JPH05243884A - Piezoelectric polarization method - Google Patents
Piezoelectric polarization methodInfo
- Publication number
- JPH05243884A JPH05243884A JP4133992A JP4133992A JPH05243884A JP H05243884 A JPH05243884 A JP H05243884A JP 4133992 A JP4133992 A JP 4133992A JP 4133992 A JP4133992 A JP 4133992A JP H05243884 A JPH05243884 A JP H05243884A
- Authority
- JP
- Japan
- Prior art keywords
- polarization
- piezoelectric body
- shaped piezoelectric
- block
- strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000010287 polarization Effects 0.000 title claims abstract description 184
- 238000000034 method Methods 0.000 title abstract description 25
- 239000000463 material Substances 0.000 claims abstract description 12
- 230000003313 weakening effect Effects 0.000 claims 1
- 230000005684 electric field Effects 0.000 abstract description 10
- 230000010355 oscillation Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 8
- 238000007796 conventional method Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000010304 firing Methods 0.000 description 4
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000032683 aging Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
(57)【要約】
【目的】 ブロック状の圧電体のロット間の材料ばらつ
きやブロック状圧電体内の位置による材料特性のばらつ
きの如何に関わらず、該ブロック状圧電体から得られた
短冊状圧電体を高精度に所望の分極度とし得る、圧電体
の分極方法を提供する。
【構成】 ブロック状圧電体１１を所望の分極度△Ｆよ
りも強く分極し、次に逆方向に所望の分極度△Ｆよりも
弱く分極し、さらに最初の分極方向に再度分極して所望
の分極度△Ｆを実現し、所望の分極度△Ｆのブロック状
圧電体１１を分極方向Ｐと平行にスライスして短冊状圧
電体１２を得、該短冊状圧電体１２において、分極され
ている方向または分極されている方向とは逆方向に直流
電界を印加して分極度を調整する、圧電体の分極方法。
(57) [Abstract] [Purpose] A strip-shaped piezoelectric body obtained from the block-shaped piezoelectric body regardless of the material variation between the lots of the block-shaped piezoelectric body and the variation in the material properties due to the position in the block-shaped piezoelectric body. Provided is a method of polarizing a piezoelectric body, which enables the body to have a desired degree of polarization with high accuracy. [Structure] The block-shaped piezoelectric body 11 is polarized more strongly than a desired polarization degree ΔF, then is polarized weaker than a desired polarization degree ΔF in the opposite direction, and is again polarized in a first polarization direction to obtain a desired polarization degree. A polarization degree ΔF is realized, a block-shaped piezoelectric body 11 having a desired polarization degree ΔF is sliced in parallel with the polarization direction P to obtain a strip-shaped piezoelectric body 12, and the strip-shaped piezoelectric body 12 is polarized. A method of polarizing a piezoelectric body, in which a direct current electric field is applied in the direction opposite to the direction in which it is polarized or the polarization degree is adjusted.
Description
【０００１】[0001]
【産業上の利用分野】本発明は、圧電体を所望の分極度
に分極する方法に関し、特に、ブロック状圧電体から切
り出された短冊状の圧電体において所望の分極度を容易
に実現することを可能とする、圧電体の分極方法に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for polarizing a piezoelectric body to a desired degree of polarization, and particularly to easily realize a desired degree of polarization in a strip-shaped piezoelectric body cut out from a block-shaped piezoelectric body. The present invention relates to a method of polarizing a piezoelectric body that enables the above.
【０００２】[0002]
【従来の技術】図２は、従来より公知の厚みすべり振動
モードを利用した圧電発振子を示す斜視図である。圧電
発振子１は、矢印Ｐ方向に分極処理された矩形の圧電板
２の両主面に振動電極３，４を形成した構造を有する
（振動電極４については、圧電基板２の下方に投影した
状態で図示する。）。ところで、上記のような圧電発振
子１を得るにあたっては、図３（ａ）に示すように、ブ
ロック状圧電体５を矢印Ｐ方向に分極処理し、図示のよ
うにスライスして短冊状圧電体６を得る。しかる後、短
冊状圧電体６の両主面に（下面側の電極については図示
されず）全面電極を形成し、次に、エッチングにより複
数の振動電極３を形成する（図３（ｂ））。しかる後、
短冊状圧電体６を厚み方向に切断することにより、図２
に示した圧電発振子１を得ていた。2. Description of the Related Art FIG. 2 is a perspective view showing a conventionally known piezoelectric oscillator utilizing a thickness shear vibration mode. The piezoelectric oscillator 1 has a structure in which vibrating electrodes 3 and 4 are formed on both main surfaces of a rectangular piezoelectric plate 2 polarized in the direction of arrow P (the vibrating electrode 4 is projected below the piezoelectric substrate 2). It is illustrated in the state.). By the way, in obtaining the piezoelectric oscillator 1 as described above, as shown in FIG. 3A, the block-shaped piezoelectric body 5 is polarized in the direction of arrow P and sliced as shown in the figure to form a strip-shaped piezoelectric body. Get 6. Then, full-face electrodes are formed on both main surfaces of the strip-shaped piezoelectric body 6 (electrodes on the lower surface side are not shown), and then a plurality of vibrating electrodes 3 are formed by etching (FIG. 3B). .. After that,
By cutting the strip-shaped piezoelectric body 6 in the thickness direction, as shown in FIG.
The piezoelectric oscillator 1 shown in FIG.
