JPH05279875A - アルカリアンモニア性エッチング液によるエッチングおよび該エッチング液の再生を行うための装置と方法 - Google Patents

アルカリアンモニア性エッチング液によるエッチングおよび該エッチング液の再生を行うための装置と方法

Info

Publication number
JPH05279875A
JPH05279875A JP11708791A JP11708791A JPH05279875A JP H05279875 A JPH05279875 A JP H05279875A JP 11708791 A JP11708791 A JP 11708791A JP 11708791 A JP11708791 A JP 11708791A JP H05279875 A JPH05279875 A JP H05279875A
Authority
JP
Japan
Prior art keywords
etching
waste
processing
liquid
etchant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11708791A
Other languages
English (en)
Japanese (ja)
Inventor
Raymond A Letize
エイ リテーズ レイモンド
Bernd Gigas
ギガス バーンド
Peter E Kukanskis
イー クカンキス ピーター
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MacDermid Inc
Original Assignee
MacDermid Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MacDermid Inc filed Critical MacDermid Inc
Publication of JPH05279875A publication Critical patent/JPH05279875A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/46—Regeneration of etching compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
JP11708791A 1990-03-21 1991-02-28 アルカリアンモニア性エッチング液によるエッチングおよび該エッチング液の再生を行うための装置と方法 Pending JPH05279875A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US49688890A 1990-03-21 1990-03-21
US496888 1990-03-21

Publications (1)

Publication Number Publication Date
JPH05279875A true JPH05279875A (ja) 1993-10-26

Family

ID=23974613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11708791A Pending JPH05279875A (ja) 1990-03-21 1991-02-28 アルカリアンモニア性エッチング液によるエッチングおよび該エッチング液の再生を行うための装置と方法

Country Status (3)

Country Link
EP (1) EP0448870A1 (fr)
JP (1) JPH05279875A (fr)
CA (1) CA2029444A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030012087A (ko) * 2001-07-30 2003-02-12 일성기계공업 주식회사 섬유가공시 발생되는 암모니아 가스의 재사용을 위한설비시스템
RU2622072C1 (ru) * 2016-01-11 2017-06-09 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Пензенский государственный университет" (ФГБОУ ВПО "Пензенский государственный университет") Способ утилизации отработанного медно-аммиачного раствора

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993009267A1 (fr) * 1991-11-09 1993-05-13 Hans Höllmüller Maschinenbau GmbH & Co. Procede de regeneration d'un agent de gravure ammoniacal et dispositif pour l'execution de ce procede
DE4339320A1 (de) * 1993-11-18 1995-05-24 Elochem Aetztechnik Gmbh Verfahren zum beschleunigten Ätzen und Abscheiden von Metallen in ammoniakalischen Ätzanlagen
FR2854905B1 (fr) * 2003-05-16 2006-07-14 Airbus France Procede de recuperation du cuivre d'une solution de gravure ammoniacale usee et de regeneration d'un sel d'ammonium
DE102006037084A1 (de) * 2005-11-11 2007-05-16 Eve Recycling Sarl Verfahren zum Behandeln von Leiterplatten mittels einer Ätzlösung
CN110172701B (zh) * 2019-05-08 2021-02-09 深圳市祺鑫环保科技有限公司 酸性蚀刻液再生回用系统
CN114752940B (zh) * 2022-04-21 2024-02-06 盛隆资源再生（无锡）有限公司 一种碱性含铜蚀刻废液的回收方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2133806B (en) * 1983-01-20 1986-06-04 Electricity Council Regenerating solutions for etching copper
DE3340342A1 (de) * 1983-11-08 1985-05-15 ELO-CHEM Ätztechnik GmbH, 7758 Meersburg Verfahren und anlage zum regenerieren einer ammoniakalischen aetzloesung
DE3608516A1 (de) * 1986-03-14 1987-09-17 Markus Maria Dipl In Bringmann Vorrichtung zum kontinuierlichen elektrolytischen regenerieren einer zumindest teilweise verbrauchten kupfertetraminkomplex-aetzloesung
DE3738022A1 (de) * 1987-11-09 1989-05-18 Holzer Walter Verfahren zur regenerierung von alkalischen aetzmitteln und vorrichtungen zur ausuebung des verfahrens

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030012087A (ko) * 2001-07-30 2003-02-12 일성기계공업 주식회사 섬유가공시 발생되는 암모니아 가스의 재사용을 위한설비시스템
RU2622072C1 (ru) * 2016-01-11 2017-06-09 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Пензенский государственный университет" (ФГБОУ ВПО "Пензенский государственный университет") Способ утилизации отработанного медно-аммиачного раствора

Also Published As

Publication number Publication date
EP0448870A1 (fr) 1991-10-02
CA2029444A1 (fr) 1991-09-22

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