JH Anderson and GA
Parks: Magazine name: J.Phys.Chem. Volume 72, page 3662
Published in 1968).
上記のような従来のセラミツクから成るもの
は、H+による電気伝導を利用するものであり、
しかもある程度良好な感度を有するには、その電
気抵抗値には、下限値（おおむね相対湿度50％で
500KΩ程度、90％で20KΩ程度）があり、上記
セラミツクを用いた湿度センサーを空調機による
自動湿度コントロール等の用途に使用する場合、
駆動および検知回路上の使い易さの点で電気抵抗
値が高く、使い易いセンサーが得られ難いという
問題点があつた。 Those made of conventional ceramics as mentioned above utilize electrical conduction due to H + .
Moreover, in order to have a certain degree of good sensitivity, the electrical resistance value must have a lower limit (approximately at a relative humidity of 50%).
(approximately 500KΩ, approximately 20KΩ at 90%), and when using the above ceramic humidity sensor for applications such as automatic humidity control with air conditioners,
In terms of ease of use in the drive and detection circuits, there was a problem in that the electric resistance value was high and it was difficult to obtain a sensor that was easy to use.
また、H+による電気伝導を利用する従来の大
部分のセラミツク感湿材料では、空気中での使用
または放置によつて水（湿気）の吸脱着がくり返
されると、OH基が表面に安定化化学吸着されて
しまうために、センサーの抵抗値が経時的に大き
く変化してしまうことが避けられないので、これ
を初期特性にまで復帰させるには、実開昭55−
161248、55−161249、特開昭52−61788、54−
70895、54−101399、55−87941、56−2542、56−
109044、56−160649号公報などに見られるよう
に、感湿材料の周囲、カバー、基板内、電極等に
ヒーターを設け、感湿材料を500〜600℃に通電可
熱することによつて変化した特性を初期特性にま
で復帰させることが必要であるという問題点があ
つた。 In addition, in most conventional ceramic moisture-sensitive materials that utilize electrical conduction through H It is unavoidable that the resistance value of the sensor changes greatly over time due to chemical adsorption, so in order to restore this to its initial characteristics,
161248, 55-161249, JP-A-52-61788, 54-
70895, 54−101399, 55−87941, 56−2542, 56−
As seen in Publications No. 109044 and 56-160649, heaters are provided around the moisture-sensitive material, in the cover, inside the substrate, on the electrodes, etc., and the moisture-sensitive material is heated to 500 to 600°C by energizing it. There was a problem in that it was necessary to restore the characteristics to the initial characteristics.
そのため、例えば特開昭59−132352号公報に示
されているように、有機けい素化合物重合体とア
ルカリ金属化合物とを含有する組成物の焼成残留
物を感湿材料とするものがある。 For this reason, for example, as shown in Japanese Patent Application Laid-Open No. 59-132352, there is a method in which the firing residue of a composition containing an organosilicon compound polymer and an alkali metal compound is used as a moisture-sensitive material.
上記公報に示された焼成残留物を感湿材料とす
るものは、電気抵抗が以前のものより低く、経時
劣化防止用の加熱装置（ヒーター）を必要とせ
ず、低温焼成で製作できるが、さらに電気抵抗の
低い感湿材料が望まれていた。
The material shown in the above publication that uses the firing residue as a moisture-sensitive material has a lower electrical resistance than the previous one, does not require a heating device (heater) to prevent deterioration over time, and can be manufactured by low-temperature firing. Moisture-sensitive materials with low electrical resistance have been desired.
この発明は、かかる問題点を解決するためにな
されたもので、経時劣化防止用の加熱装置（ヒー
ター）を必ずしも必要とせずとも長期間感湿特性
が安定し、より電気抵抗の低い感湿材料の製造方
法を得ることを目的とする。 This invention was made in order to solve these problems, and it is a moisture-sensitive material that has stable moisture-sensitive characteristics over a long period of time without necessarily requiring a heating device (heater) to prevent deterioration over time, and has a lower electrical resistance. The purpose is to obtain a manufacturing method for.