【０００３】上記のような圧電発振子１の製造方法にお
いては、分極度は、当初のブロック状の圧電体５におけ
る分極処理により決定されていた。すなわち、短冊状圧
電体６や圧電基板２を得た後においては、分極度の調整
は行われていなかった。これは、ブロック状の圧電体５
をいわゆるソフトな圧電材料で構成した場合であって
も、短冊状の圧電体６や圧電基板２において分極度を調
整するには非常に高い電圧が必要であり、実用的ではな
いことによる。例えば、抗電界が１０ｋＶ／ｃｍのソフ
トな圧電材料からなる短冊状圧電体６において、図４に
示すように直流電界を印加して分極度を調整しようとす
ると、長さＬが７ｍｍの短冊状圧電体６では、最低でも
７０００Ｖ以上の電圧を印加しなければならない。In the method of manufacturing the piezoelectric oscillator 1 as described above, the degree of polarization is determined by the polarization treatment of the initially block-shaped piezoelectric body 5. That is, the polarization degree was not adjusted after the strip piezoelectric body 6 and the piezoelectric substrate 2 were obtained. This is a block-shaped piezoelectric body 5.
This is because even if the above is made of a so-called soft piezoelectric material, a very high voltage is required to adjust the polarization degree in the strip-shaped piezoelectric body 6 and the piezoelectric substrate 2, which is not practical. For example, in a strip-shaped piezoelectric body 6 made of a soft piezoelectric material having a coercive electric field of 10 kV / cm, when a DC electric field is applied to adjust the polarization degree as shown in FIG. A voltage of at least 7,000 V must be applied to the piezoelectric body 6.
【０００４】[0004]
【発明が解決しようとする課題】他方、上記ブロック状
の圧電体５を厚み方向に分極処理するには、ブロック状
という試料形状のために数万Ｖといった高電圧を印加す
る必要があったため、絶縁油中にブロック状圧電体を浸
漬した状態で分極処理しなければならなかった。そのた
め、分極処理後に絶縁油を除去するための煩雑な洗浄作
業が必要であった。On the other hand, in order to polarize the block-shaped piezoelectric body 5 in the thickness direction, it was necessary to apply a high voltage of tens of thousands of V because of the block-shaped sample shape. It was necessary to perform polarization treatment while the block-shaped piezoelectric body was immersed in insulating oil. Therefore, a complicated cleaning work for removing the insulating oil is required after the polarization treatment.
【０００５】また、上記のような製造工程を経て得られ
た圧電発振子１では、特性を揃えるには、その前提とし
て、ブロック状の圧電体５が一様にかつ高精度に分極処
理されていることが必要である。さらに、実際の量産に
際しては、異なるブロック状圧電体５が等しい分極度を
有するように、多数のブロック状圧電体５を高精度にか
つ安定に分極処理しなければならない。Further, in the piezoelectric oscillator 1 obtained through the above manufacturing process, in order to make the characteristics uniform, the block-shaped piezoelectric body 5 is uniformly and highly accurately polarized. Need to be present. Furthermore, in actual mass production, a large number of block-shaped piezoelectric bodies 5 must be polarized with high accuracy and stability so that different block-shaped piezoelectric bodies 5 have the same degree of polarization.
【０００６】しかしながら、従来の分極方法では、圧電
材料のばらつき、焼成ロット間の変動等により、ブロッ
ク状の圧電体５の分極度にばらつきが生じざるを得なか
った。のみならず、ブロック状圧電体５は、かなりの厚
み及び寸法を有するため、上記のように数万Ｖと非常に
高い電圧を印加することにより分極していたが、この様
な高電圧を印加することによる分極では、分極度の制御
自体が非常に難しく、従ってブロック状圧電体５を一様
にかつ高精度に分極することは非常に困難であった。However, in the conventional polarization method, the polarization degree of the block-shaped piezoelectric body 5 must be varied due to variations in the piezoelectric material, variations between firing lots, and the like. In addition, since the block-shaped piezoelectric body 5 has a considerable thickness and dimensions, it was polarized by applying a very high voltage of tens of thousands of V as described above. In the polarization by doing so, it is very difficult to control the polarization degree itself, and therefore it is very difficult to uniformly and highly accurately polarize the block-shaped piezoelectric body 5.
【０００７】そこで、本願出願人は、上記のようなブロ
ック状圧電体の分極における問題点を解決する方法とし
て、特願平３−３２９８４号において、以下の方法を開
示した。すなわち、図５に示すように所望の分極度より
も強い第１の分極度△Ｆ0 に分極処理されたブロック状
圧電体を用意し、第１の分極度△Ｆ0 を得る分極工程と
は逆方向にかつ所望の分極度より弱く分極する第２の分
極工程を実施し、再度第１の分極度を得た場合と同方向
に分極し、所望の分極度を得る第３の分極工程を実施す
ることにより、ブロック状圧電体５を所望の分極度に分
極する方法である。Therefore, the applicant of the present application has disclosed the following method in Japanese Patent Application No. 3-32984 as a method for solving the above-mentioned problems in polarization of the block-shaped piezoelectric body. That is, as shown in FIG. 5, the polarization step for obtaining the first polarization degree ΔF 0 by preparing the block-shaped piezoelectric body polarized to the first polarization degree ΔF 0 which is stronger than the desired polarization degree is A third polarization step is performed in which the second polarization step is performed in the opposite direction and weaker than the desired polarization degree, and the second polarization step is performed again in the same direction as when the first polarization degree is obtained to obtain the desired polarization degree. By carrying out the method, the block-shaped piezoelectric body 5 is polarized to a desired polarization degree.
