JPH0528771Y2 - - Google Patents

Info

Publication number
JPH0528771Y2
JPH0528771Y2 JP1987154229U JP15422987U JPH0528771Y2 JP H0528771 Y2 JPH0528771 Y2 JP H0528771Y2 JP 1987154229 U JP1987154229 U JP 1987154229U JP 15422987 U JP15422987 U JP 15422987U JP H0528771 Y2 JPH0528771 Y2 JP H0528771Y2
Authority
JP
Japan
Prior art keywords
wafer
centers
arcs
positioning
positioning plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987154229U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0158939U (th
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987154229U priority Critical patent/JPH0528771Y2/ja
Publication of JPH0158939U publication Critical patent/JPH0158939U/ja
Application granted granted Critical
Publication of JPH0528771Y2 publication Critical patent/JPH0528771Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987154229U 1987-10-07 1987-10-07 Expired - Lifetime JPH0528771Y2 (th)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987154229U JPH0528771Y2 (th) 1987-10-07 1987-10-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987154229U JPH0528771Y2 (th) 1987-10-07 1987-10-07

Publications (2)

Publication Number Publication Date
JPH0158939U JPH0158939U (th) 1989-04-13
JPH0528771Y2 true JPH0528771Y2 (th) 1993-07-23

Family

ID=31430777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987154229U Expired - Lifetime JPH0528771Y2 (th) 1987-10-07 1987-10-07

Country Status (1)

Country Link
JP (1) JPH0528771Y2 (th)

Also Published As

Publication number Publication date
JPH0158939U (th) 1989-04-13

Similar Documents

Publication Publication Date Title
ES417581A1 (es) Dispositivo para la manipulacion de planchas y la ejecucionde trazados poligonales.
JPH0158939U (th)
JPH0333456B2 (th)
JP2000068352A (ja) ウエーハ反転装置
JPH0645348Y2 (ja) 芯出し機能を備えたロボットハンド
CA2126643A1 (en) Apparatus for Holding Solid Compact Medicaments During Processing
JPS63106141U (th)
JPS63126619A (ja) 曲げ加工機の自動化装置
JPH02115562U (th)
JPS6325071Y2 (th)
JPH0614173Y2 (ja) 芯出し機構
JPH0514511Y2 (th)
JPH0521312Y2 (th)
JPS63266849A (ja) 固体素子の位置決め装置
JPH0362681U (th)
JPH075638Y2 (ja) 半導体素子組立装置
SU1704947A1 (ru) Поводковый патрон
JP2000294618A (ja) ウエハ保持機構
JPH0352044U (th)
JPH0947994A (ja) ロングストロークハンド
JPH01286187A (ja) ディスクのチャック装置
JPS6246035Y2 (th)
JPH0453722U (th)
JP2720163B2 (ja) イオン注入装置
JPH02133858U (th)