JPH0522748Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a shutter mechanism in a raised floor of a clean room.

[Conventional technology]

In the manufacture of semiconductor devices, so-called wafer processing operations are carried out in which semiconductor thin plates are subjected to photolithographic processing, diffusion processing, etc.; Because they dislike change, these work rooms have traditionally been clean rooms with double-layered raised floors.

Figure 15 shows the conventional structure of a clean room.
HEPA filter 2 is installed at the top of clean room 1.
A plurality of air outlets 3 are provided, and a free access floor 6 with a double floor structure is formed using a floor panel 5 having numerous suction holes 4 on the floor surface. It has a downflow type structure in which the air conditioner and the suction hole 4 are connected through a duct 8 with an air conditioner 7 interposed therebetween. The air whose temperature and humidity have been adjusted by the air conditioner 7 is blown into the clean room 1 from the outlet 3 and exhausted from the suction hole 4 to condition and clean the air inside the clean room 1.

Moreover, FIG. 16 shows the conventional structure of the above-mentioned raised access floor 6.
The support legs 9 are arranged vertically and horizontally on the floor slab 11 at the intersections (four corners) of each adjacent floor panel 5, and the floor panel 5 is placed on the support legs 11 with cushion rubber 1.
It has a structure in which it is attached without interruption via 3. Recently, a shutter mechanism 15 has been installed on the back side of the floor panel 5 in such a free access floor 6.

The shutter mechanism 15 adjusts the volume of air blown into the clean room 1, and includes a bottom plate 16 fixed to the back side of the floor panel 5, a flat slide plate 17 that can slide on the bottom plate 16, It also includes a slide mechanism 18 for the slide plate 17. The bottom plate 16 and the slide plate 17 are shown in FIGS. 17 and 18.
Suction holes 19 of the same shape overlap each other as shown in the figure.
A plurality of suction holes 19 are formed, and by sliding a slide plate 17 on the bottom plate 16 in the directions of arrows A and B via a slide mechanism 18, the aperture ratio of the suction hole 19 can be adjusted.

19 to 21 show the slide mechanism 18
In the figure, reference numeral 20 denotes a camshaft rotatably supported in the center of the bottom plate 16, and the camshaft 20 is an elongated hole-shaped opening 2 provided approximately in the center of the slide plate 17.
A disc 22 is attached above the slide plate 17 via the camshaft 20.

An eccentric circular guide 24 from which a cam pin 23 fixed to the slide plate 17 projects is formed on the disc 22. By rotating the disc 22 in the direction of arrow C, the cam pin 23 is moved to the guide 2.
4 in the direction of arrow B and by rotating the disc 22 in the direction of arrow D.
3 moves in the direction of arrow A. In conjunction with this movement of the cam pin 23, the slide plate 17 slides in the same direction.

By adjusting the opening ratio of the suction hole 19 via the shutter mechanism 15, the volume of air blown into the clean room 1 can be adjusted.

[The problem that the idea aims to solve]

However, the conventional shutter mechanism 15 as described above
Since the sliding plate 17 is a flat plate, and the sliding portion of the bottom plate 16 and the sliding plate 17 is flat, the adhesion between the two is poor, and as a result, air flows into the suction hole 19 from the gap between them. The drawback was that the air volume could not be adjusted reliably. However, since the bottom plate 16 is fixed to the floor panel 5, even if the disc 22 is located on the back side of the floor panel 5, the opening ratio of the suction hole 19 cannot be adjusted by connecting it to the floor panel 5. It is necessary to insert a hand between the disc 22 and the bottom plate 16 to operate the disc 22, which has the drawback of poor operability.

The present invention was devised in view of the above circumstances, and the object thereof is to provide a shutter mechanism for a free accelerator floor that allows reliable air volume adjustment and is excellent in operability.

[Means to solve the problem]

In order to achieve such an object, the shutter mechanism according to claim 1 forms a floor panel support such as a large drawer or a floor beam and a joist on the subfloor via support legs, and a plurality of floor panel supports are formed on the floor panel support. A shutter plate fixing member is provided, and a plurality of lower shutter plates having a dogleg-shaped cross section having a plurality of suction holes are bridged between the shutter plate fixing members, and a plurality of lower shutter plates overlapping with the suction holes are provided on each lower shutter plate. An upper shutter plate having a suction hole of The shutter plate is equipped with an opening/closing knob that passes through a long hole provided in the lower shutter plate and a small hole provided in the upper shutter plate.

[Effect]

According to the invention according to claim 1, by sliding the upper shutter plate, the opening ratio of the suction holes of both shutter plates can be adjusted, and the upper shutter plate has good adhesion with the lower shutter plate. It easily slides on the lower shutter plate using the bent part as a guide while maintaining the position. Further, since both shutter plates are formed to have a dogleg shape in cross section, good adhesion is maintained between them, so that air does not escape from the gap between the two shutter plates to the suction hole. According to the invention according to claim 2, the upper shutter plate can be slid through the opening/closing knob.

