JPH0533018Y2 - - Google Patents
Info
- Publication number
- JPH0533018Y2 JPH0533018Y2 JP1987070815U JP7081587U JPH0533018Y2 JP H0533018 Y2 JPH0533018 Y2 JP H0533018Y2 JP 1987070815 U JP1987070815 U JP 1987070815U JP 7081587 U JP7081587 U JP 7081587U JP H0533018 Y2 JPH0533018 Y2 JP H0533018Y2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- silicon substrate
- oxide film
- gauge
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987070815U JPH0533018Y2 (sr) | 1987-05-12 | 1987-05-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987070815U JPH0533018Y2 (sr) | 1987-05-12 | 1987-05-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63178353U JPS63178353U (sr) | 1988-11-18 |
| JPH0533018Y2 true JPH0533018Y2 (sr) | 1993-08-23 |
Family
ID=30912794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987070815U Expired - Lifetime JPH0533018Y2 (sr) | 1987-05-12 | 1987-05-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0533018Y2 (sr) |
-
1987
- 1987-05-12 JP JP1987070815U patent/JPH0533018Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63178353U (sr) | 1988-11-18 |
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