JPH0528043U - Wafer holding plate storage container - Google Patents

Abstract

(57) [Abstract] [Purpose] The frame 4 is inserted very smoothly without the wafers 6 coming into contact with each other. [Structure] A drawer 1 for sliding in and out a guide groove 8a formed extending from one opening surface of a main body is provided, and a frame 4 is inserted into this drawer 1.

Description

[Detailed description of the device]

[0001]

[Industrial application]

 The present invention relates to a wafer holding plate storage container that stores a plurality of frames that hold an adhesive sheet to which wafers are attached.

[0002]

[Prior Art]

 In general, in order to divide a wafer into pellets, the wafer is attached to an adhesive sheet, a wafer holding plate that holds the outer periphery of the adhesive sheet is attached to the tiling device, and the wafer is cut into dicing devices for each integrated circuit area. , Each pellet was cut and separated. Since the wafer holding plate that holds the adhesive sheet with the wafer attached cannot be stacked and transported because it has an adhesive sheet, it is usually stored in a box-shaped wafer holding plate storage container and transported. Was there.

FIG. 3 is a perspective view of a wafer holding plate storage container showing a conventional example. Conventionally, this type of wafer holding plate storage container is provided with a guide groove 8 into which a plurality of frames 4 for holding an adhesive sheet 5 to which a wafer 6 is attached is formed, as shown in FIG. It is composed of a box-shaped main body 2 to which 3 is attached.

The frame 4 for holding the adhesive sheet 5 having the wafer 6 attached thereto is stored in the wafer holding plate storage container by inserting the frame 4 from the opening surface along the guide groove 8. The frame 4 holding the adhesive sheet 5 has an elliptical shape so that it can be easily inserted into the guide groove 8.

[0005]

[Problems to be solved by the device]

 In the conventional wafer holding plate storage container described above, when the frame is inserted into the guide groove, the frame moves up and down due to the gap between the guide grooves and the play between the proposed groove and the frame. However, there is a problem that the wafers vertically adjacent to each other may be scratched due to the swinging motion of the wafer, which is not inserted smoothly.

[0006]

[Means for Solving the Problems]

 The wafer holding plate storage container of the present invention comprises a box-shaped main body having a plurality of guide grooves formed on the opening surface in one direction so as to extend inward, and a drawer for sliding in and out of the guide grooves. And a frame for holding an adhesive sheet to which a wafer is attached is put in the drawer and stored.

[0007]

【Example】

 Next, the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view of a wafer holding plate storage container showing an embodiment of the present invention. As shown in FIG. 1, this wafer holding plate storage container has a structure in which a drawer 1 that slides in a guide groove 8a of a main body 2a is provided, and a frame 4 is inserted into the drawer 1.

By providing the drawer 1, it is only necessary to move the drawer 1 in and out when the frame 4 is stored, and the frame can be stored very smoothly. Moreover, since the frame is not directly grasped, the swinging motion of the frame 4 is eliminated and the wafer 6 is not scratched unlike the conventional case.

FIG. 2 is a perspective view of a wafer holding plate storage container according to another embodiment of the present invention. In this wafer holding plate storage container, the protrusion 7 is attached to the drawer in the above-described embodiment so that the drawer 1a can be easily grasped by hand when it is taken in and out. Other than that, it is the same as the above-mentioned embodiment.

[0011]

[Effect of the device]

 As described above, according to the present invention, by providing the drawer for inserting and removing the frame into and from the main body, it is not necessary to directly grasp the frame and to put in and out from the main body, so that it is extremely smooth without contact between wafers. There is an effect that a wafer holding and storing container can be obtained in which the frame can be taken in and out.

[Brief description of drawings]

FIG. 1 is a perspective view of a wafer holding plate storage container according to an embodiment of the present invention.

FIG. 2 is a perspective view of a wafer holding plate storage container according to another embodiment of the present invention.

FIG. 3 is a perspective view of a wafer holding plate storage container showing a conventional example.

[Explanation of symbols]

 1, 1a Drawer 2, 2a, 2b Main body 3 Handle 4 Frame 5 Adhesive sheet 6 Wafer 7 Projection part 8, 8a Guide groove

Claims (1)

[Scope of utility model registration request] 1. A wafer-attached device, comprising: a box-shaped main body in which a plurality of guide grooves are formed so as to extend to the rear side on an opening face in one direction; A container for holding a wafer holding plate, characterized in that a frame for holding an adhesive sheet is put in the drawer and stored.