JPH0530284B2 - - Google Patents

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Publication number
JPH0530284B2
JPH0530284B2 JP61219242A JP21924286A JPH0530284B2 JP H0530284 B2 JPH0530284 B2 JP H0530284B2 JP 61219242 A JP61219242 A JP 61219242A JP 21924286 A JP21924286 A JP 21924286A JP H0530284 B2 JPH0530284 B2 JP H0530284B2
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JP
Japan
Prior art keywords
aqueous solution
ferrite
ceramic
fine particles
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61219242A
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Japanese (ja)
Other versions
JPS6376404A (en
Inventor
Atsushi Ogura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
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Priority to JP61219242A priority Critical patent/JPS6376404A/en
Publication of JPS6376404A publication Critical patent/JPS6376404A/en
Publication of JPH0530284B2 publication Critical patent/JPH0530284B2/ja
Granted legal-status Critical Current

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  • Paints Or Removers (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は磁性半導体球状微粒子とその製造方法
に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to magnetic semiconductor spherical fine particles and a method for producing the same.

[従来の技術とその問題点] 従来、磁性微粒子としてはフエライトが存在す
る。しかし、フエライトは粒形が球状ではなく、
棒状であるが、またはバリユームフエライトのよ
うにフレーク状であり、磁性体として異方性を持
つている。このため、テープやデイスクなどの基
材上にフエライトを付着して磁気記録媒体を形成
する際、異方性を考慮してフエライトを基材上に
配列させることは困難なことから基材上に被着す
るフエライトの磁気異方性がまちまちの方向とな
り、良好な磁気特性が得られない問題点があつ
た。
[Prior art and its problems] Conventionally, ferrite exists as magnetic fine particles. However, the grain shape of ferrite is not spherical,
It is rod-shaped, or flake-shaped like barium ferrite, and has anisotropy as a magnetic material. For this reason, when attaching ferrite to a base material such as a tape or disk to form a magnetic recording medium, it is difficult to arrange the ferrite on the base material while taking anisotropy into consideration. There was a problem that the magnetic anisotropy of the deposited ferrite was in different directions, making it impossible to obtain good magnetic properties.

また、従来CVD(Chemical Vapour
Deposition)等でエピタキシヤル成長させる材料
のガス源には材料が単一成分のガス源を使用し、
化合物半導体を形成する場合にも各成長成分毎の
ガス源を用意しなければならず、装置および製造
プロセスが複雑化する問題点があつた。
In addition, conventional CVD (Chemical Vapor
A single component gas source is used for epitaxially growing materials such as
Even when forming a compound semiconductor, a gas source must be prepared for each growth component, which poses the problem of complicating the equipment and manufacturing process.

そこで本発明は、磁気異方性が無く基材上に被
着して良好な磁気特性の磁気記録媒体が得られる
と共に、CVD原料としてフエライト成分とセラ
ミツク成分の化合物成分ガスの発生が可能な磁性
半導体球状微粒子とその製造方法を提供すること
を目的とする。
Therefore, the present invention aims to provide a magnetic recording medium that has no magnetic anisotropy and can be deposited on a base material and has good magnetic properties, as well as a magnetic recording medium that can generate a compound component gas of ferrite components and ceramic components as a CVD raw material. The purpose of the present invention is to provide semiconductor spherical fine particles and a method for manufacturing the same.

[問題点を解決するための手段] 本発明はセラミツク微粒子の表面にフエライト
結晶を被着した粒子単位のフエライト・セラミツ
ク複合粒子を造り、これを加熱溶融して高速にて
水や冷却板等の冷却材に溶射することにより、粒
子単位で均質な固溶体の磁性半導体球状微粒子を
得るようにしたものである。
[Means for Solving the Problems] The present invention produces ferrite/ceramic composite particles in particle units in which ferrite crystals are adhered to the surface of fine ceramic particles, which are heated and melted and then heated at high speed with water, a cooling plate, etc. By thermal spraying onto a coolant, magnetic semiconductor spherical fine particles are obtained as a solid solution that is homogeneous on a particle-by-particle basis.

