JPH05327385A - Electronic parts - Google Patents

Electronic parts

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Publication number
JPH05327385A
JPH05327385A JP16040592A JP16040592A JPH05327385A JP H05327385 A JPH05327385 A JP H05327385A JP 16040592 A JP16040592 A JP 16040592A JP 16040592 A JP16040592 A JP 16040592A JP H05327385 A JPH05327385 A JP H05327385A
Authority
JP
Japan
Prior art keywords
ink
diameter
electrodes
electrode
vibrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16040592A
Other languages
Japanese (ja)
Inventor
Ryuhei Yoshida
竜平 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP16040592A priority Critical patent/JPH05327385A/en
Publication of JPH05327385A publication Critical patent/JPH05327385A/en
Pending legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To reduce the generating rate of defective products and the cost by applying ink for frequency adjustment to the surface of a vibration electrode over the specified multiple-fold diameter of the vibration electrode. CONSTITUTION:Vibration electrodes 3 are formed across from the two main surfaces of the front and the back of a rectangular piezoelectric substrate 2 respectively composed of electrostatic ceramic, and a leader electrode 6 is formed while being connected to the respective electrodes 3. Then, ink 6 for frequency adjustment is applied to the front surface of 1 or 1.2 times as large as the diameter of the electrodes 3. Thus, the quantity of the ink 6 applied by being protruded from the electrodes 3 is a little, ripple generated by the ink is decreased, and the generating rate of defective products and the cost is reduced.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、圧電性のセラミックス
等からなる矩形の圧電基板によるエネルギー閉じ込め形
厚み振動を利用した圧電素子からなる電子部品に関し、
例えば、厚み縦3倍波振動を利用した圧電素子の生産性
を低下させずにリップルの発生による不良率を低減し、
共振特性を向上する電子部品に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic component comprising a piezoelectric element utilizing energy trapping type thickness vibration by a rectangular piezoelectric substrate made of piezoelectric ceramics or the like,
For example, the defective rate due to the occurrence of ripples is reduced without lowering the productivity of the piezoelectric element using the third-order vibration in the thickness direction,
The present invention relates to an electronic component that improves resonance characteristics.

【0002】[0002]

【従来の技術】従来より、圧電性のセラミックスからな
る圧電基板を用いたエネルギー閉じ込め形厚み縦振動を
利用したセラミック圧電共振子を形成する圧電素子とし
ては、図3に示すようなものが知られている。この圧電
素子1は、圧電基板2の一方の主面(表面)に円形の振
動電極3が形成され、同様に、他方の主面(裏面)に圧
電基板2を挟んで対向して円形の振動電極3が形成さ
れ、表裏面の対向した円形の振動電極3にそれぞれ接続
したリード部4が互いに反対方向に延び、圧電基板2の
表裏面の対向した端部にそれぞれ形成された引出し電極
5にリード部4が接続されて構成されている。これらの
振動電極3、リード部4及び引出し電極5等は,Ag,
Cu材から、スパッタリング、真空蒸着、めっき、塗布
等により形成される。そして、振動電極3の表面に,図
3(b)に示すように、振動電極3の直径dの1.8倍
の直径で周波数調整用のインク6が塗布される。上記電
子部品の振動電極は、周波数が高くなるにつれて小さく
なる。また、共振周波数を所定の値にするため振動電極
の表面に塗布する周波数調整用のインクは、適当な濃度
に希釈し、パターンにより塗布位置を決め塗布する。こ
のパターンの交換の作業の煩雑さから生産性を低下させ
ることがないように、例えば、振動電極の直径1.0〜
1.4mmに対して、塗布インクの直径を1.8mmと一定
にして塗布している。
2. Description of the Related Art Conventionally, as a piezoelectric element forming a ceramic piezoelectric resonator utilizing an energy trap type thickness longitudinal vibration using a piezoelectric substrate made of a piezoelectric ceramic, one shown in FIG. 3 is known. ing. In this piezoelectric element 1, a circular vibrating electrode 3 is formed on one main surface (front surface) of a piezoelectric substrate 2, and similarly, a circular vibration electrode 3 is formed on the other main surface (back surface) so as to face each other with the piezoelectric substrate 2 interposed therebetween. The electrodes 3 are formed, and the lead portions 4 respectively connected to the circular vibrating electrodes 3 facing each other on the front and back sides extend in opposite directions, and the lead electrodes 5 are formed on the opposing end portions on the front and back surfaces of the piezoelectric substrate 2. The lead portion 4 is connected and configured. These vibrating electrode 3, lead portion 4, extraction electrode 5, etc. are made of Ag,
The Cu material is formed by sputtering, vacuum deposition, plating, coating, or the like. Then, as shown in FIG. 3B, the frequency adjusting ink 6 having a diameter 1.8 times the diameter d of the vibrating electrode 3 is applied to the surface of the vibrating electrode 3. The vibration electrode of the electronic component becomes smaller as the frequency becomes higher. Further, the frequency adjusting ink applied to the surface of the vibrating electrode in order to set the resonance frequency to a predetermined value is diluted to an appropriate concentration, and the application position is applied according to the pattern. In order not to reduce the productivity due to the complexity of the work of exchanging the pattern, for example, the diameter of the vibrating electrode is 1.0 to
With respect to 1.4 mm, the diameter of the applied ink is kept constant at 1.8 mm for application.

