JPH05242538A - Manufacturing method of magneto-optical recording medium - Google Patents

Manufacturing method of magneto-optical recording medium

Info

Publication number
JPH05242538A
JPH05242538A JP4353692A JP4353692A JPH05242538A JP H05242538 A JPH05242538 A JP H05242538A JP 4353692 A JP4353692 A JP 4353692A JP 4353692 A JP4353692 A JP 4353692A JP H05242538 A JPH05242538 A JP H05242538A
Authority
JP
Japan
Prior art keywords
optical recording
magneto
protective layer
layer
resin protective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4353692A
Other languages
Japanese (ja)
Inventor
Takeshi Kyoda
豪 京田
Hisao Arimune
久雄 有宗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP4353692A priority Critical patent/JPH05242538A/en
Publication of JPH05242538A publication Critical patent/JPH05242538A/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】 【目的】 光磁気記録体の樹脂保護層へのフライングヘ
ッドの吸着や接触を極力防止できる信頼性の高い光磁気
記録体を提供すること。 【構成】 基板の一主面上に少なくとも光記録層及び樹
脂保護層を順次積層し、しかる後に前記樹脂保護層表面
に生じた局所的な凸部を研削することにより平坦化し、
該樹脂保護層表面を最大高さが2 μm 以下の面とするこ
とによって、光磁気記録体の樹脂保護層に対するフライ
ングヘッドの吸着やヘッド浮上時の接触を極力防止する
ことができ、フライングヘッドの浮上特性が安定した信
頼性の高い光磁気記録体を提供できる。
(57) [Abstract] [PROBLEMS] To provide a highly reliable magneto-optical recording body capable of preventing the attraction and contact of the flying head to the resin protective layer of the magneto-optical recording body as much as possible. [Structure] At least an optical recording layer and a resin protective layer are sequentially laminated on one main surface of a substrate, and then a local convex portion generated on the surface of the resin protective layer is ground to be flattened,
By making the surface of the resin protective layer a maximum height of 2 μm or less, adsorption of the flying head to the resin protective layer of the magneto-optical recording body and contact during flying of the head can be prevented as much as possible. It is possible to provide a highly reliable magneto-optical recording medium having stable flying characteristics.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、基板の一主面に少なく
とも光記録層を形成した光磁気記録体の製法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a magneto-optical recording body having at least an optical recording layer formed on one main surface of a substrate.

【0002】[0002]

【従来の技術】現在、記録情報を一度だけ書き込めるラ
イト・ワンス型、情報の再書き込みが可能なリライタブ
ル型等の光磁気ディスクが開発され実用化され始めてい
る。これらの光磁気ディスクは、通常、基板上に光記録
層と該光記録層を保護する保護層とを順次積層したもの
が使用される。
2. Description of the Related Art At present, magneto-optical disks such as a write-once type in which recorded information can be written only once and a rewritable type in which information can be rewritten can be developed and put into practical use. These magneto-optical disks are usually used in which an optical recording layer and a protective layer for protecting the optical recording layer are sequentially laminated on a substrate.

【0003】このような光磁気ディスクのうち、情報の
書き込みにフライングヘッドを使用するものでは、フラ
イングヘッドが光磁気ディスクの回転開始時及び停止時
に保護層表面に接触した場合、フライングヘッドが動作
不良となったり、保護層に傷やクラック等が発生して光
記録層を損傷させるという問題があった。
Among such magneto-optical disks, in which a flying head is used for writing information, the flying head malfunctions when the flying head comes into contact with the surface of the protective layer when the magneto-optical disk starts and stops rotating. However, there is a problem that the optical recording layer is damaged due to scratches or cracks in the protective layer.

【0004】そこで、保護層である樹脂層に潤滑剤やフ
ィラーを混入させて、保護層の表面硬度を向上させると
ともに潤滑性をもたせることでフライングヘッドの接触
による問題を解消する提案がなされている(特開平2-40
149 号公報等参照) 。また、保護層上に粗面化した樹脂
層を積層させてフライングヘッドの吸着を防止し、フラ
イングヘッドの摺動摩擦や衝撃を避ける提案がなされて
いる(特開平2−232836号公報等参照) 。
Therefore, it has been proposed that a lubricant or a filler be mixed into the resin layer as the protective layer to improve the surface hardness of the protective layer and to provide lubricity, thereby eliminating the problem caused by the contact of the flying head. (Japanese Patent Laid-Open No. 2-40
(See Publication No. 149). Further, it has been proposed that a roughened resin layer is laminated on a protective layer to prevent adsorption of a flying head and avoid sliding friction and impact of the flying head (see Japanese Patent Application Laid-Open No. 2-2323636).