[作用] フエライト・セラミツク複合粒子を加熱溶融す
ることにより、フエライト成分とセラミツク成分
の均質な固溶体が得られ、更にこれを水や冷却板
等に高速溶射することにより、アモルフアス状の
磁性半導体球状微粒子が得られ、垂直記録用磁性
体として、また、フエライト・セラミツク化合物
CVD用原料として有用な新素材が得られる。
[Function] By heating and melting the ferrite/ceramic composite particles, a homogeneous solid solution of ferrite and ceramic components can be obtained, and by spraying this at high speed onto water or a cooling plate, amorphous magnetic semiconductor spherical fine particles can be obtained. is obtained, and is used as a magnetic material for perpendicular recording, as well as a ferrite ceramic compound.
A new material useful as a raw material for CVD can be obtained.

[実施例] フエライト・セラミツク複合粒子は、本願発明
者が先に発明し出願したが、その製造方法は以下
の通りである。
[Example] Ferrite-ceramic composite particles were previously invented and filed by the inventor of the present application, and the manufacturing method thereof is as follows.

まず、塩化第2鉄水溶液(濃度5〜35%)を入
れた容器中に、磁場を形成するため、強い磁力を
持つた磁石を1個または複数個を入れ、更に多数
の鉄片(粒状の場合は粒度0.1〜4mm)を入れ、
流動攪拌してから該水溶液をろ過して錯塩水溶液
を得る。
First, in order to form a magnetic field, one or more magnets with strong magnetic force are placed in a container containing an aqueous ferric chloride solution (concentration 5 to 35%), and a large number of iron pieces (in the case of granular (particle size: 0.1 to 4 mm).
After fluid stirring, the aqueous solution is filtered to obtain a complex salt aqueous solution.

この場合、塩化第2鉄水溶液は容器中におい
て、磁気を持つた鉄片と接触することによつて、
電解イオン交換によるマルチ電池反応し陰極と陽
極が多数発生して水素イオンH+が陰極で水素ガ
スH2として放出され陰イオン、陽イオンが安定
した錯塩水溶液となつている。
In this case, the ferric chloride aqueous solution is brought into contact with a magnetic iron piece in the container.
A multi-cell reaction by electrolytic ion exchange generates a large number of cathodes and anodes, hydrogen ions H + are released as hydrogen gas H 2 at the cathode, and anions and cations form a stable complex salt aqueous solution.

次に、予めセラミツク微粒子として粒度分布が
0.05μ〜数100μ好ましくは0.05μ〜20μの粒度分布
のジルコン微粒子を混入した塩化第2鉄水溶液
(濃度5〜35%)に前記錯塩水溶液を全体の約30
%〜50%の割合いで混合し、充分に攪拌し複合水
溶液とする。この複合水溶液は酸性であり、Cl-
を持つたものである。
Next, the particle size distribution is determined in advance as ceramic fine particles.
The complex salt aqueous solution is added to a ferric chloride aqueous solution (concentration 5 to 35%) mixed with zircon fine particles with a particle size distribution of 0.05 μ to several 100 μ, preferably 0.05 μ to 20 μ.
% to 50% and stir thoroughly to form a composite aqueous solution. This complex aqueous solution is acidic and Cl -
It is something that has.

