JPS63222203A - 高感度・高解像度半導体位置検出器 - Google Patents

高感度・高解像度半導体位置検出器

Info

Publication number: JPS63222203A
Authority: JP; Japan
Prior art keywords: detection element; image; position detection; semiconductor position; light
Prior art date: 1987-03-12
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP62057093A

Other languages

English (en)

Japanese (ja)

Other versions

JPH052242B2 (de

Inventor

Tsunehiro Takeda

常広武田

Yukio Fukui

幸男福井

Takeo Iida

健夫飯田

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

National Institute of Advanced Industrial Science and Technology AIST

Original Assignee

Agency of Industrial Science and Technology

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1987-03-12

Filing date

1987-03-12

Publication date

1988-09-16

1987-03-12 Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology

1987-03-12 Priority to JP62057093A priority Critical patent/JPS63222203A/ja

1988-09-16 Publication of JPS63222203A publication Critical patent/JPS63222203A/ja

1993-01-12 Publication of JPH052242B2 publication Critical patent/JPH052242B2/ja

Status Granted legal-status Critical Current

Links

239000004065 semiconductor Substances 0.000 title claims abstract description 31
230000004304 visual acuity Effects 0.000 title abstract 3
230000035945 sensitivity Effects 0.000 title description 9
238000001514 detection method Methods 0.000 claims abstract description 25
230000005484 gravity Effects 0.000 claims description 11
238000000034 method Methods 0.000 abstract description 2
230000001678 irradiating effect Effects 0.000 abstract 2
230000003321 amplification Effects 0.000 abstract 1
238000003199 nucleic acid amplification method Methods 0.000 abstract 1
238000005259 measurement Methods 0.000 description 5
238000004519 manufacturing process Methods 0.000 description 3
239000000126 substance Substances 0.000 description 3
239000004020 conductor Substances 0.000 description 2
238000010586 diagram Methods 0.000 description 2
230000004424 eye movement Effects 0.000 description 2
OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
230000006866 deterioration Effects 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
238000010438 heat treatment Methods 0.000 description 1
238000003384 imaging method Methods 0.000 description 1
230000003287 optical effect Effects 0.000 description 1
229910052709 silver Inorganic materials 0.000 description 1
239000004332 silver Substances 0.000 description 1
230000001629 suppression Effects 0.000 description 1

Landscapes

Measurement Of Optical Distance (AREA)
Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
Length Measuring Devices By Optical Means (AREA)

JP62057093A 1987-03-12 1987-03-12 高感度・高解像度半導体位置検出器 Granted JPS63222203A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP62057093A JPS63222203A (ja)	1987-03-12	1987-03-12	高感度・高解像度半導体位置検出器

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP62057093A JPS63222203A (ja)	1987-03-12	1987-03-12	高感度・高解像度半導体位置検出器

Publications (2)

Publication Number	Publication Date
JPS63222203A true JPS63222203A (ja)	1988-09-16
JPH052242B2 JPH052242B2 (de)	1993-01-12

Family

ID=13045888

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP62057093A Granted JPS63222203A (ja)	1987-03-12	1987-03-12	高感度・高解像度半導体位置検出器

Country Status (1)

Country	Link
JP (1)	JPS63222203A (de)

1987
- 1987-03-12 JP JP62057093A patent/JPS63222203A/ja active Granted

Also Published As

Publication number	Publication date
JPH052242B2 (de)	1993-01-12

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Legal Events

Date	Code	Title	Description
2007-03-12	EXPY	Cancellation because of completion of term