本発明の感湿材料の製造方法は、有機けい素化
合物重合体および金属酸化物を主成分とする混合
焼成物にアルカリイオンを付与する方法である。
The method for producing a moisture-sensitive material of the present invention is a method in which alkali ions are added to a fired mixed product containing an organosilicon compound polymer and a metal oxide as main components.
また、本発明の別の発明の感湿材料の製造方法
は、有機けい素化合物重合体および金属酸化物を
主成分とする混合焼成物に、アルカリイオンを付
与し再び焼成する方法である。 Another method for producing a moisture-sensitive material of the present invention is a method in which alkali ions are added to a fired mixture containing an organosilicon compound polymer and a metal oxide as main components, and the mixture is fired again.
本発明における金属酸化物により感湿材料の皮
膜強度が増加し、又吸水量が多くなるため感度が
大きく、抵抗値が低くなる。
The metal oxide in the present invention increases the film strength of the moisture-sensitive material, and also increases water absorption, resulting in high sensitivity and low resistance.
又、本発明における付与されたアルカリイオン
は、多孔質化した混合焼成物に付与されているの
で、感湿部表面部に存在し、表面の吸着水によつ
て呼び出され、表面電気伝導に加わることにより
感湿材料の抵抗値が低くなる。 In addition, since the alkali ions provided in the present invention are provided to the porous mixed fired product, they exist on the surface of the moisture sensitive part, are called out by the adsorbed water on the surface, and participate in surface electrical conduction. This lowers the resistance value of the moisture sensitive material.
本発明に係わる有機けい素化合物重合体として
は、例えば、メチルシリコーン、メチルフエニル
シリコーン、およびエチルシリケート重合体など
焼成により多孔質化するものが用いられ、これら
は、下記金属酸化物の結合剤となる。又その多孔
質化のため、本発明の実施例の感湿材料における
金属酸化物の上記作用が明確に現われるととも
に、吸着水量が多くなるために抵抗値のより低い
感湿材料が得られるのである。
The organosilicon compound polymers used in the present invention include, for example, methyl silicone, methyl phenyl silicone, and ethyl silicate polymers that become porous upon firing, and these are made using the following metal oxide binder. becomes. Moreover, due to its porous nature, the above-mentioned effect of the metal oxide in the moisture-sensitive material of the embodiment of the present invention is clearly manifested, and the amount of adsorbed water is increased, so that a moisture-sensitive material with a lower resistance value can be obtained. .
本発明に係わるアルカリイオンは、例えばカリ
ウムイオン、ナトリウムイオンおよびリチウムイ
オンなどの内の少なくとも一種が例えば各々の硝
酸塩、硫酸塩、炭酸塩およびハロゲン化物の一種
として用いられる。 The alkali ions according to the present invention include, for example, at least one of potassium ions, sodium ions, and lithium ions, and is used as one of the respective nitrates, sulfates, carbonates, and halides.
本発明に係わる金属酸化物は、例えば、Al、
Cu、Ni、CrおよびTiなどの酸化物の内の少なく
とも一種が用いられる。 The metal oxide according to the present invention is, for example, Al,
At least one of oxides such as Cu, Ni, Cr and Ti is used.
なお、上記公報に示された焼成残留物を感湿材
料とするものは、焼成前に、有機けい素化合物と
アルカリ金属化合物を混合しているので、その後
の焼結による固相反応によつてアルカリは均一な
固相中の一成分となり、吸着水によりアルカリイ
オンとして溶出する量が非常に少ない。それに対
し、本発明のものは、有機けい素化合物と金属酸
化物を焼成して多孔質体とした後に、アルカリイ
オンを付与しているので、アルカリイオンを表面
に安定に存在させることができ、水蒸気吸着によ
つて容易に表面に呼び出されて表面電気伝導に伝
わり感湿特性に影響を及ぼし、電気抵抗の低下を
もたらすことができる。 Furthermore, in the case of using the sintering residue as a moisture-sensitive material as shown in the above publication, an organosilicon compound and an alkali metal compound are mixed before sintering, so the solid phase reaction during subsequent sintering The alkali becomes a component in the uniform solid phase, and the amount eluted as alkali ions by adsorbed water is very small. In contrast, in the present invention, alkali ions are added after firing the organosilicon compound and metal oxide to form a porous body, so that the alkali ions can be stably present on the surface. It is easily drawn to the surface by water vapor adsorption and is transmitted to surface electrical conduction, affecting moisture sensitivity characteristics and causing a decrease in electrical resistance.