Furthermore, according to the invention described in each claim, the weight of the equipment on the floor panel is widely distributed and supported by the floor panel support, and the floor panel support prevents the support leg from collapsing. .

〔Example〕

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A free access floor equipped with a shutter mechanism according to an embodiment of the present invention in which an opening/closing knob is attached to a shutter plate will be described in detail below with reference to the drawings. Incidentally, the same elements as those in the above conventional example are indicated by the same reference numerals.

In FIG. 1, the reference numeral 25 is the support leg 9 in FIG.
Floor slab 1 with wider spacing ( ₁ < ₂ ) than
Support legs arranged at equal intervals on 1, the support legs 2
Reference numeral 5 denotes a large support 27 to which a connecting member 26 having a U-shaped cross section is attached, a height adjustment bolt 29 to which the large support 27 is connected, a cylindrical support portion 31 and a cylindrical support to which this height adjustment bolt 29 is screwed. It consists of a base plate 33 attached to the lower end of the section 31.

The details of the support leg 25 will be explained based on FIG. 2. The height adjustment bolt 29 has screws running in opposite directions at the upper and lower ends of the adjustment nut 35 fixed approximately at the center. The threaded part 29a on the upper end side is screwed into a double nut 37 fixed to the bottom of the large undercarriage 27, and the threaded part 29b on the lower end side is fixed to the upper part of the cylindrical support part 31. It is inserted into the cylindrical support part 31 via a double nut 39. Then, by turning the adjusting nut 35 in the directions of arrows E and F, the double nut 39
A height adjustment bolt 29 screwed into the support leg 25 can be moved in the directions of arrows G and H to adjust the height of the support leg 25, and a square pipe 41, which will be described later, is connected to the connection member 26. When such height adjustment is performed, the threaded portion 29 that is screwed into the double nut 37
Due to the action of a, the large support 27 does not rotate in the same direction as the height adjustment bolt 29 rotates, and as a result, the connecting member 26 moves in the directions of arrows G and H together with the height adjustment bolt 29. Nevertheless, the square pipe 41 is always supported in one direction.
In FIG. 2, reference numeral 43 is an anchor for fixing the support leg 25 to the floor slab 11, and the support leg 25 is fixed to the floor slab 11 by an epoxy adhesive applied to the base plate 33 together with the anchor 43. has been done.

Each of the support legs 25 is arranged at equal intervals.
As shown in FIG. 3, a plurality of long rectangular pipes 41 that function as a main drawer for the floor panel 5 are supported in one direction on the main support 27 (connecting member 26).

The square pipes 41 are arranged at intervals that allow two floor panels 5 to be arranged as shown in FIG. They are successively connected via two U-shaped connecting members 45 and 46, but when the support leg 25 is arranged at the connecting part, the connecting member 26 is used instead of the lower connecting member 46. It is beginning to be used. Further, a plurality of square pipes 47 functioning as joists are butted and connected between the respective square pipes 41 functioning as a joist so as to form the same plane as the joists.

5 and 6 show the connection structure of the square pipes 41 and 47, and in the figures, reference numerals 49 and 51 are connection plates arranged at the connection part of the square pipes 41 and 47,
By tightening the connecting plates 49 and 51 with the bolts 53 and nuts 55, the square pipe 47
is connected to a square pipe 41.

Further, on the upper surface of the connection plate 49, a fifth
As shown in the figure, a square cushion rubber 57 is fixed with screws using an adhesive, and the square pipe 47 is
As shown in FIG. 3, a rectangular cushion rubber 59 is attached to the upper surface of each central part of the floor panel 5, and the floor panel 5 is laid on the square pipes 41, 47 via the cushion rubber 57, 59. There is. The cushion rubber 59 is screwed to the square pipe 47 via a plate 61 bolted to the square pipe 47, as shown in FIGS. 7 to 9.
The tip of the bolt 63 attached to the floor panel 7 is inserted into the back surface of the floor panel 5 as shown in FIG.

Further, as shown in FIG. 10, a shutter plate support member 67 having a substantially U-shaped cross section and having receiving pieces 65 at both ends is attached to the upper surface of the square pipe 47 between the cushion rubbers 57 and 59. Two overlapping shutter boards 69, 7 with doglegged cross sections
1 is arranged between each receiving piece 65. In this embodiment, as shown in FIG. 3, shutter plates 69 and 71 for two sets are arranged in the spaces formed by the square pipes 41 and 47, respectively.