このセラミツク微粒子を複数混入した複合水溶
液に苛性ソーダ水溶液(濃度30%)を混入するこ
とにより、前記Cl-はNa+に結びつき、塩
(NaCl)となり、凝集過程においてフエライト
(Fe3O4)は黒茶色で、セラミツク微粒子表面に
ほぼ均等に結晶生成して被着しフエライト・セラ
ミツク複合粒子を形成する。また、塩(NaCl)
は水に溶けた状態となる。
By mixing a caustic soda aqueous solution (concentration 30%) into a composite aqueous solution containing a plurality of ceramic fine particles, the Cl - binds to Na + and becomes salt (NaCl), and in the aggregation process, ferrite (Fe 3 O 4 ) becomes black. It is brown in color and crystallizes and adheres almost uniformly to the surface of the ceramic fine particles, forming ferrite-ceramic composite particles. Also, salt (NaCl)
becomes dissolved in water.

この状態でフエライト・セラミツク複合粒子を
沈澱させて上ずみを捨てたもの、または遠心分離
して水を分離したものに水を加えて塩(NaCl)
をうすめて洗い流して取り去り、しかる後、フエ
ライト・セラミツク複合粒子に残留する水分を分
離、乾燥処理して純度の高いフエライトを均等に
被着したセラミツク体即ちフエライト・セラミツ
ク複合粒子を得る。
In this state, the ferrite/ceramic composite particles are precipitated and the top layer is discarded, or the water is separated by centrifugation and water is added to make salt (NaCl).
After that, the water remaining in the ferrite-ceramic composite particles is separated and dried to obtain ceramic bodies, ie, ferrite-ceramic composite particles, evenly coated with highly pure ferrite.

このようにして製造されたフエライト・セラミ
ツク複合粒子は、セラミツク体1微粒子単位でフ
エライト(Fe3O4)が均等に被着されたもので、
セラミツク体微粒子の粒度が0.05μ〜20μの場合
は、粒度(分布)が約0.1μ〜25μである。
The ferrite/ceramic composite particles produced in this way have ferrite (Fe 3 O 4 ) evenly coated on each fine ceramic particle.
When the particle size of the ceramic fine particles is 0.05μ to 20μ, the particle size (distribution) is approximately 0.1μ to 25μ.

このフエライト・セラミツク複合粒子はフエラ
イトがセラミツク体微粒子表面に強力に結合被着
し、機械的摩擦、衝撃等によつても分離しにく
い。
In these ferrite/ceramic composite particles, the ferrite is strongly bonded and adhered to the surface of the ceramic fine particles, and is difficult to separate even by mechanical friction, impact, etc.

上記の場合、フエライト成分として塩化第2鉄
を用いたものについて説明したが、これに限定さ
れるものではなく、塩化第1鉄と一緒に塩化第2
ニツケル、塩化コバルト、塩化バリユーム、塩化
チタン等の金属または半金属塩化物を複合添加し
ても良い。
In the above case, ferric chloride was used as the ferrite component, but the invention is not limited to this.
Metal or metalloid chlorides such as nickel, cobalt chloride, barium chloride, titanium chloride, etc. may be added in combination.

例えば、セラミツク微粒子表面にフエライト・
ニツケルを被着させたい場合は、上述の塩化第2
鉄水溶液の代りに塩化第2鉄と塩化第2ニツケル
の複合水溶液を用いればよい。
For example, ferrite on the surface of ceramic fine particles.
If you want to coat nickel, use the dichloride mentioned above.
A composite aqueous solution of ferric chloride and nickel chloride may be used instead of the iron aqueous solution.

また、セラミツク微粒子としてジルコン
(ZrSiO4)を用いたものについて説明したが、こ
れに限定されるものではなく、ジルコニア
(ZrO2)、2酸化ケイ素(SiO2)、アルナミ(Al2
O3)、酸化コバルト、酸化チタン、酸化バリユー
ム、酸化ほう素等の金属または半金属の酸化物微
粒子または窒化けい素等の窒化物微粒子またはカ
ーボンまたは炭化けい素等の炭化物微粒子等の非
金属類との化合物質およびそれら各種の複合微粒
子を用いても良い。
In addition, although zircon (ZrSiO 4 ) is used as the ceramic fine particles, the ceramic particles are not limited to this .
O 3 ), non-metals such as metal or metalloid oxide particles such as cobalt oxide, titanium oxide, barium oxide, boron oxide, nitride particles such as silicon nitride, or carbide particles such as carbon or silicon carbide Compounds with and various composite fine particles thereof may also be used.