又、上記有機けい素化合物重合体および金属酸
化物を主成分とする混合焼成物に、上記アルカリ
イオンを付与させたものを再び焼成することによ
り、更に耐水性が良好になり、経時的に一層低抵
抗化しにくくなる。 Furthermore, by adding the alkali ions to the fired mixed product containing the organosilicon compound polymer and metal oxide as main components and firing it again, the water resistance becomes even better and becomes even stronger over time. It becomes difficult to lower the resistance.
なお、本発明の実施例の感湿材料が皮膜の造膜
効果、乾燥および硬化促進、亀裂防止並びに下地
基板への接着性向上の目的で無機質材料粉末を添
加剤として含有することがある。 The moisture-sensitive material of the embodiments of the present invention may contain inorganic material powder as an additive for the purpose of forming a film, accelerating drying and curing, preventing cracking, and improving adhesion to the base substrate.
以下実施例を示すことにより本発明を詳細に説
明するが、これにより本発明を限定するものでは
ない。 The present invention will be explained in detail by showing Examples below, but the present invention is not limited thereto.
実施例 １
第１図は、本発明の一実施例による感湿材料を
用いた湿度センサーの斜視図であり、図におい
て、１は絶縁基板、２は電極、３は感湿皮膜、４
はリード線である。Embodiment 1 FIG. 1 is a perspective view of a humidity sensor using a moisture-sensitive material according to an embodiment of the present invention. In the figure, 1 is an insulating substrate, 2 is an electrode, 3 is a moisture-sensitive film, and 4
is the lead wire.
即ち、アルミナの絶縁基板１上に、Pt−Pd合
金系ペーストにて0.2mm間隔で10対のくし形状の
電極２をスクリーン印刷し、Ptのリード線４を
取り付け後焼付けを行なつた。この上に、下記組
成例の組成物にシンナーを加えて撹拌機にて混練
後、混合物を浸漬処理により、約50μmの厚さに
塗布し、530℃1.5時間の焼成後、５％K2SO4水溶
液中に、上記基板を30秒間浸漬して感湿皮膜３を
得、第１図のような本発明の一実施例による感湿
材料を用いた湿度センサーを製作した。 That is, ten pairs of comb-shaped electrodes 2 were screen printed on an alumina insulating substrate 1 using a Pt--Pd alloy paste at intervals of 0.2 mm, and after attaching Pt lead wires 4, baking was performed. On top of this, thinner was added to the composition of the following composition example, and after kneading with a stirrer, the mixture was applied to a thickness of about 50 μm by immersion treatment, and after baking at 530°C for 1.5 hours, 5% K 2 SO 4 The above substrate was immersed in an aqueous solution for 30 seconds to obtain a moisture-sensitive film 3, and a humidity sensor using a moisture-sensitive material according to an embodiment of the present invention as shown in FIG. 1 was manufactured.
組成例
有機けい素化合物重合体：
メチルフエニルシリコーン 55.6重量％
金属酸化物： TiO2 55.6重量％
Cr2O3 20.3 〃
添 加 物： SiO2 18.4 〃
実施例 ２
実施例１と同様の組成物を用い、実施例１と同
様に、上記組成物を塗布、焼成、K2SO4水溶液に
浸漬し、更に400℃、30分間焼成して本発明の別
の発明の実施例による感湿材料を用いた湿度セン
サーを製作した。Composition example Organosilicon compound polymer: Methylphenyl silicone 55.6% by weight Metal oxide: TiO 2 55.6% by weight Cr 2 O 3 20.3 Additive: SiO 2 18.4 Example 2 Same composition as Example 1 Similarly to Example 1, the above composition was coated, baked, immersed in a K 2 SO 4 aqueous solution, and further baked at 400°C for 30 minutes to produce a moisture-sensitive material according to another embodiment of the present invention. The humidity sensor used was manufactured.