【0005】[0005]

【従来技術の課題】しかしながら、上記いずれの提案も
樹脂層の形成時にゴミ等の異物が混入して局所的に突起
(凸部)が発生したり、フィラーの大きさやその凝集に
よっても局所的な凸部が発生することにより、浮上した
フライングヘッドがこれに接触して、やはり従来のよう
に動作不良が起こり情報記録の信頼性が低下するので問
題であった。
However, in any of the above proposals, foreign matter such as dust is mixed in when a resin layer is formed to locally generate projections (projections), or the size of the filler or its aggregation causes local protrusions. Since the flying head comes into contact with the convex portion due to the generation of the convex portion, a malfunction also occurs as in the conventional case and the reliability of information recording is lowered, which is a problem.

【0006】[0006]

【発明の目的】そこで、上記問題を解消して光磁気記録
体の樹脂保護層へのフライングヘッドの吸着や接触を極
力防止できる信頼性の高い光磁気記録体を提供すること
を目的とする。
SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a highly reliable magneto-optical recording medium which solves the above problems and can prevent the flying head from adsorbing or coming into contact with the resin protective layer of the magneto-optical recording medium as much as possible.

【0007】[0007]

【課題を解決するための手段】本発明の光磁気記録体の
製法は、基板の一主面上に少なくとも光記録層及び樹脂
保護層を順次積層し、しかる後に前記樹脂保護層表面に
生じた局所的な凸部を研削することにより平坦化し、該
樹脂保護層表面を最大高さが2 μm 以下の面とする。な
お、ここで光記録層とは少なくとも光磁気記録層を含む
層をいう。
According to the method of manufacturing a magneto-optical recording medium of the present invention, at least an optical recording layer and a resin protective layer are sequentially laminated on one main surface of a substrate, and thereafter the resin protective layer is formed on the surface. The local convex portions are ground to be flattened so that the surface of the resin protective layer has a maximum height of 2 μm or less. Here, the optical recording layer means a layer including at least a magneto-optical recording layer.

【0008】[0008]

【実施例】本発明に係る一実施例を図面に基づいて詳細
に説明する。図1に示す光磁気記録体Mは、ポリカーボ
ネート等の樹脂から成るディスク状の基板1( 厚み1.2
mm) の一主面上に、光記録層2をスパッタ法で形成し、
さらにスピンコート法により樹脂保護層3を形成したも
のである。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment according to the present invention will be described in detail with reference to the drawings. The magneto-optical recording medium M shown in FIG. 1 is a disk-shaped substrate 1 (having a thickness of 1.2
mm) on one main surface, the optical recording layer 2 is formed by the sputtering method,
Further, the resin protective layer 3 is formed by spin coating.

【0009】ここで、光記録層2は、非晶質イットリウ
ムサイアロンの第1誘電体層(約100 nm厚) 、非晶質Gd
-Dy-Fe系の光磁気記録層( 約20nm厚) 、非晶質イットリ
ウムサイアロンの第2誘電体層( 約30nm厚) 、及び金属
アルミニウムの反射層( 約100 nm厚) を順次積層したも
のである。なお、第1及び第2誘電体層の材質としては
他に窒化シリコン、窒化アルミニウム、炭化シリコン、
硫化カドミウム、窒化チタン、硫化亜鉛、フッ化マグネ
シウム、酸化カドミウム、酸化ビスマスなどが単体ある
いは組合せて用いられる。また、特に光磁気記録層の材
料としてはGd-Dy-Fe系の他に例えばGd-Dy-Fe,Gd-Tb-Fe,
Tb-Fe-Co,Dy-Fe-Co,Gd-Tb-Dy-Fe,Gd-Tb-Fe-Co,Tb-Dy-Fe
-Co,Gd-Dy-Fe-Co,Nd-Gd-Dy-Fe,Nd-Dy-Fe-Co,Nd-Gd-Dy-F
e-Co系などの合金系が用いられる。また、反射層の材質
としては、他にCr,Ti,Cu,Ag,SUSなどが単体あるいは組
合わせて用いられる。
Here, the optical recording layer 2 is composed of a first dielectric layer of amorphous yttrium sialon (thickness of about 100 nm) and amorphous Gd.
-Dy-Fe-based magneto-optical recording layer (about 20 nm thick), a second dielectric layer of amorphous yttrium sialon (about 30 nm thick), and a reflective layer of metallic aluminum (about 100 nm thick) are sequentially laminated. Is. Other materials for the first and second dielectric layers include silicon nitride, aluminum nitride, silicon carbide,
Cadmium sulfide, titanium nitride, zinc sulfide, magnesium fluoride, cadmium oxide, bismuth oxide and the like are used alone or in combination. Further, especially as the material of the magneto-optical recording layer, in addition to the Gd-Dy-Fe system, for example, Gd-Dy-Fe, Gd-Tb-Fe,
Tb-Fe-Co, Dy-Fe-Co, Gd-Tb-Dy-Fe, Gd-Tb-Fe-Co, Tb-Dy-Fe
-Co, Gd-Dy-Fe-Co, Nd-Gd-Dy-Fe, Nd-Dy-Fe-Co, Nd-Gd-Dy-F
An alloy system such as e-Co system is used. In addition, as the material of the reflective layer, Cr, Ti, Cu, Ag, SUS, etc. are used alone or in combination.