なお、本願明細書においてセラミツクとは、一
般学術用語において用いる金属体を除く無機物質
全般を意味する。多くは酸化物、窒化物、炭化
物、硼化物などである。また、そのセラミツク体
微粒子の表面に結晶被着するフエライトは、主と
して、錯塩水溶液をアルカリ還元して生成される
Fe3O4(亜酸化鉄)および/または塩化物金属イ
オン類を複合混合配合にて生成した磁性酸化物多
結晶体(複合亜酸化物、例えば、Fe/Ni/Co/
etc/Oxなど)を意味する。
Note that in the present specification, ceramic means all inorganic substances excluding metal bodies used in general academic terminology. Most of them are oxides, nitrides, carbides, borides, etc. In addition, the ferrite crystals deposited on the surface of the ceramic fine particles are mainly produced by alkali reduction of a complex salt aqueous solution.
Magnetic oxide polycrystals (composite suboxides, e.g. Fe/Ni/Co /
etc/Ox, etc.).

次に、このようにして得られたフエライト・セ
ラミツク複合粒子の粉体(平均粒度0.6μ)をプラ
ズマ溶射装置にて高温還元溶融する。このとき、
フエライトとセラミツクは同じ温度で同時に溶融
し、フエライト成分とセラミツク成分が均質に混
合結合した状態となる。これを高速(約30m/
sec)にて、水又は冷却板に衝突させて急冷する
ことにより、フエライト成分とセラミツク成分が
結合したアモルフアス状の磁性半導体球状微粒子
が得られる。
Next, the thus obtained powder of ferrite-ceramic composite particles (average particle size 0.6 μm) is reduced and melted at high temperature using a plasma spraying device. At this time,
Ferrite and ceramic melt simultaneously at the same temperature, resulting in a state in which the ferrite component and ceramic component are homogeneously mixed and bonded. This is done at high speed (approximately 30m/
sec), by colliding with water or a cooling plate for rapid cooling, to obtain amorphous magnetic semiconductor spherical fine particles in which a ferrite component and a ceramic component are combined.

このようにして得られた磁性半導体球状微粒子
は、フエライト成分(Fe3O4)とセラミツク成分
(ZrO2又はZrSiO4)とが良好に固溶したものであ
るから、耐熱性、高確度で強磁性をもつものであ
る。しかも、この磁性半導体球状微粒子はフエラ
イト成分とセラミツク成分とが均質に固溶して、
アモルフアス状態の半導体微粒子となつたもので
ある。従つて、記録用磁性材として優れた磁気特
性を発揮するとともに、有機物バインダー等の混
合において、球状微粒子であるので、混合比を高
めることができる。このことは磁気記録媒体製造
時における製造プロセスを容易にし、均質にして
特性の良い製品が得られることを意味する。
The magnetic semiconductor spherical fine particles obtained in this way have a good solid solution of a ferrite component (Fe 3 O 4 ) and a ceramic component (ZrO 2 or ZrSiO 4 ), so they are heat resistant, highly accurate, and strong. It is magnetic. Moreover, these magnetic semiconductor spherical fine particles have a homogeneous solid solution of ferrite components and ceramic components,
These are semiconductor particles in an amorphous state. Therefore, it exhibits excellent magnetic properties as a recording magnetic material, and since it is a spherical fine particle when mixed with an organic binder, etc., the mixing ratio can be increased. This means that the manufacturing process in manufacturing the magnetic recording medium is facilitated, and a homogeneous product with good characteristics can be obtained.