【０００８】上記方法によれば、図５から明らかなよう
に、第３の分極工程における分極度−印加電圧曲線の傾
きが第２の分極工程における分極度−印加電圧の傾きよ
りも緩やかであるため、かつ第３の分極工程では比較的
低い電圧を印加して分極し得るため、ブロック状圧電体
５をより安定にかつ高精度に分極することができる。し
かしながら、実際の量産に際して用意されるブロック状
圧電体５では、焼成ロット間において特性がばらついた
り、あるいはブロック状圧電体５をスライスして得られ
る短冊状圧電体６間においても特性のばらつきが生じが
ちであるという問題があった。すなわち、ブロック状圧
電体５自体を安定にかつ高精度に分極したとしても、用
意されるブロック状圧電体５の材料特性が焼成ロット間
でばらついており、かつ同一のブロック状圧電体５内に
おいても材料特性がその位置によってばらついているた
め、多数の短冊状圧電体６を高精度に所望の分極度に分
極することが難しく、ひいては図２に示した圧電発振子
１の発振周波数を高精度に制御することが困難であっ
た。According to the above method, as is apparent from FIG. 5, the slope of the polarization degree-applied voltage curve in the third polarization step is gentler than the slope of the polarization degree-applied voltage in the second polarization step. Therefore, in the third polarization step, a relatively low voltage can be applied to polarize the block-shaped piezoelectric body 5, so that the block-shaped piezoelectric body 5 can be polarized more stably and with high accuracy. However, in the block-shaped piezoelectric bodies 5 prepared in actual mass production, the characteristics vary between firing lots, or the characteristics also occur between the strip-shaped piezoelectric bodies 6 obtained by slicing the block-shaped piezoelectric bodies 5. There was a problem that they tended to. That is, even if the block-shaped piezoelectric body 5 itself is stably and highly accurately polarized, the material properties of the prepared block-shaped piezoelectric body 5 vary among firing lots, and in the same block-shaped piezoelectric body 5. However, since the material properties vary depending on the position, it is difficult to polarize a large number of strip-shaped piezoelectric bodies 6 to a desired degree of polarization with high precision, and thus the oscillation frequency of the piezoelectric oscillator 1 shown in FIG. Was difficult to control.
【０００９】本発明の目的は、ブロック状の圧電体をス
ライスすることにより得られる短冊状圧電体の分極度を
高精度に制御することを可能とする、圧電体の分極方法
を提供することにある。An object of the present invention is to provide a piezoelectric body polarization method capable of controlling with high accuracy the polarization degree of a strip-shaped piezoelectric body obtained by slicing a block-shaped piezoelectric body. is there.
【００１０】[0010]
【課題を解決するための手段】本願の第１発明の圧電体
の分極方法は、ブロック状圧電体を所望の分極度よりも
強く分極する第１の分極工程と、第１の分極工程とは逆
方向に所望の分極度よりも弱く分極する第２の分極工程
と、ブロック状圧電体を前記第１の分極方向に再度分極
し、所望の分極度を得る第３の分極工程と、前記所望の
分極度のブロック状圧電体を分極方向と平行にスライス
して短冊状圧電体を得る工程と、前記短冊状圧電体にお
いて分極されている方向または分極されている方向とは
逆方向に直流電界を印加して分極度を調整する工程とを
備えることを特徴とする。According to a first aspect of the present invention, there is provided a method of polarizing a piezoelectric body, which comprises a first polarization step of polarizing a block-shaped piezoelectric body stronger than a desired degree of polarization and a first polarization step. A second polarization step of polarization in the opposite direction weaker than a desired polarization degree; a third polarization step of repolarizing the block-shaped piezoelectric body in the first polarization direction to obtain a desired polarization degree; A step of slicing a block-shaped piezoelectric body having a polarization degree of parallel to the polarization direction to obtain a strip-shaped piezoelectric body, and a DC electric field in a direction polarized in the strip-shaped piezoelectric body or in a direction opposite to the polarized direction. Is applied to adjust the polarization degree.
【００１１】本願の第２発明は、ブロック状圧電体を所
望の分極度よりも強く分極する第１の分極工程と、第１
の分極工程と逆方向に、所望の分極度よりも弱く分極す
る第２の分極工程と、第２の分極工程後にブロック状圧
電体を分極方向と平行にスライスした短冊状圧電体を得
る工程と、短冊状圧電体において、第１の分極方向と同
一方向に直流電圧を印加して所望の分極度に分極する工
程とを備えることを特徴とする。A second invention of the present application is a first polarization step of polarizing a block-shaped piezoelectric material stronger than a desired polarization degree, and a first polarization step.
A second polarization step in which the polarization is weaker than a desired degree of polarization in the opposite direction to the polarization step of step 1, and a step of obtaining a strip-shaped piezoelectric body obtained by slicing the block-shaped piezoelectric body parallel to the polarization direction after the second polarization step. In the strip-shaped piezoelectric body, a step of applying a DC voltage in the same direction as the first polarization direction to polarize it to a desired degree of polarization is provided.
【００１２】[0012]
【作用】前述したように、一般に短冊状圧電体におい
て、該短冊状圧電体が主面と平行な方向に分極処理され
ている場合に分極度を調整するには、非常に大きな直流
電界を印加しなければならない。また、主面と平行な方
向に分極処理された短冊状圧電体の分極度を高めるに
は、最初の分極時以上の電圧を印加しなければならない
が、図６に示すように、印加する必要がある電圧値まで
は分極度は何ら変化しないことがわかっている。すなわ
ち、印加電圧に対する不感領域Ｘが存在している。As described above, generally, in a strip-shaped piezoelectric body, in order to adjust the polarization degree when the strip-shaped piezoelectric body is polarized in the direction parallel to the principal surface, a very large DC electric field is applied. Must. Further, in order to increase the polarization degree of the strip-shaped piezoelectric body polarized in the direction parallel to the main surface, it is necessary to apply a voltage higher than that at the first polarization, but it is necessary to apply the voltage as shown in FIG. It is known that the polarization degree does not change up to a certain voltage value. That is, there is a dead region X for the applied voltage.