上記のようにして製作した本発明の一実施例に
よる感湿材料を用いた湿度センサー、本発明の別
の発明の実施例による感湿材料を用いた湿度セン
サー、感湿皮膜に1250℃で４時間焼成したAl2O3
−MgO−ZnO系セラミツクスを用い、他は第１
図の場合と同様にして得た従来タイプのセラミツ
ク湿度センサー、および上記公報に示された焼成
残留物を感湿材料とする、即ちメチルフエニルシ
リコーン初期重合物55.0重量％、Licl16.2重量％
を主成分とするものを実施例１と同様にして、80
℃で10分間、500℃で30分解焼成して得た感湿材
料を用いた湿度センサのサンプルにより、感湿特
性（相対湿度（％）−電気抵抗（Ω））とその経時
変化を比較測定したところ、第２図の結果が得ら
れた。なお、印加電圧は交流1V、50Hzである。
第２図において、曲線A1およびA2は各々従来の
セラミツクタイプのものの初期および１年間室内
放置後の感湿特性を示し、AA1およびAA2は
各々従来の焼成残留物タイプの初期および６ケ月
間室内放置後の感湿特性を示し、曲線B1および
B2は各々本発明の一実施例による感湿材料を用
いたものの初期および１年間室内放置後の感湿特
性、曲線C1およびC2は各々本発明の別の発明の
実施例による感湿材料を用いたものの初期および
１年間室内放置後の感湿特性である。 A humidity sensor using a moisture-sensitive material according to an embodiment of the present invention manufactured as described above, a humidity sensor using a moisture-sensitive material according to another embodiment of the present invention, and a humidity sensor using a moisture-sensitive film at 1250°C. Time - calcined Al2O3
-MgO-ZnO ceramics are used, others are the first
A conventional ceramic humidity sensor obtained in the same manner as shown in the figure, and using the firing residue shown in the above publication as a moisture-sensitive material, that is, 55.0% by weight of methylphenyl silicone initial polymer and 16.2% by weight of Licl.
In the same manner as in Example 1, 80
Comparative measurement of moisture sensitivity characteristics (relative humidity (%) - electrical resistance (Ω)) and its change over time using a sample of a humidity sensor using a moisture-sensitive material obtained by baking at 500℃ for 10 minutes and 30 minutes at 500℃. As a result, the results shown in Figure 2 were obtained. Note that the applied voltage was 1 V AC and 50 Hz.
In FIG. 2, curves A 1 and A 2 represent the initial and moisture sensitivity characteristics of the conventional ceramic type after being left indoors for one year, respectively, and AA 1 and AA 2 represent the initial and 6 humidity characteristics of the conventional firing residue type, respectively. It shows the moisture sensitivity characteristics after being left indoors for several months.
Curves B 2 and C 1 and C 2 are the moisture sensitivity characteristics of a material using a moisture sensitive material according to an embodiment of the present invention at the initial stage and after being left indoors for one year, respectively, and curves C 1 and C 2 are moisture sensitivity characteristics according to another embodiment of the present invention. Moisture sensitivity characteristics of the material used initially and after being left indoors for one year.
この図から明らかなように従来のH+伝導タイ
プのセラミツクを感湿材料に用いた湿度センサー
は、１年間放置後には、抵抗値が初期と比べて２
桁ほど大となり、感湿機能もかなり低下してしま
つたのに対して、本発明の一実施例による感湿材
料を用いた湿度センサーおよび本発明の別の実施
例による乾湿材料を用いた湿度センサーは、１年
間放置後にはわずかに抵抗値が小となつたのみで
あり、感湿機能の低下も見られず、特に本発明の
別の発明の実施例による場合はアルカリイオンを
表面に付与した後、焼結しているので、安定にア
ルカリが存在しC2に示されるように、１年間放
置後の抵抗値の低下もわずかであることが解る。
また、初期の感湿特性曲線A1，AA1，B1および
C1を比較するとわかるように、本発明の一実施
例による感湿材料を用いたものおよび本発明の別
の発明による感湿材料を用いたものの方が従来の
ものよりも特に高湿度側で抵抗値が１桁以上小さ
く、回路上使い易いものであり、特に、C1の場
合、感湿感度も良好である。 As is clear from this figure, the resistance value of a humidity sensor using conventional H + conduction type ceramic as the moisture-sensitive material decreases by 2% compared to the initial value after being left unused for one year.
