JPH0525229Y2 - - Google Patents

Info

Publication number
JPH0525229Y2
JPH0525229Y2 JP1987009846U JP984687U JPH0525229Y2 JP H0525229 Y2 JPH0525229 Y2 JP H0525229Y2 JP 1987009846 U JP1987009846 U JP 1987009846U JP 984687 U JP984687 U JP 984687U JP H0525229 Y2 JPH0525229 Y2 JP H0525229Y2
Authority
JP
Japan
Prior art keywords
gas
thin film
reaction
power
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987009846U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63119233U (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987009846U priority Critical patent/JPH0525229Y2/ja
Publication of JPS63119233U publication Critical patent/JPS63119233U/ja
Application granted granted Critical
Publication of JPH0525229Y2 publication Critical patent/JPH0525229Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987009846U 1987-01-28 1987-01-28 Expired - Lifetime JPH0525229Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987009846U JPH0525229Y2 (de) 1987-01-28 1987-01-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987009846U JPH0525229Y2 (de) 1987-01-28 1987-01-28

Publications (2)

Publication Number Publication Date
JPS63119233U JPS63119233U (de) 1988-08-02
JPH0525229Y2 true JPH0525229Y2 (de) 1993-06-25

Family

ID=30795546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987009846U Expired - Lifetime JPH0525229Y2 (de) 1987-01-28 1987-01-28

Country Status (1)

Country Link
JP (1) JPH0525229Y2 (de)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4943696A (de) * 1972-08-30 1974-04-24
JPS58128728A (ja) * 1982-01-28 1983-08-01 Toshiba Mach Co Ltd 半導体気相成長装置

Also Published As

Publication number Publication date
JPS63119233U (de) 1988-08-02

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