【００１３】すなわち、主面と平行な方向に分極処理さ
れた短冊状圧電体の分極度を単に直流電界を印加して調
整することは非常に困難であった。本発明者らは、ブロ
ック状圧電体を所望の分極度よりも強く分極し、次に逆
方向に所望の分極度よりも弱く分極し、さらに最初の分
極方向と同一方向に再度分極して所望の分極度を得るよ
うにして分極処理されたブロック状圧電体を用意し、該
ブロック状圧電体を分極方向と平行にスライスすること
により短冊状圧電体を得た場合には、該短冊状の圧電体
において分極されている方向または分極方向とは逆方向
に直流電界を印加すれば、分極度を極めて容易に調整し
得ることを見出し、上記第１発明を成すに至った。That is, it was very difficult to simply adjust the polarization degree of the strip-shaped piezoelectric body polarized in the direction parallel to the main surface by simply applying a DC electric field. The inventors of the present invention polarize the block-shaped piezoelectric material stronger than the desired polarization degree, then polarize it in the opposite direction weaker than the desired polarization degree, and further re-polarize it in the same direction as the initial polarization direction. In the case where a strip-shaped piezoelectric body is obtained by preparing a block-shaped piezoelectric body that has been polarized so as to obtain a polarization degree of, and slicing the block-shaped piezoelectric body parallel to the polarization direction, The inventors have found that the polarization degree can be adjusted very easily by applying a DC electric field in the direction in which the piezoelectric body is polarized or in the direction opposite to the polarization direction, and have completed the first invention.
【００１４】また、本発明者らは、第１発明の第２の分
極工程後にブロック状圧電体を分極方向と平行にスライ
スすることにより短冊状圧電体を得た場合には、該短冊
状圧電体において、第１の分極方向と同一方向に直流電
界を印加すれば所望の分極度に極めて容易に分極し得る
ことを見出し、上記第２発明を成すに至った。Further, when the present inventors obtain a strip-shaped piezoelectric body by slicing the block-shaped piezoelectric body parallel to the polarization direction after the second polarization step of the first invention, the strip-shaped piezoelectric body is obtained. In the body, it was found that if a DC electric field is applied in the same direction as the first polarization direction, it can be extremely easily polarized to a desired degree of polarization, and the second invention has been achieved.
【００１５】すなわち、第１，第２発明の分極方法で
は、第１の分極工程に続く逆方向の第２の分極工程の処
理を行うことにより、ブロック状の圧電体において分極
可変領域が形成される。その結果、第１発明では、第３
の分極工程により所望の分極度とされたブロック状の圧
電体をスライスして短冊状圧電体を得た場合、該短冊状
の圧電体は、当初の分極方向及び該分極方向とは逆方向
に極めて小さな電圧を印加することにより、その分極度
を調整することが可能とされている。また、第２発明の
分極方法では、ブロック状圧電体において分極可変領域
が形成されており、該ブロック状圧電体をスライスして
得られた短冊状圧電体においても分極可変領域が形成さ
れているため、該短冊状の圧電体は、第１の分極方向と
同一方向に直流電圧を印加することにより極めて容易に
かつ正確に所望の分極度とすることが可能とされてい
る。That is, in the polarization method of the first and second inventions, the polarization variable region is formed in the block-shaped piezoelectric body by performing the processing of the second polarization step in the opposite direction following the first polarization step. It As a result, in the first invention, the third
When a strip-shaped piezoelectric body is obtained by slicing a block-shaped piezoelectric body having a desired degree of polarization in the polarization step of 1, the strip-shaped piezoelectric body has the original polarization direction and a direction opposite to the polarization direction. The polarization degree can be adjusted by applying an extremely small voltage. Further, in the polarization method of the second invention, the polarization variable region is formed in the block-shaped piezoelectric body, and the polarization variable region is also formed in the strip-shaped piezoelectric body obtained by slicing the block-shaped piezoelectric body. Therefore, the strip-shaped piezoelectric body can be extremely easily and accurately made to have a desired polarization degree by applying a DC voltage in the same direction as the first polarization direction.
【００１６】[0016]
【実施例】以下、本発明の非限定的な実施例につき説明
する。図１は、本発明の一実施例の分極方法の概略を説
明するための模式図である。まず、ブロック状の圧電体
１１を用意し、ブロック状の圧電体の両主面１１ａ，１
１ｂ間に直流電圧を印加し、矢印Ｐ1 方向に分極度△Ｆ
1 となるように分極処理する（第１の分極工程）。第１
の分極工程では、所望の分極度を△Ｆとしたときに、△
Ｆ1 ＞△Ｆとなるような程度に分極処理が行われる。EXAMPLES Non-limiting examples of the present invention will be described below. FIG. 1 is a schematic diagram for explaining the outline of a polarization method according to an embodiment of the present invention. First, a block-shaped piezoelectric body 11 is prepared, and both main surfaces 11a, 1 of the block-shaped piezoelectric body are prepared.
Apply a DC voltage between 1b and polarizability ΔF in the direction of arrow P 1.
The polarization process is performed so as to be 1 (first polarization step). First
In the polarization step of, when the desired polarization degree is ΔF,
The polarization process is performed to such an extent that F 1 > ΔF.
【００１７】次に、両主面１１ａ，１１ｂ間に逆方向に
電圧を印加し、ブロック状の圧電体１１を矢印Ｘ方向に
分極し、圧電体１１の分極度を所望の分極度△Ｆよりも
小さくする（第２の分極工程）。さらに、ブロック状の
圧電体１１に、第１の分極工程の場合と同一方向に直流
電界を印加し、矢印Ｐで示すように分極度△Ｆとなるよ
うにブロック状の圧電体１１を分極処理する。（第３の
分極工程）。Next, a voltage is applied in the opposite direction between the two main surfaces 11a and 11b to polarize the block-shaped piezoelectric body 11 in the direction of arrow X, and the polarization degree of the piezoelectric body 11 is set to a desired polarization degree ΔF. Is also made smaller (second polarization step). Further, a DC electric field is applied to the block-shaped piezoelectric body 11 in the same direction as in the case of the first polarization step, and the block-shaped piezoelectric body 11 is polarized so as to have a polarization degree ΔF as shown by an arrow P. To do. (Third polarization step).