【0010】また、樹脂保護層3は下部層4と上部層5
とから成る。ここで、下部層4はウレタンアクリレート
系の紫外線硬化型樹脂(大日本インキ(株)製;商品名
SD-301)を約10μm 厚に塗布形成したものであり、上部
層5はアクリル系紫外線硬化型樹脂にシリカのフィラー
(粒径1 〜10μm , 平均粒径4 μm ) を加えた樹脂(三
菱レイヨン製) を約5 μm 厚に塗布形成したものであ
る。下部層4及び上部層5の材料としては、上記材料の
他に例えばアクリル系、エポキシ系、ポリエステル系、
アクリル酸エステル系、ウレタンアクリル系、ポリエー
テル系、シリコン系等の紫外線硬化型、熱硬化型、嫌気
性硬化型、湿気性硬化型などが使用可能である。
The resin protective layer 3 includes a lower layer 4 and an upper layer 5.
It consists of and. Here, the lower layer 4 is a urethane acrylate-based ultraviolet curable resin (manufactured by Dainippon Ink and Chemicals; trade name)
SD-301) is applied and formed to a thickness of about 10 μm, and the upper layer 5 is a resin (Mitsubishi Rayon) in which silica filler (particle size 1 to 10 μm, average particle size 4 μm) is added to acrylic UV curable resin. (Made by the company) is applied and formed to a thickness of about 5 μm. As the material of the lower layer 4 and the upper layer 5, in addition to the above materials, for example, acrylic, epoxy, polyester,
Acrylic ester-based, urethane acryl-based, polyether-based, silicone-based, etc. ultraviolet curable types, heat curable types, anaerobic curable types, moisture curable types and the like can be used.

【0011】また、上部層5のフィラーは上記材料の他
に Al 2 O 3 ,Si 3 N 4 ,SiC,CdS,ZnS,SiO等のセラミッ
クとを樹脂に混合しても良く、さらに導電性のあるセラ
ミック例えばITO( SnO 2 添加のIn2 O 3 ),Sb2 O
3 ,IrO2 ,MoO2 ,NbO2 ,PtO2 ,RuO2 ,WO 2 等の酸化
物、MoC,NbC,TaC,TiC,WC等の炭化物、NbN,Ta2 N,TiN,Zr
N,VN等の窒化物等を混合しても良い。
In addition to the above materials, the filler of the upper layer 5 may be a mixture of a resin with a ceramic such as Al 2 O 3 , Si 3 N 4 , SiC, CdS, ZnS or SiO. Some ceramics such as ITO (In 2 O 3 with SnO 2 added), Sb 2 O
3 , IrO 2 , MoO 2 , NbO 2 , PtO 2 , RuO 2 , WO 2 and other oxides, MoC, NbC, TaC, TiC, WC and other carbides, NbN, Ta 2 N, TiN, Zr
Nitride such as N and VN may be mixed.

【0012】保護層3の層厚については、フライングヘ
ッドと光記録層2との距離が実際上25μm 以下であるこ
とから、下部層4の層厚は樹脂などの有機質材料では信
頼性を得るために2 〜20μm 、好ましくは4 〜15μm が
最適となる。また、上部層5はフィラーの粒径にもよる
が、粒径は4 〜8 μm が良く、その時の膜厚は4 〜8μ
m が良い。
Regarding the layer thickness of the protective layer 3, since the distance between the flying head and the optical recording layer 2 is actually 25 μm or less, the layer thickness of the lower layer 4 is required to be reliable for organic materials such as resin. The optimum value is 2 to 20 μm, preferably 4 to 15 μm. The upper layer 5 preferably has a particle size of 4 to 8 μm, depending on the particle size of the filler, and the film thickness at that time is 4 to 8 μm.
m is good.

