JPH05293965A - 三次元のケイ素構造体 - Google Patents

三次元のケイ素構造体

Info

Publication number
JPH05293965A
JPH05293965A JP4272605A JP27260592A JPH05293965A JP H05293965 A JPH05293965 A JP H05293965A JP 4272605 A JP4272605 A JP 4272605A JP 27260592 A JP27260592 A JP 27260592A JP H05293965 A JPH05293965 A JP H05293965A
Authority
JP
Japan
Prior art keywords
silicon
dimensional
bonding
passage
structure according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4272605A
Other languages
English (en)
Japanese (ja)
Inventor
Udo Jauernig
ヤウアーニヒ ウド
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of JPH05293965A publication Critical patent/JPH05293965A/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
    • F02M61/166—Selection of particular materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
    • F02M61/168—Assembling; Disassembling; Manufacturing; Adjusting

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Micromachines (AREA)
JP4272605A 1991-10-12 1992-10-12 三次元のケイ素構造体 Pending JPH05293965A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4133885A DE4133885C2 (de) 1991-10-12 1991-10-12 Dreidimensionale Silizium-Struktur
DE4133885.5 1991-10-12

Publications (1)

Publication Number Publication Date
JPH05293965A true JPH05293965A (ja) 1993-11-09

Family

ID=6442595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4272605A Pending JPH05293965A (ja) 1991-10-12 1992-10-12 三次元のケイ素構造体

Country Status (3)

Country Link
JP (1) JPH05293965A (de)
DE (1) DE4133885C2 (de)
GB (1) GB2260282B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110129621A1 (en) * 2008-03-26 2011-06-02 Gt Solar, Incorporated Systems and methods for distributing gas in a chemical vapor deposition reactor

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5872010A (en) * 1995-07-21 1999-02-16 Northeastern University Microscale fluid handling system
US6245227B1 (en) 1998-09-17 2001-06-12 Kionix, Inc. Integrated monolithic microfabricated electrospray and liquid chromatography system and method
EP1876442A3 (de) 1998-09-17 2008-03-05 Advion BioSciences, Inc. Integriertes monolithisches, auf Mikrobasis hergestelltes System und Verfahren zur Flüssigkeitschromatographie
IT1303195B1 (it) * 1998-12-02 2000-10-30 Giuliano Cozzari Dispositivo iniettore di carburante per motori a combustione internae relativo metodo di iniezione.
US6633031B1 (en) 1999-03-02 2003-10-14 Advion Biosciences, Inc. Integrated monolithic microfabricated dispensing nozzle and liquid chromatography-electrospray system and method
JP5057318B2 (ja) 1999-12-30 2012-10-24 アドビオン インコーポレイテッド 多重電気噴霧装置、システム、および方法
EP1248949B1 (de) 2000-01-18 2013-05-22 Advion, Inc. Elektrosprayvorrichtung mit array von trennsäulen sowie verfahren zur trennung von fluidproben
DE10049517B4 (de) * 2000-10-06 2005-05-12 Robert Bosch Gmbh Brennstoffeinspritzventil
DE10154601B4 (de) * 2000-11-13 2007-02-22 Agilent Technologies, Inc. (n.d.Ges.d.Staates Delaware), Palo Alto Ein Mikrobauelement mit einem integrierten hervorstehenden Elektrospray-Emitter und ein Verfahren zum Herstellen des Mikrobauelements
NL1024033C2 (nl) * 2003-08-04 2005-02-07 Univ Delft Tech Werkwijze voor het vervaardigen van nanokanalen en nanokanalen daarmee vervaardigd.

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07111940B2 (ja) * 1987-09-11 1995-11-29 日産自動車株式会社 半導体基板の接合方法
NL8900469A (nl) * 1989-02-24 1990-09-17 Imec Inter Uni Micro Electr Werkwijze en toestel voor het aanbrengen van epitaxiaal silicium en silicides.
US5006202A (en) * 1990-06-04 1991-04-09 Xerox Corporation Fabricating method for silicon devices using a two step silicon etching process

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110129621A1 (en) * 2008-03-26 2011-06-02 Gt Solar, Incorporated Systems and methods for distributing gas in a chemical vapor deposition reactor
US8961689B2 (en) * 2008-03-26 2015-02-24 Gtat Corporation Systems and methods for distributing gas in a chemical vapor deposition reactor

Also Published As

Publication number Publication date
DE4133885A1 (de) 1993-04-15
GB9221282D0 (en) 1992-11-25
GB2260282A (en) 1993-04-14
DE4133885C2 (de) 1996-03-21
GB2260282B (en) 1995-04-26

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