また、セラミツク・フエライトの半導体装置等
を製造する場合に、CVDの原料素材として、多
成分同時蒸着が可能となる。即ち、現在のCVD
においては単一成分毎のガスしか発生できない
が、本発明による磁性半導体微粒子をCVD用原
料として用いれば、多成分であるセラミツク・フ
エライト成分のガスの発生が可能となり、多成分
同時蒸着によるセラミツク・フエライトの単結晶
エピタキシヤル成長が、所望の成分比で形成でき
るようになる。
In addition, when manufacturing ceramic/ferrite semiconductor devices, etc., it becomes possible to simultaneously deposit multiple components as raw materials for CVD. i.e. current CVD
However, if the magnetic semiconductor fine particles according to the present invention are used as a raw material for CVD, it becomes possible to generate gases for ceramic and ferrite components, which are multi-components. Single crystal epitaxial growth of ferrite can now be formed with a desired component ratio.

(実施例 1) 上述したフエライト・セラミツク複合粒子の製
造方法により、フエライト成分としてマグネタイ
ト(Fe3O4)を重量比にて60%、セラミツク成分
としてジルコニア(ZrO2)を重量比にて40%持
つ、ジルコニア微粒子にマグネタイトの酸化物結
晶を被覆したジルコニア・マグネタイト複合酸化
物微粒子を製造した。次いで、前記したように、
このジルコニア・マグネタイト複合微粒子の粉末
を高周波熱プラズマ溶射装置により高温還元溶融
する。即ち、溶射条件として高周波出力:4M
Hz/75Kw、使用ガス:アルゴンガス、ガス流
量:60l/minの高周波熱プラズマ中に、流量
15l/minのアルゴンガスをキヤリアガスとして
ジルコニア・マグネタイト複合微粒子の粉末を送
り込み、プラズマフレーム速度約30m/secにて
1/2気圧の減圧チヤンバー内の冷却水槽内に射出
して急冷し、粒度分布が0.5〜5μの磁性半導体球
状微粒子を得た。
(Example 1) According to the method for producing ferrite-ceramic composite particles described above, magnetite (Fe 3 O 4 ) was 60% by weight as a ferrite component, and zirconia (ZrO 2 ) was 40% by weight as a ceramic component. Zirconia/magnetite composite oxide fine particles were manufactured by coating zirconia fine particles with magnetite oxide crystals. Then, as mentioned above,
This zirconia-magnetite composite fine particle powder is reduced and melted at high temperature using a high-frequency thermal plasma spraying device. In other words, the thermal spraying condition is high frequency output: 4M
Hz/75Kw, gas used: argon gas, gas flow rate: 60l/min during high frequency thermal plasma.
The zirconia-magnetite composite fine particles are fed using 15 l/min of argon gas as a carrier gas, and are injected into a cooling water tank in a 1/2 atm vacuum chamber at a plasma flame speed of about 30 m/sec to rapidly cool the particles. Magnetic semiconductor spherical fine particles of 0.5 to 5μ were obtained.

この磁性半導体球状微粒子の粉体を溶融した後
成形固化したものの磁気特性を測定したところ、
磁性((M.F.B(T))0.18emu/g、残留磁束密
度(M.P.H(A/m))5HKであつた。
When we measured the magnetic properties of this powder of magnetic semiconductor spherical fine particles that was melted and solidified, we found that
Magnetism (MFB(T)) was 0.18 emu/g, and residual magnetic flux density (MPH (A/m)) was 5HK.

更に、上記溶射段階で、溶融したジルコニア、
マグネタイト複合微粒子を冷却水槽内に射出して
磁性半導体球状微粒子を得る代りに、アルミナ
(Al2O3)基板に溶射して本願発明の磁性半導体
球状微粒子と同一の固溶体膜を作成し、その温
度/電気抵抗値を測定したところ、温度/電気抵
抗特性は、10KΩ/30℃〜10Ω/500℃の負性抵抗
特性(半導体特性)を持つものであつた。
Furthermore, in the above thermal spraying step, molten zirconia,
Instead of injecting magnetite composite fine particles into a cooling water tank to obtain magnetic semiconductor spherical fine particles, a solid solution film identical to the magnetic semiconductor spherical fine particles of the present invention is created by thermal spraying onto an alumina (Al 2 O 3 ) substrate, and the temperature When the electrical resistance value was measured, the temperature/electrical resistance characteristics were negative resistance characteristics (semiconductor characteristics) of 10KΩ/30°C to 10Ω/500°C.