【００１８】次に、ブロック状の圧電体１１を分極方向
と平行な方向にスライスし、短冊状圧電体１２を得る。
得られた多数の短冊状圧電体１２では、必ずしも所望の
分極度△Ｆに分極処理されているとは限らない。すなわ
ち、前述したように、圧電体１１内の部分における材料
特性のばらつきや、圧電体１１のロット間のばらつき等
により、短冊状圧電体１２においては、その分極度が△
ｆから若干ずれている場合がある。Next, the block-shaped piezoelectric body 11 is sliced in the direction parallel to the polarization direction to obtain the strip-shaped piezoelectric body 12.
The obtained large number of strip-shaped piezoelectric bodies 12 are not always polarized to a desired polarization degree ΔF. That is, as described above, the polarization degree of the strip-shaped piezoelectric body 12 is Δ due to variations in material characteristics in the portion inside the piezoelectric body 11, variations between the lots of the piezoelectric body 11, and the like.
It may be slightly deviated from f.
【００１９】そこで、本発明では、得られた短冊状圧電
体１２の両端面１２ａ，１２ｂ間に、当初の分極方向Ｐ
1 と同一方向または逆方向に直流電圧を印加することに
より、分極度を所望の分極度△ｆに調整する。上記分極
度を調整する工程において、本実施例の方法では、極め
て低い直流電圧を印加することにより短冊状圧電体１２
の分極度が変化され得る。これは、ブロック状の圧電体
１１が前述したように第１〜第３の分極工程を経て分極
処理されているため、その分極度が容易に変化され得る
ことによる。これを、図７を参照して説明する。Therefore, in the present invention, the initial polarization direction P is provided between both end faces 12a and 12b of the obtained strip-shaped piezoelectric body 12.
By applying a DC voltage in the same direction as 1 or in the opposite direction, the degree of polarization is adjusted to the desired degree of polarization Δf. In the step of adjusting the polarization degree, in the method of the present embodiment, the strip piezoelectric body 12 is applied by applying an extremely low DC voltage.
The polarization degree of can be changed. This is because the block-shaped piezoelectric body 11 is polarization-processed through the first to third polarization steps as described above, so that the polarization degree can be easily changed. This will be described with reference to FIG.
【００２０】図７は、分極度△ｆが１５０、１８０、２
１０及び２４０（ｋＨｚ）の４種類の短冊状圧電体１２
を用意し、端面１２ａ，１２ｂ間に直流電圧を印加した
場合の分極度−印加電圧曲線Ａ〜Ｄを示す図である。比
較のために、従来法、すなわちブロック状の圧電体１１
を厚み方向に飽和分極状態とし、しかる後逆方向に直流
電圧を印加して所望の分極度△ｆとし、次に分極方向と
平行にスライスすることにより得られた短冊状圧電体を
用意した。この従来法により得られた短冊状圧電体の両
端面間に直流電圧を印加して分極度を高めた場合の分極
度−印加電圧曲線を破線Ｅ〜Ｈで示す。FIG. 7 shows that the polarizability Δf is 150, 180, 2
Four types of strip-shaped piezoelectric bodies 12 of 10 and 240 (kHz)
FIG. 3 is a diagram showing polarization degree-applied voltage curves A to D when a DC voltage is applied between the end faces 12a and 12b by preparing the above. For comparison, a conventional method, that is, a block-shaped piezoelectric body 11
Was made into a saturated polarization state in the thickness direction, then a direct current voltage was applied in the opposite direction to obtain a desired polarization degree Δf, and then a strip piezoelectric body obtained by slicing in parallel to the polarization direction was prepared. Broken lines E to H show polarization degree-applied voltage curves in the case where a direct current voltage is applied between both end surfaces of the strip-shaped piezoelectric body obtained by this conventional method to increase the polarization degree.
【００２１】図７から明らかなように、本実施例の方法
では、ブロック状の圧電体１１が予め上記のような分極
処理を経て分極処理されているため、短冊状圧電体にお
ける印加電圧に対する不感領域が存在せず、従って極め
て低い電圧で分極度△ｆが高められることがわかる。次
に、具体的な実験例につき説明する。As is apparent from FIG. 7, in the method of this embodiment, since the block-shaped piezoelectric body 11 is polarized in advance through the above-described polarization treatment, it is insensitive to the applied voltage in the strip-shaped piezoelectric body. It can be seen that there are no regions and therefore the polarizability Δf is enhanced at very low voltages. Next, a specific experimental example will be described.
【００２２】まず、Ｐｂ（Ｔｉ，Ｚｒ）Ｏ3 系セラミッ
クスであって、正方晶系と菱面体系の相境界にある組成
を有し、かつ２０ｍｍ×３０ｍｍ×７ｍｍのブロック状
圧電体２１（抗電界は１３ｋＶ／ｃｍ（２０℃））を用
意した。（図８（ａ）参照）。次に、上記ブロック状圧
電体２１の両主面２１ａ，２１ｂ間に、６０℃の温度で
２０ｋＶの電圧を６０分間印加し、圧電体２１を飽和分
極状態とした。First, a Pb (Ti, Zr) O 3 system ceramic having a composition at a phase boundary between a tetragonal system and a rhombohedral system and having a block-shaped piezoelectric body 21 (20 mm × 30 mm × 7 mm) The electric field was 13 kV / cm (20 ° C.)). (See FIG. 8A). Next, a voltage of 20 kV was applied for 60 minutes at a temperature of 60 ° C. between the two principal surfaces 21a and 21b of the block-shaped piezoelectric body 21 to bring the piezoelectric body 21 into a saturated polarization state.
