JPH0525699Y2 - - Google Patents

Description

[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to an ultrafine powder collection device used in an apparatus for producing ultrafine powder of metals, ceramics, etc., for example.

(Prior Art) Conventionally, ultrafine powder generated by a gas phase method is carried on a carrier gas stream consisting of argon gas and hydrogen gas, conveyed to a collection device, and collected by a filter. When collecting the ultrafine powder collected by the collection device,
In the case of ultrafine powder, which is undesirable for oxidation, moisture absorption, etc. due to contact with the atmosphere, it is necessary to separate the collection device from the main body of the manufacturing device and perform oxidation removal treatment within the glove box. When separating the collection device from the manufacturing equipment main body,
The valves provided at the inlet and outlet sides of the collection device are required to be airtight.

(Problem that the invention aims to solve) However, in the conventional method, a valve was provided in the middle of the carrier gas conveyance pipe containing ultrafine powder, which caused the problem that ultrafine powder adhered to the valve seat and airtightness could not be maintained. It was hot. That is, ultrafine powder is, for example,
Because it is small (0.1 to 0.01μ), it has a large surface area and is suspended in the gas, so it easily adheres to the valve.
This will impede the airtightness of the valve.

The present invention has been made in view of the above problems, and an object of the present invention is to provide an ultrafine powder collection device that can improve airtightness by preventing ultrafine powder from adhering to a valve.

(Means and effects for solving the problem) In order to achieve the above-mentioned purpose, the present invention has a conveyor tube through which ultrafine powder is conveyed, and a movable axially movable device on the outer periphery of the conveyor tube near the opening of the conveyor tube. The filter housing is connected to the connecting pipe and has a built-in filter for collecting ultrafine powder, and the valve component has a double structure. This prevents ultrafine powder from adhering to the valve and damaging the airtightness of the collection device and the entire manufacturing device.

(Example) An example of the present invention will be described in detail below with reference to the drawings.

That is, FIGS. 2a, b and 3 show an example of the ultrafine powder manufacturing apparatus according to the present invention, in which a chamber 3 having a glass window 2 is provided in the upper part of the manufacturing apparatus main body 1, and the interior of this chamber 3 is is provided with a discharge electrode 4 and a material 5 such as metal or ceramic. A conveying pipe 6 is connected to the chamber 3, and a connecting pipe 17 having valves 7 and 8 is attached to the outer periphery near the opening of the conveying pipe 6 so as to be movable in the axial direction. Housing 9 is connected. A filter 10 is provided inside the filter housing 9, and a valve 11 is provided at the outlet of the filter 10.
will be provided. One end of a tube member 12 is connected to this valve 11, and the other end of this tube member 12 is connected to the chamber 3 via a circulation pump 13 and a heat exchanger 14. A portion of the tube member 12 is connected to the discharge electrode 4. Further, a power source 15 is connected to the discharge electrode 4 and the chamber 3. still,
The part surrounded by the dotted line 16 in FIG. 3 constitutes an ultrafine powder collection device.

Figures 1a and 1b show an example of an ultrafine powder collection device,
A connecting tube 6 is attached to the outer periphery near the opening of the conveying tube 6 connected to the chamber 3 through which the ultrafine powder is conveyed, with a sealing material 18 interposed therebetween to maintain airtightness, and the connecting tube 6 is movable in the axial direction. The connecting pipe 17 is provided with valves 7 and 8 . A filter housing 9 is connected to the connecting pipe 17, and a filter 10 for collecting ultrafine powder is provided inside the filter housing 9. A valve 11 is provided at the discharge side opening of the filter 10.

That is, first, as shown in FIG. 1a, with the conveying pipe 6 inserted into the connecting pipe 17, the inside of the chamber 3 is made into an atmosphere of hydrogen gas, argon gas, etc., and the discharge electrode 4 is supplied with a voltage of 20 V, 150 A, etc., for example. Electrical power is applied to cause arc discharge, and the material, such as metal or ceramic, is vaporized to generate ultrafine powder. The ultrafine powder generated in chamber 3 is transported to circulation pump 1.
3, the chamber 3, the conveying pipe 6, the connecting pipe 17,
The carrier gas is carried by the carrier gas airflow circulating within the filter housing 9, the tube member 12, and the chamber 3, and is collected by the filter 10.

In such a state in which ultrafine powder is being collected, the valves 7 and 8 of the connecting pipe 17 are located outside the conveyance pipe 6 and are not affected by the ultrafine powder being conveyed.

Thereafter, the carrier gas is caused to flow back into the filter 10, and the ultrafine powder collected by the filter 10 is brushed off. Thereafter, as shown in FIG. 1b, the connecting pipe 17 and the filter housing 9 are moved in the axial direction so that the conveying pipe 6 is pulled out, and the valves 7, 8,
and 11, the filter housing 9 is removed and the ultrafine powder inside the filter housing 9 is collected. In this way, the valves 7 and 8 are opened and closed in a clean state, so that airtightness is maintained.

As described above, during the collection of ultrafine powder, by creating a double structure in which the connecting pipe 17 having valves 7 and 8 is placed outside the transport pipe 6, the ultrafine powder can be collected while passing through the transport pipe 6. The valves 7 and 8 are not affected by this, and it is possible to prevent ultrafine powder from adhering to the valve seat surface and maintain airtightness.

Each of the above-mentioned valves may be a manual valve or a solenoid valve, and the connecting pipe and filter housing may be moved manually, electrically, hydraulically, or pneumatically.

(Effects of the Invention) As described above, according to the present invention, it is possible to provide an ultrafine powder collection device that can improve airtightness by preventing ultrafine powder from adhering to the valve.

[Brief explanation of the drawing]

Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is a configuration diagram showing an example of an ultrafine powder manufacturing apparatus according to the present invention, and FIG. 3 is a system diagram showing an example of an ultrafine powder manufacturing apparatus according to the present invention. 3... Chamber, 6... Conveying pipe, 7, 8, 1
1...Valve, 9...Filter housing, 10
...Filter, 17...Connecting pipe.

Claims (1)

[Scope of utility model registration request] A transport pipe through which ultrafine powder is transported, a connecting pipe having a valve movable in the axial direction on the outer periphery near the opening of this transport pipe, and a filter connected to this connecting pipe to collect the ultrafine powder inside. An ultrafine powder collection device comprising: a filter housing having a built-in filter housing;