【0003】[0003]

【発明が解決しようとする課題】上記従来の電子部品
は、振動電極面に塗布するインクを希釈し、しかも振動
電極に対して広い範囲に塗布するので、膜厚及び密度分
布のバラツキがそれだけ生じやすく、品質のバラツキが
生じたり、不良品が多数発生する。また、材料によって
相違はあるが、通常は、図4に示すように、振動電極下
に約90%のエネルギーが閉じ込められるが、残部の1
0%のエネルギーが振動電極の中心から半径の比で1.
1〜1.2倍離れた外部に漏れ、この外部に漏れたエネ
ルギーが振動電極から外れて塗布された周波数調整用の
インクで抑えられて、リップルを生じさせる原因となっ
ている。さらに、周波数の調整量(fo を変化させる
量)を大きくする場合に濃度を濃くするが、振動電極に
対して過大な寸法に塗布すると、振動を阻害して共振特
性を悪化させる。そのため、この電子部品は、不良品の
発生率が高いとともに、品質の信頼性が低かった。
In the above-mentioned conventional electronic component, since the ink applied to the vibrating electrode surface is diluted and applied to a wide range on the vibrating electrode, variations in film thickness and density distribution are caused accordingly. It is easy and causes quality variations and many defective products. Also, although there is a difference depending on the material, as shown in FIG. 4, normally about 90% of the energy is confined under the vibrating electrode, but the remaining 1
The energy of 0% is 1.
It leaks to the outside at a distance of 1 to 1.2 times, and the energy leaked to the outside is suppressed by the frequency adjusting ink applied outside the vibrating electrode, which causes ripples. Further, the density is increased when the frequency adjustment amount (the amount that changes fo) is increased, but if the vibration electrode is applied in an excessively large size, the vibration is hindered and the resonance characteristic is deteriorated. Therefore, this electronic component has a high incidence of defective products and low reliability of quality.

【0004】本発明は、上記従来技術が有する事情に鑑
みてなされたものであり、生産性を低下させずに、不良
品の発生率を低減し、コストを低減した電子部品を提供
することを目的とする。
The present invention has been made in view of the circumstances of the above-mentioned prior art, and it is an object of the present invention to provide an electronic component in which the rate of defective products is reduced and the cost is reduced without lowering the productivity. To aim.

【0005】[0005]

【課題を解決するための手段】本発明に係る電子部品
は、圧電性のセラミックスからなる矩形の圧電基板の表
裏の2つの主面に、それぞれ対向して振動電極が形成さ
れ、該各振動電極にそれぞれ接続して引出し電極が形成
されてなる電子部品において、上記振動電極の表面に該
振動電極の直径の1〜1.2倍の直径に周波数調整用の
インクを塗布したことを特徴とする。
In the electronic component according to the present invention, vibrating electrodes are formed so as to face each other on two front and back main surfaces of a rectangular piezoelectric substrate made of piezoelectric ceramics. In the electronic component in which the extraction electrode is formed by connecting to each of the above, the frequency adjusting ink is applied to the surface of the vibrating electrode to a diameter of 1 to 1.2 times the diameter of the vibrating electrode. .