However, the humidity sensor using a moisture-sensitive material according to one embodiment of the present invention and the humidity sensor using a dry-humidity material according to another embodiment of the present invention The resistance value only slightly decreased after being left for one year, and no deterioration of the moisture-sensing function was observed.Especially in the case of another embodiment of the present invention, the resistance value decreased only slightly, and no deterioration of the moisture-sensing function was observed. Since it is then sintered, alkali is stably present, and as shown in C 2 , the resistance value decreases only slightly after being left for one year.
In addition, the initial moisture sensitivity characteristic curves A 1 , AA 1 , B 1 and
As can be seen by comparing C 1 , the one using the moisture-sensitive material according to one embodiment of the present invention and the one using the moisture-sensitive material according to another invention of the present invention are better than the conventional one, especially on the high humidity side. The resistance value is one order of magnitude smaller, making it easier to use in circuits, and especially in the case of C1 , the moisture sensitivity is also good.
上記感湿材料を用いた湿度センサーの抵抗値が
低いのは、付与されたアルカリイオン（この場合
K+が容易に感湿部表面の吸着水によつて呼び出
され、表面電気伝導に加わるためであり、特に本
発明の別の発明の実施例による感湿材料を用いた
湿度センサーの感度が良好でしかも経時的に低抵
抗化しにくいのは、再焼成することによるより多
孔質化のため吸水量が多くなるためである。 The reason why the resistance value of the humidity sensor using the above moisture-sensitive material is low is that the alkali ions (in this case
This is because K + is easily called out by the adsorbed water on the surface of the humidity sensitive part and participates in surface electrical conduction, and the sensitivity of the humidity sensor using the humidity sensitive material according to another embodiment of the present invention is particularly good. However, the reason why it is difficult to lower the resistance over time is because re-firing makes the material more porous and absorbs more water.
なお、上記実施例では、アルカリイオンの付与
方法として、上記イオンを含有する溶液に浸漬す
る場合について示したが、例えばイオン注入、蒸
着および上記イオン蒸気中放置等別の方法によつ
ても同様の効果が得られ、又有機けい素化合物重
合体、金属酸化物およびアルカリイオンの種類を
変更した場合も同様の効果が得られる。 In the above example, the method of applying alkali ions is immersed in a solution containing the ions, but the same method may be used, such as ion implantation, vapor deposition, and leaving in the ion vapor. Similar effects can be obtained even when the types of organosilicon compound polymer, metal oxide, and alkali ion are changed.
本発明は以上説明したとおり、有機けい素化合
物重合体および金属酸化物を主成分とする混合焼
成物にアルカリイオンを付与することにより、経
時劣化防止用の加熱装置（ヒーター）を必ずしも
必要とせずとも長期間感湿特性が安定し、より電
気抵抗の低い感熱材料の製造方法を得ることがで
き、例えば湿度センサーに有用である。
As explained above, the present invention eliminates the need for a heating device (heater) to prevent deterioration over time by adding alkali ions to a mixed fired product whose main components are an organosilicon compound polymer and a metal oxide. In both cases, it is possible to obtain a method for producing a heat-sensitive material that has stable moisture-sensitive characteristics over a long period of time and has a lower electrical resistance, and is useful for, for example, a humidity sensor.