【0013】上部層5の表面はフィラーにより粗面化
し、フィラーの凝集やゴミ等の異物などによ局部的に生
じる凸部の高さが4 〜10μm の凹凸状となる。次に、一
般にハードディスクなどで使用されているバニッシュヘ
ッドタイプの研削用ヘッドを用いて、光磁気記録体Mを
回転させながらこの凸部の最大の高さが0.05〜3.0 μm
となる試料を多数作製した。なお、この高さの測定は触
針型の表面粗さ計により凸部の底辺から頂点までの高さ
を測定することより行った。また、各試料の表面粗さは
中心線粗さで100 nmRa程度となるように上部層5を塗布
形成した。
The surface of the upper layer 5 is roughened by the filler, and the height of the convex portion locally generated by the agglomeration of the filler or foreign matters such as dust becomes unevenness of 4 to 10 μm. Next, using a vanishing head type grinding head generally used in hard disks, etc., the maximum height of the convex portion is 0.05 to 3.0 μm while rotating the magneto-optical recording medium M.
Many samples were prepared. The height was measured by measuring the height from the bottom to the apex of the protrusion with a stylus type surface roughness meter. Further, the upper layer 5 was formed by coating so that the surface roughness of each sample was about 100 nmRa in terms of centerline roughness.

【0014】そして、各試料についてフライングヘッド
6による浮上テスト( 光磁気記録体の回転数3600rpm ,
フライングヘッド6の荷重4g重) を行ったところ、凸部
の最大高さが2.5 μm 以上では図2に示すようにフライ
ングヘッド6の光磁気記録体Mへの接触が発生した。ま
た、凸部の最大高さが0.1 μm より小さい場合ではフラ
イングヘッド6の吸着がみられ、表面粗さも初期の約10
0 nmRaから約10nmRaへとかなり低下していた。一方、凸
部の最大高さが0.1 〜2.0 μm の場合は、フライングヘ
ッド6の光磁気記録体Mへの接触や吸着は全く見られ
ず、表面粗さも初期の約100 nmRaを維持していた。な
お、表面粗さは表面粗さ計で測定し、光磁気記録体の直
径方向に沿った中心線平均粗さ(測定長さ=2mm )の平
均値を算出したものである。
A levitation test by the flying head 6 for each sample (rotational speed of the magneto-optical recording medium 3600 rpm,
When the flying head 6 was loaded with a load of 4 g), the flying head 6 contacted the magneto-optical recording medium M as shown in FIG. 2 when the maximum height of the protrusion was 2.5 μm or more. Also, when the maximum height of the convex portion is smaller than 0.1 μm, the flying head 6 is adsorbed and the surface roughness is about 10% of the initial value.
It was considerably reduced from 0 nmRa to about 10 nmRa. On the other hand, when the maximum height of the convex portion was 0.1 to 2.0 μm, no contact or adsorption of the flying head 6 to the magneto-optical recording medium M was observed, and the surface roughness maintained the initial value of about 100 nmRa. . The surface roughness is measured by a surface roughness meter, and the average value of the center line average roughness (measurement length = 2 mm) along the diameter direction of the magneto-optical recording material is calculated.

【0015】なお、上部層5の表面粗さはこの実施例に
限定されるものではなく、凸部の最大高さが0.1 〜2.0
μm の場合は、フライングヘッド6の光磁気記録体Mへ
の接触や吸着は全く見られず、表面粗さも初期の粗さを
維持することが判明した。また、樹脂保護層の態様は上
述の構成に限定されるものではなく、例えばサンドペー
パー等による表面研磨でもよく粗面化を施したものであ
れば適宜変更し実施しうる。
The surface roughness of the upper layer 5 is not limited to that in this embodiment, and the maximum height of the convex portion is 0.1 to 2.0.
In the case of μm, no contact or adsorption of the flying head 6 to the magneto-optical recording medium M was observed, and it was found that the surface roughness maintains the initial roughness. Further, the mode of the resin protective layer is not limited to the above-mentioned configuration, and may be appropriately changed and implemented as long as the surface is roughened by sandpaper or the like.