Upper shutter plate 69 and lower shutter plate 71
As shown in FIGS. 10 to 12, the lower shutter plate 69 is made of a plate material having a dogleg-shaped cross section and has a plurality of suction holes 73 formed of long holes of the same shape, and is larger than the upper shutter plate 71. is the above receiving piece 65
The upper shutter plate 71 is arranged between the upper shutter plate 69 and the lower shutter plate 69 so that the suction holes 73 coincide with each other.
are superimposed on. And both shutter plates 6
Between 9 and 71 is the bent portion 6 of the lower shutter plate 69.
An opening/closing knob 79 is attached that passes through a long hole 75 provided in the upper shutter plate 9a and a small hole 77 provided in the bent portion 71a of the upper shutter plate 71. As it moves along the hole 75, the upper shutter plate 7 moves in conjunction with this movement.
1 move in the same direction to adjust the aperture ratio of the suction hole 73.

As described above, the square pipes 41 and 47 that function as the main drawers and joists are assembled on the floor slab 11 via the support legs 25, and the cushion rubber 5
7 and 59 to the square pipes 41 and 47, and both shutter plates 69 and 71 are placed in a predetermined position via the shutter plate support member 67.
As shown in FIG. 3, the floor panel 5 is fixed with screws 81 via cushion rubbers 57 and 59.
Further, as shown in FIG. 14, cushion rubber 85 is interposed in the gap between the pillar 83 and each floor panel 5.

Since the free access floor according to this embodiment is configured as described above, if such a free access floor is used in the clean room 1 shown in FIG. After the air is blown from the floor panel 5 to condition and clean the air in the clean room 1,
from the duct 8 to the air conditioner 7.
will be returned to. After being adjusted by the air conditioner 7, the air is blown out into the clean room 1 again.

In addition, an opening/closing knob 7 is provided from the suction hole 4 of the floor panel 5.
9 along the long hole 75 of the lower shutter plate 69, the upper shutter plate 71 will be moved to the bent portion 69a,
Using 71a as a guide, it can easily slide on the lower shutter plate 69 while maintaining good adhesion to the lower shutter plate 69. As the upper shutter plate 71 slides on the lower shutter plate 69 in this manner, the aperture ratio of the suction holes 73 of both shutter plates 69 and 71 changes, and the clean room 1
The amount of air blown out will be adjusted.

In order to adjust the height of the support leg 25 during construction, it is sufficient to rotate the adjustment nut 35 of the support leg 25 in the directions of arrows E and F as shown in FIG. Square pipe 4 via leg 25
To adjust the height after assembling 1,47,
Similarly, the adjustment nut 35 may be rotated in the directions of arrows E and F. Therefore, since the height adjustment bolt 29 is provided with threaded portions 29a and 29b in opposite directions,
Even if the adjustment nut 35 is rotated in the directions of arrows E and F and the height adjustment bolt 29 is moved in the directions of arrows G and H, the large undercarriage 27 is moved in the same direction as the height adjustment bolt 29 by the action of the threaded portion 29a. The square pipe 41 is always supported in one direction without rotating. or,
Square pipes 41 and 47 assembled on the floor slab 11 prevent the supporting legs 25 from collapsing. When the equipment is placed on the installed floor panel 5, the weight of the equipment is widely distributed over the square pipes 41 and 47, and the equipment is supported.

As described above, according to this embodiment, by sliding the upper shutter plate 69 from above the floor using the opening/closing knob 79 without removing the floor panel 5,
The opening ratio of the suction holes 73 of both shutter plates 69 and 71 can be adjusted, and the upper shutter plate 71 can maintain good adhesion with the lower shutter plate 69 while the bent portion 69
A, 71a are used as guides to slide on the lower shutter plate 69, and furthermore, these operations can be performed on the adjacent floor panel 5, which makes the shutter mechanism 15 superior to the conventional shutter mechanism 15 shown in FIGS. This resulted in improved operability.

Furthermore, as described above, both the shutter plates 69 and 71 are formed to have a dogleg shape in cross section and good adhesion between them is maintained, so that air escapes from the gap between the two shutter plates 69 and 71 to the suction hole 73. The air volume blown into the clean room can now be adjusted reliably.

Furthermore, in this embodiment, the shutter plate 69,
71 is formed into a dogleg shape in cross section, the force applied from above (force due to own weight and air resistance) is transferred to the receiving pieces 6 on both sides.
It is distributed in five directions, and this is distributed in the receiving piece 6.
5 and the square pipe 47, it is possible to form the shutter plates 69, 71 thinner than in a conventional shutter mechanism in which the shutter plates are arranged in a plane.

Furthermore, since the suction holes 73 formed in the shutter plates 69 and 71 are elongated holes, the change in the aperture ratio is larger even if the amount of movement of the shutter plate 71 is small compared to a case where the suction holes 73 are formed into a simple circular shape. becomes.