又、本発明の別の発明は、有機けい素化合物重
合体および金属酸化物を主成分とする混合焼成物
に、アルカリイオンを付与し再び焼成することに
より、上記効果に加えてさらに、耐水性が良好に
なり、経時的に一層低抵抗化しにくい感湿材料の
製造方法を得ることができる。 Further, another invention of the present invention provides water resistance in addition to the above-mentioned effects by adding alkali ions to a mixed fired product mainly composed of an organosilicon compound polymer and a metal oxide and firing it again. It is possible to obtain a method for producing a moisture-sensitive material that has good resistance and is less likely to become lower in resistance over time.
第１図は、本発明の一実施例による感湿材料を
用いた湿度センサーの斜視図、第２図は、本発明
および本発明の別の発明の一実施例による感湿材
料を用いた湿度センサーと従来の湿度センサーを
比較する感湿特性図である。
図において、１は絶縁基板、２は電極、３は感
湿膜、４はリード線、A1，A2，AA1，AA2は比
較従来例の感湿特性、B1，B2，C1，C2は本発明
および本発明の別の発明の実施例による感湿材料
を用いた湿度センサーの感湿特性である。
FIG. 1 is a perspective view of a humidity sensor using a moisture-sensitive material according to an embodiment of the present invention, and FIG. 2 is a perspective view of a humidity sensor using a moisture-sensitive material according to an embodiment of the present invention and another embodiment of the present invention. It is a humidity sensitivity characteristic diagram comparing a sensor and a conventional humidity sensor. In the figure, 1 is an insulating substrate, 2 is an electrode, 3 is a moisture-sensitive film, 4 is a lead wire, A 1 , A 2 , AA 1 , AA 2 are humidity-sensitive characteristics of a comparative conventional example, B 1 , B 2 , C 1 and C2 are the moisture sensitivity characteristics of humidity sensors using moisture sensitive materials according to embodiments of the present invention and other embodiments of the present invention.
Claims (1)
主成分とする混合焼成物に、アルカリイオンを付
与し、これを感湿材料とする感湿材料の製造方
法。 ２ 有機けい素化合物重合体および金属酸化物を
主成分とする混合焼成物に、アルカリイオンを付
与し、再び焼成して焼成残留物を得、これを感湿
材料とする感湿材料の製造方法。[Scope of Claims] 1. A method for producing a moisture-sensitive material, in which alkali ions are added to a mixed fired product containing an organosilicon compound polymer and a metal oxide as main components, and the resulting mixture is used as a moisture-sensitive material. 2. A method for producing a moisture-sensitive material by adding alkali ions to a fired mixed product containing an organosilicon compound polymer and a metal oxide as main components and firing it again to obtain a fired residue, and using this as a moisture-sensitive material. .
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26895884A JPS61147141A (en) | 1984-12-20 | 1984-12-20 | Moisture sensitive material and its production |
| US06/778,225 US4666628A (en) | 1984-12-20 | 1985-09-20 | Moisture sensitive material and process for its production |
| EP85112861A EP0187205B1 (en) | 1984-12-20 | 1985-10-10 | Moisture sensitive ceramic material and process for its production |
| DE8585112861T DE3585997D1 (en) | 1984-12-20 | 1985-10-10 | MOISTURE-SENSITIVE CERAMIC MATERIAL AND METHOD FOR THE PRODUCTION THEREOF. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26895884A JPS61147141A (en) | 1984-12-20 | 1984-12-20 | Moisture sensitive material and its production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61147141A JPS61147141A (en) | 1986-07-04 |
| JPH052100B2 true JPH052100B2 (en) | 1993-01-11 |
Family
ID=17465658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26895884A Granted JPS61147141A (en) | 1984-12-20 | 1984-12-20 | Moisture sensitive material and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61147141A (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58166701A (en) * | 1982-03-26 | 1983-10-01 | 株式会社デンソー | Method of producing humidity sensitive element |
| JPS5948647A (en) * | 1982-09-13 | 1984-03-19 | Mitsubishi Electric Corp | Method for manufacturing moisture-sensitive materials |
| JPH0244390B2 (en) * | 1983-01-19 | 1990-10-03 | Mitsubishi Electric Corp | KANSHITSUZAIRYO |
-
1984
- 1984-12-20 JP JP26895884A patent/JPS61147141A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61147141A (en) | 1986-07-04 |
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