JPH0529637B2 - - Google Patents

Info

Publication number
JPH0529637B2
JPH0529637B2 JP59277327A JP27732784A JPH0529637B2 JP H0529637 B2 JPH0529637 B2 JP H0529637B2 JP 59277327 A JP59277327 A JP 59277327A JP 27732784 A JP27732784 A JP 27732784A JP H0529637 B2 JPH0529637 B2 JP H0529637B2
Authority
JP
Japan
Prior art keywords
gas
reaction tube
inlet
vapor phase
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59277327A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61155292A (ja
Inventor
Akihiko Okamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP59277327A priority Critical patent/JPS61155292A/ja
Publication of JPS61155292A publication Critical patent/JPS61155292A/ja
Publication of JPH0529637B2 publication Critical patent/JPH0529637B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP59277327A 1984-12-26 1984-12-26 気相成長装置 Granted JPS61155292A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59277327A JPS61155292A (ja) 1984-12-26 1984-12-26 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59277327A JPS61155292A (ja) 1984-12-26 1984-12-26 気相成長装置

Publications (2)

Publication Number Publication Date
JPS61155292A JPS61155292A (ja) 1986-07-14
JPH0529637B2 true JPH0529637B2 (th) 1993-05-06

Family

ID=17581980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59277327A Granted JPS61155292A (ja) 1984-12-26 1984-12-26 気相成長装置

Country Status (1)

Country Link
JP (1) JPS61155292A (th)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2818776B2 (ja) * 1989-04-29 1998-10-30 豊田合成株式会社 窒化ガリウム系化合物半導体の気相成長装置
EP0459425A1 (en) * 1990-05-30 1991-12-04 Idemitsu Petrochemical Company Limited Process for the preparation of diamond

Also Published As

Publication number Publication date
JPS61155292A (ja) 1986-07-14

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term