【0006】[0006]

【作用】本発明によれば、圧電基板の振動電極の表面に
該振動電極の直径の1〜1.2倍の直径に周波数調整用
のインクを塗布したので、振動電極からはみ出して偏っ
て塗布されるインクの量が少なく、それにより発生する
リップルを減少させることができるとともに、塗布パタ
ーンの交換の作業が煩雑になりすぎることもないので生
産性を低下させることがなく、偏りをなくすための塗布
の位置決めもそれ程困難でなく、コストを上昇させるこ
となく、不良品の発生率を低減できる。振動電極の直径
の1.2倍を超えた直径に周波数調整用のインクを塗布
すると、振動部以外の部分に塗布するインク量が多くな
り、ダンピング量が増えて不良率が30%以上の割合で
発生するとともに不良品にはならない程度の共振特性の
悪化がある。振動電極の直径の1倍未満にインクを塗布
する場合は、周波数調整が不完全な不良品の発生が増え
てしまい、総不良率の発生が多くなる。それ故上記の振
動電極の直径の1〜1.2倍の範囲とするのが好まし
い。
According to the present invention, since the ink for frequency adjustment is applied to the surface of the vibrating electrode of the piezoelectric substrate in a diameter of 1 to 1.2 times the diameter of the vibrating electrode, it is applied unevenly beyond the vibrating electrode. The amount of ink that is applied is small, and the ripples that occur can be reduced, and since the work of replacing the coating pattern does not become too complicated, there is no reduction in productivity and there is no need to eliminate bias. Positioning of coating is not so difficult, and the rate of defective products can be reduced without increasing the cost. If the frequency adjustment ink is applied to a diameter that exceeds 1.2 times the diameter of the vibrating electrode, the amount of ink applied to parts other than the vibrating part will increase, and the damping amount will increase, resulting in a defect rate of 30% or more. And the resonance characteristics are deteriorated to the extent that it does not result in a defective product. When the ink is applied to less than 1 time the diameter of the vibrating electrode, the number of defective products whose frequency adjustment is incomplete increases, and the total defective rate increases. Therefore, the range of 1 to 1.2 times the diameter of the vibrating electrode is preferable.

【0007】[0007]

【実施例】以下、本発明の実施例を図面に基づいて説明
する。図1は、本発明の一実施例による電子部品、例え
ば、エネルギー閉じ込め形厚み縦振動の電子部品を説明
する図である。従来例と同一又は相当する部分について
は同一符号を付して説明する。図において、1は電子部
品を形成する圧電素子で、この圧電素子1は、従来例と
同様に、圧電基板2の表面に円形の振動電極3が形成さ
れ、裏面に対向して同様に円形の振動電極3が形成さ
れ、表裏面の対向した円形の振動電極3にそれぞれ導通
したリード部4が互いに反対方向に延び、圧電基板2の
表裏面の対向した端部にそれぞれ形成された引出し電極
5にリード部4が接続されて構成されている。表裏面の
各振動電極3の表面に該振動電極の直径dの1.2倍の
直径で周波数調整用のインク6が塗布されている。周波
数調整用のインクとしては、従来と同様のものが使用さ
れる。
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram illustrating an electronic component according to an embodiment of the present invention, for example, an energy trap type thickness longitudinal vibration electronic component. Parts that are the same as or correspond to those in the conventional example will be described with the same reference numerals. In the figure, reference numeral 1 denotes a piezoelectric element forming an electronic component. In this piezoelectric element 1, a circular vibrating electrode 3 is formed on the front surface of a piezoelectric substrate 2 as in the conventional example, and a circular vibrating electrode 3 is formed on the rear surface so as to face the circular electrode. The vibrating electrode 3 is formed, the lead portions 4 respectively conducting to the opposing circular vibrating electrodes 3 on the front and back surfaces extend in opposite directions, and the extraction electrodes 5 are formed on the opposing end portions on the front and back surfaces of the piezoelectric substrate 2. Is connected to the lead portion 4. The frequency adjusting ink 6 is applied to the front and back surfaces of the respective vibrating electrodes 3 with a diameter 1.2 times the diameter d of the vibrating electrodes. As the ink for frequency adjustment, the same ink as the conventional one is used.

【0008】本発明の上記実施例で、32MHzの厚み
縦3倍波を用いた電子部品で、振動電極の直径を1.0
mmとしたもの、及び本発明の範囲外の電子部品の振動電
極の直径に対する周波数調整用のインクが塗布された直
径の比と、リップル不良率(%)との関係を図2に示
す。この図2によれば、特にリップルに起因する波形不
良と周波数調整用のインク塗布径との関係がほぼ直線的
に変化しており、従来の振動電極の直径の1.8倍で周
波数調整用のインクが塗布された場合に比べ、不良率を
約10%改善していることが分かる。
In the above embodiment of the present invention, the vibration electrode has a diameter of 1.0 in an electronic component using a 32 MHz thickness triple wave.
FIG. 2 shows the relationship between the ripple defect ratio (%) and the ratio of the diameter of the frequency adjusting ink applied to the diameter of the vibrating electrode of the electronic component outside the scope of the present invention in mm. According to FIG. 2, the relationship between the waveform defect caused by the ripple and the ink application diameter for frequency adjustment changes almost linearly, and the frequency adjustment is 1.8 times the diameter of the conventional vibrating electrode for frequency adjustment. It can be seen that the defective rate is improved by about 10% as compared with the case where the above ink is applied.