[発明の効果] 以上のように本発明によれば、特に記録用磁性
材料および半導体形成用材料として、従来にない
優れた機能、特性を発揮する磁性半導体微粒子が
得られる。
[Effects of the Invention] As described above, according to the present invention, magnetic semiconductor fine particles can be obtained that exhibit unprecedented functions and characteristics, especially as magnetic materials for recording and materials for forming semiconductors.

Claims (1)

【特許請求の範囲】[Claims] 1 塩化第2鉄水溶液を磁場中において多数の鉄
片と接触させて錯塩水溶液とし、その錯塩水溶液
に多数のセラミツク体微粒子を混合して塩化第2
鉄水溶液中に混入し、攪拌して複合水溶液とし、
その複合水溶液に苛性ソーダ水溶液を混入して混
合攪拌することにより、前記セラミツク体の単体
微粒子の全表面にフエライトをほぼ均等に結晶生
成状態にて被着させてから水洗いし、乾燥させて
フエライト・セラミツク複合粒子を製造した後、
このフエライト・セラミツク複合粒子の粉末をプ
ラズマ溶射装置にて溶融し、冷却材に高速溶射す
ることにより急冷して固溶状態の球状微粒子を形
成することを特徴とする磁性半導体球状微粒子の
製造方法。
1. A ferric chloride aqueous solution is brought into contact with a large number of iron pieces in a magnetic field to form a complex salt aqueous solution, and a large number of ceramic fine particles are mixed with the complex salt aqueous solution to form a ferric chloride aqueous solution.
Mix it into an iron aqueous solution and stir it to form a composite aqueous solution.
By mixing and stirring the composite aqueous solution with an aqueous solution of caustic soda, ferrite is almost evenly deposited on the entire surface of the single fine particles of the ceramic body in a crystalline state, and then washed with water and dried to form ferrite/ceramic. After manufacturing the composite particles,
A method for producing magnetic semiconductor spherical fine particles, which comprises melting the powder of the ferrite-ceramic composite particles in a plasma spraying device, and rapidly cooling the powder by spraying it onto a coolant at high speed to form solid solution spherical fine particles.
JP61219242A 1986-09-19 1986-09-19 Magnetic semiconductor globular fine particle and manufacture thereof Granted JPS6376404A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61219242A JPS6376404A (en) 1986-09-19 1986-09-19 Magnetic semiconductor globular fine particle and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61219242A JPS6376404A (en) 1986-09-19 1986-09-19 Magnetic semiconductor globular fine particle and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS6376404A JPS6376404A (en) 1988-04-06
JPH0530284B2 true JPH0530284B2 (en) 1993-05-07

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Family Applications (1)

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JP61219242A Granted JPS6376404A (en) 1986-09-19 1986-09-19 Magnetic semiconductor globular fine particle and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS6376404A (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102186372B1 (en) * 2019-09-24 2020-12-03 (주)전진티티에스 Superprecision collet chuck for high speed spindle

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5853490B2 (en) * 1976-06-11 1983-11-29 松下電器産業株式会社 Magnetic semiconductor and its manufacturing method
JPS6077129A (en) * 1983-09-30 1985-05-01 Toshiba Corp Magnetic powder of barium ferrite
JPS6110210A (en) * 1984-06-26 1986-01-17 Fuji Photo Film Co Ltd Ferrite magnetic grain for magnetic recording

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JPS6376404A (en) 1988-04-06

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