JPH0521247Y2 - - Google Patents
Info
- Publication number
- JPH0521247Y2 JPH0521247Y2 JP2296187U JP2296187U JPH0521247Y2 JP H0521247 Y2 JPH0521247 Y2 JP H0521247Y2 JP 2296187 U JP2296187 U JP 2296187U JP 2296187 U JP2296187 U JP 2296187U JP H0521247 Y2 JPH0521247 Y2 JP H0521247Y2
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- torch
- frequency
- arm
- inductively coupled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 15
- 229910052799 carbon Inorganic materials 0.000 claims description 15
- 238000009616 inductively coupled plasma Methods 0.000 claims description 10
- 230000006698 induction Effects 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 7
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 4
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2296187U JPH0521247Y2 (2) | 1987-02-19 | 1987-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2296187U JPH0521247Y2 (2) | 1987-02-19 | 1987-02-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63131061U JPS63131061U (2) | 1988-08-26 |
| JPH0521247Y2 true JPH0521247Y2 (2) | 1993-05-31 |
Family
ID=30820841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2296187U Expired - Lifetime JPH0521247Y2 (2) | 1987-02-19 | 1987-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521247Y2 (2) |
-
1987
- 1987-02-19 JP JP2296187U patent/JPH0521247Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63131061U (2) | 1988-08-26 |
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