JPH052242B2 - - Google Patents

Info

Publication number
JPH052242B2
JPH052242B2 JP5709387A JP5709387A JPH052242B2 JP H052242 B2 JPH052242 B2 JP H052242B2 JP 5709387 A JP5709387 A JP 5709387A JP 5709387 A JP5709387 A JP 5709387A JP H052242 B2 JPH052242 B2 JP H052242B2
Authority
JP
Japan
Prior art keywords
image
semiconductor position
detection element
position detection
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5709387A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63222203A (ja
Inventor
Tsunehiro Takeda
Yukio Fukui
Takeo Iida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP62057093A priority Critical patent/JPS63222203A/ja
Publication of JPS63222203A publication Critical patent/JPS63222203A/ja
Publication of JPH052242B2 publication Critical patent/JPH052242B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Optical Distance (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP62057093A 1987-03-12 1987-03-12 高感度・高解像度半導体位置検出器 Granted JPS63222203A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62057093A JPS63222203A (ja) 1987-03-12 1987-03-12 高感度・高解像度半導体位置検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62057093A JPS63222203A (ja) 1987-03-12 1987-03-12 高感度・高解像度半導体位置検出器

Publications (2)

Publication Number Publication Date
JPS63222203A JPS63222203A (ja) 1988-09-16
JPH052242B2 true JPH052242B2 (de) 1993-01-12

Family

ID=13045888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62057093A Granted JPS63222203A (ja) 1987-03-12 1987-03-12 高感度・高解像度半導体位置検出器

Country Status (1)

Country Link
JP (1) JPS63222203A (de)

Also Published As

Publication number Publication date
JPS63222203A (ja) 1988-09-16

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term