【００２３】さらに、圧電体２１に上記飽和分極状態と
した分極処理とは逆方向に６０℃の温度で５ｋＶの電圧
を１０分間印加し、第２の分極工程を実施した。さら
に、逆分極後、１５０℃及び１時間の条件で大気中にて
エージングを行った。エージング後、ブロック状圧電体
２１の短辺側の分極度△Ｆ（図８（ｂ）の矢印Ｐ方向の
分極度）は、△Ｆ＝５．０±０．１ｋＨｚであった。な
お、分極度△Ｆは、ブロック状圧電体２１の両主面２１
ａ，２１ｂ間に電圧を印加して共振させた場合の短辺方
向の共振周波数Ｆr と反共振周波数Ｆa とから求めた値
△Ｆ＝Ｆa −Ｆrである。Further, a voltage of 5 kV was applied for 10 minutes at a temperature of 60 ° C. in the opposite direction to the polarization treatment in which the piezoelectric body 21 was brought into the saturated polarization state, and the second polarization step was carried out. Further, after reverse polarization, aging was performed in the atmosphere under the conditions of 150 ° C. and 1 hour. After aging, the polarization degree ΔF on the short side of the block-shaped piezoelectric body 21 (the polarization degree in the direction of arrow P in FIG. 8B) was ΔF = 5.0 ± 0.1 kHz. In addition, the polarization degree ΔF is determined by the two principal surfaces 21 of the block-shaped piezoelectric body 21.
A value ΔF = F a −F r obtained from the resonance frequency F r in the short side direction and the anti-resonance frequency F a when a voltage is applied between a and 21b to cause resonance.
【００２４】次に、図８（ｂ）に示すように、圧電体２
１をスライスし、３０ｍｍ×７ｍｍ×０．３５ｍｍの短
冊状圧電体２２を得た。短冊状圧電体２２の両主面をラ
ップ研磨し、所定の厚み（０．３５５ｍｍ）とした後、
蒸着により短冊状圧電体２２の両主面２２ａ，２２ｂの
全面にＡｇ膜を約１μｍの厚みに形成し、次にエッチン
グを行うことにより、図９（ａ）に示す分極用電極２３
ａ，２３ｂ及び振動電極２４ａを形成した。振動電極２
４ａは、短冊状圧電体２２の上面２２ａに所定間隔を隔
てて多数形成されており、他方、図９（ａ）では図示さ
れていないが、振動電極２４ａと圧電体２２を介して重
なり合うように下面側にも同様に振動電極が形成されて
いる。Next, as shown in FIG. 8B, the piezoelectric body 2
1 was sliced to obtain a strip-shaped piezoelectric body 22 of 30 mm × 7 mm × 0.35 mm. After lapping both main surfaces of the strip-shaped piezoelectric body 22 to a predetermined thickness (0.355 mm),
An Ag film having a thickness of about 1 μm is formed on the entire surfaces of both principal surfaces 22a and 22b of the strip-shaped piezoelectric body 22 by vapor deposition, and then etching is performed to form a polarization electrode 23 shown in FIG.
a, 23b and the vibrating electrode 24a were formed. Vibrating electrode 2
A large number of 4a are formed on the upper surface 22a of the strip-shaped piezoelectric body 22 at a predetermined interval. On the other hand, although not shown in FIG. 9A, the vibrating electrode 24a and the piezoelectric body 22 are overlapped with each other. A vibrating electrode is similarly formed on the lower surface side.
【００２５】次に、上記のようにして短冊状の圧電体２
２に構成された複数の圧電共振子部分の特性を、圧電体
２２を介して重なり合う一対の振動電極間に電圧を印加
し共振させることにより測定した。次に、上記のように
して測定された各圧電発振子部分の内、発振周波数が所
望の発振周波数ｆ0 より小さい場合には、図９（ｂ）に
示すようにパルス状の電圧を１５０℃の温度で印加し、
分極度を高めることにより図１０及び図１１に示すよう
に、発振周波数を高め、所望の発振周波数ｆ0 とした。
なお、図１１において、破線は発振周波数を高める前の
インピーダンス−周波数曲線を、実線は発振周波数をｆ
0 に高めた状態のインピーダンス−周波数曲線を示す。
なお、発振周波数ｆ0 は、共振周波数をｆr 、反共振周
波数をｆa としたとき、近似的にｆ0≒１／２（ｆr ＋
ｆa ）の位置となる。Next, the strip-shaped piezoelectric body 2 is formed as described above.
The characteristics of the plurality of piezoelectric resonator portions configured in No. 2 were measured by applying a voltage between a pair of vibrating electrodes that are overlapped with each other via the piezoelectric body 22 to cause resonance. Next, when the oscillation frequency is smaller than the desired oscillation frequency f 0 among the piezoelectric oscillator portions measured as described above, a pulsed voltage of 150 ° C. is applied as shown in FIG. 9B. At the temperature of
By increasing the polarization degree, as shown in FIGS. 10 and 11, the oscillation frequency was increased to a desired oscillation frequency f 0 .
In FIG. 11, the broken line shows the impedance-frequency curve before increasing the oscillation frequency, and the solid line shows the oscillation frequency f.
The impedance-frequency curve in the state raised to 0 is shown.
The oscillation frequency f 0 is the resonance frequency f r, when the anti-resonant frequency is f a, approximately f 0 ≒ 1/2 (f r +
The position is f a ).
【００２６】図１０から明らかなように、上記実験例の
製造方法では、比較的小さな印加電圧を印加することに
より短冊状の圧電体２２の分極度が高められ、全発振子
の発振周波数が小さな電圧を印加するだけで簡単に高め
得ることがわかる。しかる後、上記短冊状圧電体２２を
個々の圧電発振子部分に切断することにより（図９
（ｃ）参照）、圧電発振子２５を得た。As is apparent from FIG. 10, in the manufacturing method of the above experimental example, the polarization degree of the strip-shaped piezoelectric body 22 is increased by applying a relatively small applied voltage, and the oscillation frequency of all the oscillators is small. It can be seen that the voltage can be easily increased simply by applying a voltage. Then, the strip-shaped piezoelectric body 22 is cut into individual piezoelectric oscillator portions (see FIG. 9).
(See (c)), and the piezoelectric oscillator 25 was obtained.