In addition, according to this embodiment, the square pipes 41, 4
7 prevents the support legs 25 from collapsing, there is no need to separately attach reinforcing members such as stringers, and the weight of the equipment on the floor panel 5 is widely distributed to each square pipe 41, 47, so the floor panel This has the secondary effect of eliminating the occurrence of deflection in a part of the structure 5.

Also, instead of the structure of the shutter plate 71 in the above embodiment, it is formed into a dogleg shape with a more acute angle than the lower shutter plate 69, and its wall thickness is made thinner than that of the shutter plate 69. Good too.

According to this structure, when force due to air resistance is applied to the shutter plate 71, the spring property of the shutter plate 71 causes the shutter plate 71 to come into close contact with the surface of the shutter plate 69. ,
The adhesion between both shutter plates 69 and 71 is improved.

[Effect of idea]

As described above, the shutter mechanism according to claim 1 forms a floor panel support such as a floor panel support or a floor beam and a joist on a subfloor via support legs, and a plurality of shutter plates are formed on the floor panel support. A fixing member is provided, and a plurality of lower shutter plates having a dogleg-shaped cross section having a plurality of suction holes are bridged between the shutter plate fixing members, and each of the lower shutter plates has a plurality of suction holes overlapping with the suction holes. and an upper shutter plate having a dogleg-shaped cross section smaller than the lower shutter plate is slidably placed on top of the upper shutter plate. It is equipped with an opening/closing knob that passes through a long hole in the lower shutter plate and a small hole in the upper shutter plate.
Operability has been improved compared to conventional shutter mechanisms. According to the second aspect of the present invention, since the opening/closing knob is attached to the shutter plate, the upper shutter plate can easily slide.

In addition, since the two shutter plates are formed into a dogleg shape in cross section, good adhesion between them is maintained, so according to the invention of each claim, air flows through the gap between the two shutter plates and into the suction hole. The amount of air blown into the clean room can now be adjusted reliably. In addition, since the floor panel support prevents the support legs from collapsing, there is no need to separately install reinforcing members such as stringers, and a large amount of effective space can be secured under the floor. Since it is widely distributed on the support body, it has the advantage that deflection does not occur in a part of the floor panel.

[Brief explanation of the drawing]

FIG. 1 is a side view of a raised floor equipped with an embodiment of a shutter mechanism equipped with an opening/closing knob. FIG. 2 is a side view of the support leg used in the above embodiment. FIG. 3 is a plan view of the free access floor according to the above embodiment. FIG. 4 is a side view of the connecting portion of the square pipes. FIG. 5 is a plan view of the connecting portion of the square pipes. Figure 6 is the − of Figure 5.
FIG. FIG. 7 is a plan view of the attachment portion of the cushion rubber. FIG. 8 is a side view of the attachment part of the cushion rubber. Figure 9 is the − of Figure 7.
FIG. FIG. 10 is a sectional view taken along the line -- in FIG. 3. 11 and 12 are plan views of the lower shutter plate and the upper shutter plate. 13th
The figure is a cross-sectional side view of a joint of square pipes with a floor panel attached. FIG. 14 is a cross-sectional side view of the square pipe connecting portion near the pillar. FIG. 15 is a schematic diagram of a conventional clean room. FIG. 16 is a side view showing the structure of a conventional raised floor. FIG. 17 is a plan view of the bottom plate of a conventional shutter mechanism. FIG. 18 is a plan view of a slide plate of a conventional shutter mechanism. FIG. 19 is a side view of a conventional shutter mechanism. Figures 20 and 21
The figure is a plan view of a shutter slide mechanism in a conventional shutter mechanism. Explanation of symbols of main parts, 9...Floor panel, 25...Support legs, 41, 47...Square pipe,
65... Receiving piece, 67... Shutter plate support member,
69... Upper shutter plate, 71... Lower shutter plate, 73... Suction hole, 79... Opening/closing knob.

Claims (1)

[Scope of Claim for Utility Model Registration] (1) Floor panel supports such as floor panels or floor beams and joists are formed on the subfloor via support legs, and a plurality of shutter board fixing members are provided on the floor panel support. and a plurality of lower shutter plates having a dogleg-shaped cross section having a plurality of suction holes are bridged between the shutter plate fixing members, each of the lower shutter plates has a plurality of suction holes overlapping with the suction holes; A shutter mechanism for a raised floor, characterized in that an upper shutter plate having a dogleg-shaped cross section smaller than the lower shutter plate is slidably placed on top of the lower shutter plate. (2) The upper shutter plate and the lower shutter plate are provided with an opening/closing knob that passes through a long hole provided in the lower shutter plate and a small hole provided in the upper shutter plate. shutter mechanism on a raised floor.