【0016】[0016]

【発明の効果】以上述べたように、本発明の光磁気記録
体の製法によれば、光磁気記録体の樹脂保護層に対する
フライングヘッドの吸着やヘッド浮上時の接触を極力防
止することができ、フライングヘッドの浮上特性が安定
した信頼性の高い光磁気記録体を提供できる。
As described above, according to the method for manufacturing a magneto-optical recording medium of the present invention, it is possible to prevent the flying head from adsorbing to the resin protective layer of the magneto-optical recording medium or contacting the head during flying. Thus, it is possible to provide a highly reliable magneto-optical recording body with stable flying characteristics of the flying head.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る一実施例の光磁気記録体の断面図
である。
FIG. 1 is a sectional view of a magneto-optical recording medium according to an embodiment of the present invention.

【図2】フライングヘッドが樹脂保護層に接触した様子
を示す光磁気記録体の断面図である。
FIG. 2 is a cross-sectional view of a magneto-optical recording body showing a state where a flying head is in contact with a resin protective layer.

【符号の説明】[Explanation of symbols]

1 ・・・ 基板 2 ・・・ 光記
録層 3 ・・・ 樹脂保護層 4 ・・・ 下部
層 5 ・・・ 上部層 6 ・・・ フラ
イングヘッド M ・・・ 光磁気記録体
1 ・ ・ ・ Substrate 2 ・ ・ ・ Optical recording layer 3 ・ ・ ・ Resin protective layer 4 ・ ・ ・ Lower layer 5 ・ ・ ・ Upper layer 6 ・ ・ ・ Flying head M ・ ・ ・ Magneto-optical recording material

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 基板の一主面上に少なくとも光記録層及
び樹脂保護層を順次積層し、しかる後に前記樹脂保護層
表面を研削することにより平坦化し、該樹脂保護層表面
を最大高さが2 μm 以下の面とすることを特徴とする光
磁気記録体の製法。
1. An optical recording layer and a resin protective layer are sequentially laminated on one main surface of a substrate, and the surface of the resin protective layer is then flattened by grinding so that the surface of the resin protective layer has a maximum height. A method of manufacturing a magneto-optical recording material, which has a surface of 2 μm or less.
JP4353692A 1992-02-28 1992-02-28 Manufacturing method of magneto-optical recording medium Pending JPH05242538A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4353692A JPH05242538A (en) 1992-02-28 1992-02-28 Manufacturing method of magneto-optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4353692A JPH05242538A (en) 1992-02-28 1992-02-28 Manufacturing method of magneto-optical recording medium

Publications (1)

Publication Number Publication Date
JPH05242538A true JPH05242538A (en) 1993-09-21

Family

ID=12666463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4353692A Pending JPH05242538A (en) 1992-02-28 1992-02-28 Manufacturing method of magneto-optical recording medium

Country Status (1)

Country Link
JP (1) JPH05242538A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4863154A (en) * 1984-03-27 1989-09-05 Mitsubishi Jukogyo Kabushiki Kaisha Conveyor system for planar objects

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4863154A (en) * 1984-03-27 1989-09-05 Mitsubishi Jukogyo Kabushiki Kaisha Conveyor system for planar objects

Similar Documents

Publication Publication Date Title
US4898774A (en) Corrosion and wear resistant magnetic disk
EP2150898B1 (en) High performance computer hard disk drive
CN100353420C (en) Disk drive with negative-pitch slider for contact recording
JPH05242538A (en) Manufacturing method of magneto-optical recording medium
US5416656A (en) Magnetic recording and reproducing head having a flat surface with round front ridge
US6466408B2 (en) Storage system slider having trailing edge pad and method for making the same
WO2004008450A1 (en) Protective overcoatings
JPH07105031B2 (en) Magnetic recording disk file
US6670032B2 (en) Oriented magnetic medium on a nonmetallic substrate
JP2851719B2 (en) Magnetic head for magnetic field modulation overwrite
JP7745361B2 (en) magnetic recording and reproducing device
JPH07182628A (en) Magnetic head, magnetic storage device, and magnetic disk storage device
JP3704000B2 (en) Magnetic head slider
JP2011034663A (en) Slider device and method of forming overcoat layer thereof
JP2770806B2 (en) Magnetic recording media
JPS5939809B2 (en) magnetic memory
JPH09212836A (en) Magnetic head slider and its production
JPH05151632A (en) Magneto-optical disk
JPH06168488A (en) Magneto-optical disk
JPH0644535A (en) Floating type magnetic head
JPH0589523A (en) Optical disk
JP2974555B2 (en) Magneto-optical recording medium
JPH04372703A (en) Magnetic disk device
JPH02168420A (en) Magnetic disk
JPH0714336A (en) Magnetic recording device