【００２７】[0027]
【発明の効果】以上のように、本願の第１，第２発明に
よれば、ブロック状の圧電体の段階で、第１の分極工程
後に逆方向に第２の分極処理が行われて分極可変領域が
形成される。As described above, according to the first and second inventions of the present application, at the stage of the block-shaped piezoelectric body, the second polarization treatment is performed in the opposite direction after the first polarization step to perform polarization. A variable region is formed.
【００２８】従って、第１発明では、さらに、第１の分
極方向と同一方向に再度分極処理することにより、所望
の分極度とされたブロック状圧電体を用い、該ブロック
状圧電体を分極方向と平行にスライスすることにより短
冊状圧電体が得られ、得られた短冊状圧電体では、上記
第１〜第３の分極工程による分極履歴のために、非常に
小さな電圧を印加するだけでその分極度を調整すること
が可能となる。よって、ブロック状の圧電体内における
分極度のばらつきや焼成ロット間における特性のばらつ
きの如何に関わらず、短冊状圧電体を得た段階で分極度
を正確に制御し得るため、特性の安定な圧電発振子等の
圧電共振部品を提供することが可能となる。また、従
来、短冊状圧電体を得た後に、所望の特性の得られない
不良品を排除していたのに対し、本発明によれば短冊状
の圧電体を得た後に分極度や発振周波数を制御し得るた
めに、不良品率を低減することができる。Therefore, in the first invention, the block-shaped piezoelectric body is further polarized in the same direction as the first polarization direction so that the block-shaped piezoelectric body has a desired polarization degree. A strip-shaped piezoelectric body is obtained by slicing in parallel with, and in the obtained strip-shaped piezoelectric body, due to the polarization history due to the first to third polarization steps, a very small voltage is applied to the strip-shaped piezoelectric body. It is possible to adjust the polarization degree. Therefore, the polarization degree can be accurately controlled when the strip-shaped piezoelectric body is obtained regardless of variations in polarization degree in the block-shaped piezoelectric body and variations in characteristics between firing lots. It is possible to provide a piezoelectric resonance component such as an oscillator. Further, conventionally, after obtaining a strip-shaped piezoelectric body, defective products that do not obtain desired characteristics were excluded, whereas according to the present invention, the polarization degree and the oscillation frequency are obtained after the strip-shaped piezoelectric body is obtained. Therefore, the defective product rate can be reduced.
【００２９】また、本願の第２発明では、上記分極可変
領域が形成されたブロック状圧電体をスライスして短冊
状圧電体が得られ、該分極可変領域が形成されている短
冊状圧電体において第１の分極工程と同一方向に直流電
圧が印加されて分極処理が施されるため、短冊状圧電体
を所望の分極度を有するように容易にかつ正確に分極す
ることができる。In the second invention of the present application, a strip-shaped piezoelectric body is obtained by slicing the block-shaped piezoelectric body in which the polarization variable region is formed, and a strip-shaped piezoelectric body in which the polarization variable region is formed. Since the direct current voltage is applied in the same direction as the first polarization step and the polarization process is performed, the strip-shaped piezoelectric body can be easily and accurately polarized so as to have a desired polarization degree.
【図１】本発明の一実施例の分極方法を説明するための
模式図。FIG. 1 is a schematic diagram for explaining a polarization method according to an embodiment of the present invention.
【図２】圧電発振子を示す斜視図。FIG. 2 is a perspective view showing a piezoelectric oscillator.
【図３】（ａ）は従来法においてブロック状圧電体をス
ライスして短冊状圧電体を得る工程を示す斜視図、
（ｂ）は得られた短冊状圧電体の両主面に振動電極を形
成した状態を示す斜視図。FIG. 3A is a perspective view showing a step of slicing a block-shaped piezoelectric body to obtain a strip-shaped piezoelectric body in a conventional method;
FIG. 3B is a perspective view showing a state where vibrating electrodes are formed on both main surfaces of the obtained strip-shaped piezoelectric body.
【図４】短冊状圧電体の両端面間に電圧を印加して分極
度を制御する工程を示す模式図。FIG. 4 is a schematic diagram showing a process of controlling a polarization degree by applying a voltage between both end faces of a strip-shaped piezoelectric body.
【図５】従来法においてブロック状圧電体を所望の分極
度に分極処理する方法を説明するための分極度−印加電
圧曲線を示す図。FIG. 5 is a diagram showing a polarization degree-applied voltage curve for explaining a method of polarizing the block-shaped piezoelectric body to a desired polarization degree in the conventional method.
【図６】従来法において短冊状圧電体の両端面に電圧を
印加した場合の分極度の変化を示す図。FIG. 6 is a view showing a change in polarization degree when a voltage is applied to both end faces of a strip-shaped piezoelectric body in a conventional method.
【図７】実施例及び従来例において、短冊状圧電体の両
端面間に電圧を印加した場合の分極度の変化を示す図。FIG. 7 is a diagram showing changes in the polarization degree when a voltage is applied between both end surfaces of a strip-shaped piezoelectric body in Examples and Conventional Examples.
【図８】本発明の実施例の各工程を説明するための図で
あり、（ａ）はブロック状圧電体を示す斜視図、（ｂ）
は短冊状圧電体を得る工程を説明するための斜視図、
（ｃ）は短冊状圧電体を示す斜視図。8A and 8B are views for explaining each step of the embodiment of the present invention, FIG. 8A is a perspective view showing a block-shaped piezoelectric body, and FIG.
Is a perspective view for explaining a step of obtaining a strip-shaped piezoelectric body,
FIG. 3C is a perspective view showing a strip-shaped piezoelectric body.