【0009】上記のように、本実施例によれば、作業を
それ程煩雑にすることなく生産性を低下させずに、不良
品の発生率を低減し、コストを低減でき、塗布量もそれ
程大きくしていないので、振動を阻害して共振特性を悪
化させることがなく、品質の信頼性を向上できる。また
本発明によれば、周波数の異なる電子部品を生産する場
合であっても、ラインを変えずに適用可能となり、生産
性を向上できる。なお、本発明は、上記実施例における
振動電極及び周波数調整用インクの直径例に限られれ
ず、他の寸法に形成した電子部品についても同様であ
る。
As described above, according to this embodiment, the production rate of defective products can be reduced, the cost can be reduced, and the coating amount can be increased so much without complicating the work and reducing the productivity. Since this is not done, it is possible to improve the reliability of the quality without disturbing the vibration and deteriorating the resonance characteristic. Further, according to the present invention, even in the case of producing electronic parts having different frequencies, it can be applied without changing the line, and the productivity can be improved. The present invention is not limited to the diameter examples of the vibrating electrode and the frequency adjusting ink in the above-described embodiment, and the same applies to electronic components formed in other dimensions.

【0010】[0010]

【発明の効果】上述のように本発明に係る電子部品によ
れば、振動部以外の部分のインクの塗布量を大きくしな
いので、ダンピング量も少ないから共振特性を悪化させ
ることがなく、品質の信頼性を向上でき、作業をそれ程
煩雑にすることなく不良品の発生率を低減でき、コスト
を低減できる。
As described above, according to the electronic component of the present invention, since the amount of ink applied to the portion other than the vibrating portion is not increased, the damping amount is small and the resonance characteristic is not deteriorated. The reliability can be improved, the occurrence rate of defective products can be reduced without making the work so complicated, and the cost can be reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る電子部品の一実施例を示す図で、
(a)は平面図、(b)は正面図である。
FIG. 1 is a diagram showing an embodiment of an electronic component according to the present invention,
(A) is a plan view and (b) is a front view.

【図2】周波数調整用のインクが塗布直径と不良品率の
関係を示すグラフである。
FIG. 2 is a graph showing a relationship between a coating diameter of a frequency adjusting ink and a defective product rate.

【図3】従来の電子部品を示す図で、(a)は平面図、
(b)は正面図である。
FIG. 3 is a view showing a conventional electronic component, (a) is a plan view,
(B) is a front view.

【図4】振動エネルギー分布を示すグラフである。FIG. 4 is a graph showing a vibration energy distribution.

【符号の説明】[Explanation of symbols]

1 圧電素子 2 圧電基板 3 振動電極 5 引出し電極 6 インク 1 Piezoelectric element 2 Piezoelectric substrate 3 Vibration electrode 5 Extraction electrode 6 Ink

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 圧電性のセラミックスからなる矩形の圧
電基板の表裏の2つの主面に、それぞれ対向して振動電
極が形成され、各振動電極にそれぞれ接続して引出し電
極が形成されてなる電子部品において、上記振動電極の
表面に該振動電極の直径の1〜1.2倍の直径に周波数
調整用のインクを塗布してなることを特徴とする電子部
品。
1. An electronic device comprising vibrating electrodes formed on two front and back surfaces of a rectangular piezoelectric substrate made of piezoelectric ceramic so as to face each other, and extraction electrodes connected to the respective vibrating electrodes. The electronic component is characterized in that the frequency adjusting ink is applied to the surface of the vibrating electrode in a diameter of 1 to 1.2 times the diameter of the vibrating electrode.
JP16040592A 1992-05-25 1992-05-25 Electronic parts Pending JPH05327385A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16040592A JPH05327385A (en) 1992-05-25 1992-05-25 Electronic parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16040592A JPH05327385A (en) 1992-05-25 1992-05-25 Electronic parts

Publications (1)

Publication Number Publication Date
JPH05327385A true JPH05327385A (en) 1993-12-10

Family

ID=15714231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16040592A Pending JPH05327385A (en) 1992-05-25 1992-05-25 Electronic parts

Country Status (1)

Country Link
JP (1) JPH05327385A (en)

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