【図９】本発明の実施例の各工程を説明するための図で
あり、（ａ）は短冊状圧電体状に分極用電極及び振動電
極を形成した状態を示す斜視図、（ｂ）は分極度を制御
する工程を説明するための図、（ｃ）は短冊状圧電体を
カットして個々の圧電発振子を得る工程を説明するため
の斜視図。9A and 9B are views for explaining each step of the embodiment of the present invention, FIG. 9A is a perspective view showing a state in which a polarization electrode and a vibrating electrode are formed in a strip-shaped piezoelectric body, and FIG. The figure for demonstrating the process of controlling a polarization degree, (c) is a perspective view for demonstrating the process of cutting a strip-shaped piezoelectric body and obtaining each piezoelectric oscillator.
【図１０】実験例において短冊状圧電体の両端面間に電
圧を印加した場合の個々の圧電発振子の発振周波数の変
化を示す図。FIG. 10 is a diagram showing a change in oscillation frequency of each piezoelectric oscillator when a voltage is applied between both end faces of a strip-shaped piezoelectric body in an experimental example.
【図１１】圧電発振子の発振周波数を高めるように電圧
を印加した場合のインピーダンス−周波数特性の変化を
示す図。FIG. 11 is a diagram showing changes in impedance-frequency characteristics when a voltage is applied so as to increase the oscillation frequency of the piezoelectric oscillator.
１１…ブロック状の圧電体 １２…短冊状圧電体 11 ... Block-shaped piezoelectric body 12 ... Strip-shaped piezoelectric body
Claims (2)
強く分極する第１の分極工程と、 第１の分極工程とは逆方向に、所望の分極度よりも弱く
分極する第２の分極工程と、 ブロック状圧電体を前記第１の分極方向に再度分極し、
所望の分極度を得る第３の分極工程と、 前記所望の分極度に分極されたブロック状圧電体を分極
方向と平行にスライスして短冊状圧電体を得る工程と、 前記短冊状圧電体において、分極されている方向または
分極されている方向とは逆方向に直流電圧を印加して分
極度を調整する工程とを備えることを特徴とする、圧電
体の分極方法。1. A first polarization step of polarizing a block-shaped piezoelectric material stronger than a desired polarization degree, and a second polarization of weakening a polarization degree weaker than a desired polarization degree in a direction opposite to the first polarization step. And a step of repolarizing the block-shaped piezoelectric body in the first polarization direction,
A third polarization step of obtaining a desired degree of polarization; a step of slicing the block-shaped piezoelectric body polarized to the desired degree of polarization parallel to the polarization direction to obtain a strip-shaped piezoelectric body; And a step of adjusting the degree of polarization by applying a DC voltage in the direction of polarization or in the direction opposite to the direction of polarization.
強く分極する第１の分極工程と、 第１の分極工程とは逆方向に、所望の分極度よりも弱く
分極する第２の分極工程と、 前記第２の分極工程後にブロック状圧電体を分極方向と
平行にスライスして短冊状圧電体を得る工程と、 前記短冊状圧電体において、前記第１の分極工程におけ
る分極方向に再度分極し、所望の分極度を得る工程とを
備えることを特徴とする、圧電体の分極方法。2. A first polarization step of polarizing the block-shaped piezoelectric body stronger than a desired polarization degree, and a second polarization of weakly polarizing the block-shaped piezoelectric material in a direction opposite to the first polarization step. A step of slicing the block-shaped piezoelectric body parallel to the polarization direction after the second polarization step to obtain a strip-shaped piezoelectric body, and in the strip-shaped piezoelectric body, the polarization direction in the first polarization step is changed again. And a step of polarizing the piezoelectric body to obtain a desired degree of polarization.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4133992A JPH05243884A (en) | 1992-02-27 | 1992-02-27 | Piezoelectric polarization method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4133992A JPH05243884A (en) | 1992-02-27 | 1992-02-27 | Piezoelectric polarization method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05243884A true JPH05243884A (en) | 1993-09-21 |
Family
ID=12605766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4133992A Pending JPH05243884A (en) | 1992-02-27 | 1992-02-27 | Piezoelectric polarization method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05243884A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009000864A (en) * | 2007-06-20 | 2009-01-08 | Ricoh Printing Systems Ltd | Liquid discharge head, its manufacturing method and image formation device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4944299A (en) * | 1972-07-17 | 1974-04-25 | ||
| JPS5222798A (en) * | 1975-08-13 | 1977-02-21 | Matsushita Electric Ind Co Ltd | Polarizing method of piezoelectric porcelain |
| JPS5421599A (en) * | 1977-07-19 | 1979-02-17 | Sato Risaburou | Process for polarizing piezoelectric ceramic |
| JPS59131212A (en) * | 1983-01-14 | 1984-07-28 | Murata Mfg Co Ltd | Piezoelectric ceramic filter and its production |
| JPS63182906A (en) * | 1987-01-23 | 1988-07-28 | Murata Mfg Co Ltd | Thin piezoelectric resonator and its manufacture |
-
1992
- 1992-02-27 JP JP4133992A patent/JPH05243884A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4944299A (en) * | 1972-07-17 | 1974-04-25 | ||
| JPS5222798A (en) * | 1975-08-13 | 1977-02-21 | Matsushita Electric Ind Co Ltd | Polarizing method of piezoelectric porcelain |
| JPS5421599A (en) * | 1977-07-19 | 1979-02-17 | Sato Risaburou | Process for polarizing piezoelectric ceramic |
| JPS59131212A (en) * | 1983-01-14 | 1984-07-28 | Murata Mfg Co Ltd | Piezoelectric ceramic filter and its production |
| JPS63182906A (en) * | 1987-01-23 | 1988-07-28 | Murata Mfg Co Ltd | Thin piezoelectric resonator and its manufacture |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009000864A (en) * | 2007-06-20 | 2009-01-08 | Ricoh Printing Systems Ltd | Liquid discharge head, its manufacturing method and image formation device |
| US9009973B2 (en) | 2007-06-20 | 2015-04-21 | Ricoh Company, Ltd. | Method of manufacturing liquid discharging head |
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